CN-121992355-A - PVD coating analysis control method and related device

CN121992355ACN 121992355 ACN121992355 ACN 121992355ACN-121992355-A

Abstract

The application discloses a PVD coating analysis control method and a related device, which are used for stabilizing chromatic aberration of products. The method comprises the steps of obtaining color difference values of a first preset number of heat before a current heat, obtaining a current datum point corresponding to the current heat based on the number of heat in a color difference specification range in the color difference values of the first preset number of heat, obtaining color layer data and interference layer data corresponding to the current heat if the current datum point is larger than the preset datum value, determining a lifting moment based on the color layer data and the interference layer data, and adjusting parameters of the current heat according to the lifting moment. According to the embodiment of the application, the coating time is intelligently regulated and controlled according to the association of the datum point and the lifting time, the color difference of the product is accurately corrected, the stability of the quality of the product is effectively improved, the optimal process parameters are intelligently recommended according to the lifting time, the human intervention is greatly reduced, the minimum fluctuation of the color difference is realized, and the production efficiency and the intelligent management level are remarkably improved.

Inventors

Zhou Liangjuan
SHI YUEDING
LIN JUNYAN
ZHANG YUANHUA
ZHANG SHENGYAO
WU PEIYUAN

Assignees

富联裕展科技(深圳)有限公司

Dates

Publication Date: 20260508
Application Date: 20251222

Claims (13)

1. A PVD coating analysis control method, comprising: Acquiring color difference values of a first preset number of heat before the current heat; obtaining a current datum point corresponding to the current heat based on the number of the heat in a color difference specification range in the color difference values of the first preset number of heat; If the current datum point is larger than a preset datum value, color layer data and interference layer data corresponding to the current heat are obtained; determining a rise time based on the color layer data and the interference layer data; And adjusting the parameters of the current heat according to the rise time.
2. The method of claim 1, wherein the obtaining the current reference point corresponding to the current heat based on the number of heat in the color difference specification range in the color difference values of the first preset number of heat includes: if the number of the furnace times in the color difference specification range in the color difference values of the first preset number of furnace times is larger than or equal to the preset number of furnace times, acquiring the rising time corresponding to the furnace times of the color difference values in the color difference specification range; Taking the average value of the corresponding return time of the heat of the color difference value in the color difference specification range as the current datum point, or And if the number of the furnace times in the color difference specification range in the color difference value of the first preset number of furnace times is smaller than the preset number of the furnace times, taking the preset reference value as the current reference point.
3. The method of claim 1, wherein the obtaining the color layer data and the interference layer data corresponding to the current heat comprises: Collecting online data of the current heat; And screening the color layer data and the interference layer data from the online data.
4. The method of claim 1, wherein determining a rise time based on the color layer data and the interference layer data comprises: Determining a moving average voltage corresponding to each calculation time in a first time length according to the color layer data and the interference layer data, wherein the first time length is the time length between the current heat starting time and the current time; determining the minimum voltage moment corresponding to each calculation moment according to the moving average voltage corresponding to each calculation moment; And determining the rise time according to the minimum voltage time corresponding to each calculation time.
5. The method of claim 4, wherein determining a moving average voltage for each computation time in a first duration from the color layer data and the interference layer data comprises: executing a first procedure for each calculation time to obtain a moving average voltage corresponding to each calculation time; the first process includes: obtaining a calculation time according to the calculation time and a preset time window length; acquiring a voltage value of each calculation time within the calculation time; and taking the average value of the voltage values at each calculation time in the calculation time as the moving average voltage corresponding to the calculation time.
6. The method of claim 4, wherein determining the minimum voltage time for each calculation time based on the moving average voltage for each calculation time comprises: executing a second procedure for each calculation time to obtain a minimum voltage time corresponding to each calculation time; The second flow includes: acquiring a moving average voltage corresponding to each calculation time between the current heat starting time and the calculation time; sequencing the moving average voltage to obtain a moving average voltage sequence; sequentially selecting a second preset number of target moving average voltages from the moving average voltage sequence; calculating the average value of the calculation time corresponding to the target moving average voltages of the second preset number; and taking the average value as the minimum voltage moment corresponding to the calculation moment.
7. The method of claim 4, wherein determining the rise time from the minimum voltage time for each of the calculated time instants comprises: And if the minimum voltage time corresponding to each calculated time determined in the second time is the same, taking the minimum voltage time as the rising time.
8. The method of claim 1, wherein said adjusting parameters of the current heat according to the rise time comprises: taking the difference value between the current datum point and the rising time as a target difference value; obtaining a compensation proportion according to the target difference value and a preset piecewise function; Obtaining a feedback control duration according to the compensation proportion and the target difference value; and adjusting the control time length of the current heat according to the control time length.
9. The method according to claim 1, wherein the method further comprises: Collecting online data of the current heat; performing feature extraction processing on the online data to obtain a first feature value corresponding to the current heat; performing parameter gridding processing on the first characteristic values to obtain a plurality of target characteristic value groups; Respectively inputting the target characteristic values into a pre-trained color difference prediction model to obtain color difference predicted values corresponding to each target characteristic value output by the color difference prediction model; the method comprises the steps of executing color difference predicted values corresponding to each characteristic value group respectively, and obtaining comprehensive color difference according to the furnace color difference value and the color difference predicted values; Taking a characteristic value group corresponding to a color difference predicted value with the minimum comprehensive color difference as a target characteristic value group; and adjusting the parameters of the current heat according to the target characteristic value group.
10. A PVD coating analysis control device, characterized in that the device comprises a memory and a processor, the memory being adapted to store instructions, the instructions stored in the memory being executable by the processor to implement the method according to any of claims 1-9.
11. A system comprising a PVD apparatus, the PVD coating analysis control device of claim 10, the PVD apparatus receiving the adjusted parameters of the current heat or the instructions to adjust the parameters of the current heat sent by the PVD coating control device.
12. An electronic device comprising a memory for storing computer program instructions and a processor for executing the program instructions, wherein the computer program instructions, when executed by the processor, trigger the electronic device to perform the method of any one of claims 1-9.
13. A computer readable storage medium, characterized in that the computer readable storage medium comprises a stored program, wherein the program, when run, controls a device in which the computer readable storage medium is located to perform the method of any one of claims 1-9.

Description

PVD coating analysis control method and related device Technical Field The application relates to the technical field of data processing, in particular to a PVD coating analysis control method and a related device. Background When a large number of products are produced by batch PVD coating, it is generally: In the initial machine adjustment stage, two sets of twin target structures are adopted, and the calibration of basic process parameters is completed by presetting the ratio of reaction gas and the coating time; When the process enters a production link between the heat, an operator needs to manually correct the parameters of the ratio of the reaction gas and the coating time according to the color difference detection result of the previous heat product; In the normal machine adjustment stage, the color difference data of the last furnace still needs to be continuously referred, and whether the proportion of the reaction gas and the coating time are adjusted is manually judged. However, the process scheme has the obvious defect in practical application that even if the product color difference reaches the specification requirement, the key parameters of the film coating still need to be judged and adjusted manually, the process is greatly influenced by the experience level of operators, and further the consistency of the film coating process and the product color difference is insufficient, the fluctuation range of the product color difference between different heat ranges is large, and the high-precision production requirement is difficult to meet. Disclosure of Invention In view of the above, the present application provides a PVD coating analysis control method and related apparatus for stabilizing product color differences. In a first aspect, an embodiment of the present application provides a PVD coating analysis control method, where the method includes: Acquiring color difference values of a first preset number of heat before the current heat; obtaining a current datum point corresponding to the current heat based on the number of the heat in a color difference specification range in the color difference values of the first preset number of heat; If the current datum point is larger than a preset datum value, color layer data and interference layer data corresponding to the current heat are obtained; determining a rise time based on the color layer data and the interference layer data; And adjusting the parameters of the current heat according to the rise time. According to the embodiment of the application, the coating time is intelligently regulated and controlled according to the association of the datum point and the lifting time, the color difference of the product is accurately corrected, the stability of the quality of the product is effectively improved, the optimal process parameters are intelligently recommended according to the lifting time, the human intervention is greatly reduced, the minimum fluctuation of the color difference is realized, and the production efficiency and the intelligent management level are remarkably improved. In some possible embodiments, the obtaining the current reference point corresponding to the current heat based on the number of heat in the color difference specification range in the color difference values of the first preset number of heat includes: if the number of the furnace times in the color difference specification range in the color difference values of the first preset number of furnace times is larger than or equal to the preset number of furnace times, acquiring the rising time corresponding to the furnace times of the color difference values in the color difference specification range; Taking the average value of the corresponding return time of the heat of the color difference value in the color difference specification range as the current datum point, or And if the number of the furnace times in the color difference specification range in the color difference value of the first preset number of furnace times is smaller than the preset number of the furnace times, taking the preset reference value as the current reference point. In some possible embodiments, the obtaining the color layer data and the interference layer data corresponding to the current heat includes: Collecting online data of the current heat; And screening the color layer data and the interference layer data from the online data. In some possible embodiments, the determining the rise time based on the color layer data and the interference layer data includes: Determining a moving average voltage corresponding to each calculation time in a first time length according to the color layer data and the interference layer data, wherein the first time length is the time length between the current heat starting time and the current time; determining the minimum voltage moment corresponding to each calculation moment according to the moving average voltage corresponding to each c