CN-121992379-A - Battery piece processing equipment, control method and device thereof and storage medium

CN121992379ACN 121992379 ACN121992379 ACN 121992379ACN-121992379-A

Abstract

The embodiment of the disclosure discloses a control method, a control device and a storage medium of battery piece processing equipment, wherein the control method comprises the steps of obtaining respective state information of a piece inlet chamber, a processing chamber and a piece outlet chamber of the battery piece processing equipment, wherein the state information is used for indicating whether the piece inlet chamber, the processing chamber and the piece outlet chamber respectively have materials to be transmitted, controlling valves among the piece inlet chamber, the processing chamber and the piece outlet chamber to be opened or closed according to the respective state information of the piece inlet chamber, the processing chamber and the piece outlet chamber, synchronously opening or closing at least part of valves among adjacent processing chambers, and synchronously transmitting the materials to be transmitted to a next chamber by controlling a chamber with the materials to be transmitted.

Inventors

Yin Lingyang
YANG BAOHAI
HAN LIANG
Li Diejun
LI YISHENG

Assignees

营口金辰机械股份有限公司
金辰双子太阳能光伏科技(营口)有限公司北京分公司

Dates

Publication Date: 20260508
Application Date: 20241108

Claims (15)

1. A control method of a battery piece processing apparatus, the method being applied to a control system, the method comprising: acquiring respective state information of a sheet feeding chamber, a processing chamber and a sheet discharging chamber of the battery sheet processing equipment, wherein the state information is used for indicating whether the sheet feeding chamber, the processing chamber and the sheet discharging chamber are respectively provided with materials to be transmitted or not; Controlling valves among the film feeding chamber, the processing chamber and the film discharging chamber to be opened or closed according to the respective state information of the film feeding chamber, the processing chamber and the film discharging chamber; and controlling the chamber with the material to be conveyed to synchronously convey the material to be conveyed to the next chamber.
2. The control method according to claim 1, characterized in that the method further comprises: And in a state that a valve between the feeding chamber and the adjacent processing chamber is closed, if a discharging signal of the automatic feeding table is received, controlling the material to be transmitted of the automatic feeding table to be transmitted to the feeding chamber.
3. The control method according to claim 2, wherein the controlling the transfer of the material to be transferred of the automated loading station to the advance chamber includes: Controlling the vacuum breaking of the sheet feeding chamber; Receiving an atmospheric signal of the wafer inlet chamber; and if the atmospheric signal of the feeding chamber is received, starting the feeding chamber to transmit feeding, so that the material to be transmitted of the automatic feeding table is transmitted to the feeding chamber.
4. The control method according to claim 1, characterized in that the method further comprises: And in a state that a valve between the sheet discharging chamber and the adjacent processing chamber is closed, if a feeding signal of the automatic blanking table is received, controlling the material to be transmitted in the sheet discharging chamber to be transmitted to the automatic blanking table.
5. The control method according to claim 4, wherein the controlling the transfer of the material to be transferred of the sheet discharging chamber to the automated blanking station includes: controlling the vacuum breaking of the slice outlet chamber; Receiving an atmospheric signal of the wafer outlet chamber; And if the atmospheric signal of the sheet discharging chamber is received, starting the sheet discharging chamber to transmit and discharge, so that the material to be transmitted in the sheet discharging chamber is transmitted to the automatic blanking table.
6. The control method according to any one of claims 1 to 5, wherein the controlling the opening or closing of the valves between the film-feeding chamber, the processing chamber, and the film-discharging chamber according to the respective status information of the film-feeding chamber, the processing chamber, and the film-discharging chamber comprises: And if the state information indicates that at least one chamber in the sheet feeding chamber and/or the processing chambers is/are to be transported with the material to be transported, and the sheet discharging chamber is not to be transported with the material to be transported, opening valves among the sheet feeding chamber, the sheet discharging chamber and the adjacent processing chambers, and opening valves among the adjacent processing chambers.
7. The control method according to any one of claims 1 to 5, wherein the controlling the opening or closing of the valves between the film-feeding chamber, the processing chamber, and the film-discharging chamber according to the respective status information of the film-feeding chamber, the processing chamber, and the film-discharging chamber comprises: And if the state information indicates that at least one chamber in the feeding chamber and/or the processing chamber has material to be transmitted and the discharging chamber has no material to be transmitted, opening a valve between the chamber with the material to be transmitted and the next chamber, and closing other valves.
8. The control method according to any one of claims 1 to 5, characterized in that controlling the chamber in which the material to be conveyed is conveyed to the next chamber in synchronization includes: And if a valve opening signal fed back by one or more valves among the wafer inlet chamber, the processing chamber or the wafer outlet chamber is received, controlling the chamber with the material to be transmitted to synchronously transmit the material to be transmitted to the next chamber, wherein the valve opening signal is used for indicating that the valve is opened.
9. The control method according to any one of claims 1 to 5, characterized in that the method further comprises: After the synchronous transmission is finished, controlling valves among the wafer feeding chamber, the processing chamber and the wafer discharging chamber to be closed; And if valve closing signals fed back by the valves are received, controlling the processing chamber to process the materials corresponding to the processing chamber, wherein the valve closing signals are used for indicating that the valves are closed.
10. The control method according to any one of claims 1 to 5, wherein the acquiring the respective status information of the film-feeding chamber and the film-discharging chamber includes: respectively acquiring first detection information for indicating whether the wafer inlet chamber and the wafer outlet chamber contain carriers or not; If the first detection information indicating that the wafer inlet chamber or the wafer outlet chamber contains the carrier is received, determining that the state information of the wafer inlet chamber or the wafer outlet chamber indicates that the wafer inlet chamber or the wafer outlet chamber has the materials to be transported.
11. The control method according to any one of claims 1 to 5, wherein the acquiring the respective status information of the process chambers includes: Respectively acquiring second detection information for indicating whether each processing chamber contains a carrier or not; and under the condition that the second detection information indicating that the processing chamber contains the carrier is received, if a transfer state request sent by the processing chamber is received, determining that the state information of the processing chamber indicates that materials to be transmitted exist in the processing chamber, wherein the transfer state request is used for indicating that the processing chamber meets the condition of opening a valve and the processing chamber is completed and needs to be transmitted to the next chamber.
12. The battery piece processing equipment is characterized by comprising a plurality of chambers which are sequentially connected, wherein each chamber comprises a piece inlet chamber, at least one processing chamber and a piece outlet chamber; a control device and a transmission unit, wherein the control device comprises: The device comprises an acquisition module, a processing module and a control module, wherein the acquisition module is configured to acquire respective state information of a sheet feeding chamber, a processing chamber and a sheet discharging chamber of the battery sheet processing equipment, wherein the state information is used for indicating whether the sheet feeding chamber, the processing chamber and the sheet discharging chamber respectively have materials to be transmitted or not; the first control module is configured to control valves among the wafer inlet chamber, the processing chamber and the wafer outlet chamber to be opened or closed according to the state information of each of the wafer inlet chamber, the processing chamber and the wafer outlet chamber; And the second control module is configured to control the chamber with the material to be conveyed to synchronously convey the material to be conveyed to the next chamber.
13. The battery piece processing apparatus according to claim 12, further comprising: an isolation chamber connected between the two process chambers, the control device being further configured to: And controlling valves on two sides of the isolation chamber to be opened at most one at the same time.
14. A control apparatus, characterized by comprising: a processor and a memory configured to store a program, the processor being configured to execute the program to implement the control method according to any one of claims 1 to 11.
15. A computer-readable storage medium, on which a computer program is stored, characterized in that the computer program, when executed, implements the control method according to any one of claims 1 to 11.

Description

Battery piece processing equipment, control method and device thereof and storage medium Technical Field The embodiment of the disclosure relates to the technical field of semiconductors, in particular to a control method and a control device of battery piece processing equipment and a computer readable storage medium. Background Some semiconductor battery piece processing devices may apply a chained plasma enhanced chemical Vapor Deposition (PLASMA ENHANCED CHEMICAL Vapor Deposition) process to deposit a semiconductor film on a carrier plate to manufacture a battery piece, and the efficiency and quality of film Deposition may be improved through optimization and segmentation of the manufacturing process. In the production process of chain PECVD, a carrying frame can be adopted to carry a carrying plate to enter a vacuum environment from a film feeding chamber, after the carrying plate is preheated by a preheating chamber, a plurality of process chambers are used for coating films, then a film discharging chamber leaves the vacuum environment to complete part or all of film coating processes, the processes are one by one and are continuously transmitted to the next chamber, the film conveying process of the chambers can be performed through a transmission valve (loadlock) or an isolation valve between the two chambers, the same chamber is a feeding process or a discharging process, simultaneous feeding and discharging cannot be completed, so that the transmission valve can be repeatedly opened or closed for multiple times in different time periods in the whole transmission process, the transmission in or out occupies the time of the whole film coating process, and the production efficiency is reduced. How to improve the chain PECVD process efficiency of the multi-process chamber is a problem to be solved. Disclosure of Invention According to some aspects of the embodiments of the present disclosure, a control method of a battery piece processing device is provided, where the method is applied to a control system, and the method includes obtaining respective status information of a piece feeding chamber, a processing chamber and a piece discharging chamber of the battery piece processing device, where the status information is used to indicate whether the piece feeding chamber, the processing chamber and the piece discharging chamber have materials to be transferred respectively, controlling opening or closing of valves among the piece feeding chamber, the processing chamber and the piece discharging chamber according to the respective status information of the piece feeding chamber, the processing chamber and the piece discharging chamber, and synchronously opening or closing valves among at least some adjacent processing chambers, and controlling a chamber with the materials to be transferred to synchronously transfer the materials to a next chamber. In some embodiments, the method further comprises controlling the material to be transferred of the automated loading table to the feeding chamber if a discharge signal of the automated loading table is received in a state that a valve between the feeding chamber and an adjacent processing chamber is closed. In some embodiments, the controlling the transfer of the material to be transferred of the automated loading platform to the tablet inlet chamber includes controlling the tablet inlet chamber to break a vacuum, receiving an atmospheric signal of the tablet inlet chamber, and if the atmospheric signal of the tablet inlet chamber is received, starting the tablet inlet chamber to transfer a feed material so that the material to be transferred of the automated loading platform is transferred to the tablet inlet chamber. In some embodiments, the method further comprises controlling the material to be transferred in the sheet discharging chamber to the automatic blanking table if a feeding signal of the automatic blanking table is received in a state that a valve between the sheet discharging chamber and an adjacent processing chamber is closed. In some embodiments, the controlling the material to be transferred of the sheet discharging chamber to the automatic blanking station includes controlling the sheet discharging chamber to break vacuum, receiving an atmospheric signal of the sheet discharging chamber, and starting the sheet discharging chamber to transfer the material to be transferred of the sheet discharging chamber to the automatic blanking station if the atmospheric signal of the sheet discharging chamber is received. In some embodiments, the controlling the opening or closing of the valves among the feeding chamber, the processing chamber and the discharging chamber according to the respective state information of the feeding chamber, the processing chamber and the discharging chamber includes opening the valves among the feeding chamber, the discharging chamber and the adjacent processing chambers and opening the valves among the adjacent processin