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CN-121992481-A - Lifting equipment for auxiliary matching of guide cylinder of crystal growth machine and thermal field

CN121992481ACN 121992481 ACN121992481 ACN 121992481ACN-121992481-A

Abstract

The application provides lifting equipment for auxiliary matching of a crystal growth machine guide cylinder and a thermal field, which comprises a plurality of lifting mechanisms arranged at equal intervals along the circumferential direction of a furnace cover, wherein each lifting mechanism comprises a fixed seat and lifting assemblies, the fixed seat is fixed on the furnace cover, the number of the lifting mechanisms is at least 3, each lifting assembly comprises a driving device, a switching block, a weighing sensor and a lifting rod, the weighing sensor and the lifting rod are connected with the switching block, the lower end of the weighing sensor is connected with the lifting rod, the lower end of the lifting rod penetrates through the furnace cover and is fixedly connected with the guide cylinder, the driving device is fixed on the fixed seat, and the driving device is used for driving the switching block to drive the weighing sensor, the lifting rod and the guide cylinder to reciprocate up and down so that the guide cylinder is close to the thermal field and matched with or far away from the thermal field. The lifting equipment provided by the application is suitable for all crystal growth machines with guide barrels for lifting, saves labor, simplifies the measuring operation flow, and has good practical value and technical improvement significance.

Inventors

  • ZHONG YOUSHENG
  • ZHANG CHAOLI
  • WU HONGMING
  • CHEN ZHIGANG
  • WANG JUNREN
  • Wan Junzhao

Assignees

  • 郑州合晶硅材料有限公司

Dates

Publication Date
20260508
Application Date
20260107

Claims (10)

  1. 1. The lifting device for auxiliary matching of the crystal growth machine guide cylinder and the thermal field comprises a plurality of lifting mechanisms which are arranged at equal intervals along the circumferential direction of a furnace cover (8), wherein each lifting mechanism comprises a fixed seat and a lifting assembly, and the fixed seats are fixed on the furnace cover (8); the lifting assembly comprises a driving device, a switching block, a weighing sensor (5) and a lifting rod (9), wherein the weighing sensor (5) and the lifting rod are connected with the switching block; The driving device is fixed on the fixing seat and is used for driving the switching block to drive the weighing sensor, the lifting rod and the guide cylinder to reciprocate up and down, so that the guide cylinder is close to the thermal field and matched with the thermal field or far away from the thermal field.
  2. 2. The lifting device for auxiliary matching of the crystal growth machine guide cylinder and the thermal field according to claim 1 is characterized in that the driving device is a servo motor (1), the fixing seat comprises a barrel-shaped part communicated with the furnace cover (8) and a supporting frame connected with the barrel-shaped part, the lifting assembly further comprises a vertical screw rod arranged on the supporting frame and a sliding block moving up and down along the screw rod, the switching block is connected with the sliding block, an output shaft of the servo motor (1) is fixedly connected with the screw rod, the lifting rod (9) penetrates through the furnace cover (8) and the barrel-shaped part, the upper end of the lifting rod is connected with the lower end of the weighing sensor (5), and the lower end of the lifting rod is fixedly connected with the upper edge of the guide cylinder.
  3. 3. The lifting device for auxiliary matching of a crystal growth machine guide cylinder and a thermal field according to claim 1, wherein a lifting claw (10) is fixed on the upper edge of the guide cylinder, and the lower end of the lifting rod (9) is fixedly connected with the upper edge of the guide cylinder through the lifting claw (10).
  4. 4. The lifting device for auxiliary matching of a crystal growth machine guide cylinder and a thermal field according to claim 2, wherein a rectangular servo motor heightening frame (2) is fixedly connected to the top of the supporting frame, the servo motor (1) is installed on the servo motor heightening frame (2), and an output shaft of the servo motor (1) penetrates through the servo motor heightening frame (2) to be connected with the screw rod.
  5. 5. The lifting device for auxiliary matching of a crystal growth machine guide cylinder and a thermal field according to claim 1, wherein the adapter block is L-shaped, and a reinforcing diagonal brace (4) is further arranged at the bending part of the adapter block.
  6. 6. Lifting device for auxiliary cooperation of a crystal growth machine guide cylinder and a thermal field according to claim 5, characterized in that the reinforcement diagonal (4) is a 45 ° diagonal.
  7. 7. Lifting device for auxiliary cooperation of a crystal growth machine guide cylinder and a thermal field according to claim 1, characterized in that the load cell (5) is an S-shaped load cell.
  8. 8. Lifting device for auxiliary cooperation of a crystal growth machine guide cylinder and a thermal field according to claim 1, characterized in that the lifting mechanism further comprises a control assembly, the driving means and the weighing sensor (5) are electrically connected with the control assembly, the control assembly comprises a servo driver, a PLC, a display panel and a key, and the PLC is electrically connected with the servo driver, the display panel and the key.
  9. 9. The lifting device for use in conjunction with thermal field assistance of claim 8, wherein the servo drive supports multi-axis control.
  10. 10. The lifting device for auxiliary matching of the crystal growth machine guide cylinder and the thermal field according to claim 1, wherein a vacuum sealing corrugated pipe (7) sleeved outside the lifting rod (9) is arranged between the upper surface of the fixing seat and the top of the lifting rod (9).

Description

Lifting equipment for auxiliary matching of guide cylinder of crystal growth machine and thermal field Technical Field The application belongs to the technical field of semiconductors, and particularly relates to lifting equipment for auxiliary matching of a crystal growth machine guide cylinder and a thermal field. Background The existing crystal growth machine is equipment for preparing silicon single crystals, and is provided with a main furnace chamber, an auxiliary furnace chamber, an isolation valve chamber and a vacuum system matched with a furnace bottom plate, and is matched with a main pump, an auxiliary pump and a connected vacuum pipeline. As shown in fig. 1, a vacuum internal thermal field guide cylinder of a crystal growth machine of the related art is guided by two side guide rods, and is driven to rise by a servo motor, so that the vacuum internal thermal field guide cylinder is separated from a thermal field in a non-growth state, and is driven by two side servo motors to descend to be contacted with the thermal field in a high-temperature growth state, so that not only is a growth air flow used for guiding the growth air flow so as to prevent the air flow from being flocculated in the crystal growth process, but also an oxide is better pumped along a vacuum pipeline along with the guide cylinder air flow in the crystal growth process, and abnormal conditions of growth parameters caused by falling into a silicon solution are prevented. However, during the production process, there are two problems: (1) In the actual growth process, two servo motors positioned at two sides of the guide cylinder are independently controlled, a worker can respectively observe whether the two sides of the guide cylinder are descended to be attached to the thermal field through the visual window, but because the guide cylinder is of a conical structure, the visual window can only observe the left side and the right side, the matching state of the whole guide cylinder and the thermal field cannot be directly observed, once the gap exists between the guide cylinder and the thermal field, air flow can flow through the gap between the guide cylinder and the thermal field in the growth process of the crystal, the air flow and the air field are disturbed, and further, the abnormal high temperature in the furnace such as oxide, temperature and the like is caused, and the abnormal crystal growth is caused; (2) The guide cylinder is lifted in the process of being simultaneously borne by the two lifting rods, the parallel lifting rod structure can cause shaking of the guide cylinder, oxide attached to the guide cylinder can fall into a solution along with shaking of the guide cylinder in the growth process, and abnormal crystal pulling is caused in the growth process of the crystal rod. Disclosure of Invention The application aims to provide lifting equipment for auxiliary matching of a guide cylinder and a thermal field of a crystal growth machine, so as to solve the problem that the conventional crystal growth machine is abnormal in crystal growth or crystal pulling caused by incomplete bonding of the guide cylinder and the thermal field or shaking of the guide cylinder in the production process. The invention provides lifting equipment for auxiliary matching of a crystal growth machine guide cylinder and a thermal field, which comprises a plurality of lifting mechanisms arranged at equal intervals along the circumferential direction of a furnace cover, wherein each lifting mechanism comprises a fixed seat and lifting assemblies, the fixed seats are fixed on the furnace cover, the number of the lifting mechanisms is at least 3, each lifting assembly comprises a driving device, a switching block, a weighing sensor and a lifting rod, the weighing sensor and the lifting rod are connected with the switching block, the lower end of the weighing sensor is connected with the lifting rod, the lower end of the lifting rod penetrates through the furnace cover and is fixedly connected with the guide cylinder, the driving device is fixed on the fixed seat, and the driving device is used for driving the switching block to drive the weighing sensor, the lifting rod and the guide cylinder to reciprocate up and down so that the guide cylinder is close to the thermal field and matched with or far away from the thermal field. Further, the driving device is a servo motor, the fixing seat comprises a barrel-shaped part communicated with the furnace cover and a supporting frame connected with the barrel-shaped part, the lifting assembly further comprises a vertical screw rod arranged on the supporting frame and a sliding block moving up and down along the screw rod, the switching block is connected with the sliding block, an output shaft of the servo motor is fixedly connected with the screw rod, the lifting rod penetrates through the furnace cover and the barrel-shaped part, the upper end of the lifting rod is connected with the lower end