CN-121992482-A - Crystal rotation and crucible rotation cooperative regulation and control system based on oxygen and carbon content feedback

CN121992482ACN 121992482 ACN121992482 ACN 121992482ACN-121992482-A

Abstract

The invention relates to the technical field, in particular to a crystal rotation and crucible rotation cooperative regulation and control system based on oxygen and carbon content feedback, and belongs to the technical field of single crystal growth. Aiming at the defects of lack of multi-parameter linkage, stepless pertinence of regulation and control and no effect verification in the prior art, the system comprises five modules of oxygen-carbon time sequence data acquisition, oxygen-carbon characteristic extraction, steering cooperative regulation and control, rotation speed parameter correction and regulation and control effect verification. According to the invention, the system integrates oxygen and carbon content, growth stage marks and furnace temperature and pressure parameters, extracts oxygen and carbon dynamic characteristics in stages, cooperatively regulates and controls the steering, time sequence and rotating speed difference value of crystal rotation and crucible rotation, and verifies and controls the effect through uniformity comparison. The method realizes deep coordination of oxygen carbon feedback and mechanism regulation, improves the regulation pertinence and the precision, stabilizes the single crystal growth environment, helps to cultivate single crystal materials with high lattice regularity, and meets the requirements of the high technical field on core base materials.

Inventors

CHEN JIAHAO
GENG RONGJUN
HE XIAOPING
PANG KUN

Assignees

乐山新天源太阳能科技有限公司

Dates

Publication Date: 20260508
Application Date: 20260213

Claims (7)

1. Crystal rotation and crucible rotation cooperative regulation and control system based on oxygen and carbon content feedback, which is characterized by comprising: the oxygen-carbon time sequence data acquisition module acquires real-time data of oxygen and carbon content in the single crystal growth furnace, synchronously acquires identification parameters of a growth stage, correlates temperature and pressure working condition parameters in the furnace, and integrates the parameters according to time nodes to generate an oxygen-carbon working condition time sequence data set; the oxygen-carbon characteristic extraction module is used for judging a single crystal growth stage based on the oxygen-carbon working condition time sequence data set, calling a corresponding time window threshold value, calculating the change amplitude and the change speed of adjacent oxygen-carbon data, respectively comparing the adjacent oxygen-carbon data with the stage threshold value, screening out standard characteristic points, and reserving standard clusters after clustering operation to generate a stage exclusive oxygen-carbon characteristic set; The steering cooperative regulation module is used for calling a special oxygen-carbon characteristic set at the stage, calculating the oxygen-carbon content change rate, comparing the oxygen-carbon content change rate with a critical value, judging the change trend, regulating and controlling the crystal steering, crucible steering and start-stop time sequence, and obtaining a crystal steering crucible steering parameter set; The rotating speed parameter correction module is used for calculating oxygen-carbon radial and axial gradient values according to the special oxygen-carbon characteristic set in the stage, weighting and summing the oxygen-carbon radial and axial gradient values, correcting a rotating speed difference value reference value after comparing the oxygen-carbon radial and axial gradient values with a gradient threshold value, and distributing the corrected rotating speed difference value reference value to corresponding parameters to obtain a dynamic rotating speed difference value parameter; And the regulation and control effect verification module is used for collecting oxygen and carbon data corresponding to the crystal crucible turning parameter set and the dynamic rotating speed difference parameter, calculating uniformity and comparing with a threshold value to generate an oxygen and carbon regulation and control adaptation coefficient.
2. The system of claim 1 wherein the oxygen-carbon condition time series data set comprises an oxygen content sequence, a carbon content sequence, a growth stage identification sequence, an in-furnace temperature sequence and an in-furnace pressure sequence, the stage exclusive oxygen-carbon characteristic set comprises characteristic point coordinates, a cluster density value, a characteristic point change amplitude and change rate data, the crystal-to-crucible turning parameter set comprises a crystal turning direction, a crucible turning direction and a turning start-stop time sequence, the dynamic rotation speed difference parameter comprises a radial/axial gradient correction value, a crystal turning and crucible turning target rotation speed, and the oxygen-carbon regulation adaptation coefficient comprises an oxygen/carbon content uniformity coefficient and a regulation parameter adaptation degree value.
3. The coordinated regulation and control system of crystal rotation and crucible rotation based on oxygen and carbon content feedback according to claim 1, wherein the oxygen and carbon time sequence data acquisition module comprises: The data acquisition sub-module acquires real-time data of oxygen and carbon content in the single crystal growth furnace, synchronously acquires identification parameters of a growth stage, and performs classification record on the three acquired data to generate a basic data set; the parameter association sub-module is used for acquiring temperature and pressure working condition parameters in the furnace based on the basic data set, correspondingly matching the temperature and pressure parameters with the basic data set according to the same time node, and generating an association parameter set; And the time sequence integration sub-module is used for calling the related parameter set, sequencing and integrating all data in the set according to the sequence of the nodes, checking the corresponding consistency of the data nodes and generating an oxygen-carbon working condition time sequence data set.
4. The coordinated regulation and control system of crystal rotation and crucible rotation based on oxygen and carbon content feedback according to claim 3, wherein the oxygen and carbon characteristic extraction module comprises: The phase judging submodule judges the single crystal growth phase based on the oxygen-carbon working condition time sequence data set, calls a corresponding phase time window threshold value, extracts complete oxygen-carbon time sequence data in the phase, carries out association binding on the time window threshold value, a phase amplitude threshold value and a phase speed threshold value, checks the corresponding consistency of parameters and generates a phase threshold value parameter set; The feature screening submodule is used for calling a phase threshold parameter set, extracting oxygen-carbon time sequence data of a corresponding phase, calculating the change amplitude and the change rate of adjacent oxygen-carbon data point by point, comparing the change amplitude with a phase amplitude threshold value, comparing the change rate with a phase rate threshold value, screening out feature points which exceed two types of threshold values simultaneously, recording the coordinates and the numerical information of the feature points, and generating an out-of-standard feature point set; and the cluster integration sub-module is used for calling stage feature density parameters based on the superscalar feature point set, carrying out clustering operation on the feature points, calculating the density value of each clustered cluster, comparing the clustered density value with a set density threshold value, reserving the feature clusters reaching the set density threshold value, sorting cluster data according to stage classification, and generating a stage dedicated oxygen-carbon feature set.
5. The oxygen and carbon content feedback-based crystal rotation and crucible rotation cooperative regulation and control system according to claim 4, wherein the rotation cooperative regulation and control module comprises: the change rate calculation submodule is used for calling a special oxygen-carbon characteristic set in a stage, extracting oxygen-carbon content data in the characteristic set, calculating oxygen-carbon content change rate according to adjacent data nodes, calling a preset forward critical value and a preset reverse critical value, carrying out association matching on the change rate and the two types of critical values, recording a matching corresponding relation, and generating a change rate critical comparison table; The trend judging submodule is used for respectively comparing the oxygen carbon content change rate with a forward critical value and a reverse critical value based on the change rate critical comparison table, judging the rising or falling trend of the oxygen carbon content, marking a critical value interval corresponding to the trend and generating a trend judging result set; And the steering parameter generation sub-module is used for regulating and controlling the steering directions of the crystal steering mechanism and the crucible steering mechanism according to the trend judging result set, adjusting the steering start-stop time sequence parameters, integrating the steering direction parameters and the time sequence parameters, classifying and sorting according to the parameter types, and generating a crystal steering crucible steering parameter set.
6. The coordinated regulation and control system of crystal rotation and crucible rotation based on oxygen and carbon content feedback according to claim 1, wherein the rotation speed parameter correction module comprises: The gradient calculation sub-module is used for extracting radial distribution data and axial distribution data of oxygen and carbon contents in the characteristic sets based on the stage exclusive oxygen and carbon characteristic sets, calculating oxygen and carbon content differences among radial acquisition points to obtain radial gradient values, calculating oxygen and carbon content differences among axial acquisition points to obtain axial gradient values, and carrying out weighted summation operation on the radial gradient values and the axial gradient values to generate gradient comprehensive values; The gradient comparison sub-module is used for calling a gradient integrated value, calling a preset gradient threshold interval, comparing the gradient integrated value with the gradient threshold interval, determining a threshold interval to which the gradient integrated value belongs, calling a rotating speed difference value reference value of the corresponding interval and generating a reference value matching table; And the parameter correction sub-module is used for calculating the deviation degree of the gradient comprehensive value and the corresponding interval median according to the reference value matching table, linearly correcting the rotating speed difference reference value according to the deviation degree percentage, distributing the corrected rotating speed difference value to the crystal rotating speed parameter and the crucible rotating speed parameter, and generating a dynamic rotating speed difference value parameter.
7. The oxygen and carbon content feedback-based crystal rotation and crucible rotation cooperative regulation and control system according to claim 6, wherein the regulation and control effect verification module comprises: The data acquisition submodule is used for calling a crystal crucible turning parameter set and a dynamic rotating speed difference parameter, acquiring oxygen content real-time data and carbon content real-time data under the working condition corresponding to the two sets of parameters, correspondingly integrating the two sets of parameters and oxygen carbon data according to time nodes, and generating an oxygen carbon data set after regulation; The uniformity calculation submodule is used for extracting oxygen content distribution data and carbon content distribution data based on the regulated oxygen carbon data set, calculating the oxygen content data discrete degree and the carbon content data discrete degree, calculating the oxygen carbon content uniformity through the distribution data discrete degree, and generating an oxygen carbon uniformity value; And the adaptation coefficient generation submodule is used for preparing an oxygen-carbon uniformity value, preparing a preset uniformity threshold, comparing the oxygen-carbon uniformity value with the uniformity threshold, calculating parameter adaptation proportion according to the comparison result, and generating an oxygen-carbon regulation and control adaptation coefficient.

Description

Crystal rotation and crucible rotation cooperative regulation and control system based on oxygen and carbon content feedback Technical Field The invention relates to the technical field of single crystal growth, in particular to a crystal rotation and crucible rotation cooperative regulation and control system based on oxygen and carbon content feedback. Background The technical field of single crystal growth comprises the relevant technologies of crystal material cultivation and preparation, and the core content of the technology is that substances are promoted to form single crystal materials with regular lattice structures through the accurate control of technological parameters of growth environments. Wherein the crystal transformation and crucible transformation cooperative regulation and control system based on oxygen and carbon content feedback refers to a technical scheme for parameter regulation and control in the single crystal growth process, and aims at technical matters comprising real-time acquisition of oxygen and carbon content and cooperative control of crystal transformation and crucible movement states, specifically, oxygen and carbon content data in a single crystal growth environment are collected through a sensor, the data are used as regulation and control basis, and the cooperative operation of crystal rotation and crucible rotation is realized by regulating and controlling the rotation speed of a crystal rotation mechanism and the rotation speed of a crucible rotation mechanism. In the prior art, the rotating speed of the crystal rotary crucible is regulated and controlled only by means of oxygen and carbon content data, working condition parameters such as a growth stage, temperature and pressure are not associated, the regulation and control lack stage pertinence and multi-parameter linkage support cannot capture the dynamic change characteristics and the space distribution difference of the oxygen and carbon content, only the focusing rotating speed regulation ignores steering and timing coordination, and no regulation and control effect verification link is adopted, regulation and control lag or deviation easily occurs in actual single crystal growth, so that the growth environment is fluctuated, the lattice regularity of the single crystal is influenced, the preparation qualification rate of the high-performance single crystal is reduced, and the high standard requirement on materials in the fields such as semiconductors is difficult to adapt. Disclosure of Invention The invention aims to solve the defects in the prior art, and provides a crystal rotation and crucible rotation cooperative regulation and control system based on oxygen and carbon content feedback. In order to achieve the purpose, the invention adopts the following technical scheme that the crystal rotation and crucible rotation cooperative regulation and control system based on oxygen and carbon content feedback comprises: the oxygen-carbon time sequence data acquisition module acquires real-time data of oxygen and carbon content in the single crystal growth furnace, synchronously acquires identification parameters of a growth stage, correlates temperature and pressure working condition parameters in the furnace, and integrates the parameters according to time nodes to generate an oxygen-carbon working condition time sequence data set; the oxygen-carbon characteristic extraction module is used for judging a single crystal growth stage based on the oxygen-carbon working condition time sequence data set, calling a corresponding time window threshold value, calculating the change amplitude and the change speed of adjacent oxygen-carbon data, respectively comparing the adjacent oxygen-carbon data with the stage threshold value, screening out standard characteristic points, and reserving standard clusters after clustering operation to generate a stage exclusive oxygen-carbon characteristic set; The steering cooperative regulation module is used for calling a special oxygen-carbon characteristic set at the stage, calculating the oxygen-carbon content change rate, comparing the oxygen-carbon content change rate with a critical value, judging the change trend, regulating and controlling the crystal steering, crucible steering and start-stop time sequence, and obtaining a crystal steering crucible steering parameter set; The rotating speed parameter correction module is used for calculating oxygen-carbon radial and axial gradient values according to the special oxygen-carbon characteristic set in the stage, weighting and summing the oxygen-carbon radial and axial gradient values, correcting a rotating speed difference value reference value after comparing the oxygen-carbon radial and axial gradient values with a gradient threshold value, and distributing the corrected rotating speed difference value reference value to corresponding parameters to obtain a dynamic rotating speed difference value parameter; And the regulatio