CN-121993377-A - Intelligent high-vacuum ultra-large pumping speed cryogenic pump and vacuum obtaining method thereof

CN121993377ACN 121993377 ACN121993377 ACN 121993377ACN-121993377-A

Abstract

The invention provides an intelligent high-vacuum ultra-large pumping speed low-temperature pump and a vacuum obtaining method thereof, and the intelligent high-vacuum ultra-large pumping speed low-temperature pump comprises a pump body, a refrigerating system and a control system, wherein the pump body is provided with an adsorption array and a liquid nitrogen shielding shell, the adsorption array is formed by a plurality of adsorption units in a vertical parallel mode, gaps are reserved between every two adjacent adsorption units, each adsorption unit comprises a plurality of adsorption cold plates and a baffle plate which are alternately arranged, an adsorbent is arranged on the surface of each adsorption cold plate, the refrigerating system comprises a helium refrigerating system and a liquid nitrogen refrigerating system, the helium refrigerating system provides cold energy for the adsorption cold plates, and the liquid nitrogen refrigerating system provides cold energy for the baffle plates and the liquid nitrogen shielding shell. The intelligent low-temperature pump solves the technical problems of insufficient pumping speed, insufficient vacuum degree, low intelligent degree, high energy consumption and large occupied space of the conventional low-temperature pump. The invention can be widely applied to the fields of semiconductors, cores, aerospace, pharmacy and the like.

Inventors

WEI ZHIBIN
MA YUELAN
WANG JIANXIN
ZHONG ZIQIANG
LIU ZILEI

Assignees

兰州驭星科技有限责任公司

Dates

Publication Date: 20260508
Application Date: 20260319

Claims (10)

1. The intelligent high-vacuum ultra-high pumping speed cryogenic pump is characterized by comprising a pump body, a refrigerating system and a control system, wherein the pump body is provided with an adsorption array and a liquid nitrogen shielding shell, the adsorption array is formed by vertically arranging a plurality of adsorption units in parallel, gaps are reserved between every two adjacent adsorption units, each adsorption unit comprises a plurality of adsorption cold plates and baffle plates which are alternately arranged, and an adsorbent is arranged on the surface of each adsorption cold plate; the refrigerating system comprises a helium refrigerating system and a liquid nitrogen refrigerating system, wherein the helium refrigerating system provides cold energy for the adsorption cold plate; The control system is a distributed control system taking a PLC as a core, is configured to monitor the temperature and pressure parameters of a pump body in real time, automatically adjusts the running state of the refrigerating system according to a preset threshold value, and executes fault diagnosis and safety protection programs, and adopts a hardware circuit, a program and an operation software triple interlocking and interlocking mechanism to prevent misoperation.
2. The intelligent high-vacuum ultra-high pumping speed cryogenic pump according to claim 1, wherein the pump body is divided into a left pump body and a right pump body, the left pump body and the right pump body are respectively hoisted at two sides of the vacuum chamber and the pump openings are opposite, each pump body comprises an adsorption array formed by 8 adsorption units, the adsorption cold plates are of a three-layer V-shaped plate structure, the umbrella-shaped baffle plates are adopted by the adsorption cold plates, the adsorption cold plates are positioned behind the umbrella-shaped baffle plates, and the adsorption cold plates and the umbrella-shaped baffle plates are alternately arranged to form a wheat spike-shaped cross section structure.
3. The intelligent high-vacuum ultra-high pumping speed cryogenic pump of claim 1, wherein the pump body is of an embedded type multi-layer structure and is sealed with the vacuum chamber by a fluororubber sealing ring.
4. The intelligent high-vacuum ultra-large pumping speed cryopump of claim 1, wherein the control system comprises a cryopump body control system, a liquid nitrogen refrigeration control system and a helium refrigeration control system, temperature, pressure and flow parameters are detected through on-site sensors, and the parameters are collected into the control system to participate in logic operation and displayed and stored in a man-machine interface in real time.
5. The intelligent high-vacuum ultra-large pumping speed cryogenic pump according to claim 1, wherein the adsorbent is activated carbon, the specific surface area is 1000-2000 m 2 /g, the micropore ratio is greater than 80%, the activated carbon is adhered to two sides of the adsorption cold plate by using low-temperature glue, and the adhesive effective thickness is 2mm.
6. The intelligent high-vacuum ultra-high pumping speed cryogenic pump according to claim 2, characterized in that a refrigeration loop of the adsorption cold plate adopts a turbo expansion refrigeration mode to provide 100W of cold energy, the temperature of the refrigerant at the inlet of the cryogenic pump is less than 6K, the temperature of the refrigerant at the outlet of the cryogenic pump is less than 8K, the refrigeration loop of the umbrella-shaped baffle adopts a liquid nitrogen storage tank to provide liquid nitrogen, the temperature of the inlet of the pump is less than 80K, and the temperature of the outlet of the pump is less than 90K.
7. The intelligent high-vacuum ultra-high pumping speed cryogenic pump according to claim 2, wherein the adsorption cold plate and the umbrella-shaped baffle are of a tube-fin heat exchanger structure and are formed by welding branch pipes and fins, the fins are made of oxygen-free copper TU1, the branch pipes are made of thin-wall stainless steel, the thickness of the fins is 2-3mm, and the maximum temperature difference is not more than 2K.
8. The intelligent high vacuum ultra-high pumping speed cryogenic pump of claim 1, wherein the helium refrigeration system comprises a helium compressor, a cold box and an auxiliary system, and is arranged in an inverse brayton cycle, and the liquid nitrogen refrigeration system comprises a liquid nitrogen storage tank, a liquid nitrogen regulating valve, a safety valve, a sensor, a stop valve and a pipeline bracket.
9. The intelligent high vacuum ultra-high pumping speed cryopump of claim 8, wherein the control system is configured to automatically adjust operating parameters of the liquid nitrogen regulator valve and the helium compressor based on a comparison of the collected data to a set threshold, thereby adjusting temperatures of the adsorption cold plate and the shadow mask.
10. A method for vacuum acquisition by using the intelligent high-vacuum ultra-high pumping speed cryopump of claims 1 to 9, characterized by comprising the following steps: a precooling step, namely cooling the umbrella-shaped baffle to be less than or equal to 90K through a liquid nitrogen refrigerating system; a cryogenic step of cooling the adsorption cold plate to less than or equal to 8K through a helium refrigerating system; the air extraction step is that the pump port of the low-temperature pump faces the vacuum chamber, so that gas molecules sequentially pass through the umbrella-shaped baffle plate and the adsorption cold plate, and the gas is adsorbed by the activated carbon on the surface of the adsorption cold plate; the pre-cooling step and the deep cooling step are performed simultaneously.

Description

Intelligent high-vacuum ultra-large pumping speed cryogenic pump and vacuum obtaining method thereof Technical Field The invention relates to a cryopump, in particular to an intelligent high-vacuum ultra-high pumping speed cryopump and a vacuum obtaining method thereof. Background At present, domestic cryopumps are mainly concentrated on medium-low end products, high-end products depend on import from a America day enterprise, and from the aspect of the current technical development trend, the conventional cryopump products cannot completely meet the development requirements of new technologies and new technologies in terms of pumping speed, vacuum degree, intelligent degree, pumping capacity, recovery time, regeneration period, energy consumption and the like, and particularly, the cryopumps are more outstanding in the semiconductor industry, the nuclear field, the aerospace field and the pharmaceutical industry, and along with the continuous progress of scientific technology, each industry inevitably provides higher requirements for the cryopumps, and the cryopumps are bound to face new innovations and challenges. Disclosure of Invention Aiming at the technical problems of insufficient pumping speed, insufficient vacuum degree, low intelligent degree, high energy consumption and large occupied space of the traditional low-temperature pump, the invention provides the intelligent high-vacuum super-large pumping speed low-temperature pump with remarkably improved pumping speed and vacuum degree, high intelligent degree, low energy consumption and small occupied space and the vacuum obtaining method thereof. The intelligent high-vacuum ultra-large pumping speed cryogenic pump comprises a pump body, a refrigerating system and a control system, wherein the pump body is provided with an adsorption array and a liquid nitrogen shielding shell, the adsorption array is vertically formed by a plurality of adsorption units in parallel, gaps are reserved between every two adjacent adsorption units, each adsorption unit comprises a plurality of adsorption cold plates and baffle plates which are alternately arranged, and the surfaces of the adsorption cold plates are provided with adsorbents; the refrigerating system comprises a helium refrigerating system and a liquid nitrogen refrigerating system, wherein the helium refrigerating system provides cold energy for the adsorption cold plate; The control system is a distributed control system taking a PLC as a core, is configured to monitor the temperature and pressure parameters of a pump body in real time, automatically adjusts the running state of the refrigerating system according to a preset threshold value, and executes fault diagnosis and safety protection programs, and adopts a hardware circuit, a program and an operation software triple interlocking and interlocking mechanism to prevent misoperation. Preferably, the pump body is divided into a left pump body and a right pump body, the left pump body and the right pump body are respectively hoisted at two sides of the vacuum chamber and the pump openings are opposite, each pump body comprises an adsorption array formed by 8 adsorption units, the adsorption cold plates adopt a three-layer V-shaped plate structure, the baffle plates adopt umbrella-shaped baffle plates, the adsorption cold plates are positioned behind the umbrella-shaped baffle plates, and the adsorption cold plates and the umbrella-shaped baffle plates are alternately arranged to form a wheat spike-shaped structure. Preferably, the pump body adopts an embedded multi-layer structure, and the pump body and the vacuum chamber are sealed by fluororubber sealing rings. Preferably, the control system comprises a cryopump body control system, a liquid nitrogen refrigeration control system and a helium refrigeration control system, temperature, pressure and flow parameters are detected through on-site sensors, and the parameters are collected into the control system to participate in logic operation and displayed and stored in a man-machine interface in real time. Preferably, the adsorbent adopts activated carbon, the specific surface area is 1000-2000 m 2/g, the micropore ratio is greater than 80%, the activated carbon is glued on two sides of the adsorption cold plate by adopting low-temperature glue, and the bonding effective thickness is 2mm. Preferably, the adsorption cold plate refrigerating circuit adopts a turbo expansion refrigeration mode to provide 100W of cold energy, the temperature of the refrigerant at the inlet of the cryogenic pump is less than 6K, the temperature of the refrigerant at the outlet of the cryogenic pump is less than 8K, the umbrella-shaped baffle refrigerating circuit adopts a liquid nitrogen storage tank to provide liquid nitrogen, the temperature of the inlet of the pump is less than 80K, and the temperature of the outlet of the pump is less than 90K. Preferably, the adsorption cold plate and the umbrella-shaped baffle adopt