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CN-121993409-A - Vacuum pump and lamination system

CN121993409ACN 121993409 ACN121993409 ACN 121993409ACN-121993409-A

Abstract

The application discloses a vacuum pump and a lamination processing system. The vacuum pump comprises a shell, a rotor assembly and a cooling piece, wherein the shell is provided with a communicated air inlet and a cavity, the rotor assembly comprises a rotating shaft and a multi-stage rotor, the rotating shaft is rotatably arranged in the shell and penetrates through the cavity along a first direction, the multi-stage rotor is positioned in the cavity, the multi-stage rotor comprises a plurality of rotors sequentially arranged on the rotating shaft along the first direction, the cooling piece is arranged outside the cavity, a runner corresponding to the multi-stage rotor in position is formed in the cooling piece, the runner comprises a first subsection and a second subsection which are sequentially distributed and communicated along the first direction, the first subsection is a linear extension section and is close to the air inlet, the second subsection is a bending extension section, and the inner diameter of the first subsection is larger than that of the second subsection. Through the technical scheme, the risk that the front stage of the vacuum pump is blocked due to low temperature condensation of the process gas or the rear stage of the vacuum pump is blocked due to rotor deformation caused by high temperature of the process gas due to uneven temperature of the front stage and the rear stage of the vacuum pump can be avoided.

Inventors

  • ZHAO LEI
  • PENG CHONG
  • NIE ZHENG

Assignees

  • 北京通嘉宏瑞科技有限公司

Dates

Publication Date
20260508
Application Date
20260313

Claims (10)

  1. 1. A vacuum pump, comprising: the shell is provided with an air inlet and a containing cavity, and the air inlet is communicated with the containing cavity; The rotor assembly comprises a rotating shaft and a multistage rotor, wherein the rotating shaft is rotatably arranged in the shell and penetrates through the containing cavity along a first direction, the multistage rotor is positioned in the containing cavity and comprises a plurality of rotors which are sequentially arranged on the rotating shaft along the first direction, and The cooling piece is arranged on the shell and is positioned outside the containing cavity, a runner corresponding to the position of the multistage rotor is formed in the cooling piece, the runner comprises a first sub-section and a second sub-section which are sequentially distributed and communicated along the first direction, the first sub-section is a linear extension section and is close to the air inlet, the second sub-section is a bending extension section, and the inner diameter of the first sub-section is larger than that of the second sub-section.
  2. 2. The vacuum pump according to claim 1, wherein the multi-stage rotor includes a first-stage rotor, a second-stage rotor, a third-stage rotor, a fourth-stage rotor, and a fifth-stage rotor sequentially arranged in the first direction, the first sub-stage being provided corresponding to the first-stage rotor and the second-stage rotor, the second sub-stage being provided corresponding to the third-stage rotor, the fourth-stage rotor, and the fifth-stage rotor, or the first sub-stage being provided corresponding to the first-stage rotor, the second-stage rotor, and the third-stage rotor, and the second sub-stage being provided corresponding to the fourth-stage rotor and the fifth-stage rotor.
  3. 3. The vacuum pump according to claim 1, wherein the second subsection is provided in the cooling member so as to extend in a serpentine shape in the axial direction of the housing, and/or the cooling member is plate-like and plural in number, and all the cooling members are sequentially distributed on the outer surface of the housing in the circumferential direction of the housing.
  4. 4. A vacuum pump according to any one of claims 1 to 3, further comprising a drive in driving connection with the spindle.
  5. 5. A vacuum pump according to any one of claims 1 to 3, wherein the vacuum pump is a roots vacuum pump.
  6. 6. A vacuum pump according to any one of claims 1to 3, further comprising an adsorption mechanism disposed in the housing and located outside the chamber, the adsorption mechanism being in communication with the gas inlet and configured to adsorb a condensable gas.
  7. 7. The vacuum pump according to claim 6, wherein the adsorption mechanism comprises a cylinder and an adsorbent disposed within the cylinder, the adsorbent being for adsorbing a condensable gas, the cylinder being secured to the housing and having an inlet and an outlet disposed in spaced relation, wherein the outlet is in communication with the inlet.
  8. 8. A vacuum pump according to any one of claims 1 to 3, further comprising a heating mechanism comprising a heater disposed in the housing adjacent the air inlet.
  9. 9. The vacuum pump of claim 8, wherein the heating mechanism further comprises a temperature controller, the temperature controller being electrically connected to the heater.
  10. 10. A lamination processing system comprising a vacuum pump as claimed in any one of claims 1 to 9.

Description

Vacuum pump and lamination system Technical Field The application relates to the technical field of pumps, in particular to a vacuum pump and a lamination processing system. Background In the core manufacturing process, the lamination process, in the fields of composite materials, photovoltaic panels, printed Circuit Boards (PCBs), safety glass and the like, vacuum pumps play an indispensable key role. Firstly, before die assembly and pressurization, the vacuum pump rapidly pumps air between material layers to eliminate initial bubbles to the greatest extent, secondly, in the subsequent heating, pressurizing and curing stage, the vacuum pump can continuously maintain a stable high-vacuum environment, on one hand, molten resin is forced to fully flow and infiltrate reinforcing materials, on the other hand, volatile micromolecule gas generated by resin curing reaction is effectively discharged, and finally, the continuous vacuum state can also inhibit residual gas from expanding due to temperature rise or generation of new bubbles. It is the clean low pressure environment created and maintained by the vacuum pump that the laminate can achieve zero internal bubbles, high density, excellent interlayer bond strength, and uniform physical properties. However, the vacuum pump provided by the related art has the technical problems that if the temperature is too low, the vacuum pump is blocked due to condensation accumulation of the condensable gas, the gas is compressed excessively, and the rotor is deformed due to the too high temperature, so that the vacuum pump is blocked. Disclosure of Invention The embodiment of the application provides a vacuum pump and a lamination processing system, which are used for solving the technical problems that the vacuum pump is blocked due to condensation and accumulation of condensable gas and the vacuum pump is blocked due to deformation of a rotor caused by overhigh temperature in the lamination process of the vacuum pump. In order to achieve the above object, according to a first aspect of the present application, there is provided a vacuum pump comprising: The rotor assembly comprises a rotating shaft and a multistage rotor, wherein the rotating shaft is rotatably arranged in the shell and penetrates through the containing cavity along a first direction, the multistage rotor is positioned in the containing cavity and comprises a plurality of rotors which are sequentially arranged on the rotating shaft along the first direction, and The cooling piece is arranged on the shell and is positioned outside the containing cavity, a runner corresponding to the position of the multistage rotor is formed in the cooling piece, the runner comprises a first sub-section and a second sub-section which are sequentially distributed and communicated along the first direction, the first sub-section is a linear extension section and is close to the air inlet, the second sub-section is a bending extension section, and the inner diameter of the first sub-section is larger than that of the second sub-section. Optionally, the multi-stage rotor includes a first-stage rotor, a second-stage rotor, a third-stage rotor, a fourth-stage rotor, and a fifth-stage rotor sequentially distributed along the first direction, the first sub-segment is disposed corresponding to the first-stage rotor and the second-stage rotor, and the second sub-segment is disposed corresponding to the third-stage rotor, the fourth-stage rotor, and the fifth-stage rotor. Optionally, the multistage rotor includes first stage rotor, second stage rotor, third stage rotor, fourth stage rotor and fifth stage rotor that distributes in proper order along first direction, first subsection corresponds first stage rotor, second stage rotor and third stage rotor sets up, the second subsection corresponds fourth stage rotor and fifth stage rotor sets up. Optionally, the cooling pieces are plate-shaped and are multiple in number, and all the cooling pieces are sequentially distributed on the outer surface of the shell along the circumferential direction of the shell. Optionally, the second subsection is arranged in the cooling piece in a serpentine circuitous extending manner along the axial direction of the shell. Optionally, the vacuum pump further comprises a driver, and the driver is in driving connection with the rotating shaft. Optionally, the vacuum pump is a roots vacuum pump. Optionally, the vacuum pump further comprises an adsorption mechanism, wherein the adsorption mechanism is arranged on the shell and is located outside the containing cavity, and the adsorption mechanism is communicated with the air inlet and is used for adsorbing the condensable gas. Optionally, the adsorption mechanism comprises a cylinder and an adsorbent arranged in the cylinder, wherein the adsorbent is used for adsorbing the condensable gas, and the cylinder is fixed on the shell and is provided with an inlet and an outlet which are arranged at intervals, and