CN-121993492-A - Sliding member and method for manufacturing same

CN121993492ACN 121993492 ACN121993492 ACN 121993492ACN-121993492-A

Abstract

The sliding member (10) has a base material (11) and a solid lubricating film (12). The solid lubricating film is provided so as to cover the base material. The solid lubricating film is composed of molybdenum sulfide having a sulfur-to-molybdenum content ratio S/Mo of 1.33 or less. The solid lubricant film may be formed by an atomic layer deposition method using an organic material having a tert-butyl group as a sulfur-containing raw material.

Inventors

OOTAKE NOBUYUKI

Assignees

株式会社电装
丰田自动车株式会社
未来瞻科技株式会社

Dates

Publication Date: 20260508
Application Date: 20251103
Priority Date: 20241106

Claims (6)

1. A sliding member, having: Substrate and method for producing the same A solid lubricating film provided so as to cover the base material, The solid lubricating film is composed of molybdenum sulfide having a sulfur-to-molybdenum content ratio S/Mo of 1.33 or less.
2. The sliding member according to claim 1, wherein an amount of carbon contained in molybdenum sulfide constituting the solid lubricating film is 11 at% or more.
3. The sliding member according to claim 1 or 2, wherein the solid lubricating film has no reflection peak at an incidence angle 7.189 ° in an X-ray diffraction measurement using cukα rays.
4. The sliding member according to claim 1 or 2, wherein the solid lubricating film is formed on an alumina coating provided on the outermost surface of the base material.
5. A method for producing a sliding member comprising a base material and a solid lubricating film provided so as to cover the base material, wherein the solid lubricating film comprises molybdenum sulfide having a sulfur-to-molybdenum content ratio S/Mo of 1.33 or less, The solid lubricant film is formed by an atomic layer deposition method using an organic material having a tertiary butyl group as a sulfur-containing raw material.
6. The method for producing a sliding member according to claim 5, wherein the solid lubricating film is formed at a temperature equal to or lower than a decomposition temperature of the organic material.

Description

Sliding member and method for manufacturing same Technical Field The present disclosure relates to sliding members and methods of making the same. Background Conventionally, various sliding members made of molybdenum sulfide having self-lubricating properties have been known. For example, the sliding member described in patent document 1 includes a base material and a sliding layer formed on at least a sliding surface side of the base material and including molybdenum disulfide. The sliding layer includes a first sliding layer formed on the substrate and a second sliding layer laminated on the first sliding layer. The first sliding layer contains 10at% or less of a metal element and/or a compound of a metal element when the entire amount is set to 100 at%. The metal element is at least 1 of Ti, cr, W, zr and V. The second sliding layer is free of the metal element and/or the compound of the metal element. By containing a metal element or a compound of a metal element, the strength of the first sliding layer can be suppressed from decreasing or from peeling from the base material. The second sliding layer is a soft layer having a lower hardness than the first sliding layer because it does not contain a metal element or a compound of a metal element. Therefore, the sliding roller exhibits high running-in property with respect to the sliding target. Prior art literature Patent literature Patent document 1 Japanese patent laid-open No. 2006-348343 Disclosure of Invention As is well known, molybdenum sulfide has a layered crystal structure along the (001) plane, and peeling is easily generated in this plane. Thus, for example, if the (001) plane is oriented in a direction perpendicular to the load direction, peeling occurs, whereas if it is oriented in the load direction, peeling can be suppressed. However, in general, the (001) face in the sliding layer is oriented in a random direction, and it is difficult to orient the sliding layer in the same direction completely, and it is difficult to sufficiently suppress peeling. In addition, when the load and the sliding are not in the same direction, since the frictional force is applied in the sliding direction, even if the peeling in the load direction can be suppressed, the peeling occurs in the sliding direction. The present disclosure is made in view of the above-exemplified circumstances and the like. That is, the present disclosure provides a technique capable of improving wear resistance in a sliding member formed of molybdenum sulfide having self-lubricity, for example, as compared with the conventional one. The sliding member according to claim 1 of the present disclosure includes a base material and a solid lubricant film provided so as to cover the base material, wherein the solid lubricant film is composed of molybdenum sulfide having a sulfur-to-molybdenum content ratio S/Mo of 1.33 or less. The production method according to claim 2 of the present disclosure is the production method of a sliding member according to claim 1, and the production method includes a process or step of forming the solid lubricating film by an atomic layer deposition method using an organic material having a tert-butyl group as a sulfur-containing raw material. Drawings Fig. 1 is a sectional view showing a schematic configuration of a sliding member according to an embodiment of the present disclosure. Fig. 2 is a cross-sectional TEM image of the vicinity of the interface of the alumina coating and the solid lubricating film in the configuration shown in fig. 1. Fig. 3 is a cross-sectional TEM image of the vicinity of the interface of the alumina coating and the solid lubricating film in the comparative example. Fig. 4 is a graph showing the change in friction coefficient with the passage of slip time in the comparative example. Fig. 5 is a graph showing a sliding cross-sectional profile in the comparative example. Fig. 6 is a graph showing the change in friction coefficient with the passage of slip time in the example. Fig. 7 is a graph showing a sliding cross-sectional profile in the embodiment. Fig. 8 is a graph showing the X-ray diffraction intensity patterns of the examples and the comparative examples. FIG. 9 is a graph showing the relationship between the carbon concentration and the S/Mo content ratio of sulfur to molybdenum. Fig. 10 is a graph showing a relationship between adhesion strength and carbon concentration in a solid lubricating film. Fig. 11 is a graph showing the film formation temperature dependence of the carbon concentration in the solid lubricating film. Detailed Description (Embodiment) Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. The following embodiments, modifications thereof, and descriptions of the drawings are schematic or simplified descriptions for the sake of brevity of description of the present disclosure, and the present disclosure is not limited to them in any way. Therefore, the desc