CN-121993540-A - Vibration isolation device and vibration isolation method integrating horizontal-vertical cooperative control

CN121993540ACN 121993540 ACN121993540 ACN 121993540ACN-121993540-A

Abstract

The invention relates to the technical field of vibration isolation, in particular to a vibration isolation device and a vibration isolation method integrating horizontal-vertical cooperative control, wherein the vibration isolation device comprises a foundation table; the vibration isolation device comprises a base platform, a bearing platform, a state monitoring component, a vertical adjusting component and a horizontal adjusting component, wherein the bearing platform is arranged above the base platform, the state monitoring component is arranged on the bearing platform, the vertical adjusting component is used for adjusting the relative position of the bearing platform relative to the base platform in the vertical direction, the horizontal adjusting component is used for adjusting the relative position of the bearing platform relative to the base platform in the horizontal direction, the control module is arranged on the base platform and used for receiving data acquired by the state monitoring component, outputting instructions to control the vertical adjusting component and the horizontal adjusting component to respectively move so as to realize adjustment on the vertical direction and the horizontal direction of the bearing platform, and the control module is used for solving the technical problems that vibration isolation equipment occupies a large space, vibration isolation effect is affected due to time lag, high-frequency gesture fluctuation scene cannot be adapted and damping force adaptability is poor in the prior art.

Inventors

SHENG YING
LIU CHAOYANG
XIANG QILIN
CHEN YUQI
CUI DONGYANG
JIA BIN

Assignees

西南科技大学

Dates

Publication Date: 20260508
Application Date: 20260401

Claims (10)

1. An integrated horizontal-vertical cooperative control vibration isolation apparatus, comprising: A base station; The bearing table is positioned above the foundation table, and a state monitoring component is arranged on the bearing table and is used for monitoring vibration data of the bearing table; the vertical adjusting assembly and the horizontal adjusting assembly are arranged between the foundation table and the bearing table, the vertical adjusting assembly is used for adjusting the relative position of the bearing table relative to the foundation table along the vertical direction, and the horizontal adjusting assembly is used for adjusting the relative position of the bearing table relative to the foundation table along the horizontal direction; The control module is arranged on the foundation platform and used for receiving data acquired by the state monitoring component and outputting instructions to control the vertical adjusting component and the horizontal adjusting component to move respectively so as to adjust the vertical direction and the horizontal direction of the bearing platform, isolate vibration and further achieve the vibration isolation purpose.
2. The vibration isolation apparatus of claim 1, wherein the condition monitoring means comprises a horizontal vibration sensor, an inclination sensor and a force sensor, wherein the inclination sensor comprises two and is respectively installed at two adjacent corners of the loading table, the horizontal vibration sensor comprises two and is respectively installed at the midpoints of two adjacent sides of the loading table, and the force sensor is installed at the upper surface or the lower surface of the loading table.
3. The vibration isolation device integrating horizontal-vertical cooperative control according to claim 2, wherein the vertical adjusting assembly comprises four groups of vertical adjusting units respectively positioned on four corners of a diagonal line of the foundation platform, the vertical adjusting units comprise a vertical rod sleeve with the bottom being fixedly installed relative to the foundation platform and a vertical lifting seat which is installed relative to the rod sleeve in a sliding mode, the top of the vertical lifting seat is abutted to the bottom surface of the bearing platform through a vertical universal connecting piece, four groups of circular ring limiting seats are arranged on the bottom surface of the bearing platform, the moving range of the vertical universal connecting piece is limited by the circular ring limiting seats, and the vertical lifting seat is driven to do vertical lifting action through the vertical driving assembly.
4. The vibration isolation device integrating horizontal-vertical cooperative control according to claim 3, wherein the vertical driving assembly comprises a power part, the power part controls the vertical lifting seat to realize lifting adjustment along the vertical direction through the gear rack assembly, the power part comprises two groups, and each group of power parts simultaneously controls the two vertical lifting seats positioned on the diagonal line to displace along the opposite direction through belt transmission.
5. The vibration isolation device integrating horizontal-vertical cooperative control according to claim 4, wherein the rack-and-pinion assembly comprises a gear rotatably mounted on a gear housing mounted on a base table, a rack engaged with the gear is provided on a side of the vertical elevating seat, a pulley concentrically provided thereon is further provided on the gear, the gear is rotated by a power section mounted on the bearing table, and the two pulleys positioned on a diagonal line are synchronously rotated by a belt connection.
6. The vibration isolation device integrating horizontal-vertical cooperative control according to claim 5, wherein the horizontal adjusting assembly comprises four groups of horizontal adjusting units respectively positioned at the middle points of four sides of the foundation table, each group of horizontal adjusting units comprises a magnetorheological damper arranged on the foundation table and an L-shaped sleeve connected with the power output end of the magnetorheological damper, the top of the L-shaped sleeve is slidably provided with a telescopic rod, the top of the telescopic rod is hinged with the bottom surface of the bearing table through a horizontal universal connecting piece, the L-shaped sleeve is rotatably arranged with the power output end of the magnetorheological damper so as to realize that the power output ends of the magnetorheological dampers of the two opposite horizontal adjusting units are relatively rotated to avoid interference while the other two L-shaped sleeves opposite to the horizontal adjusting units output opposite forces.
7. An integrated horizontal-vertical cooperative control vibration isolation method, characterized in that the integrated horizontal-vertical cooperative control vibration isolation method comprises the following steps: collecting vibration data of the bearing table to obtain a vibration data set; Calculating a horizontal adjustment amount and a vertical adjustment amount based on the vibration data set; and controlling the horizontal adjusting assembly to move according to the horizontal adjusting quantity, and controlling the vertical adjusting assembly to move according to the vertical adjusting quantity so as to realize vibration isolation.
8. The vibration isolation method integrating horizontal-vertical cooperative control according to claim 7, wherein the calculation method of the horizontal adjustment amount comprises: Obtaining the maximum allowable time lag based on the vibration data set and a preset motion equation; obtaining a time lag judgment result according to the maximum allowable time lag amount, wherein the time lag judgment result comprises a required compensation and a non-required compensation; calculating a predicted acceleration according to the time lag judgment result; comparing the predicted acceleration with an expected value to obtain acceleration deviation and deviation variation; the level adjustment amount is calculated based on the acceleration deviation and the deviation variation amount.
9. The vibration isolation method of claim 8, wherein said calculating a level adjustment amount comprises: inputting the acceleration deviation and the deviation variation into a fuzzy controller; optimizing the fuzzy controller parameters, wherein the fuzzy controller parameters comprise a first quantization factor, a second quantization factor and a scaling factor; calculating the horizontal adjustment amount based on the optimized fuzzy controller; Performing joint simulation on the horizontal adjustment quantity to obtain a vibration isolation effect corresponding to the horizontal adjustment quantity; And if the vibration isolation effect does not meet the expectation, continuing to optimize the parameters of the fuzzy controller until the vibration isolation effect meets the expectation, and outputting the horizontal adjustment quantity.
10. The vibration isolation method integrating horizontal-vertical cooperative control according to claim 7, wherein the calculation method of the vertical adjustment amount comprises: Obtaining vertical expansion and contraction amount according to the vibration data set; and calculating the vertical adjustment amount based on the transmission clearance and the vertical expansion amount.

Description

Vibration isolation device and vibration isolation method integrating horizontal-vertical cooperative control Technical Field The invention relates to the technical field of vibration isolation, in particular to a vibration isolation device and a vibration isolation method integrating horizontal-vertical cooperative control. Background With the rapid development of semiconductor manufacturing, ultra-precise measurement and aerospace technology, core process equipment such as a photoetching machine, an ultra-precise three-coordinate measuring machine, an electron microscope, an inertial navigation test bench and the like have extremely high requirements on micro-vibration control of the working environment. The small vibrations in the environment have become key factors affecting the ultimate performance of the device, limiting manufacturing yields and measurement accuracy. For example, in a 12-inch wafer lithography process, small vibration disturbance can cause the lithography pattern to deviate, so that the line width error is enlarged from +/-2 nm to +/-10 nm, and the yield is suddenly reduced and huge economic loss is directly caused. At present, vibration isolation technology of precision equipment is mainly divided into two types of passive vibration isolation and active vibration isolation, wherein the passive vibration isolation relies on elements such as springs, rubber or air floatation, has the advantages of simple structure and good high-frequency vibration isolation effect, and is widely applied in industry, however, a resonance peak exists at the natural frequency of a passive vibration isolation system, low-frequency vibration lower than the frequency cannot be isolated but can be amplified, the natural defect makes the vibration isolation technology difficult to meet the isolation requirement of equipment such as a photoetching machine and an electron microscope on low-frequency (especially below 5 Hz) micro-vibration, the active vibration isolation technology monitors vibration in real time through a sensor and drives an actuator to generate reverse force to counteract the vibration, so that vibration isolation bandwidth can be effectively widened, and low-frequency interference is particularly good at being treated. The invention discloses a modularized multi-mechanism vibration isolation energy consumption vibration absorption integrated device and a control method thereof, and discloses an invention patent application with the bulletin number of CN120100860A, which comprises a support, wherein a plurality of corrugated plates are fixedly connected inside the support, the bottom of the inner wall of each corrugated plate is fixedly connected with a magnetorheological damper, the top of each magnetorheological damper is fixedly connected with a dynamic vibration absorber, the top of each dynamic vibration absorber is fixedly connected with a particle damper, a control unit is arranged outside the support, each magnetorheological damper comprises a first shell, the inner wall of the first shell is fixedly connected with a piston rod, and all-dimensional inhibition of vibration is realized through various mechanisms such as integrated corrugated plate vibration isolation, particle damping energy consumption, dynamic vibration absorber vibration absorption, intelligent control of each magnetorheological damper and the like, and under different frequency and vibration working conditions, each module cooperatively works, so that the vibration absorption effect is greatly improved. The related technology including the technical scheme still has the problems that the ① space occupation is large, the motion interference is that a horizontal control unit and a vertical control unit are independently arranged, the whole volume is large, the horizontal damper and the vertical rod are in rigid connection, additional constraint is generated by the vertical rod when in horizontal vibration, vibration isolation precision is reduced by 40%, ② time lag problem causes control failure, the horizontal direction only adopts passive damping or conventional active control (such as PID), a prediction mechanism is not available, the magnetorheological damper time lag (50-150 ms) causes vibration inhibition hysteresis, even vibration is amplified in a high frequency band (20-50 Hz), the amplitude is increased by 30%, the ③ existing vibration isolation device vertically adopts a hydraulic drive or spiral lifter structure, the hydraulic structure has oil leakage risk, leveling failure is easily caused by oil viscosity change in a low-temperature environment, the spiral lifter depends on single-motor drive single-rod adjustment, equipment cost is increased, multiple iteration correction levelness is needed, the vertical adjustment frequency is limited to 0.1-1Hz, the vibration damping force is not suitable for a high-frequency gesture fluctuation scene, the damping force of ④ is poor, the horizontal damper parameter i