CN-121993617-A - Pneumatic diaphragm valve of superhigh pressure semiconductor

CN121993617ACN 121993617 ACN121993617 ACN 121993617ACN-121993617-A

Abstract

The invention discloses an ultrahigh-pressure semiconductor pneumatic diaphragm valve which at least comprises a valve body, a connecting component and a cylinder, wherein the connecting component is detachably connected between the valve body and the cylinder, a spring and a piston are arranged in the cylinder body of the cylinder, two ends of the spring are respectively in press connection with a cylinder cover of the cylinder and the upper end plane side of the piston, a lever mechanism is also arranged in the cylinder, the lever mechanism is arranged below the piston, the top of the lever mechanism is in press connection with the lower end plane side of the piston, the bottom of the lever mechanism is in press connection with the connecting component, and the connecting component controls the opening and closing of an air inlet and an air outlet of the valve body through the lever mechanism. The invention utilizes the lever principle to realize the technical effects of more vertical downward pressure to the membrane, larger contact area, more contact points, smaller lever pressure and longer lever service life.

Inventors

WEI QING
GENG DEZHAN
YANG YI
LIU YI
ZHANG JIAN
GAO XIANG
YAN PEISHENG
DUAN XUWEI
ZHANG JUN
FANG ZHENG

Assignees

中科艾尔(北京)科技有限公司

Dates

Publication Date: 20260508
Application Date: 20251230

Claims (10)

1. The ultrahigh-pressure semiconductor pneumatic diaphragm valve is characterized by at least comprising a valve body, a connecting assembly and a cylinder, wherein the connecting assembly is detachably connected between the valve body and the cylinder; a spring and a piston are arranged in the cylinder body of the cylinder, and two ends of the spring are respectively pressed against the cylinder cover of the cylinder and the upper end plane side of the piston; The cylinder is internally provided with a lever mechanism, the lever mechanism is arranged below the piston, the top of the lever mechanism is in pressure connection with the plane side of the lower end of the piston, and the bottom of the lever mechanism is in pressure connection with the connecting component; The connecting component controls the opening and closing of the air inlet and the air outlet of the valve body through a lever mechanism.
2. The ultra-high pressure semiconductor pneumatic diaphragm valve of claim 1, wherein the lever mechanism comprises a plurality of pairs of lever units and rotating shaft units, a shaft support plate and a support plate; Each lever unit is rotatably fixed on the shaft support plate through a corresponding rotating shaft unit, the lever unit comprises a first lever and a second lever, and the rotating shaft unit comprises a first shaft and a second shaft; The first lever is provided with a first compression joint section and a first abutting section, a first shaft hole is formed between the first compression joint section and the first abutting section in a connecting mode, and the first shaft penetrates through the first shaft hole to fix the first lever on the shaft supporting plate; the second lever is provided with a second compression joint section and a second abutting section, a second shaft hole is formed between the second compression joint section and the second abutting section in a connecting mode, and the second shaft penetrates through the second shaft hole to fix the second lever on the shaft supporting plate.
3. The ultrahigh-pressure semiconductor pneumatic diaphragm valve of claim 2, wherein the free ends of the first and second crimp segments are each provided with a rounded curved surface, the free end of the first crimp segment is crimped to the lower planar side of the piston, the free end of the second crimp segment is crimped to the upper planar side of the support plate, and the free ends of the first and second abutment segments are in abutment with each other.
4. The ultrahigh-pressure semiconductor pneumatic diaphragm valve of claim 3, wherein the shaft support plate comprises a support ring, shaft fixing blocks and a support table, the support ring extends downwards from the periphery of the support table to the bottom surface in the cylinder of the cylinder body, a plurality of the shaft fixing blocks are arranged on the support table, and each shaft fixing block is provided with two fixing holes for the first shaft and the second shaft to pass through.
5. The ultrahigh-pressure semiconductor pneumatic diaphragm valve of claim 4, wherein the support plate is accommodated in a space formed by the support ring, the support table and the in-cylinder bottom surface of the cylinder block, the support table is further provided with a plurality of holes, and the free end of the second crimping section passes through the holes in the support table and is crimped to the upper end plane side of the support plate.
6. The ultrahigh-pressure semiconductor pneumatic diaphragm valve of claim 5, wherein the lever mechanism comprises four sets of lever units and a rotating shaft unit, the four shaft fixing blocks are arranged on the supporting table in a central symmetry manner, and each lever unit is rotatably fixed on one shaft fixing block through the corresponding rotating shaft unit.
7. The ultrahigh-pressure semiconductor pneumatic diaphragm valve of claim 6, wherein each of the shaft-securing blocks comprises a first shaft-securing block and a second shaft-securing block, the first and second shafts rotatably securing the first and second levers between the first and second shaft-securing blocks, respectively, the four lever units enclosing a circle in the same direction.
8. The ultra-high pressure semiconductor pneumatic diaphragm valve of claim 6, wherein the lever unit further comprises a third lever and a fourth lever; The third lever is provided with a third compression joint section and a third abutting section, a third shaft hole is formed between the third compression joint section and the third abutting section in a connecting mode, and the second shaft penetrates through the third shaft hole to fix the third lever on a supporting table of the shaft supporting plate; the fourth lever is provided with a fourth compression joint section and a fourth abutting section, a fourth shaft hole is arranged between the fourth compression joint section and the fourth abutting section in a connecting way, the first shaft penetrates through the fourth shaft hole to fix the fourth lever on a supporting table of the shaft supporting plate; The free ends of the third compression joint section and the fourth compression joint section are respectively provided with a smooth curved surface, the free ends of the third compression joint section are in compression joint with the lower end plane side of the piston, the free ends of the fourth compression joint section penetrate through holes in the supporting table and are in compression joint with the upper end plane side of the supporting plate, and the free ends of the third abutting section and the fourth abutting section are in mutual abutting joint.
9. The ultra-high pressure semiconductor pneumatic diaphragm valve of claim 8, wherein each of the support tables comprises a flat surface on a side of the support table toward the center of the shaft support plate and a curved surface on a side of the support table toward the cylinder side wall; The first lever and the second lever are arranged on one side of the plane of the supporting table, the third lever and the fourth lever are arranged on one side of the curved surface of the supporting table, and the third lever and the fourth lever both have radians corresponding to the curved surface; Four first levers and second levers enclose a circle in the positive direction, and four third levers and fourth levers enclose a circle in the opposite direction.
10. The ultrahigh-pressure semiconductor pneumatic diaphragm valve according to claim 2, wherein a circular table surface is arranged in the center of the supporting plate, the top end of the valve rod of the connecting assembly is provided with a spherical surface, and the circular table surface and the spherical surface are mutually matched, so that the diaphragm head controls the opening and closing of the diaphragm to the air inlet and the air outlet in the vertical direction.

Description

Pneumatic diaphragm valve of superhigh pressure semiconductor Technical Field The invention relates to the technical field of semiconductor manufacturing, in particular to a part for semiconductor manufacturing. In particular to an ultrahigh-pressure semiconductor pneumatic diaphragm valve. Background In the prior art, such as JP2005325893a controller, JP4529023B2 controller, and JP2018123872a valve actuator and diaphragm valve equipped therewith, a pair of levers in the middle are often used as force reinforcement members for the cylinder of the pneumatic diaphragm valve. The structure realizes the strength enhancement of the lever principle, so that the diaphragm valve can be opened or closed under the condition of ultrahigh pressure by acting lower air pressure on the air cylinder of the pneumatic diaphragm valve. However, in the prior art, a pair of levers are fixed in the middle to increase the force, so that the deflection is easily generated due to the clearance under the matching and guiding of parts. I.e. the forces ultimately acting on the membrane are not perpendicular to the membrane. The large downward pressure exerted by the tilting is then likely to cause a reduction in the lifetime of the diaphragm and damage. In addition, the contact surface of the pair of levers is small, the contact points are few, the left pressure and the right pressure are symmetrical, but the problem that the front pressure and the rear pressure are uneven is likely to occur, the downward pressing direction of the diaphragm is offset, and meanwhile, the service life of a lever part is easy to be low due to the fact that the pressure is high. Therefore, there is a need for an ultrahigh pressure semiconductor pneumatic diaphragm valve with a lower pressure force perpendicular to the diaphragm, a larger contact area, a larger contact point, a smaller lever pressure, and a longer lever life. Disclosure of Invention In order to solve the problems, the invention provides an ultrahigh-pressure semiconductor pneumatic diaphragm valve, which aims to achieve the purposes of more vertical downward pressure to a diaphragm, larger contact area, more contact points, smaller lever member pressure and longer lever member service life. In order to achieve the above object, the present invention provides the following technical solutions: The pneumatic diaphragm valve at least comprises a valve body, a connecting assembly and a cylinder, wherein the connecting assembly is detachably connected between the valve body and the cylinder; a spring and a piston are arranged in the cylinder body of the cylinder, and two ends of the spring are respectively pressed against the cylinder cover of the cylinder and the upper end plane side of the piston; The cylinder is internally provided with a lever mechanism, the lever mechanism is arranged below the piston, the top of the lever mechanism is in pressure connection with the plane side of the lower end of the piston, and the bottom of the lever mechanism is in pressure connection with the connecting component; The connecting component controls the opening and closing of the air inlet and the air outlet of the valve body through a lever mechanism. In an alternative embodiment, the lever mechanism comprises a plurality of pairs of lever units, a rotating shaft unit, a shaft supporting plate and a supporting plate, wherein each lever unit is rotatably fixed on the shaft supporting plate through the corresponding rotating shaft unit, the lever unit comprises a first lever and a second lever, and the rotating shaft unit comprises a first shaft and a second shaft; The first lever is provided with a first compression joint section and a first abutting section, a first shaft hole is formed between the first compression joint section and the first abutting section in a connecting mode, and the first shaft penetrates through the first shaft hole to fix the first lever on the shaft supporting plate; the second lever is provided with a second compression joint section and a second abutting section, a second shaft hole is formed between the second compression joint section and the second abutting section in a connecting mode, and the second shaft penetrates through the second shaft hole to fix the second lever on the shaft supporting plate. In an alternative embodiment, the free ends of the first and second crimping sections are each provided with a rounded surface, the free end of the first crimping section is crimped to the lower planar side of the piston, the free end of the second crimping section is crimped to the upper planar side of the support plate, and the free ends of the first and second abutment sections are in abutment with each other. In an alternative embodiment, the shaft support plate comprises a support ring, shaft fixing blocks and a support table, wherein the support ring extends downwards from the periphery of the support table to the bottom surface in the cylinder of the cylinder body, a