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CN-121993644-A - Double-cavity balanced piezoelectric valve

CN121993644ACN 121993644 ACN121993644 ACN 121993644ACN-121993644-A

Abstract

The application discloses a double-cavity balanced piezoelectric valve which comprises a valve seat, wherein a cavity and a first air outlet are formed in the valve seat, a piezoelectric valve plate is arranged in the cavity and is divided into a first cavity and a second cavity, the first air outlet is communicated with the first cavity, the first cavity is enabled to exhaust to the outside through the first air outlet, the piezoelectric valve plate is suitable for being deformed to control the on-off of the first air outlet, an air inlet runner comprises an air inlet, a first branch and a second branch which are separated from the air inlet, the first branch and the second branch are mutually independent fluid channels, after fluid of the air inlet is separated, the fluid independently enters the first cavity and the second cavity through the first branch and the second branch, so that when no air flow is output from the first cavity and the second cavity, the air pressure in the first cavity and the second cavity is kept balanced, the valve plate does not need to additionally overcome the pressure difference deformation, the driving force required by opening or closing the valve of the piezoelectric valve plate is further reduced, and the response speed of the valve is higher.

Inventors

  • HONG YU

Assignees

  • 宁波健立电子有限公司

Dates

Publication Date
20260508
Application Date
20260203

Claims (10)

  1. 1. A dual-chamber balanced piezoelectric valve, comprising: The valve seat is internally provided with a cavity and a first air outlet; The piezoelectric valve plate is arranged in the cavity and divides the cavity into a first cavity and a second cavity, the first air outlet is communicated with the first cavity, so that the first cavity is exhausted to the outside through the first air outlet, and the piezoelectric valve plate is suitable for being deformed to control the on-off of the first air outlet; the air inlet flow passage is arranged in the valve seat, the air inlet flow passage comprises an air inlet, a first branch and a second branch, the first branch and the second branch are mutually independent fluid passages, the first branch is communicated with the first cavity, the second branch is communicated with the second cavity, after the fluid of the air inlet is split, the fluid independently enters the first cavity and the second cavity through the first branch and the second branch, and therefore when no air flow is output from the first cavity and the second cavity, the air pressure in the first cavity and the air pressure in the second cavity are kept balanced.
  2. 2. The dual-chamber balanced piezoelectric valve of claim 1, further comprising a power supply module electrically connected to the piezoelectric valve plate for applying a forward voltage or a reverse voltage to the piezoelectric valve plate, so that the piezoelectric valve plate deforms in a direction away from or close to the first air outlet, and opening and closing of the first air outlet is achieved.
  3. 3. The dual chamber balanced piezoelectric valve of claim 2, wherein at least one end of the piezoelectric valve plate is fixedly mounted on an inner wall of the valve seat.
  4. 4. The dual-chamber balanced piezoelectric valve of claim 3, wherein one end of the piezoelectric valve plate, which is close to the air inlet, is a free end, and one end, which is far away from the air inlet, is fixedly arranged on the inner wall of the valve seat, and a gap is formed between the free end and the inner wall of the valve seat so as to avoid interference with the inner wall of the valve seat when the valve plate is deformed; Or the periphery sides of the piezoelectric valve plates are fixedly arranged on the inner wall of the valve seat.
  5. 5. The dual chamber balanced piezoelectric valve of claim 2, wherein the piezoelectric valve plate comprises a piezoelectric plate and an elastic material layer coated on a surface of the piezoelectric plate.
  6. 6. The dual-chamber balanced piezoelectric valve according to any one of claims 2 to 5, wherein a second air outlet is provided in the second chamber, and the second air outlet is disposed opposite to the first air outlet on both sides of the piezoelectric valve plate, so that the first air outlet and the second air outlet are alternately opened and closed when the positive voltage or the negative voltage is applied to the piezoelectric valve plate.
  7. 7. The dual-cavity balanced piezoelectric valve according to claim 1 or 2, wherein the periphery of the piezoelectric valve plate is hermetically mounted on the inner wall of the valve seat, the second branch extends into the second chamber from the bottom surface of the valve seat, and the air outlet end of the second branch is located on two sides of the piezoelectric valve plate opposite to the first air outlet, so that when the piezoelectric valve plate is far away from the first air outlet, the piezoelectric valve plate approaches to the air outlet end of the second branch; The piezoelectric valve further comprises a pressure relief valve arranged in the second cavity, the pressure relief valve is arranged opposite to the piezoelectric valve plate, and when the piezoelectric valve plate deforms to cover the air outlet end of the second branch, the pressure relief valve pushes against the ejector rod of the pressure relief valve to open the pressure relief valve, so that the second cavity is communicated with the outside of the piezoelectric valve.
  8. 8. The dual chamber balanced piezoelectric valve of claim 7, wherein the outlet end of the second leg is sleeved with a first seal, the first seal abutting against the bottom surface of the piezoelectric valve plate when the piezoelectric valve plate covers the outlet end.
  9. 9. The dual chamber balanced piezoelectric valve of claim 7, wherein the piezoelectric valve plate comprises a piezoelectric plate and an elastic material layer coated on a surface of the piezoelectric plate.
  10. 10. The dual-chamber balanced piezoelectric valve of claim 1, wherein the air inlet is disposed on a side wall of the valve seat, so that fluid enters the corresponding chamber from two sides of the piezoelectric valve plate through two branches, respectively, the first air outlet is disposed on a top wall of the valve seat, and an opening direction of the first air outlet is consistent with a deformation direction of the piezoelectric valve plate.

Description

Double-cavity balanced piezoelectric valve Technical Field The application relates to the technical field of piezoelectric valves, in particular to a double-cavity balanced piezoelectric valve. Background The conventional piezoelectric valve mostly adopts a spring pre-tightening type sealing structure, namely, the valve plate is pressed at the air outlet through the pre-tightening force of the spring, so that the valve is closed, and when the piezoelectric valve is electrified, the piezoelectric valve plate deforms to overcome the pre-tightening force of the spring, so that the valve plate is separated from the air outlet, and the valve is opened. However, the structure has the obvious technical defects that as the opening amplitude of the valve is gradually increased, the elastic restoring force of the spring is linearly increased, so that the driving deformation force required by the piezoelectric valve plate is synchronously increased, extremely high requirements are provided for the deformation performance and the compressive strength of the piezoelectric valve plate, the loss rate of the piezoelectric valve plate is increased, the service life of the valve is shortened, the opening response speed of the valve is reduced, and the fluid control requirements of high precision and high frequency are difficult to meet. Disclosure of Invention The application aims to provide a double-cavity balanced piezoelectric valve, which is used for solving the problem that the driving force required by a valve plate is large when the opening degree of the valve is large. The technical scheme includes that the double-cavity balanced piezoelectric valve comprises a valve seat, a piezoelectric valve plate, the first air outlet and the second air outlet, wherein a cavity and a first air outlet are formed in the valve seat, the piezoelectric valve plate is arranged in the cavity and divides the cavity into a first cavity and a second cavity, the first air outlet is communicated with the first cavity, the first cavity is enabled to exhaust to the outside through the first air outlet, the piezoelectric valve plate is suitable for being deformed to control on-off of the first air outlet, the air inlet runner is arranged in the valve seat and comprises an air inlet, a first branch and a second branch which are separated from the air inlet, the first branch and the second branch are mutually independent fluid channels, the first branch and the first cavity are communicated, the second branch and the second cavity are communicated, and after fluid of the air inlet is shunted, the fluid independently enters the first cavity and the second cavity through the first branch and the second branch, and therefore air pressure of the first cavity and the second cavity are kept free from being balanced when the air pressure of the first cavity and the second cavity is not output. Preferably, the device further comprises a power supply module, wherein the power supply module is electrically connected with the piezoelectric valve plate and is used for applying forward voltage or reverse voltage to the piezoelectric valve plate so that the piezoelectric valve plate deforms in a direction away from or close to the first air outlet to open and close the first air outlet. As another preferred aspect, at least one end of the piezoelectric valve plate is fixedly mounted on the inner wall of the valve seat. Further preferably, one end of the piezoelectric valve plate, which is close to the air inlet, is a free end, one end of the piezoelectric valve plate, which is far away from the air inlet, is fixedly arranged on the inner wall of the valve seat, a gap is formed between the free end and the inner wall of the valve seat so as to avoid interference between the piezoelectric valve plate and the inner wall of the valve seat when the valve plate deforms, or the periphery of the piezoelectric valve plate is fixedly arranged on the inner wall of the valve seat. Further preferably, the piezoelectric valve plate comprises a piezoelectric plate and an elastic material layer coated on the surface of the piezoelectric plate. Further preferably, a second air outlet is arranged in the second chamber, and the second air outlet and the first air outlet are oppositely arranged at two sides of the piezoelectric valve plate, so that when the piezoelectric valve plate is applied with forward voltage or reverse voltage, the first air outlet and the second air outlet are alternately opened and closed. Further preferably, the periphery of the piezoelectric valve plate is hermetically mounted on the inner wall of the valve seat, the second branch extends into the second cavity from the bottom surface of the valve seat, and the air outlet end of the second branch and the first air outlet are oppositely located at two sides of the piezoelectric valve plate, so that when the piezoelectric valve plate is far away from the first air outlet, the piezoelectric valve is close