CN-121993698-A - Locking assembly, camera adjusting device and detection equipment

CN121993698ACN 121993698 ACN121993698 ACN 121993698ACN-121993698-A

Abstract

The invention provides a locking assembly, a camera adjusting device and detection equipment, wherein the locking assembly is used for locking a rotating piece and comprises a fixed plate, an anti-rotation connecting shaft, a clamping piece, a screwing piece and a screwing piece, wherein the fixed plate is provided with a through anti-rotation guide hole, the anti-rotation connecting shaft is inserted into the anti-rotation guide hole and is in anti-rotation fit with the anti-rotation guide hole, the anti-rotation connecting shaft can move along the axial direction of the anti-rotation guide hole, the clamping piece is connected with one end of the anti-rotation connecting shaft, a clamping space for accommodating the rotating piece is formed by the clamping piece in fit with one side surface of the fixed plate, the screwing piece is connected with the other end of the anti-rotation connecting shaft, and when the screwing piece is screwed, the screwing piece can move along the anti-rotation connecting shaft towards the direction close to the clamping piece. The invention can not generate rotation moment in the locking process, and avoid the influence of the locking process on the rotation adjustment precision of the camera.

Inventors

WANG YUFENG
YANG YUANRUI
YANG XIAOWEI

Assignees

深圳精积微半导体技术有限公司
上海精积微半导体技术有限公司

Dates

Publication Date: 20260508
Application Date: 20241101

Claims (10)

1. A locking assembly for locking a rotating member, comprising: The fixed plate is provided with a through anti-rotation guide hole; The anti-rotation connecting shaft is inserted into the anti-rotation guide hole, is in anti-rotation fit with the anti-rotation guide hole, and can move along the axial direction of the anti-rotation guide hole; The clamping piece is connected with one end of the anti-rotation connecting shaft, and the clamping piece is matched with one side surface of the fixed plate to form a clamping space for accommodating the rotating piece; The screwing piece is connected with the other end of the anti-rotation connecting shaft, the screwing piece is abutted to the surface of the other side of the fixed plate, and when the screwing piece is screwed, the screwing piece can move along the anti-rotation connecting shaft towards the direction close to the clamping piece.
2. The locking assembly of claim 1 wherein the anti-rotation connection shaft has a first anti-rotation member located at an outer periphery and the anti-rotation guide hole has a second anti-rotation member located at an inner wall; the anti-rotation connecting shaft and the anti-rotation guide hole are matched in a rotation stopping way, and the anti-rotation connecting shaft is characterized in that the first anti-rotation part is a flat key convexly arranged on the outer peripheral surface of the anti-rotation connecting shaft, the second anti-rotation part is a guide groove concavely arranged on the inner wall of the anti-rotation guide hole, and the flat key is arranged in the guide groove; Or alternatively The first rotation preventing piece is a convex rib protruding from the outer circumferential surface of the rotation preventing connecting shaft, the second rotation preventing piece is a guide groove concavely arranged on the inner wall of the rotation preventing guide hole, and the convex rib is arranged in the guide groove; Or alternatively The first anti-rotation part is a guide groove concavely arranged on the outer circumferential surface of the anti-rotation connecting shaft, the second anti-rotation part is a convex rib convexly arranged on the inner wall of the anti-rotation guide hole, and the convex rib is arranged in the guide groove.
3. The locking assembly of claim 1, wherein the clamp comprises: a first screw connected with one end of the anti-rotation connecting shaft; the first gasket, the flexible piece and the second gasket are sleeved on the first screw in sequence, and the first gasket and the second gasket are arranged at intervals and respectively in abutting contact with the flexible piece.
4. The locking assembly of claim 1, wherein the tightening member comprises: The second screw is connected with the other end of the anti-rotation connecting shaft; And the third gasket is sleeved on the second screw and is in abutting contact with the second screw, and when the second screw is screwed, the second screw can drive the third gasket to move towards the direction close to the clamping piece.
5. A camera adjustment device, comprising: a locking assembly according to any one of claims 1 to 4; the rotating piece is used for installing a camera and can be locked and fastened on the fixed plate through the locking assembly.
6. The camera adjustment device of claim 5, further comprising an axial compression member coupled to the fixed plate; the axial pressing piece is in abutting contact with the side surface, deviating from the fixed plate, of the rotating piece along the axial direction of the rotating piece.
7. The camera adjustment device of claim 6, further comprising a first radial support and a second radial compression connected to the fixed plate; The first radial supporting piece is in rolling abutting contact with the arc-shaped peripheral surface of the lower end of the rotating piece along the radial direction of the rotating piece; the second radial pressing piece is in rolling abutting contact with the arc-shaped outer peripheral surface of the upper end of the rotating piece along the radial direction of the rotating piece.
8. The camera adjustment device of claim 7, wherein, The first radial support has at least two, and a resultant force of supporting forces of the first radial support to the rotating member is directed to the second radial pressing member.
9. The camera adjustment device of claim 5, further comprising a rotation adjustment assembly; The rotation adjusting assembly comprises an extension handle fixedly connected to the arc-shaped outer peripheral surface of the rotating piece, a fixed seat fixedly connected to the fixed plate, and a micrometer connected to the fixed seat; The micrometer rotates to axially move relative to the fixed seat, and provides a rotating moment for the rotating piece through the extension handle so as to drive the rotating piece to rotate relative to the fixed plate along the axis of the rotating piece.
10. A detection apparatus, characterized by comprising: A camera; The camera adjustment device according to any one of claims 5 to 9; The camera is connected with a rotating piece in the camera adjusting device.

Description

Locking assembly, camera adjusting device and detection equipment Technical Field The invention relates to the field of detection equipment, in particular to a locking assembly, a camera adjusting device and detection equipment. Background In the field of wafer pattern inspection, it is often necessary to adjust the pixel array of the camera to be consistent with the wafer to be inspected or the wafer motion direction, and typically the rotation error of the pixel array does not exceed the requirement of one pixel or less. To achieve such requirements, it is generally necessary to control the angular accuracy of the camera target surface to within a few micro radians, with strict angular accuracy requirements. Meanwhile, after the camera is adjusted to be within the precision range, the camera needs to be locked in time, so that the positioning accuracy is ensured. In the related camera rotation adjustment device, the camera is usually locked manually using a set screw for locking after the camera adjustment is completed. However, a certain rotational displacement is generated in the manual locking process, so that the influence on the field of wafer pattern detection with the angle precision required to be within a few micro-arcs is large, and the precision of wafer pattern detection is influenced. Disclosure of Invention In view of the above, the present invention provides a locking assembly, a camera adjusting device and a detecting device, so as to at least solve the problem of larger rotational displacement when the locking assembly of the existing camera is locked. In one aspect, embodiments of the present invention provide a locking assembly for locking a rotating member, comprising: the fixed plate is provided with a through anti-rotation guide hole; the anti-rotation connecting shaft is inserted into the anti-rotation guide hole, is in anti-rotation fit with the anti-rotation guide hole, and can move along the axial direction of the anti-rotation guide hole; The clamping piece is connected with one end of the anti-rotation connecting shaft, and the clamping piece is matched with one side surface of the fixed plate to form a clamping space for accommodating the rotating piece; the screwing piece at the other end of the connecting shaft is connected, the screwing piece is abutted against the surface of the other side of the fixed plate, and when the screwing piece is screwed, the screwing piece can move along the connecting shaft in a direction close to the clamping piece. In some embodiments, the anti-rotation connection shaft has a first anti-rotation member located at the outer periphery and the anti-rotation guide hole has a second anti-rotation member located at the inner wall; The anti-rotation connection shaft and the anti-rotation guide hole are matched in a rotation stopping way through the following structure that the first anti-rotation piece is a flat key convexly arranged on the outer peripheral surface of the anti-rotation connection shaft, the second anti-rotation piece is a guide groove concavely arranged on the inner wall of the anti-rotation guide hole, and the flat key is arranged in the guide groove; Or alternatively The first anti-rotation part is a convex rib protruding from the outer circumferential surface of the anti-rotation connecting shaft, the second anti-rotation part is a guide groove concavely arranged on the inner wall of the anti-rotation guide hole, and the convex rib is arranged in the guide groove; Or alternatively The first anti-rotation piece is a guide groove concavely arranged on the outer peripheral surface of the anti-rotation connecting shaft, the second anti-rotation piece is a convex rib convexly arranged on the inner wall of the anti-rotation guide hole, and the convex rib is arranged in the guide groove. In some embodiments, the clip comprises: A first screw connected with one end of the anti-rotation connecting shaft; The first gasket, the flexible piece and the second gasket are sleeved on the first screw in sequence, are arranged at intervals and are respectively in abutting contact with the flexible piece. In some embodiments, the tightening member comprises: a second screw connected with the other end of the anti-rotation connecting shaft; and the third gasket is sleeved on the second screw and is in abutting contact with the second screw, and when the second screw is screwed, the second screw can drive the third gasket to move towards the direction close to the clamping piece. In another aspect, an embodiment of the present invention further provides a camera adjusting apparatus, including: The locking assembly; The rotating piece is used for installing a camera and can be locked and fastened on the fixed plate through the locking component. In some embodiments, the camera adjustment device further comprises an axial compression member connected to the fixed plate; the axial compressing piece is in propping contact with the side surface of the rot