CN-121993727-A - High-safety full-automatic filling method and system applied to filling of fluorine-nitrogen mixed gas

CN121993727ACN 121993727 ACN121993727 ACN 121993727ACN-121993727-A

Abstract

A high-safety full-automatic filling method and system applied to filling fluorine-nitrogen mixed gas relates to the field of gas filling, and the method comprises the following steps: and (5) filling the fluorine-nitrogen mixed gas into the target steel cylinder, collecting the filling quality in real time, and stopping when the target filling quantity is reached. And applying active enhanced heat dissipation to the steel cylinder in the first half period of each preset modulation period, stopping heat dissipation in the second half period, and continuously and alternately executing a plurality of complete periods. And continuously collecting the pressure in the bottle, calculating the average pressure value of each period by taking the modulation period as an integral window, and performing linear trend fitting on the average pressure value sequences of a plurality of continuous periods to obtain the pressure decreasing rate. If the decreasing rate exceeds the preset leakage judging threshold, judging that the steel cylinder has leakage, and if the decreasing rate does not exceed the preset leakage judging threshold, judging that the steel cylinder is qualified in sealing, and finishing filling. By implementing the method, the accuracy of detecting the leakage state of the steel cylinder can be improved.

Inventors

REN RU
PAN HUAJIE
Yang Huanyao
SUN AOYUN

Assignees

上海栎智半导体科技股份有限公司

Dates

Publication Date: 20260508
Application Date: 20260402

Claims (10)

1. A high-safety full-automatic filling method applied to filling fluorine-nitrogen mixed gas, which is characterized by being applied to an automatic filling system, and comprising the following steps of: Filling fluorine-nitrogen mixed gas into a target steel cylinder, collecting the filling quality of the target steel cylinder in real time, and stopping filling when the collected filling quality data reach the target filling quantity; Applying active enhanced heat dissipation to the target steel cylinder in the first half period of each preset modulation period, stopping active heat dissipation to the target steel cylinder in the second half period of each preset modulation period, and continuously and alternately executing a plurality of complete preset modulation periods; Continuously collecting the in-cylinder pressure of the target steel cylinder, and calculating to obtain a period average pressure value corresponding to each modulation period according to the in-cylinder pressure data collected in each complete modulation period by taking the preset modulation period as an integral window; Performing linear trend fitting on a pressure value sequence formed by the period average pressure values corresponding to a plurality of continuous preset modulation periods to obtain a pressure decreasing rate; When the pressure decreasing rate exceeds a preset leakage judging threshold value, judging that the target steel cylinder has leakage; and when the pressure decreasing rate does not exceed the preset leakage judging threshold value, judging that the target steel cylinder is qualified in sealing, and finishing filling of the fluorine-nitrogen mixed gas.
2. The method of claim 1, wherein the step of applying active enhanced heat dissipation to the target cylinder during the first half of each preset modulation cycle comprises: collecting the surface temperature of the cylinder body of the target steel cylinder at the beginning time of the first half period of the current modulation period to obtain the reference surface temperature of the current period; Continuously applying cooling air flow to the target steel cylinder in the first half period, and acquiring real-time surface temperature of the bottle body in real time; Performing closed-loop feedback adjustment on the flow of the cooling air flow according to the difference between the real-time bottle surface temperature and the current period reference surface temperature so as to keep the active strengthening heat dissipation amplitude of each modulation period consistent; and stopping applying the cooling airflow at the end time of the first half period to finish the active enhanced heat dissipation of the current modulation period.
3. The method according to claim 1, wherein the step of calculating a cycle average pressure value corresponding to each modulation cycle based on the intra-bottle pressure data collected in each complete modulation cycle using the preset modulation cycle as an integration window specifically comprises: Dividing the pressure data in the bottle acquired in each complete modulation period into a first half-period pressure data set and a second half-period pressure data set according to time sequence; Removing pressure transient fluctuation data and retaining steady-state pressure data from the front half-cycle pressure data set and the rear half-cycle pressure data set respectively to obtain front half-cycle steady-state pressure data and rear half-cycle steady-state pressure data respectively; And merging the steady-state pressure data of the first half period with the steady-state pressure data of the second half period to obtain a period average pressure value corresponding to the current modulation period.
4. The method according to claim 1, wherein the step of performing linear trend fitting on a pressure value sequence formed by the period average pressure values corresponding to a plurality of continuous preset modulation periods to obtain a pressure decreasing rate specifically includes: Performing initial least square linear fitting on the pressure value sequence to obtain an initial fitting straight line; Calculating the residual error of the average pressure value of each period in the pressure value sequence relative to the initial fitting straight line; Distributing fitting weights for the average pressure values of each period according to residual absolute values corresponding to the average pressure values of each period, and carrying out weighted least square linear fitting on the pressure value sequences by using the fitting weights to obtain a corrected fitting straight line; And taking the absolute value of the slope of the correction fitting straight line as the pressure decreasing rate.
5. The method of claim 1, wherein after the step of determining that the target cylinder is leaking when the rate of pressure decrease exceeds a preset leak determination threshold, the method further comprises: closing a filling stop valve connected with the target steel cylinder and a filling pipeline to enable the target steel cylinder to enter a gas path isolation state; under the gas path isolation state, keeping the filling stop valve to be turned off, and continuously executing a plurality of continuous and complete preset modulation periods on the target steel cylinder; Continuously collecting the pressure in the target steel cylinder, and calculating to obtain an average pressure value of an isolation period corresponding to each modulation period in the gas path isolation state by taking the preset modulation period as an integral window; Performing linear trend fitting on an isolation pressure value sequence formed by the average pressure values of the isolation periods corresponding to a plurality of continuous preset modulation periods to obtain an isolation pressure decreasing rate; When the isolation pressure decreasing rate exceeds a preset leakage judging threshold value, judging that a leakage source is a bottle body of the target steel bottle, and outputting a bottle body leakage alarm; When the isolation pressure decreasing rate does not exceed the preset leakage judging threshold value, judging that a leakage source is a filling interface between the filling pipeline and the target steel cylinder, and outputting a filling interface leakage alarm.
6. The method of claim 1, wherein after the step of determining that the target cylinder is leaking when the rate of pressure decrease exceeds a preset leak determination threshold, the method further comprises: Respectively taking average values of bottle internal pressure data acquired in a first half period and bottle internal pressure data acquired in a second half period of each preset modulation period in a plurality of continuous preset modulation periods, and obtaining a first half period section voltage-sharing sequence and a second half period section voltage-sharing sequence according to time sequence arrangement; respectively carrying out linear trend fitting on the first half-period section voltage-sharing sequence and the second half-period section voltage-sharing sequence to obtain a first half-period pressure decreasing rate and a second half-period pressure decreasing rate; When the pressure decreasing rate of the first half period and the pressure decreasing rate of the second half period both exceed the preset leakage judging threshold, confirming that the target steel cylinder has real leakage, carrying out weighted fusion on the pressure decreasing rate of the first half period and the pressure decreasing rate of the second half period to obtain a fused pressure decreasing rate, and outputting the fused pressure decreasing rate as a final leakage rate evaluation value of the target steel cylinder; And when only one of the first half-cycle pressure decreasing rate and the second half-cycle pressure decreasing rate exceeds the preset leakage judging threshold value, re-executing tightness detection on the target steel cylinder after prolonging the preset modulation period.
7. The method of claim 6, wherein the step of weighted fusing the first half-cycle pressure decrease rate and the second half-cycle pressure decrease rate to obtain a fused pressure decrease rate specifically comprises: Carrying out arithmetic average on the pressure decreasing rate of the first half period and the pressure decreasing rate of the second half period to obtain an initial fusion pressure decreasing rate; Calculating the absolute value of the difference between the pressure decreasing rate of the first half period and the pressure decreasing rate of the second half period to obtain a thermal asymmetry index; Determining a thermal offset modifier according to the thermal asymmetry indicator, the thermal offset modifier being positively correlated to the thermal asymmetry indicator; Subtracting the thermal bias correction from the initial fusion pressure decrease rate to obtain the fusion pressure decrease rate.
8. An automatic filling system comprising one or more processors and memory coupled to the one or more processors, the memory to store computer program code comprising computer instructions that the one or more processors invoke to cause the automatic filling system to perform the method of any of claims 1-7.
9. A computer readable storage medium comprising instructions which, when run on an automatic filling system, cause the automatic filling system to perform the method of any one of claims 1-7.
10. A computer program product, characterized in that the computer program product, when run on an automatic filling system, causes the automatic filling system to perform the method of any one of claims 1-7.

Description

High-safety full-automatic filling method and system applied to filling of fluorine-nitrogen mixed gas Technical Field The application relates to the field of gas filling, in particular to a high-safety full-automatic filling method and system applied to filling of fluorine-nitrogen mixed gas. Background Fluorine (F 2) is an irreplaceable key process gas in the fields of semiconductor manufacturing, photovoltaic industry, nuclear fuel processing, etc. Because fluorine gas has extremely strong oxidizing property and corrosiveness, the detection of tightness in the filling, storage and transportation processes is a core link for guaranteeing safe production. In the related art, the tightness detection of the steel cylinder after filling mainly adopts a static pressure maintaining method, namely, a steel cylinder valve is closed after filling is completed, an initial pressure value is recorded, the pressure value is read again after a period of pressure maintaining time, and if the pressure drops above a preset threshold value, the leakage is judged. However, the compression work of the gas continuously injects heat into the bottle body in the high-pressure filling process, and the temperature of the bottle body is obviously higher than the environment at the end of filling. In the subsequent pressure maintaining detection stage, the bottle body continuously radiates outwards, the temperature is reduced, and the pressure in the bottle is directly caused to continuously attenuate by the temperature reduction under the sealed constant volume condition according to a gas state equation. Since the bottle body heat dissipation follows newton's law of cooling, the rate of pressure decrease due to thermal effects is a slow variable that continuously decays as the temperature difference narrows, the thermal effect contribution between windows is approximately constant over a short time window, but accumulates significantly over a longer observation window required for the pressure retention method. The thermal effect pressure drop and the leakage pressure drop are overlapped on the same pressure reading, the magnitude is in the same order of magnitude, so that the steel cylinder which is well sealed is misjudged to be leaked due to the fact that the thermal effect pressure drop exceeds the threshold, or after the threshold is adjusted up to avoid misinformation, the actually leaked steel cylinder is covered by the thermal effect background and passes detection. The way of reducing the thermal effect by extending the waiting time to the complete temperature balance is not feasible due to the safety risk of the continuous escape of fluorine gas and the constraint of the production line efficiency. Disclosure of Invention The application provides a high-safety full-automatic filling method and a system applied to filling of fluorine-nitrogen mixed gas, which are used for improving the accuracy of detecting the leakage state of a steel cylinder. The application provides a high-safety full-automatic filling method applied to a fluorine-nitrogen mixed gas filling system, which is applied to an automatic filling system and comprises the steps of filling fluorine-nitrogen mixed gas into a target steel bottle, collecting the filling quality of the target steel bottle in real time, stopping filling when the collected filling quality data reach the target filling quantity, applying active enhanced heat dissipation to the target steel bottle in the first half period of each preset modulation period, stopping active heat dissipation to the target steel bottle in the second half period of each preset modulation period, continuously and alternately executing a plurality of complete preset modulation periods, continuously collecting the bottle internal pressure of the target steel bottle, taking the preset modulation period as an integral window, calculating to obtain a period average pressure value corresponding to each modulation period according to the bottle internal pressure data collected in each complete modulation period, performing linear trend fitting on a pressure value sequence formed by the period average pressure values corresponding to a plurality of continuous preset modulation periods, obtaining a pressure decreasing rate, judging that the target steel bottle has leakage when the pressure decreasing rate does not exceed a preset leakage judging threshold, and judging that the target steel bottle has leakage, and the target fluorine-nitrogen mixed gas is completely filled. In the above embodiment, active enhanced heat dissipation is applied to the target steel cylinder in the first half period and active heat dissipation is stopped in the second half period of each preset modulation period, the period average pressure value is calculated by taking the preset modulation period as an integral window, a pressure value sequence formed by continuous multiple period average pressure values is subjected to linear trend fitti