CN-121994002-A - Rapid filter material drying equipment and use method thereof

CN121994002ACN 121994002 ACN121994002 ACN 121994002ACN-121994002-A

Abstract

The invention discloses filter material quick drying equipment and a use method thereof, wherein the filter material quick drying equipment comprises an equipment main body, a stirring system, a heating system, a nitrogen system and a filtrate discharging system. The top of the equipment main body is provided with a feeding pipe, the bottom of the equipment main body is provided with a solid filter material discharging pipe, a feeding control valve is arranged on the feeding pipe, and a solid filter material discharging valve is arranged on the solid filter material discharging pipe. The stirring system comprises a stirring paddle arranged in the equipment main body and is used for stirring and scattering filter materials. The heating system comprises a heat conduction oil tank and a heat conduction oil pipeline connected with the heat conduction oil tank and the equipment main body, and a heat conduction oil inlet valve and a heat conduction oil return valve are arranged on the heat conduction oil pipeline. The nitrogen system comprises a nitrogen pipe, and a nitrogen control valve and a pressure control valve which are arranged on the nitrogen pipe. The invention can greatly reduce the labor intensity of personnel, improve the working efficiency, reduce the risks of ignition, corrosion, environmental pollution and the like, further greatly reduce the potential safety hazard and ensure the safety of personnel and equipment.

Inventors

SUN SHOUCHENG
HAO WEIQIANG
Dou Bowu
YUAN ZHICHENG

Assignees

全椒金宏电子材料有限公司

Dates

Publication Date: 20260508
Application Date: 20260226

Claims (10)

1. A filter media rapid drying apparatus comprising: the device comprises a device main body, wherein the top of the device main body is provided with a feed pipe, the bottom of the device main body is provided with a solid filter material discharge pipe, a feed control valve is arranged on the feed pipe, and a solid filter material discharge valve is arranged on the solid filter material discharge pipe; the stirring system comprises a stirring paddle arranged in the equipment main body and is used for stirring and scattering filter materials; the heating system comprises a heat conduction oil tank and a heat conduction oil pipeline connected with the heat conduction oil tank and the equipment main body, wherein a heat conduction oil inlet valve and a heat conduction oil return valve are arranged on the heat conduction oil pipeline; a nitrogen system including a nitrogen pipe and a nitrogen control valve and a pressure control valve installed thereon for providing an inert atmosphere for the apparatus body and controlling an internal pressure; the filtrate discharging system comprises a filtrate pipe, a filtrate discharging valve, a filtrate to crude product tank control valve and a tail gas removing system control valve which are arranged on the filtrate pipe.
2. The rapid filter material drying device according to claim 1, wherein a jacket is arranged on the outer side of the device body, and the jacket is connected with the heat conduction oil tank through the heat conduction oil pipeline.
3. The rapid filter material drying device according to claim 1, wherein the inner bottom of the device main body is provided with filter cloth, and the inner wall of the device main body is made of corrosion-resistant materials.
4. A rapid filter media drying apparatus according to claim 3, wherein the filter cloth is a high temperature resistant, chemically resistant, precision filter material having a filtration accuracy of 0.1 μm to 10 μm, the filter cloth being capable of withstanding an operating temperature of not less than 150 ℃.
5. The rapid filter material drying apparatus according to claim 1, wherein the stirring system is capable of automatically adjusting the rotation speed, rotation direction and lifting height of the stirring paddle, so as to realize stirring and compacting filter cake flattening operations of the filter material at different stages.
6. The rapid filter material drying device according to claim 1, wherein a temperature control device is arranged in the heat conducting oil tank and is used for stably controlling the temperature of the heat conducting oil to be any set value between 30 ℃ and 200 ℃, and the temperature control precision is +/-1 ℃.
7. A rapid filter media drying apparatus as claimed in claim 1, wherein the filtrate discharge system further comprises a sampling valve mounted to the filtrate pipe for sampling and monitoring the composition and content of the gas during the drying process in real time.
8. The rapid filter media drying apparatus of claim 1, further comprising a central control system, wherein the feed control valve, the nitrogen control valve, the pressure control valve, the heat transfer oil feed valve, the heat transfer oil return valve, and the stirring paddle are electrically connected to the central control system for automatic control of the feed, pressure, temperature, and stirring process.
9. A method of using the filter media flash drying apparatus of any one of claims 1-8, comprising the steps of: S1, purging and replacing a main body of the equipment through a nitrogen system, and controlling the internal pressure of the main body of the equipment to be a preset value after detecting that the oxygen content and the moisture are qualified, so as to prepare feeding; s2, closing a valve of the filtrate discharge system, remotely opening a feed control valve to transfer reaction products into the equipment main body, and starting a stirring paddle to stir and wash; s3, stopping stirring, enabling solid particles on the filter cloth to stand still to form a filter cake, then introducing nitrogen to boost pressure, performing filter pressing operation, and discharging filtrate to a crude product tank through a filtrate discharge system; S4, starting a heating system, heating the temperature in the equipment main body to a set drying temperature, performing constant-temperature drying, keeping a filtrate discharging system passage, and collecting volatile products; s5, after drying is finished, switching a filtrate discharge pipeline to a tail gas system, introducing nitrogen to purge and replace the solid filter material, and monitoring gas components through a sampling valve until the gas components are qualified; S6, reducing the temperature of the main body of the equipment, releasing pressure to normal pressure, starting the stirring paddle to reversely rotate, opening the solid filter material discharging valve, and finishing discharging of the solid filter material.
10. The method according to claim 9, wherein in S3, the pressure of the press filtration operation is 2-5bar, the number of times of repeated flattening and press filtration is at least 2, and in S4, the drying temperature is 70-90 ℃ and the constant-temperature drying time is 1-3 hours.

Description

Rapid filter material drying equipment and use method thereof Technical Field The invention belongs to the technical field of filter material drying, and particularly relates to filter material rapid drying equipment and a using method thereof. Background With the development of the semiconductor industry, the demand for trisilylammonium has grown rapidly. Trisilylamine has found wide application in the fields of semiconductor fabrication, integrated circuits, solar cells, and the like, and is particularly excellent in processes such as amorphous silicon growth, epitaxial growth, chemical vapor deposition, and the like. The trisilyl ammonia is prepared by reacting monochlorosilane and ammonia in a reactor at a certain temperature and under a certain pressure to generate a crude product, and purifying the crude product by means of filtration, separation, distillation and the like to finally obtain a qualified target product. In the process, a certain amount of solid materials can be produced, so that the yield of the product is improved, the safety risk is reduced, and the solid filter materials can reach the safety extraction or discharge standard only by treating the solid filter materials through means of filter pressing, washing, drying and the like. In the prior art, the most commonly used filter material drying technology is that a filter screen is used for carrying out primary separation on filtrate and a solid filter material, after the separation is completed, the filtrate is sent into a crude product tank, the solid filter material is required to pass through lotion for a plurality of times, then the qualified filter material of the lotion is transferred into drying equipment, and residual liquid is evaporated in a heating mode, so that the aim of drying the solid filter material is fulfilled. The existing drying operation is complicated, the personnel are required to operate frequently, the labor intensity of the personnel is increased, the time is wasted, and in the process of transferring the filter material, the residual chemical substances have the safety risks of catching fire, corroding, bringing occupational injury to the operators, polluting the environment and the like. Therefore, in view of the above technical problems, it is necessary to provide a rapid filter material drying apparatus and a method for using the same. The information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person of ordinary skill in the art. Disclosure of Invention The invention aims to provide a rapid filter material drying device and a use method thereof, which can solve the problems of leakage ignition, corrosion and environmental pollution accidents caused by the existence of the filter material in the drying process. In order to achieve the above objective, a specific embodiment of the present invention provides a rapid filter material drying apparatus, which includes an apparatus main body, a stirring system, a heating system, a nitrogen system, and a filtrate discharge system. The device is characterized in that the top of the device main body is provided with a feeding pipe, the bottom of the device main body is provided with a solid filter material discharging pipe, a feeding control valve is arranged on the feeding pipe, and a solid filter material discharging valve is arranged on the solid filter material discharging pipe. The stirring system comprises a stirring paddle arranged in the equipment main body and is used for stirring and scattering filter materials. The heating system comprises a heat conduction oil tank and a heat conduction oil pipeline connected with the heat conduction oil tank and the equipment main body, and a heat conduction oil inlet valve and a heat conduction oil return valve are arranged on the heat conduction oil pipeline. The nitrogen system comprises a nitrogen pipe, and a nitrogen control valve and a pressure control valve which are arranged on the nitrogen pipe and are used for providing inert atmosphere for the equipment main body and controlling the internal pressure. The filtrate discharging system comprises a filtrate pipe, a filtrate discharging valve, a filtrate to crude product tank control valve and a tail gas removing system control valve which are arranged on the filtrate pipe. In one or more embodiments of the present invention, a jacket is provided outside the apparatus body, and the jacket is connected to the heat conduction oil tank through the heat conduction oil pipeline. In one or more embodiments of the present invention, the inner bottom of the apparatus body is provided with a filter cloth, and the inner wall of the apparatus body is made of a corrosion-resistant material. In one or more embodiments of the present invention, the material of the filte