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CN-121994058-A - 6-Series aluminum alloy water cooling disc and manufacturing method thereof

CN121994058ACN 121994058 ACN121994058 ACN 121994058ACN-121994058-A

Abstract

The invention discloses a 6-series aluminum alloy water cooling disc and a manufacturing method thereof, wherein the 6-series aluminum alloy water cooling disc comprises a 6-series aluminum alloy water cooling disc main body part and a 5-series aluminum alloy water channel cover plate, a water channel is arranged on the water cooling disc main body part, an interface to be welded is arranged on the water channel, and the 5-series aluminum alloy water channel cover plate is covered on the water channel and is welded with the interface to be welded into a whole through a vacuum electron beam. According to the 6-series aluminum alloy water-cooled disc and the manufacturing method thereof, under the condition that an additional filling welding lug is not used, the 5-series aluminum alloy or the 3-series aluminum alloy water channel cover plate and the 6-series aluminum alloy water-cooled disc main body are directly welded by vacuum electron beams, so that weld joint crystallization cracks are effectively restrained, the 6-series aluminum alloy water-cooled disc manufactured by the vacuum electron beam direct welding has qualified weld joints without cracks and air holes, and the risk of generating weld joint nail tip defects is effectively reduced. Meanwhile, the assembly process before welding is simplified, the production efficiency is improved, and the production cost is reduced.

Inventors

  • ZHOU ZIJUN
  • WANG HONGJUN
  • XIE RUYING
  • ZHENG SHENGHUA
  • XU HUAJIAN

Assignees

  • 浙江先导精密机械有限公司

Dates

Publication Date
20260508
Application Date
20251217

Claims (10)

  1. 1. A6-series aluminum alloy water cooling disc is characterized by comprising a 6-series aluminum alloy water cooling disc main body part (2) and a 5-series aluminum alloy water channel cover plate (3), wherein a water channel (4) is arranged on the water cooling disc main body part (2), an interface (5) to be welded is arranged on the water channel (4), and the 5-series aluminum alloy water channel cover plate (3) covers the water channel (4) and is directly welded with the interface (5) to be welded into a whole through a vacuum electron beam.
  2. 2. The 6-series aluminum alloy water-cooled panel according to claim 1, wherein a welding structure with 6-10 mm penetration depth is formed between the 5-series aluminum alloy water channel cover plate (3) and the 6-series aluminum alloy water-cooled panel main body (2).
  3. 3. The 6-series aluminum alloy water-cooling disc as claimed in claim 1 or 2, wherein the 6-series aluminum alloy water-cooling disc main body part (2) is made of 6061 aluminum alloy or 6005 aluminum alloy or 6063 aluminum alloy.
  4. 4. The 6-series aluminum alloy water-cooling disc as claimed in claim 1 or 2, wherein the 5-series aluminum alloy water channel cover plate (5) is made of 5052 aluminum alloy or 5083 aluminum alloy.
  5. 5. A method for manufacturing a 6-series aluminum alloy water-cooled panel according to any one of claims 1 to 4, comprising the steps of: s1, selecting 6-series aluminum alloy materials to manufacture a main body part for the water-cooling disc, arranging a water channel on the main body part of the water-cooling disc, and arranging an interface to be welded on the water channel; s2, selecting a 5-series aluminum alloy material to manufacture a water channel cover plate matched with the shape of a water channel; s3, covering a 5-series aluminum alloy water channel cover plate on a to-be-welded interface of a water channel, and directly welding 6-10 mm penetration of the 5-series aluminum alloy water channel cover plate and a 6-series aluminum alloy water cooling disc main body part through a vacuum electron beam; Wherein, the vacuum electron beam welding adopts 70 kV-100 kV accelerating voltage, defocusing is carried out by 10-15 mA, the welding speed is 900-1200 mm/min, and the beam current is 20-40 mA; s4, preparing the 6-series aluminum alloy water-cooled disc.
  6. 6. A6-series aluminum alloy water cooling disc is characterized by comprising a 6-series aluminum alloy water cooling disc main body part (2) and a 3-series aluminum alloy water channel cover plate (3), wherein a water channel (4) is arranged on the water cooling disc main body part (2), an interface (5) to be welded is arranged on the water channel (4), and the 3-series aluminum alloy water channel cover plate (3) covers the water channel (4) and is directly welded with the interface (5) to be welded into a whole through a vacuum electron beam.
  7. 7. The 6-series aluminum alloy water-cooled panel as set forth in claim 6, wherein a welding structure with 6-10 mm penetration depth is formed between the 3-series aluminum alloy water channel cover plate (3) and the 6-series aluminum alloy water-cooled panel main body member (2).
  8. 8. The 6-series aluminum alloy water-cooling disc as claimed in claim 6 or 7, wherein the 6-series aluminum alloy water-cooling disc main body part (2) is made of 6061 aluminum alloy or 6005 aluminum alloy or 6063 aluminum alloy.
  9. 9. The 6-series aluminum alloy water-cooling disc as claimed in claim 6 or 7, wherein the 3-series aluminum alloy water channel cover plate (3) is made of 3003 aluminum alloy.
  10. 10. A method for manufacturing a 6-series aluminum alloy water-cooled panel according to any one of claims 6 to 9, comprising the steps of: s1, selecting 6-series aluminum alloy materials to manufacture a main body part for the water-cooling disc, arranging a water channel on the main body part of the water-cooling disc, and arranging an interface to be welded on the water channel; S2, selecting 3-series aluminum alloy materials to manufacture a water channel cover plate matched with the shape of a water channel; S3, covering a water channel cover plate of the 3-series aluminum alloy on a to-be-welded interface of the water channel, and directly welding the water channel cover plate of the 3-series aluminum alloy and a main body part of the 6-series aluminum alloy water-cooling disc by using vacuum electron beams in a penetration way of 6-10 mm; Wherein, the vacuum electron beam welding adopts 70 kV-100 kV accelerating voltage, defocusing is carried out by 10-15 mA, the welding speed is 900-1200 mm/min, and the beam current is 20-40 mA; s4, preparing the 6-series aluminum alloy water-cooled disc.

Description

6-Series aluminum alloy water cooling disc and manufacturing method thereof Technical Field The invention relates to the technical field of water-cooling discs, in particular to a 6-series aluminum alloy water-cooling disc and a manufacturing method thereof. Background The aluminum alloy has the advantages of small density, excellent mechanical property, good processability and corrosion resistance and the like, and is increasingly applied to the fields of semiconductor equipment, national defense industry, aerospace and the like. The 6061 aluminum alloy is used as a medium-strength heat-treatable reinforced aluminum alloy, has excellent mechanical processing and hot processing performance compared with other aluminum alloys, and has good strength and plasticity and toughness matching, excellent corrosion resistance and excellent heat conductivity, so that the 6061 aluminum alloy becomes one of aluminum alloy brands widely applied in industrial production. In the semiconductor device manufacturing industry, 6061 aluminum alloy is widely applied to manufacturing of vacuum cavity cooling and heat dissipation components, in order to improve heat dissipation and cooling effects, a cooling water channel structure is generally required to be additionally arranged on a device component, such as a water cooling disc part shown in fig. 1, the track of the cooling water channel is complex, the penetration requirement is high, and the requirement on the cleanliness of welding seams is high. In aluminum alloy welding, there are currently four main technical methods: (1) And welding the water channel cover plate and the main body part of the water-cooled disc by adopting argon arc welding (TIG/MIG), wherein the argon arc welding is performed by using a tungsten electrode (TIG) or a welding wire (MIG) as an electrode to generate electric arc under the protection of inert gas (argon). However, because the argon arc welding has concentrated electric arc, the heat input is higher, and the local high temperature is easy to cause the deformation of parts (especially thin wall or precise water channel structure), and additional orthopedic procedures are needed. And the penetration depth of argon arc welding is small (less than 2mm in a single layer), the welding line is wide (more than 6 mm), the high-precision machining requirement of a water cooling disc with large penetration depth and a dense water channel can not be met, and a groove structure needs to be machined on a sub-piece before welding, so that the machining difficulty is increased. (2) Laser welding (LBW), which is a welding method in which a workpiece is irradiated with a laser beam having a high energy density to melt a material to form a weld. However, since aluminum alloys are highly reflective materials, they have high reflectivity to laser light (especially laser light around 1 μm wavelength), and require high power to initiate deep-melt welding. The welding process is easy to generate process air holes (due to unstable small holes) and metallurgical air holes, the requirements on cleaning before welding and stability of process parameters are extremely high, and the problem of oxidization of welding parts and the problem of air holes caused by hydrogen absorption cannot be avoided in the atmospheric environment. (3) Friction Stir Welding (FSW) is to use a stirring head rotating at high speed to prick a workpiece butt joint, and the materials are metallurgically bonded under the solid state lower than the melting point through the friction heat and the severe plastic deformation of the shaft shoulder of the stirring head and the workpiece. However, at the end of the welding process, the stirring head is withdrawn, leaving an unfilled hole (keyhole). And is generally applicable only to butt and lap welds of straight or regular circular arcs. For complex water channel structures with three-dimensional curves and space multi-angle intersection, the accessibility and the movement track of the stirring head become main obstacles, and the flexibility is far less than that of fusion welding. (4) Vacuum Electron Beam Welding (EBW), through the numerical control system of high accuracy, can satisfy the welding requirement of intensive complicated orbit to can carry out quantization control to the heat input, be fit for the batch welding. And the welding is carried out under the high vacuum (such as 10- 5 Pa) environment, so that metallurgical defects such as hydrogen holes, oxide inclusions and the like caused by atmospheric pollution are fundamentally avoided, and the purity of the welding seam is high. In summary, vacuum Electron Beam Welding (EBW) can meet the various requirements of aluminum alloy water cooling disc cooling water channel welding. However, 6061 is an Al-Mg-Si aluminum alloy, and contains Mg and Si elements, so that a low-melting eutectic such as Al-Si or Mg 2 Si is formed at the columnar crystal boundary when the weld metal is crystallized. These