CN-121994108-A - Plasma cleaning height measurement method

Abstract

The invention relates to the technical field of plasma cleaning and discloses a plasma cleaning height measurement method which comprises the following steps of 1, plugging a conical feeler into the space between a nozzle and a product, 2, determining the position of the nozzle at the conical feeler, 3, measuring the vertical distance of the position of the nozzle at the conical feeler by using a ruler, and 4, after the test is completed, recording the height on the ruler. The invention can rapidly measure the height of the Plasma spray head and reduce the disassembly and assembly errors.

Inventors

• TAN JINLONG
• WANG FAN
• WU JIANJUN

Assignees

• 江西芯视佳光电科技有限公司

Dates

Publication Date

20260508

Application Date

20260129

Claims (3)

1. 1. A method for measuring a cleaning height of a plasma, comprising the steps of: step 1, plugging a conical feeler into the middle of a spray head and a product; step 2, determining the position of the spray head at the conical feeler gauge; step 3, measuring the vertical distance of the position of the conical feeler gauge nozzle by using a ruler; And 4, after the test is completed, recording the height on the ruler.
2. 2. The method for measuring the cleaning height of the plasma according to claim 1, wherein the taper of the tapered plug gauge is 1:50, the measuring range is 0.1-10 mm, the precision grade is at least 1 grade, and the taper length is 50-200 mm.
3. 3. The method for measuring the cleaning height of plasma a according to claim 2, wherein after the step4 is completed, data analysis is performed after collecting at least 20 times of measurement data, and whether the stability and the accuracy of measurement meet the requirements is evaluated according to the analysis result.

Description

Plasma cleaning height measurement method Technical Field The invention relates to the technical field of plasma cleaning, in particular to a plasma cleaning height measuring method. Background Plasma cleaning technology, commonly referred to as Plasma surface treatment technology, is a central process step in the production of LCD (liquid crystal display) and OLED (organic light emitting diode) panels. The technology mainly removes organic residues, particulate pollutants and oxides on the surface and between layers of the panel through active particles generated by ionized gas, and simultaneously improves the surface energy, so that the bonding quality of subsequent procedures such as gluing, coating, laminating and the like is ensured, and the yield, reliability and durability of products are ensured. With the development of OLED technology, especially the application of flexible OLED, plasma cleaning technology has become more critical, because the organic light emitting layer of the flexible panel, the flexible substrate is more sensitive to contaminants and surface energy, and needs to withstand repeated physical stresses such as bending, folding, etc., and the stability of interlayer bonding directly depends on the surface state after cleaning. In addition, the fabrication process of OLED panels involves multilayer thin film deposition and encapsulation, and the surface cleanliness of each layer directly affects the light emission performance, encapsulation sealability, and lifetime of the panel. The method for measuring the cleaning height of the surface cleaning (plasma cleaning) of the LCD and OLED panel industry at present mainly comprises the following two steps of (1) measuring a ruler, particularly as shown in figure 1, wherein the measuring mode is limited by a space structure of equipment, interference can be generated between the ruler and a mechanism when the ruler is used for measuring the height vertically, measurement can only be carried out remotely, the height measuring error is large, and (2) Mark is carried out on a spray head, reduction is carried out according to Mark after disassembly and maintenance, and under the measuring mode, the spray head is installed according to Mark after disassembly and maintenance or replacement, and the installation accuracy error is large. Disclosure of Invention Aiming at the defects of the prior art, the invention provides a method for measuring the cleaning height of plasma, which solves the problems of low measuring efficiency and large measuring error of the traditional method for measuring the cleaning height of plasma. In order to achieve the above purpose, the invention is realized by the following technical scheme: a plasma cleaning height measurement method, comprising the steps of: step 1, plugging a conical feeler into the middle of a spray head and a product; step 2, determining the position of the spray head at the conical feeler gauge; step 3, measuring the vertical distance of the position of the conical feeler gauge nozzle by using a ruler; And 4, after the test is completed, recording the height on the ruler. Preferably, the taper of the conical feeler gauge is 1:50, the measuring range is 0.1-10 mm, the precision grade is at least 1 grade, and the taper length is 50-200 mm. Preferably, after the step 4 is completed, data analysis can be performed after at least 20 times of measurement data are collected, and whether the stability and the accuracy of measurement meet the requirements is evaluated according to the analysis result. The invention has the following beneficial effects: According to the Plasma cleaning height measurement method, the plugging position of the conical feeler is directly measured through the ruler in combination with the conical feeler, the heights of the spray head and the product are indirectly measured, the condition that interference exists between the ruler and the spray head mechanism in a traditional measurement mode and measurement errors are large is effectively avoided, meanwhile, after the spray head is detached and maintained, the height measurement of the spray head-product is carried out through the ruler in combination with the conical feeler, the error caused by the traditional installation according to a marking mode is avoided, and the whole method can be used for rapidly and accurately measuring the heights of the Plasma spray head and the product. Drawings FIG. 1 is a schematic illustration of a prior art ruler measurement method for measuring height; FIG. 2 is a schematic diagram showing the maintenance of a conventional mark marking method; FIG. 3 is a schematic diagram of the measurement of the present invention. Detailed Description The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention