CN-121994119-A - Micro-scale capacitance measuring instrument with variable stroke

CN121994119ACN 121994119 ACN121994119 ACN 121994119ACN-121994119-A

Abstract

The invention discloses a variable-stroke microscale capacitive measuring instrument, which relates to the technical field of high-precision optical detection and is used for detecting the relative position between two adjacent lenses in a telescope reflector array, and comprises a target plate, a measuring device and a measuring device, wherein the target plate is used for installing a measured target; the device comprises a base, a sensor carrier, a rooting block, a base, a height adjusting unit, a fastening unit and a lifting unit, wherein the sensor carrier is provided with a sensor element for detecting the position of a detected object, the rooting block is fixedly connected with a lens in an adhesive mode, the base is provided with two base plates and is respectively used for installing the object plate and the sensor carrier, the height adjusting unit is arranged on the base and is configured to be capable of adjusting the relative heights of the program object plate and/or the sensor carrier and the rooting block, the fastening unit is configured to be capable of enabling the object plate or the sensor carrier, the base and the rooting block to be relatively fixed, and the height adjusting unit can flexibly adjust the heights of the object plate or the sensor carrier so as to adapt to the measurable stroke requirements of the sensor element under different scenes, thereby improving the applicability of the device.

Inventors

LIU GUOQIANG
LI WEI
LI MINGXIA
Cao Longxuan
ZHAO GUOFENG
DIAO WEIDONG
CHEN GUANGZHENG

Assignees

安徽见行科技有限公司

Dates

Publication Date: 20260508
Application Date: 20260408

Claims (10)

1. A variable stroke microscale capacitive measuring instrument for detecting the relative position between two adjacent mirrors (1) in a telescope mirror array, characterized by comprising: a target plate (2) provided with a target object to be measured; A sensor carrier (3) provided with a sensor element for detecting the position of a measured object; the two bases (5) are arranged, and the target plate (2) and the sensor carrier (3) can be fixed relative to the two lenses (1) respectively; And the height adjusting unit is arranged on the base (5) and is configured to adjust the relative heights of the program target plate (2) and/or the sensor carrier (3) and the lens (1) in a rotating mode.
2. A variable-stroke microscale capacitive measuring instrument according to claim 1, characterized in that the height-adjusting unit comprises an adjusting plate (7), a third contact (9) and a fourth contact (10), The adjusting plate (7) is arranged between the base (5) and the target plate (2) or the sensor carrier (3) and is attached to the target plate (2) or the sensor carrier (3); The third contacts (9) are arranged to be at least three; the fourth contacts (10) are provided with a plurality of groups, and each group of the fourth contacts (10) comprises a plurality of corresponding third contacts (9); The third contact (9) and the fourth contact (10) are in contact with each other, one of the third contact and the fourth contact is arranged on the base (5), and the other contact is arranged on the adjusting plate (7).
3. A variable-stroke microscale capacitive measuring instrument according to claim 2, characterized in that a plurality of sets of the fourth contacts (10) are arranged in a circumferential array.
4. The variable stroke micro-scale capacitive measuring instrument as claimed in claim 1, wherein the height adjusting unit comprises an adjusting plate (7), a V-shaped groove (11) and a ball (12); The adjusting plate (7) is arranged between the base (5) and the target plate (2) or the sensor carrier (3) and is attached to the target plate (2) or the sensor carrier (3); the balls (12) are arranged in at least three ways; the V-shaped grooves (11) are provided with a plurality of groups, and each group of V-shaped grooves (11) comprises a plurality of corresponding balls (12), wherein the V-shaped grooves (11) are arranged in a circumferential array and have different depths; The ball (12) can be clamped into the V-shaped groove (11), one of the ball and the ball is arranged on the base (5), and the other ball is arranged on the adjusting plate (7).
5. A variable-stroke capacitive measuring instrument as claimed in claim 4 wherein said V-shaped grooves (11) are arranged obliquely.
6. A variable-stroke capacitive measuring instrument as claimed in claim 4 wherein said adjusting plate (7) is rotatably connected to the base (5) and is slidable in a direction perpendicular to the lens (1).
7. The variable-stroke micro-scale capacitive measuring instrument as claimed in claim 2 or 4, wherein the height adjusting unit further comprises at least three first contacts (6), wherein the first contacts (6) are fixed on the top of the adjusting plate (7), and the top ends of the first contacts (6) are abutted with the target plate (2) or the sensor carrier (3).
8. The variable-stroke micro-scale capacitance type measuring instrument according to claim 1 is characterized in that a fastening unit is arranged on the base (5), the fastening unit comprises a rooting block (4), a push rod (13), a pressing plate (14), a screw rod (16) and a nut (17), the rooting block (4) is fixedly connected with the lens (1) in an adhesive mode, the push rod (13) is fixedly arranged on the base (5) and is used for applying horizontal thrust to the target plate (2) or the sensor carrier (3), the target plate (2) or the sensor carrier (3) is tightly attached to the base (5), the pressing plate (14) is arranged above the target plate (2) or the sensor carrier (3), the screw rod (16) is fixed with the rooting block (4), the nut (17) is in threaded connection with the screw rod (16) and is attached to the top surface of the pressing plate (14), and the pressing plate (14) can be applied to the target plate (2) or the sensor carrier (3) downwards by rotating the nut (17).
9. The variable-stroke micro-scale capacitance measuring instrument according to claim 8, wherein an elastic element (15) is arranged between the nut (17) and the pressing plate (14), and the top and bottom surfaces of the elastic element (15) are respectively attached to the nut (17) and the pressing plate (14).
10. A variable-stroke micro-scale capacitive measuring instrument according to claim 8, characterized in that a second contact (8) is fixed on the base (5), and the second contact (8) is arranged opposite to the push rod (13).

Description

Micro-scale capacitance measuring instrument with variable stroke Technical Field The invention relates to the technical field of high-precision optical detection, in particular to a variable-stroke microscale capacitance measuring instrument. Background In the reflection surface system of astronomical telescope, in order to obtain larger luminous flux and higher angular resolution, a reflection array structure formed by splicing a plurality of sub-mirrors is often adopted. The structure requires that each sub-mirror meets certain space position requirements in the assembly and operation process so as to ensure the optical co-phase characteristic of the whole reflecting surface. Therefore, a high-precision displacement sensor needs to be arranged between adjacent sub-mirrors, and the relative position of the sub-mirrors is detected in real time and used as the basis for the correction of a subsequent active optical system. In order to realize high-precision measurement of the relative positions of adjacent lenses, a capacitive displacement sensor with measurement precision, high response speed and non-contact measurement is generally adopted in the prior art. However, the measurement stroke of the high-precision capacitive sensor is generally extremely small, the nano-level position change detection can be adapted only, the telescope mirror array is influenced by various factors such as machining precision, assembly tools, manual operation and the like in the assembly process, the initial installation error between adjacent lenses can reach 2-3mm, the error magnitude is far greater than the effective measurement stroke of the existing high-precision sensor, the high-precision sensor cannot be directly installed, if the sensor is forcedly arranged according to the designed position, the initial installation deviation of the lenses can enable the initial distance between the detection end and the detected end of the sensor to exceed the effective measurement range, the sensor cannot output effective detection signals, even the physical damage of sensor elements is caused due to mechanical interference, and if the initial installation error is adapted, the measurement stroke of the sensor is increased, the measurement precision of the sensor is greatly sacrificed, and the requirement of the telescope mirror array on nano-level position detection cannot be met. Disclosure of Invention The invention aims to provide a variable-stroke micro-scale capacitance measuring instrument so as to solve the problems in the background technology. In order to achieve the purpose, the invention provides a technical scheme that a variable-stroke microscale capacitive measuring instrument is used for detecting the relative position between two adjacent lenses in a telescope reflector array, and comprises the following components: The target plate is used for installing a detected target object; a sensor carrier provided with a sensor element for detecting the position of a measured object; The rooting block is fixedly connected with the lens in an adhesive mode; The base is provided with two bases and is respectively used for installing the target plate and the sensor carrier; The height adjusting unit is arranged on the base and is configured to adjust the relative heights of the program target plate and/or the sensor carrier and the rooting block; and the fastening unit is configured to enable the target plate or the sensor carrier to be relatively fixed with the base and the rooting block. As a further aspect of the present invention, the height adjusting unit includes an adjusting plate, a third contact, and a fourth contact, The adjusting plate is arranged between the base and the target plate or the sensor carrier and is attached to the target plate or the sensor carrier; The third contacts are arranged into at least three; The fourth contacts are provided with a plurality of groups, and each group of the fourth contacts comprises a plurality of groups corresponding to the number of the third contacts; the third contact and the fourth contact are in contact with each other, one of the third contact and the fourth contact is arranged on the base, and the other contact is arranged on the adjusting plate. As a further aspect of the present invention, the fourth contacts are arranged in a circumferential array. As a further aspect of the present invention, the height adjusting unit includes an adjusting plate, a V-groove, and a ball; The adjusting plate is arranged between the base and the target plate or the sensor carrier and is attached to the target plate or the sensor carrier; the balls are arranged into at least three balls; The V-shaped grooves are provided with a plurality of groups, and each group of V-shaped grooves comprises a plurality of corresponding balls, wherein the V-shaped grooves are arranged in a circumferential array and have different depths; The ball can be clamped into the V-shaped groove, one of the b