CN-121994123-A - Interferometer adjustment equipment and adjustment method

CN121994123ACN 121994123 ACN121994123 ACN 121994123ACN-121994123-A

Abstract

The invention discloses an interferometer adjustment device and an adjustment method, wherein the interferometer adjustment device is suitable for adjusting an interferometer of a side-hanging type laser, and comprises an optical axis indication assembly, a laser adjustment mechanism and an optical path turning assembly, wherein the optical axis indication assembly is arranged on a mainboard of the interferometer and is provided with an eccentric reference and an inclined reference, the laser adjustment mechanism is at least provided with an eccentric adjustment degree of freedom and an inclined adjustment degree of freedom so that an output beam of the laser is suitable for the eccentric reference and the inclined reference of the optical axis indication assembly, and the optical path turning assembly is arranged on the interferometer and is matched with the optical axis indication assembly to complete secondary posture adjustment of the laser when the laser is hung on a side plate of the interferometer, so that an optical path of the laser meets the working requirement of the interferometer. The invention can improve the adjustment efficiency and the adjustment precision of the interferometer, and is particularly suitable for interferometer adjustment scenes of large-volume and heavy-weight side-mounted lasers.

Inventors

LIN PING
ZHANG JIAN
MA WENBO
LI XIAOMIN
Tian Guangkun
WANG RUDONG

Assignees

北京启望精密光学科技有限公司

Dates

Publication Date: 20260508
Application Date: 20260213

Claims (10)

1. An interferometer tuning apparatus adapted for tuning an interferometer of a side-hung laser, comprising: The optical axis indicating assembly is configured on the main board of the interferometer and is provided with an eccentric reference and an inclined reference so as to provide reference positioning for the posture adjustment of the laser; The laser adjusting mechanism is provided with at least an eccentric adjusting degree of freedom and an inclined adjusting degree of freedom so as to bear the laser and adjust the posture of the laser, so that the output light beam of the laser is adapted to the eccentric reference and the inclined reference of the optical axis indicating assembly; The optical path turning component is configured on the interferometer, and when the laser is laterally hung on a side plate of the interferometer, the optical path turning component is matched with the optical axis indicating component to finish the secondary posture adjustment of the laser, so that the optical path of the laser meets the working requirement of the interferometer.
2. The interferometer apparatus of claim 1, wherein the optical axis indicating assembly comprises: an eccentric reference member, which is a structural member having a reference channel, to provide a reference for eccentric adjustment of the laser; And the inclination reference piece is a structural piece capable of reflecting laser beams so as to provide a reference for inclination adjustment of the laser.
3. The interferometer apparatus of claim 2, wherein the eccentric reference member comprises: the reference body is provided with a small hole, and the small hole forms the reference channel; and the mounting part is connected with the reference body so as to arrange the reference body on the interferometer motherboard.
4. The interferometer apparatus of claim 2, wherein the tilt reference comprises: A cube mirror forming a structure capable of reflecting the laser beam; and the bearing adjusting part is connected with the cube mirror to bear the cube mirror and adjust the inclined posture of the cube mirror.
5. The interferometer apparatus of any one of claims 2 to 4, wherein the interferometer motherboard is provided with a positioning portion; the eccentric reference piece and the inclined reference piece are both provided with a matching part, and the matching part is matched with the positioning part so as to facilitate repeated positioning of the eccentric reference piece and the inclined reference piece on the mainboard of the interferometer.
6. The interferometer apparatus of claim 5, wherein the eccentric adjustment degrees of freedom comprise positional adjustment degrees of freedom in an X-direction and a Y-direction, the X-direction intersecting perpendicularly with the Y-direction, the tilt adjustment degrees of freedom comprising angular adjustment degrees of freedom about axes corresponding to the X-direction and about axes corresponding to the Y-direction; The laser adjusting mechanism carries the laser and adjusts the posture of the laser through the position adjustment and the angle adjustment, so that the output light beam of the laser is adapted to the eccentric reference and the inclination reference of the optical axis indicating assembly.
7. The interferometer apparatus of claim 5, wherein the optical path deflecting member comprises a plurality of reflecting members, each of which is adjustable in mounting posture to reflect a light beam outputted from a laser that is laterally hung from a side plate of the interferometer; And the posture of each reflecting piece is adjusted, so that the reflected light beam is matched with the eccentric reference and the inclined reference of the optical axis indicating assembly, and the secondary posture adjustment of the laser is completed in a matched mode.
8. A tuning method of an interferometer tuning apparatus according to any one of claims 1-7, comprising the steps of: step one, arranging an optical axis indicating assembly on a main board of an interferometer; Step two, carrying a laser through a laser adjusting mechanism, and adjusting the eccentric posture and the inclined posture of the laser based on the eccentric reference and the inclined reference of the optical axis indicating assembly so as to enable the output light beam of the laser to adapt to the eccentric reference and the inclined reference; Removing the optical axis indicating assembly from the main board of the interferometer, and adjusting other assemblies of the interferometer by taking the output light beam of the adjusted laser as a reference; installing a side plate of the interferometer and laterally hanging the laser on the side plate; and fifthly, configuring an optical path turning component and the optical axis indicating component on the main board of the interferometer, and adjusting the optical path posture of the laser by matching the optical path turning component with the optical axis indicating component to finish the secondary posture adjustment of the laser so that the optical path of the laser meets the working requirement of the interferometer.
9. The tuning method of claim 8, wherein in the second step, the adjusting the eccentric attitude of the laser includes the steps of: Adjusting the eccentric adjustment degree of freedom of the laser adjusting mechanism to enable the light beam output by the laser to pass through the reference channel of the eccentric reference and to be concentric with the reference channel; And adjusting the inclination adjustment degree of freedom of the laser adjusting mechanism to enable the light beam output by the laser to return to the reference channel after being reflected by the inclination reference.
10. The method according to claim 8, wherein in the fifth step, the optical path turning assembly cooperates with the optical axis indicating assembly, and when the secondary posture adjustment of the laser is completed, the light beam output by the laser can pass through the reference channel of the eccentric reference and is concentric with the reference channel after being reflected by the optical path turning assembly, and simultaneously returns to the reference channel after being reflected by the inclined reference.

Description

Interferometer adjustment equipment and adjustment method Technical Field The invention relates to the field of optical adjustment and precise instruments, in particular to an interferometer adjustment device and an adjustment method. Background The interferometer is used as a high-precision measuring instrument and is widely applied to a plurality of industries such as mechanical manufacture, optical processing, aerospace and the like, and the measuring precision of the interferometer is closely related to the quality of the assembly and the tempering of each component of the system. The rationality of the laser as a light source component of the interferometer, its installation and tuning directly affects the overall performance of the interferometer. In the prior art, most of lasers matched with interferometers are of conventional specifications, the weight of the lasers is about 1kg, the volume of the lasers is about 350cm 3, the volume of the lasers is small, and based on the size and weight characteristics, the lasers can be directly integrated and mounted on a mainboard of the interferometer without an additional external supporting structure. In the assembling and adjusting process, a worker can directly position and install the laser on the main board of the interferometer, meanwhile, the worker relies on the installation space of the main board of the interferometer to conveniently complete the integrated assembling and adjusting of other matched components, the assembling and adjusting process is smooth, and the using requirements of the conventional interferometer can be met. With the development of technology, the application requirements of special band interferometers in specific fields are increasing, and in order to achieve laser output in specific bands, the adaptive lasers have significant differences from conventional lasers in structural design and performance parameters. The weight of the special laser is usually more than 20KG, the volume can reach about 1.6X10 4 cm < 3 >, and compared with the conventional laser, the volume and the weight are greatly increased. Because the size of the interferometer mainframe is limited, enough installation space and bearing capacity cannot be provided for directly integrating the large-size and heavy-weight lasers, only an external hanging installation mode can be adopted, namely, the lasers are fixed on the side plates of the interferometer. When the laser is hung on the side plate of the interferometer, in order to balance the weight of the laser and ensure the stability of the whole structure of the interferometer, the problems of inclination, shaking and the like of the interferometer caused by overlarge weight of the laser are avoided, and the interferometer mainboard of the interferometer and the four side plates are assembled to form a complete outer frame structure, and then subsequent component assembling and adjusting work is carried out. However, after the outer frame and the four side plates are assembled, shielding and limiting can be formed on the operation space around the main board of the interferometer, and when a worker carries out integrated adjustment on other components such as a reflector and a focusing lens assembly on the main board of the interferometer, the operation space becomes very narrow, and the installation, positioning and adjustment operations are difficult to smoothly carry out, so that the adjustment efficiency of the whole interferometer system is greatly reduced. Disclosure of Invention In order to solve the problems that the side wall of an interferometer needs to be hung laterally by a large-size and heavy-weight laser, and the side plate needs to be assembled in advance to limit the adjustment space of other components of a main board of the interferometer and reduce the adjustment efficiency, the invention uses the main board of the interferometer as a reference, can firstly complete the external posture adjustment of the laser by an optical axis indicating assembly, then uses an adjusted laser beam as a reference to adjust other assemblies, finally installs the side plate side-hung laser and completes the secondary posture adjustment by a light path turning assembly, thereby realizing the adjustment efficiency of the side-hung laser of the interferometer. Based on this, in a first aspect of the present invention, there is provided an interferometer tuning apparatus adapted for tuning an interferometer of a side-hung laser, comprising: the optical axis indicating assembly is configured on the main board of the interferometer and is provided with an eccentric reference and an inclined reference so as to provide reference positioning for posture adjustment of the laser; the laser adjusting mechanism is at least provided with an eccentric adjusting degree of freedom and an inclined adjusting degree of freedom so as to bear the laser and adjust the posture of the laser, so that the output light beam of the las