CN-121994162-A - Stereoscopic image scanning device

Abstract

A stereoscopic image scanning device comprises a linear scanning optical module, a plane scanning optical module, an image capturing module, a motion platform and a control module. The linear scanning light module is used for projecting linear light to the object to be detected along an incident angle. The plane scanning optical module is used for projecting plane light to the object to be detected along the same incident angle. The image capturing module is used for capturing linear light or plane light reflected by the object to be detected, so as to obtain a first linear image or plane image. The motion platform is used for controlling the relative movement among the object to be detected, the linear scanning optical module, the plane scanning optical module and the image acquisition module so as to scan the object to be detected along a scanning direction.

Inventors

• YU LIANGBIN
• WANG YONGFENG

Assignees

• 鉴微科技股份有限公司

Dates

Publication Date

20260508

Application Date

20241101

Claims (12)

1. 1. A stereoscopic image scanning device, comprising: a linear scanning light module for projecting a linear light onto an object to be measured along an incident angle; a plane scanning light module for projecting a plane light onto the object to be measured along the same incident angle; an image capturing module for capturing the linear light or the plane light reflected by the object to be detected, thereby obtaining a first linear image or a plane image; A motion platform for controlling the relative movement among the object to be detected, the linear scanning optical module, the plane scanning optical module and the image capturing module to scan the object to be detected along a scanning direction, and The control module is coupled with and controls the linear scanning optical module, the plane scanning optical module, the image capturing module and the motion platform.
2. 2. The apparatus of claim 1, wherein the control module obtains a second line image of the overlapping area with the first line image from the planar image, and performs a comparison or a correction according to a variance algorithm to obtain a measurement result.
3. 3. The apparatus of claim 1, wherein the planar image is divided by the first line image into a first area that does not overlap with the first line image, and the control module uses the image of the first area to measure whether the image is overexposed in advance so as to control the brightness of a partial area of the line light emitted by the line scanning light module correspondingly.
4. 4. The stereoscopic image scanning device according to claim 1, wherein the planar image is divided by the first line image into a backward region that does not overlap with the first line image, and the control module verifies a measurement result using the image of the backward region.
5. 5. The apparatus of claim 1, further comprising a stage for carrying the object, wherein the control module calculates a height of the stage according to the planar image, so as to obtain a motion variation caused by the motion platform.
6. 6. The stereoscopic image scanning device according to claim 1, further comprising a light splitting element for combining the linear light and the plane light into the same optical path.
7. 7. The stereoscopic image scanning device according to claim 1, further comprising a light splitting element for separating the reflected linear light and the planar light from the same light path, wherein the image capturing module comprises a first photographing unit and a second photographing unit disposed behind the light splitting element for receiving the reflected linear light and the planar light separated from the same light path, respectively.
8. 8. The stereoscopic image scanning device according to claim 6 or 7, wherein the light splitting element is a bandpass filter.
9. 9. The stereoscopic image scanning device according to claim 6 or 7, wherein the spectroscopic element is a polarizing plate beam splitter.
10. 10. The stereoscopic image scanning device according to claim 6 or 7, wherein the light splitting element is a half mirror.
11. 11. The stereoscopic image scanning device according to claim 1, wherein the linear scanning light module and the planar scanning light module are integrated into a digital micromirror device.
12. 12. The stereoscopic image scanning device according to claim 1, further comprising a bandpass filter for combining the linear light and the planar light into a same optical path, wherein the image capturing module is a color photographing unit, and the reflected linear light and the planar light are separated from the same optical path by using a color filter matrix of the color photographing unit.

Description

Stereoscopic image scanning device Technical Field The present invention relates to a stereoscopic image scanning technology, and more particularly to a stereoscopic image scanning device combining line scanning and surface scanning technologies. Background Automatic optical inspection of product tubes has been performed for many years in various production lines in the electronics industry. In recent years, because of the popularity of automated production concepts such as industrial 4.0 and intelligent analysis of big data, the inspection is performed by sampling inspection, so far, most of the inspection is performed piece by piece. The production line pays attention to production efficiency, so that the detection speed is very required, and the three-dimensional imaging technology actually used by automatic optical inspection (Automated Optical Inspection, AOI) equipment on the production line is mainly a line scanning technology and a surface scanning technology. Both belong to trigonometry (Triangulation) in their main classification. The line scanning technology has a relatively simple structure, can concentrate the energy of the measurement signal in a single line area during implementation, can improve the signal strength, is suitable for surface imaging with high reflectivity and low reflectivity, and is the most common three-dimensional imaging technology. In recent years, as the bandwidth of industrial cameras has been greatly increased and the operation area has been changed, imaging with an industrial camera together with a laser light source has been widely used. One of the characteristics of the line scan is that the measurement result is affected by the error (MECHANICAL RUNOUT) of the matched motion platform, so that the precision and vibration specification of the motion platform are required to be high. In addition, when the dimension of the object to be measured tends to be fine, but the test area is large and concentrated, the line scanning can generally provide the optimal scanning speed, on the other hand, the surface scanning technology is to project the structural light source onto the object to be measured, and calculate the three-dimensional appearance of the object to be measured through the change of the structural light source. The large-area can be measured each time, and the three-dimensional compensation can be performed between each measurement area through the overlapping area, so that the measurement area is relatively not easy to be interfered by the error of the motion platform. In addition, due to the mechanical movement characteristics of the motion platform, the surface scanning technology can achieve the best balance between scanning speed and precision when the test area is locally discrete. On the other hand, consumer electronics have been recently developed to be light, thin and small, and the functions of the device are highly diversified, and the complexity of the product is continuously improved, so that the wiring of the chip is more and more compact and finer, the advanced packaging process of the semiconductor is rapidly developed, and the detection requirement of the semiconductor is greatly increased. Although the bump (bump) is concentrated, two distinct types of concentrated areas and local discrete areas of the test requirement may exist on the carrier due to Fan-out (Fan-out) packaging characteristics. How to achieve the best balance of scanning speed and accuracy becomes a new problem. Disclosure of Invention In view of the above, an embodiment of the invention provides a stereoscopic image scanning device based on the similarity of the triangle method, which includes a linear scanning optical module, a planar scanning optical module, an image capturing module, a motion platform and a control module. The linear scanning light module is used for projecting linear light to the object to be detected along an incident angle. The plane scanning optical module is used for projecting plane light to the object to be detected along the same incident angle. The image capturing module is used for capturing linear light or plane light reflected by the object to be detected, so as to obtain a first linear image or plane image. The motion platform is used for controlling the relative movement among the object to be detected, the linear scanning optical module, the plane scanning optical module and the image acquisition module so as to scan the object to be detected along a scanning direction. According to the stereoscopic image scanning device provided by the embodiment of the invention, the combined light path can combine the advantages of line scanning and surface scanning, and the scanning mode is switched according to the characteristics of an actual object to be detected, so that the optimization of the scanning speed and the scanning precision is achieved. By sharing components and optical paths, cost can be reduced and equipment volume can be further optim