CN-121994165-A - Virtual double-differential-based structural illumination microscope surface morphology reconstruction method and system

CN121994165ACN 121994165 ACN121994165 ACN 121994165ACN-121994165-A

Abstract

The invention belongs to the field of three-dimensional morphology measurement, and particularly discloses a method and a system for reconstructing surface morphology of a structure illumination microscope based on virtual double differential motion, which comprises the steps of carrying out SIM reconstruction and modulation demodulation on a structure light image acquired by scanning to obtain an axial modulation response curve of a full-view-field pixel, virtually moving a scanning position forwards and backwards along a scanning direction by the same axial offset distance respectively to obtain corresponding virtual forward and backward Jiao Diaozhi response curves AMR 1 、AMR 2 , and further approximating a Gaussian function based on AMR 1 and AMR 2 And Constructing a virtual double-differential modulation response curve And z represents the scanning position, when the virtual double differential modulation response curve crosses the zero point, the corresponding scanning position is the height of the sample surface, and the peak position of AMR is corresponding at the moment, so that the reconstruction of the surface morphology of the sample is realized. The invention can realize the rapid high-precision morphology reconstruction of the complex surface.

Inventors

QU TONG
LIU XIAOJUN
ZHANG XUEHONG
ZHOU XIBEI

Assignees

华中科技大学

Dates

Publication Date: 20260508
Application Date: 20260120

Claims (10)

1. The method for reconstructing the surface morphology of the structure illumination microscope based on the virtual double differential motion is characterized by comprising the following steps: Performing SIM reconstruction and modulation demodulation on the scanning-acquired structured light image to obtain an axial modulation response curve of each pixel of the full view field; For a pixel axial modulation response curve AMR, the scanning position is virtually moved forwards and backwards by the same axial offset distance along the scanning direction to obtain virtual front and back imaging planes to obtain corresponding virtual front and back Jiao Diaozhi response curves AMR 1 、AMR 2 , and then based on the approximate Gaussian functions of AMR 1 and AMR 2 And Constructing a virtual double-differential modulation response curve Z represents the scanning position; when the virtual double differential modulation response curve crosses zero, i.e The corresponding scanning position is the surface height of the sample, and the corresponding pixel axial modulation response curve AMR peak position is obtained at the moment; And respectively obtaining peak positions corresponding to the axial modulation response curves of the pixels, thereby realizing the reconstruction of the surface morphology of the sample.
2. The method for reconstructing the surface morphology of a structure illumination microscope based on virtual double differential motion as set forth in claim 1, wherein the zero crossing point position of the virtual double differential modulation response curve is solved by adopting a weighted linear fitting strategy, and is expressed as: Wherein, the A virtual double differential modulation response curve is represented, The weight function is represented by a function of the weight, Representing an ith scan position; Representing a linear fitting interval, and taking the full width half maximum range of an axial modulation response curve AMR as the linear fitting interval; respectively representing the slope and intercept parameters, Representing the slope and intercept parameters of the linear fit respectively, Representing the scan position at the zero crossing of the virtual double differential modulation response curve.
3. The method for reconstructing surface morphology of a virtual double differential-based structured illumination microscope according to claim 2, wherein the weight function Expressed as: Wherein, the Representing the sensitivity parameter.
4. A method for reconstructing surface topography of a virtual double differential based structured illumination microscope as recited in claim 3, wherein said sensitivity parameter is The range of the values is as follows 。
5. The method for reconstructing surface morphology of a virtual double differential based structured illumination microscope according to any one of claims 1-4, wherein the virtual double differential modulation response curve Expressed as: Wherein d represents the axial offset distance, Representing the height of the sample surface, M being a constant, FWHM denotes the full width at half maximum of the axial modulation response curve AMR.
6. The method for reconstructing the surface morphology of the structure illumination microscope based on the virtual double differential motion as set forth in claim 5, wherein the range of values of the axial offset distance is: 。
7. the method for reconstructing a surface topography of a structure illumination microscope based on a virtual double differential motion as recited in claim 6, wherein a calculation formula of the axial offset distance is as follows: wherein d opt denotes the optimum axial offset distance, Representing the normalized spatial frequency of the projected fringes, Indicating the numerical aperture of the objective lens, Indicating the center wavelength of the light source, Representing the refractive index.
8. A virtual double differential based structured illumination microscope surface topography reconstruction system comprising a processor for performing the virtual double differential based structured illumination microscope surface topography reconstruction method according to any one of claims 1-7.
9. A computer readable storage medium, on which a computer program is stored, characterized in that the computer program, when being executed by a processor, implements a virtual double differential based structured illumination microscope surface topography reconstruction method according to any one of claims 1-7.
10. A computer program product comprising a computer program which, when executed by a processor, implements a virtual double differential based structured illumination microscope surface topography reconstruction method as claimed in any one of claims 1 to 7.

Description

Virtual double-differential-based structural illumination microscope surface morphology reconstruction method and system Technical Field The invention belongs to the field of three-dimensional morphology measurement, and particularly relates to a method and a system for reconstructing surface morphology of a structure illumination microscope based on virtual double differential motion. Background The microstructure surface morphology is an important geometric feature of manufactured products and scientific research samples, and has important significance for measuring, analyzing and evaluating the functional quality characteristics of the surface. The structured light illumination microscopic measurement technology (SIM) is based on a wide-field microscopic imaging principle, uses structured light to modulate the measured surface or structure information, removes defocusing signal interference, combines vertical scanning to obtain an optical tomographic image, and then utilizes a peak value positioning algorithm to extract a peak value of a tomographic response curve so as to realize three-dimensional measurement. The method has the characteristics of non-contact, high efficiency and high precision, and can be applied to not only reflecting surfaces, but also morphology measurement of scattering surfaces. For the morphology measurement of complex surfaces in the industrial field, the SIM technology needs to extract Axial Modulation Response (AMR) corresponding to each pixel from a chromatographic image sequence after the chromatographic calculation is completed, and accurately position the peak position of the AMR by using a high-precision peak positioning method so as to reconstruct the surface morphology of a sample. Therefore, the high-efficiency, robust and high-precision peak value positioning method is a key for realizing high-quality surface morphology measurement. Common SIM peak positioning methods include centroid and Gaussian fitting methods according to the difference of peak positioning mechanisms. The centroid method accurately determines peak position by calculating the centroid of AMR, however, for complex surfaces with low reflectivity or local gradient surge and the like, the signal-to-noise ratio of AMR is reduced, and significant peak position errors are easily introduced under the conditions of asymmetric modulation response shape, larger side lobe, multiple peaks and the like. Since AMR of SIMs approximately obeys gaussian functions in the neighborhood of peaks, gaussian fitting is the most widely used method in the field of SIM surface topography. However, due to the limitations of initial parameter estimation precision, iteration convergence calculation overhead and other factors, the peak positioning time of the Gaussian fitting method is too long, and the requirement of rapid measurement is difficult to meet. Disclosure of Invention Aiming at the defects or improvement demands of the prior art, the invention provides a method and a system for reconstructing the surface morphology of a structure illumination microscope based on virtual double differential motion, and aims to realize rapid high-precision morphology reconstruction of a complex surface. In order to achieve the above object, according to a first aspect of the present invention, a method for reconstructing a surface topography of a structure illumination microscope based on virtual double differential is provided, comprising the steps of: Performing SIM reconstruction and modulation demodulation on the scanning-acquired structured light image to obtain an axial modulation response curve of each pixel of the full view field; For a pixel axial modulation response curve AMR, the scanning position is virtually moved forwards and backwards by the same axial offset distance along the scanning direction to obtain virtual front and back imaging planes to obtain corresponding virtual front and back Jiao Diaozhi response curves AMR 1、AMR2, and then based on the approximate Gaussian functions of AMR 1 and AMR 2AndConstructing a virtual double-differential modulation response curveZ represents the scanning position; when the virtual double differential modulation response curve crosses zero, i.e The corresponding scanning position is the surface height of the sample, and the corresponding pixel axial modulation response curve AMR peak position is obtained at the moment; And respectively obtaining peak positions corresponding to the axial modulation response curves of the pixels, thereby realizing the reconstruction of the surface morphology of the sample. As a further preferred option, a weighted linear fitting strategy is used to solve for the zero-crossing position of the virtual double differential modulation response curve, expressed as: Wherein, the A virtual double differential modulation response curve is represented,The weight function is represented by a function of the weight,Representing an ith scan position; Representin