CN-121994293-A - Wireless test method, system, device and program for MEMS sensor

CN121994293ACN 121994293 ACN121994293 ACN 121994293ACN-121994293-A

Abstract

The wireless testing method for the MEMS sensor comprises the steps of preprocessing voltage data by a mobile terminal, calculating the sensitivity of the currently tested sensor, preprocessing the sensor data, determining a voltage reference value, calculating the sensitivity of the sensor, namely, when the sensor is subjected to external excitation in the process of testing the sensitivity of the sensor, changing the output voltage of the sensor, calculating the change quantity of the voltage of the sensor relative to the reference value, calculating the ratio of the change quantity to the reference value to be the sensitivity of the sensor, presetting a maximum threshold value and a minimum threshold value of the sensitivity, if the sensitivity of the sensor is between the minimum threshold value and the maximum threshold value of the sensitivity, the sensitivity of the sensor meets the requirement, and if the sensitivity of the sensor is not between the minimum threshold value and the maximum threshold value of the sensitivity, the sensitivity of the sensor does not meet the requirement, and displaying the sensor sensitivity data meeting the threshold value requirement.

Inventors

LEI ZHENDONG
SHEN BING
HAN KEKE
CHEN YANG

Assignees

东阳市济沛先进材料与器件研究院

Dates

Publication Date: 20260508
Application Date: 20260303

Claims (10)

1. A wireless test method for a MEMS sensor, performed at a mobile terminal, comprising: The mobile terminal preprocesses the voltage data of the sensor received from the MEMS sensor testing equipment, and calculates the sensitivity of the currently tested sensor according to the voltage data of the sensor, and the mobile terminal specifically comprises the following steps: the mobile terminal carries out moving average filtering processing on the voltage data of the sensor received from the MEMS sensor testing equipment; determining a voltage reference value of the sensor; The sensitivity of the sensor is calculated, specifically: in the process of testing the sensitivity of the sensor, when the sensor is excited by the outside, the voltage of the sensor changes, firstly, the change of the current voltage of the sensor relative to the voltage reference value is calculated, and then the ratio of the change to the voltage reference value is calculated to be the sensitivity of the sensor; presetting a maximum threshold and a minimum threshold of sensitivity; Judging that if the sensitivity of the sensor is between a minimum sensitivity threshold and a maximum sensitivity threshold, the sensitivity of the sensor meets the requirement, if the sensitivity of the sensor is not between the minimum sensitivity threshold and the maximum sensitivity threshold, the sensitivity of the sensor does not meet the requirement, the mobile terminal sends out warning information, and the sensor sensitivity value which does not meet the requirement is recorded; The sensor sensitivity meeting the threshold requirement is displayed.
2. The method according to claim 1, wherein the determining the voltage reference value comprises calibrating the voltage reference value by an automatic zero point, namely, reading the voltage value of the sensor to be detected as the voltage reference value when the sensor is in a non-excited static state, or inputting the known voltage reference value through a mobile terminal.
3. The wireless test method for a MEMS sensor according to claim 1, wherein the mobile terminal pre-processes the voltage data of the sensor received from the MEMS sensor test device and calculates the sensitivity of the currently tested sensor from the voltage data of the sensor, comprising the steps of: establishing a wireless data transmission channel between a mobile terminal and the MEMS sensor testing equipment; Setting test parameters for the MEMS sensor test equipment remotely through a mobile terminal, and testing the sensor by the MEMS sensor test equipment according to the test parameters to acquire voltage data of the sensor; a mobile terminal receives voltage data of the sensor from the MEMS sensor testing device.
4. A wireless testing method for a MEMS sensor according to claim 3, wherein the remotely setting, by a mobile terminal, testing parameters for the MEMS sensor testing device, in particular: Setting channel selection parameters for determining to select one or more sensors for testing; setting gain adjustment parameters for adjusting the amplification factor of the sensor signal, and selecting a voltage adjustment gain mode or a resistance adjustment gain mode; and setting a sampling rate parameter for setting the acquisition frequency of the voltage data of the sensor.
5. The wireless testing method for a MEMS sensor according to claim 1, wherein the mobile terminal pre-processes the voltage data of the sensor received from the MEMS sensor testing device and calculates the sensitivity of the currently tested sensor from the voltage data of the sensor, and then comprises the steps of: the method for visually displaying the sensor data specifically comprises the following steps: The multichannel display mode is that real-time data curves of a plurality of sensors can be simultaneously drawn according to the collected voltage data of the plurality of sensors, wherein the real-time data curves take the voltage data of the sensors as ordinate and take the time for reading the voltage data of the sensors as abscissa; the single-channel display mode is used for displaying real-time data of single parameters of a single sensor and is used for realizing real-time monitoring of the single parameters of the sensor.
6. The wireless testing method for a MEMS sensor of claim 5, further comprising generating a test log at the mobile terminal during testing of the sensor after visually displaying the sensor data.
7. The wireless test method for a MEMS sensor of claim 6, wherein during the testing of the sensor, a test log is generated at the mobile terminal, further comprising the steps of: The data management specifically comprises that in the process of testing the sensor by the MEMS sensor testing equipment, a mobile terminal can send a command to the MEMS sensor testing equipment to pause or resume the acquisition and display of the voltage data of the sensor, the mobile terminal can send the command to the MEMS sensor testing equipment to clear the currently displayed historical data curve and restart drawing, and the mobile terminal can send the command to the MEMS sensor testing equipment to export the test data or the graph into a standard format so as to facilitate subsequent analysis.
8. A wireless test system for a MEMS sensor, comprising: the communication module is used for establishing a wireless data transmission channel between the mobile terminal and the MEMS sensor test equipment; The parameter configuration module is used for remotely setting test parameters for the MEMS sensor test equipment through the mobile terminal, and the MEMS sensor test equipment tests the sensor according to the test parameters to acquire voltage data of the sensor; the parameter configuration module comprises a channel selection unit, a gain adjustment unit and a sampling rate setting unit; a channel selection unit for selecting one or more sensors for testing; the gain adjusting unit is used for adjusting the amplification factor of the sensor signal and can select a voltage adjusting gain mode or a resistance adjusting gain mode; The sampling rate setting unit is used for setting the acquisition frequency of the voltage data of the sensor; the data acquisition module is used for receiving the voltage data of the sensor from the MEMS sensor testing equipment by the mobile terminal; The sensor sensitivity calculation module is used for preprocessing the voltage data of the sensor received from the MEMS sensor testing equipment by the mobile terminal and calculating the sensitivity of the currently tested sensor according to the voltage data of the sensor; The data management module is used for sending a command to the MEMS sensor testing equipment to suspend or resume the acquisition and display of sensor voltage data in the process of testing the sensor by the MEMS sensor testing equipment, sending the command to the MEMS sensor testing equipment to clear the currently displayed historical data curve and restart drawing, and sending the command to the MEMS sensor testing equipment to lead out the test data or the chart to be in a standard format so as to facilitate subsequent analysis; The log module is used for generating a test log at the mobile terminal in the process of testing the sensor; The visual display module is used for visually displaying the sensor data through the multi-channel curve graph unit and the single-channel curve graph unit; The real-time data curves of a plurality of sensors can be simultaneously drawn through a multi-channel curve graph unit, wherein the real-time data curves take voltage data of the sensors as ordinate and time for reading the sensor data as abscissa; And displaying real-time numerical values of the single parameters of the sensor, namely real-time data of a certain parameter of the sensor obtained through testing, through the single-channel curve chart unit, wherein the real-time numerical values are used for realizing real-time monitoring of the single parameters of the sensor.
9. Wireless test device for a MEMS sensor, comprising a memory and a processor, the memory storing a computer program, characterized in that the processor, when executing the computer program, implements the wireless test method for a MEMS sensor according to any of claims 1 to 7.
10. A computer program product comprising a computer program, characterized in that the computer program, when executed by a processor, implements the wireless testing method for a MEMS sensor according to any one of claims 1 to 7.

Description

Wireless test method, system, device and program for MEMS sensor Technical Field The invention relates to the technical field of sensors, in particular to a wireless testing method, a wireless testing system, wireless testing equipment and wireless testing program for MEMS (micro-electromechanical systems) sensors. Background The sensor is used as a core element for sensing external physical quantity or chemical quantity, and the performance quality of the sensor directly influences the accuracy of the whole detection system. Among the performance indexes, the sensitivity is defined as the ratio of the output variation of the sensor to the corresponding input variation, and is a decisive parameter for measuring the response capability of the sensor to the measured parameter variation, so the sensitivity of the sensor needs to be measured. The sensitivity test equipment of the existing sensor transmits data through cable connection, and the complex cable connection limits a test scene, and particularly when physical operations such as vibration, inclination and the like are required to be carried out on the sensor, the cable can introduce interference. Disclosure of Invention The invention aims to provide a wireless testing method for an MEMS sensor, and a mobile terminal adopts the wireless testing method for the MEMS sensor to realize wireless testing of the sensor. In one aspect, a wireless test method for a MEMS sensor is provided, performed at a mobile terminal, comprising: The mobile terminal preprocesses the voltage data of the sensor received from the MEMS sensor testing equipment, and calculates the sensitivity of the currently tested sensor according to the voltage data of the sensor, and the mobile terminal specifically comprises the following steps: the mobile terminal carries out moving average filtering processing on the voltage data of the sensor received from the MEMS sensor testing equipment; Determining a voltage reference value; The sensitivity of the sensor is calculated, specifically: in the process of testing the sensitivity of the sensor, when the sensor is excited by the outside, the voltage of the sensor changes, firstly, the change of the current voltage of the sensor relative to the voltage reference value is calculated, and then the ratio of the change to the voltage reference value is calculated to be the sensitivity of the sensor; presetting a maximum threshold and a minimum threshold of sensitivity; Judging that if the sensitivity of the sensor is between a minimum sensitivity threshold and a maximum sensitivity threshold, the sensitivity of the sensor meets the requirement, if the sensitivity of the sensor is not between the minimum sensitivity threshold and the maximum sensitivity threshold, the sensitivity of the sensor does not meet the requirement, the mobile terminal sends out warning information, and the sensitivity of the sensor which does not meet the requirement is recorded; The sensor sensitivity meeting the threshold requirement is displayed. In another aspect, a wireless test system for a MEMS sensor is provided, comprising: the communication module is used for establishing a wireless data transmission channel between the mobile terminal and the MEMS sensor test equipment; The parameter configuration module is used for remotely setting test parameters for the MEMS sensor test equipment through the mobile terminal, and the MEMS sensor test equipment tests the sensor according to the test parameters to acquire voltage data of the sensor; the parameter configuration module comprises a channel selection unit, a gain adjustment unit and a sampling rate setting unit; a channel selection unit for selecting one or more sensors for testing; the gain adjusting unit is used for adjusting the amplification factor of the sensor signal and can select a voltage adjusting gain mode or a resistance adjusting gain mode; The sampling rate setting unit is used for setting the acquisition frequency of the voltage data of the sensor; the data acquisition module is used for receiving the voltage data of the sensor from the MEMS sensor testing equipment by the mobile terminal; The sensor sensitivity calculation module is used for preprocessing the voltage data of the sensor received from the MEMS sensor testing equipment by the mobile terminal and calculating the sensitivity of the currently tested sensor according to the voltage data of the sensor; The data management module is used for sending a command to the MEMS sensor testing equipment to suspend or resume the acquisition and display of sensor voltage data in the process of testing the sensor by the MEMS sensor testing equipment, sending the command to the MEMS sensor testing equipment to clear the currently displayed historical data curve and restart drawing, and sending the command to the MEMS sensor testing equipment to lead out the test data or the chart to be in a standard format so as to facilitate subsequent analysis; The log