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CN-121994306-A - Multi-parameter on-line detection device for dry film photoresist

CN121994306ACN 121994306 ACN121994306 ACN 121994306ACN-121994306-A

Abstract

The invention discloses a dry film photoresist multi-parameter on-line detection device, and belongs to the technical field of photoresist detection. The utility model provides a detection structure dispersion on dry film photoresist production line of its main product, and the probe of detecting instrument needs the problem of manual cleaning, proposes following technical scheme, including support frame and air supporting vibration isolation platform, wherein, air supporting vibration isolation platform is located the top of support frame, the last front and back symmetry of air supporting vibration isolation platform is provided with the detecting element who is used for carrying out multiparameter detection to the material. According to the invention, the two detection units are arranged on the same support frame, so that the integration of multi-parameter detection of the dry film photoresist on the production line is realized, the synchronous detection of the multi-parameter detection can be realized, the equipment cost is reduced, the detection accuracy and the detection efficiency are improved, the detection unit is provided with the corresponding cleaning mechanism, the air flow blowing and wiping cleaning are integrated, and the trouble of manual cleaning is further reduced under the condition of ensuring the accuracy of the detection area.

Inventors

  • JIANG SHUFU
  • CHEN WENZHONG
  • WU YA
  • ZOU JUN
  • SHI MINGMING

Assignees

  • 浙江铭天电子新材料有限公司

Dates

Publication Date
20260508
Application Date
20260312

Claims (10)

  1. 1. The dry film photoresist multi-parameter on-line detection device comprises a support frame (1) and an air floatation vibration isolation platform (2), wherein the air floatation vibration isolation platform (2) is positioned at the top of the support frame (1), and is characterized in that detection units (3) for carrying out multi-parameter detection on materials are symmetrically arranged on the air floatation vibration isolation platform (2), a supporting plate (4) positioned on the support frame (1) is arranged between the two detection units (3), a liquid spraying component (5) for pumping medicaments and a blower main body (6) for blowing are arranged on the supporting plate (4), and the liquid spraying component (5) and the blower main body (6) are connected with the two detection units (3); The detection unit (3) comprises an auxiliary piece (31) arranged on the air floatation vibration isolation platform (2), a shell (32) is arranged on the auxiliary piece (31), a detector main body (33) for detecting materials is arranged in the shell (32), a cleaning mechanism (34) for self-cleaning is arranged at the periphery of the bottom of the shell (32), and a lifting assembly (35) for lifting adjustment is arranged on the cleaning mechanism (34).
  2. 2. The dry film photoresist multi-parameter on-line detection device according to claim 1, wherein the support frame (1) comprises a transverse plate (11) and support legs (12), wherein the support legs (12) comprise two support legs which are respectively arranged at two ends of the bottom of the transverse plate (11), the support legs (12) are fixedly connected with the transverse plate (11) through bolts, the air floatation vibration isolation platform (2) is arranged at the top of the transverse plate (11), side frames for auxiliary limiting are arranged at two sides of the air floatation vibration isolation platform (2), and the side frames are fixedly connected with the transverse plate (11) through bolts; The utility model provides a cleaning mechanism, including baffle (4), spray assembly (5), baffle (4) are on the bottom shell wall of diaphragm (11) through bolt fixed connection, spray assembly (5) are including medical kit (51), water pump main part (52) and catheter, wherein, medical kit (51) all set up in the top of baffle (4) with water pump main part (52), and be connected through the pipe between medical kit (51) and water pump main part (52), the catheter sets up in the discharge end of water pump main part (52), the both ends of catheter are respectively through the hose with corresponding clearance mechanism (34) are connected, blower main part (6) also set up in the top of baffle (4), the air duct is installed to the output of blower main part (6), the both ends of air duct correspond corresponding detecting element (3) respectively, and the both ends of air duct all are provided with two air outlet ports, two air outlet ports are respectively through hose connection corresponding shell (32) and clearance mechanism (34).
  3. 3. The dry film photoresist multi-parameter on-line detection device according to claim 2, wherein the auxiliary piece (31) comprises a supporting arm (311) fixedly connected to the air floatation vibration isolation platform (2) through bolts, a rectangular through groove is formed in the bottom shell wall of the supporting arm (311), L-shaped plates are fixedly connected to two sides of the rectangular through groove through bolts, and an adjusting seat (312) is arranged between the two L-shaped plates through adjusting bolts; The shell (32) comprises a shell (321), an overhaul plate (322), an end plate (323) and a light shield (324), wherein the shell (321) is fixedly connected to the bottom shell wall of the adjusting seat (312) through bolts, an overhaul hole is formed in the outer shell wall of the shell (321), the overhaul plate (322) is fixedly connected to the overhaul hole through bolts, the bottom of the shell (321) is in an opening design, the end plate (323) is fixedly connected with the bottom opening of the shell (321) through bolts and is used as a bottom plate, the light shield (324) is arranged on the bottom shell wall of the end plate (323) through bolts, and an optical filter is arranged on the bottom shell wall of the light shield (324); The utility model discloses a portable electronic device, including casing (321), rectangular channel, casing, gas inlet pipe, air inlet pipe and corresponding hose, detector main part (33) are located the inside of casing (321), and the probe of detector main part (33) passes end plate (323), rectangular channel has been seted up on the inboard shell wall of casing (321), and the integral type all around of rectangular channel is provided with the casing, and the intake pipe is installed to the side of casing.
  4. 4. The dry film photoresist multi-parameter online detection device according to claim 2, wherein the cleaning mechanism (34) comprises a base component (341), an auxiliary plate (342), a wiping component (343) and an air blowing component (344), wherein the base component (341) comprises side bars (3411) which are arranged in a bilateral symmetry manner, a beam (3412) and an electric sliding rail (3413) are connected between the two side bars (3411) through bolts, the beam (3412) is positioned behind the electric sliding rail (3413), and sliding sleeves are arranged on the beam (3412) and the electric sliding rail (3413); The auxiliary plate (342) is fixedly connected to the two side bars (3411) through bolts, the auxiliary plate (342) is located above the electric sliding rail (3413), the wiping component (343) is arranged on the two sliding sleeves, the blowing component (344) is arranged between the cross beam (3412) and the electric sliding rail (3413), and the blowing component (344) is also communicated with corresponding hoses.
  5. 5. The dry film photoresist multi-parameter online detection device according to claim 4, wherein the wiping component (343) comprises a hollow shaft (3431), an outer ring of the hollow shaft (3431) is integrally provided with a carrying cylinder (3432), both sides of the carrying cylinder (3432) are rotationally connected with fixing frames positioned on the hollow shaft (3431) through bearings, the two fixing frames are fixedly connected to corresponding sliding sleeves through bolts respectively, a plurality of grooves for loading wiping cotton slivers are formed in the peripheral wall of the outer ring of the carrying cylinder (3432) along the circumferential direction, a plurality of liquid-permeable holes are transversely and linearly formed in the bottom shell wall of each groove, the liquid-permeable holes are communicated with the inner cavity of the hollow shaft (3431), a collecting shell (3433) for loading wastes is further arranged below the carrying cylinder (3432), and both sides of the collecting shell (3433) are fixedly connected to corresponding fixing frames through bolts respectively; The inner sides of the two fixing frames are respectively provided with a side end piece (3434) for propping up the wiping cotton sliver, the outer sides of the two fixing frames are respectively provided with a friction sleeve and a gear (3435) which are positioned on the hollow shaft (3431), wherein a switching piece (3436) is arranged below the gear (3435), a limiting piece (3437) for limiting and locking is arranged below the friction sleeve, the inner cavity of the hollow shaft (3431) is further provided with a liquid spraying pipe (3438), the top of the peripheral wall of the liquid spraying pipe (3438) is linearly provided with a plurality of liquid outlet holes, the liquid outlet holes are in one-to-one correspondence with corresponding liquid permeation holes, the liquid spraying pipe (3438) is fixedly connected with an auxiliary frame, the auxiliary frame is fixed with corresponding sliding sleeves through bolts, and the outer end of the liquid spraying pipe (3438) is communicated with corresponding hoses.
  6. 6. The dry film photoresist multiparameter online detection device according to claim 5, wherein the side end piece (3434) comprises a side ring (34341), openings are formed above and below the side ring (34341), a filling plate I (34342) is arranged in the opening above, a filling plate II (34343) is arranged in the opening below, electric push rods I (34344) are arranged on the outer walls of the filling plate I (34342) and the filling plate II (34343), the electric push rods I (34344) are connected with corresponding fixing frames, two cylinders are fixedly connected to the outer wall of the side ring (34341), and the other ends of the two cylinders are connected with the corresponding fixing frames through screws respectively; the switching piece (3436) comprises a base plate (34361), an electric push rod II (34362) and a rack (34363), wherein the electric push rod II (34362) is fixedly connected to the top of the base plate (34361), the rack (34363) is arranged at the output end of the electric push rod II (34362) and meshed with the gear (3435), and the base plate (34361) is fixedly connected with the corresponding side bar (3411) through a bolt.
  7. 7. The dry film photoresist multiparameter on-line detecting device according to claim 5, wherein the limiting piece (3437) comprises a fixed plate, a U-shaped plate (34371) and a movable rod (34372), wherein the fixed plate is fixedly connected to a corresponding fixed frame through bolts, the U-shaped plate (34371) is positioned above the fixed plate, the movable rod (34372) is welded at the bottom of the U-shaped plate (34371), the bottom end of the movable rod (34372) penetrates through the fixed plate and is in rolling connection with a ball, the ball is in rolling contact with the auxiliary plate (342), a positioning ring is integrally arranged on the outer ring shell wall of the movable rod (34372), and a reset spring positioned on the movable rod (34372) is sleeved between the positioning ring and the fixed plate.
  8. 8. The dry film photoresist multi-parameter on-line detection device according to claim 7, wherein the blowing assembly (344) comprises a gas jet pipe (3441), an adjusting piece (3442) and two hanging frames, wherein the hanging frames comprise two hanging frames which are arranged on the gas jet pipe (3441) and are fixedly connected to a corresponding cross beam (3412) and an electric sliding rail (3413) through bolts respectively; The regulating part (3442) comprises a sleeve (34421) sleeved on an air inlet port of the air injection pipe (3441), an adjusting rod (34422) is arranged in the sleeve (34421), a sealing plug (34423) is arranged at the bottom end of the adjusting rod (34422), the top end of the adjusting rod (34422) extends to the upper side of the sleeve (34421) and is integrally provided with a contact disc, an extrusion spring positioned on the adjusting rod (34422) is sleeved between the contact disc and the sleeve (34421), and an air inlet pipe used for air inlet is arranged on the peripheral wall of the sleeve (34421) and is communicated with a corresponding hose.
  9. 9. The dry film photoresist multi-parameter online detection device according to claim 4, wherein the lifting assembly (35) comprises a lifting member (351) and an electric push rod III (352), wherein the lifting member (351) comprises base frames (3511) fixedly connected to the left outer wall and the right outer wall of the shell (321) through bolts, each base frame (3511) is movably connected with two round rods (3512), the bottom end of each round rod (3512) is provided with a clamping sleeve, the clamping sleeve is connected with the corresponding (34311), the top ends of the round rods (3512) are jointly provided with an integrated plate (3513), a shielding cover (3514) positioned on the shell (32) is arranged above the wiping assembly (343), and the shielding cover (3514) is used for covering the wiping assembly (343).
  10. 10. The dry film photoresist multi-parameter on-line detection device according to claim 9, wherein the third electric push rod (352) is disposed on the outer wall of the housing (32) and above the lifting member (351), and an output end of the third electric push rod (352) is connected with the integration board (3513).

Description

Multi-parameter on-line detection device for dry film photoresist Technical Field The invention relates to the technical field of photoresist detection, in particular to a dry film photoresist multi-parameter on-line detection device. Background The dry film photoresist is a photoetching material for microelectronic manufacture and Printed Circuit Board (PCB) production, and mainly consists of photosensitive resin, photoinitiator and solvent, and is subjected to chemical reaction under ultraviolet irradiation to form a patterned protective layer, wherein the patterned protective layer is used for the subsequent etching or electroplating process, and parameters such as film thickness, uniformity, surface defects, color and the like directly determine the resolution, etching precision and finished product yield of the photoetching process. The existing dry film photoresist detection mostly adopts an off-line sampling detection mode, parameter measurement is carried out through an SEM, an AFM or a single optical detector, the problems that the detection efficiency is low, the production working condition cannot be fed back in real time, and the multi-parameter detection needs to be replaced for multiple times exist, part of on-line detection devices can only realize single-parameter detection, and a plurality of detection stations are required to be arranged on a production line for multi-parameter detection of photoresist, so that the integration of multi-optical detection principle is not realized, the synchronous detection of a plurality of core parameters cannot be completed on the same detection station, the arrangement cost of detection devices on the production line is increased, the detection efficiency is also reduced, the multi-parameter, high-precision and real-time on-line detection requirements of industrial continuous production are difficult to meet, the quality judgment accuracy of the dry film photoresist is directly influenced by the probe cleanliness of the detection instrument, and the dust removal and cleaning of the instrument probes are required to be carried out regularlyOtherwise, dust or pollutant can cause measurement deviation and false alarm defect, even affect the yield of the whole batch of products, the existing cleaning mode is to purge floating dust through airflow, and for stubborn stains, the manual work is neededThe dust-free cotton swab dips in a small amount of medicament to wipe, which is time-consuming and labor-consuming, and has large manual burden and troublesome operation. Disclosure of Invention In order to overcome the defects in the prior art, the invention provides the dry film photoresist multi-parameter on-line detection device, which is characterized in that two detection units are arranged on the same support frame, so that the multi-parameter detection of the dry film photoresist on a production line is integrated, the multi-parameter synchronous detection can be realized, the configuration of detection stations is reduced, the equipment cost is reduced, the detection accuracy and the detection efficiency are improved, the detection units are provided with corresponding cleaning mechanisms, the air flow blowing and the wiping cleaning are integrated, the manual work is replaced by a machine under the condition of ensuring the accuracy of a detection area, the trouble of manual cleaning is further reduced, and the cleaning efficiency is improved, so that the problems in the background technology are solved. In order to achieve the above purpose, the present invention provides the following technical solutions: The multi-parameter online detection device for the dry film photoresist comprises a support frame and an air-floating vibration isolation platform, wherein the air-floating vibration isolation platform is positioned at the top of the support frame, detection units for carrying out multi-parameter detection on materials are symmetrically arranged on the air-floating vibration isolation platform front and back, a supporting plate positioned on the support frame is arranged between the two detection units, a liquid spraying component for pumping a medicament and a blower main body for blowing are arranged on the supporting plate, and the liquid spraying component and the blower main body are connected with the two detection units; the detection unit comprises an auxiliary piece arranged on the air floatation vibration isolation platform, a shell is arranged on the auxiliary piece, a detector main body for detecting materials is arranged in the shell, a cleaning mechanism for self-cleaning is arranged at the periphery of the bottom of the shell, and a lifting assembly for lifting adjustment is arranged on the cleaning mechanism. As still further scheme of the invention, the supporting frame comprises a transverse plate and supporting legs, wherein the supporting legs comprise two supporting legs which are respectively arranged at two ends of the bottom of