CN-121994400-A - Pressure sensor and pressure interface thereof

Abstract

A pressure sensor and a pressure interface are disclosed. The pressure sensor comprises a pressure interface and a strain gauge, wherein the pressure interface comprises a cylindrical ceramic base and a ceramic diaphragm arranged at one end part of the ceramic base, the strain gauge is connected with the ceramic diaphragm, and the ceramic base and the ceramic diaphragm are integrally manufactured. Because the pressure sensor adopts the ceramic base and the ceramic diaphragm of integral type, consequently do not need to carry out extra equipment and sealed, and do not have the risk of revealing, simultaneously with low costs. Moreover, since the pressure sensor is made of a ceramic material in contact with the pressure medium, the pressure sensor can be applied to corrosive pressure media and the like.

Inventors

• FENG PENGCHENG
• QIU JIANHAI
• Zhao xuetang

Assignees

• 精量电子（深圳）有限公司

Dates

Publication Date

20260508

Application Date

20241104

Claims (12)

1. 1.A pressure sensor, the pressure sensor comprising: A pressure port (10), the pressure port (10) comprising a cylindrical ceramic base (11) and a ceramic diaphragm (12) provided at one end of the ceramic base (11), and A strain gage (20) connected to the ceramic membrane, Wherein the ceramic base (11) and the ceramic membrane (12) are integrally formed.
2. 2. The pressure sensor of claim 1, wherein the strain gauge (20) is attached to the ceramic diaphragm (12) via glass using a glass micro-dissolution process.
3. 3. The pressure sensor of claim 1, wherein the strain gauge (20) is made of a semiconductor material.
4. 4. The pressure sensor according to claim 1, further comprising a cover (30) provided at an end of the pressure port (10) where the ceramic diaphragm (12) is provided.
5. 5. Pressure sensor according to claim 4, wherein the ceramic base (11) is formed with a radially outwardly extending flange (15) at which the cover (30) is glued.
6. 6. The pressure sensor of claim 4, further comprising a circuit board (60) located on the ceramic diaphragm (12), the circuit board (60) being electrically connected to the strain gauge (20) by a bond wire (70).
7. 7. The pressure sensor of claim 6, wherein a cable (40) connected to the circuit board (60) is attached to the circuit board (60) and led out via a via (31) provided in the cover (30).
8. 8. The pressure sensor of claim 4, wherein a groove (14) is formed in a sidewall of the ceramic base (11), and a seal ring (50) is disposed in the groove.
9. 9. Pressure sensor according to claim 4, wherein a groove (14) is formed in the end face of the ceramic base (11) remote from the end of the ceramic membrane (12), in which groove a sealing ring (50) is arranged.
10. 10. The pressure sensor according to any one of claims 1 to 9, wherein the ceramic base (11) has a mounting groove (13) formed thereon, the pressure sensor being mounted to a pressure member to be measured through the mounting groove (13).
11. 11. The pressure sensor according to any one of claims 4 to 9, wherein the cover (30) is formed with a mounting groove (32), and the pressure sensor is mounted to a pressure member to be measured through the mounting groove (32).
12. 12. A pressure interface for a pressure sensor, the pressure interface comprising: A cylindrical ceramic base (11), and A ceramic membrane (12) disposed at an end of the ceramic base; Wherein the ceramic base and the ceramic membrane are integrally formed.

Description

Pressure sensor and pressure interface thereof Technical Field Embodiments of the present disclosure relate to a pressure sensor, and a pressure interface for a pressure sensor. Background The pressure sensor is the most commonly used sensor in industrial application, and is widely applied to industries such as water conservancy and hydropower, railway traffic, intelligent building, petrochemical industry and the like. Current pressure sensors typically include a pressure port and a strain gauge, wherein the strain gauge is attached to the diaphragm of the pressure port after the glass is melted using high temperature glass micro-dissolution techniques. When external pressure acts on the sensor, the diaphragm can generate tiny deformation, and further the resistance value of the strain gauge is changed. However, the conventional diaphragm is generally made of stainless steel materials, and has the disadvantages that (1) the thermal stability of the resistance of the strain gauge is poor due to the large difference of the thermal expansion coefficients of glass and the stainless steel diaphragm, (2) the thickness of the glass is generally within 0.1mm, so that the insulating strength and the dielectric strength between the strain gauge and the stainless steel diaphragm are low, and further the sensor is difficult to pass the ATEX safety enhancement certification, (3) the pretreatment process of the stainless steel diaphragm is complex, including heat treatment, sanding treatment, ultrasonic cleaning and the like, (4) the pressure interface made of stainless steel is generally processed by CNC (computer numerical control), the cost is high, and the bursting pressure and the overpressure are low. Disclosure of Invention The present disclosure is directed to solving at least one of the above-mentioned problems and disadvantages of the prior art. According to one aspect of the present disclosure, there is provided a pressure sensor comprising a pressure interface including a cylindrical ceramic base and a ceramic diaphragm disposed at one end of the ceramic base, and a strain gauge connected to the ceramic diaphragm, wherein the ceramic base and the ceramic diaphragm are integrally formed. According to an exemplary embodiment of the present disclosure, the strain gauge is attached to the ceramic membrane via glass using a glass micro-dissolution process. According to an exemplary embodiment of the present disclosure, the strain gauge is made of a semiconductor material. According to an exemplary embodiment of the present disclosure, a cover provided at one end of the pressure port where the ceramic diaphragm is provided is further included. According to an exemplary embodiment of the present disclosure, the ceramic base is formed with a flange extending radially outward, and the cover is adhered to the flange. According to an exemplary embodiment of the present disclosure, the pressure sensor further includes a circuit board on the ceramic diaphragm, the circuit board being electrically connected to the strain gauge by a bonding wire. According to an exemplary embodiment of the present disclosure, a cable connected to the circuit board is stuck to the circuit board and is led out through a via hole opened in the cover. According to an exemplary embodiment of the present disclosure, a groove is formed on a sidewall of the ceramic base, and a sealing ring is disposed in the groove. According to an exemplary embodiment of the present disclosure, a groove is formed in an end surface of the ceramic base, which is remote from an end of the ceramic membrane, and a sealing ring is disposed in the groove. According to an exemplary embodiment of the present disclosure, the ceramic base is formed with a mounting groove through which the pressure sensor is mounted to the pressure member to be measured. According to an exemplary embodiment of the present disclosure, the cover is formed with a mounting groove through which the pressure sensor is mounted to the pressure member to be measured. According to another aspect of the present disclosure, there is also provided a pressure interface for a pressure sensor, the pressure interface comprising a cylindrical ceramic base, and a ceramic diaphragm disposed at one end of the ceramic base, wherein the ceramic base and the ceramic diaphragm are integrally made. According to the pressure sensor and the pressure interface thereof according to the various embodiments of the present disclosure, since the integrated ceramic base and ceramic diaphragm are adopted, additional assembly and sealing are not required, no leakage risk is generated, and the cost is low. Moreover, since the pressure sensor is made of ceramic material in contact with the pressure medium, the pressure sensor can be applied to corrosive pressure medium, dialysis and the like. In addition, the surface roughness and the cleanliness of the pressure interface after sintering molding can meet the requirements, and sand