CN-121994424-A - High-temperature helium detection device and method for sealing surface of vacuum cavity

Abstract

The invention discloses a high-temperature helium detection device and a helium detection method for a vacuum cavity sealing surface, which comprises a helium detection box body, a jig plate and a heating heat transfer rod, the jig plate is in sealing fit with a to-be-detected sealing surface of the vacuum cavity, the heating heat transfer rod is connected to the jig plate and penetrates through the sealing window to extend into an inner cavity of the vacuum cavity to be electrically connected with the helium detection box body. The high-temperature helium detection device aims at solving the problems that in a traditional high-temperature helium detection device for a sealing surface of a vacuum cavity, a heating rod is arranged outside, so that the heating efficiency is low, and the whole detection time is long. The device can efficiently heat the area near the sealing surface of the vacuum cavity, thereby improving the heating rate and heating efficiency of the vacuum cavity and realizing high-efficiency detection.

Inventors

• CHEN SHILONG
• ZHENG SHENGHUA
• WANG BIN
• LI JIXUAN
• LIU YANGJIE

Assignees

• 浙江先导精密机械有限公司

Dates

Publication Date

20260508

Application Date

20251226

Claims (10)

1. 1. The high-temperature helium detection device for the sealing surface of the vacuum cavity is characterized by comprising a helium detection box body (1), a jig plate (9) and a heating heat transfer rod (2), wherein the jig plate (9) is in sealing fit with the sealing surface to be detected of the vacuum cavity, which is provided with a sealing window, and the heating heat transfer rod (2) is connected to the jig plate (9) and extends into an inner cavity of the vacuum cavity through the sealing window to be electrically connected with the helium detection box body (1).
2. 2. The high-temperature helium detection device for the sealing surface of the vacuum cavity according to claim 1, wherein the heating heat transfer rod (2) comprises a heating rod (5) and a heat transfer rod (6) which are arranged in a nested mode, one end face of the heat transfer rod (6) is attached to the surface of the jig plate (9), the other end face of the heat transfer rod (6) is concave to form a heat transfer groove (7), the heating rod (5) is inserted into the heat transfer groove (7) and transfers heat, and the heat transfer direction is that the heating rod (5) passes through the heat transfer rod (6) and the jig plate (9) to reach the sealing surface of the vacuum cavity.
3. 3. The helium detector for vacuum cavity sealing surface according to claim 2, wherein the heat transfer mode is heat conduction, and the outer surface of the heating rod (5) is at least partially attached to the groove surface of the heat transfer groove (7).
4. 4. The high-temperature helium detection device for the sealing surface of the vacuum cavity according to claim 3, wherein aluminum powder is filled between the heat transfer groove (7) and the heating rod (5), and an annular aluminum powder layer (8) is formed around the heating rod (5) by the aluminum powder.
5. 5. The helium high-temperature detection device for the sealing surface of the vacuum cavity according to claim 2, wherein the heat transfer rod (6) is connected with the jig plate (9) through a fastener, and the heat conduction silicone grease is coated between the heat transfer rod (6) and the jig plate (9) to form a heat conduction silicone grease layer (28).
6. 6. The high-temperature helium detection device for the sealing surface of the vacuum cavity according to claim 2 is characterized in that a first electric conductor (15) is embedded on the heat transfer rod (6), the first electric conductor (15) penetrates through the heat transfer groove (7) and the outside of the heat transfer rod (6), a second electric conductor (16) is embedded on the jig plate (9), and the second electric conductor (16) penetrates through the surface of the jig plate (9) and is provided with an electrode (17) on the outer surface of the jig plate far away from the vacuum cavity.
7. 7. The helium detector for sealing surfaces of vacuum cavities according to claim 6, wherein when the heat transfer rod (6) is installed on the jig plate (9), the first electric conductor (15) is connected with the second electric conductor (16) and is electrically communicated, the heating rod (5) is electrically connected with the first electric conductor (15), two groups of first electric conductors (15) and second electric conductors (16) are arranged, and electrodes (17) of the two groups of second electric conductors (16) are connected with a power supply to form a closed circuit for supplying power to the heating rod.
8. 8. The helium detector for sealing surfaces of vacuum chambers according to any one of claims 1 to 7, wherein a temperature sensor (11) and a controller (12) for detecting the surface temperature of the jig plate are arranged on the side wall of the helium detection box body, and the temperature sensor (11) and the controller (12) are electrically connected with an external receiving end to display temperature signals.
9. 9. The helium detector for sealing surfaces of vacuum cavities according to claim 8, further comprising a wireless module (14), wherein the controller (12) communicates with the receiving end through the wireless module (14), and the wireless module (14) adopts a Bluetooth protocol.
10. 10. A high-temperature helium detection method for a vacuum cavity sealing surface is characterized by adopting the high-temperature helium detection device for the vacuum cavity sealing surface, which is disclosed by any one of claims 1 to 9, and comprises the following steps: S1, placing a helium detection box body in a vacuum cavity; S2, connecting a heating heat transfer rod on the jig plate, penetrating through the sealing window and extending into the inner cavity of the vacuum cavity to be electrically connected with the helium detection box body; S3, communicating the helium detector with the vacuum cavity, vacuumizing through the helium detector and monitoring the vacuum degree; S4, heating the heat transfer rod to transfer heat; S5, injecting helium to key parts of the sealing surface of the cavity to realize high-temperature helium detection of the sealing surface.

Description

High-temperature helium detection device and method for sealing surface of vacuum cavity Technical Field The invention relates to the technical field of vacuum cavity detection, in particular to a high-temperature helium detection device and a helium detection method for a vacuum cavity sealing surface. Background The vacuum cavity is used as a core basic component in the fields of high-end manufacture, semiconductors, aerospace and the like, the operation precision, reliability and service life of the whole equipment are directly determined by the sealing performance of the vacuum cavity, the sealing performance is also a core barrier for guaranteeing the smooth progress of the process under the high-vacuum environment and extreme working conditions, and the high-temperature helium detection technology is a key defense line for guarding the quality of the vacuum cavity. At present, the high-temperature helium detection of the vacuum cavity is carried out by heating the outside of the cavity, monitoring the temperature by a temperature measuring gun, vacuumizing by a helium detector, and monitoring the vacuum degree, and injecting helium gas to key parts such as a sealing surface of the cavity when the vacuum degree and the temperature reach detection set values. And if the vacuum degree is kept stable and no fluctuation occurs, the sealing performance of the cavity reaches the standard, and the cavity is judged to be qualified. However, the external heating mode of the chamber can have a large amount of heat transferred to the environment, so that the heating rate of the vacuum chamber is slow and the heating efficiency is low. The prior art relates to heating functions, for example, chinese patent document CN217444339U discloses a high vacuum bonding machine, wherein heaters are arranged in an upper sample stage and a lower sample stage so as to realize stable and uniform pressure of the bonding machine, the bonding machine has a self-positioning function, the upper sample stage and the lower sample stage can be automatically leveled, the bonding effect is good, and multiple functions are integrated. But is not suitable for high temperature helium inspection of vacuum chambers. Therefore, there is a need to design a high-temperature helium detection device and a helium detection method for a sealing surface of a vacuum cavity, which can efficiently heat a region near the sealing surface of the vacuum cavity, thereby improving the heating rate and heating efficiency of the vacuum cavity and realizing high-efficiency detection. Disclosure of Invention The invention provides a high-temperature helium detection device and a helium detection method for a sealing surface of a vacuum cavity, which can efficiently heat the area near the sealing surface of the vacuum cavity, thereby improving the heating rate and the heating efficiency of the vacuum cavity and realizing high-efficiency detection. The high-temperature helium detection device for the sealing surface of the vacuum cavity comprises a helium detection box body, a jig plate and a heating heat transfer rod, wherein the jig plate is in sealing fit with the sealing surface to be detected of the vacuum cavity, and the heating heat transfer rod is connected to the jig plate and extends into an inner cavity of the vacuum cavity through the sealing window to be electrically connected with the helium detection box body. According to the high-temperature helium detection device for the sealing surface of the vacuum cavity, when the sealing surface of the vacuum cavity is detected in a helium sealing way, the helium detection box body is arranged in the vacuum cavity, then the heating heat transfer rod and the jig plate are fixed and extend into the vacuum cavity from the sealing window to be electrically connected with the helium detection box body, then the jig plate is in sealing connection with the vacuum cavity, the helium detector is communicated with the vacuum cavity, vacuum pumping is carried out through the helium detector, the vacuum degree is monitored, when the vacuum degree and the temperature reach detection set values, the heating heat transfer rod is heated, helium is sprayed to key parts such as the sealing surface of the cavity, and the like, due to the high vacuum in the vacuum cavity, heat convection can be ignored, heat radiation is mainly diffused to the wall surface of the vacuum cavity, and main parts are transferred to the sealing surface of the vacuum cavity with the sealing window and the corresponding jig plate from heat conduction. The high-vacuum environment inside the vacuum cavity is fully utilized, the temperature rise of the jig plate and the sealing surface with the sealing window is accelerated, so that the efficient detection is realized, and the detection effect is good. According to the high-temperature helium detection device for the sealing surface of the vacuum cavity, the heating heat transfer rod generating heat is arr