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CN-121994816-A - Efficient and accurate defect rapid detection method and equipment

CN121994816ACN 121994816 ACN121994816 ACN 121994816ACN-121994816-A

Abstract

The invention relates to the technical field of detection devices and discloses a high-efficiency and accurate defect rapid detection method and equipment, the high-efficiency and accurate defect rapid detection method comprises a main base, wherein the bottom of the main base is fixedly connected with a foot seat, the top of the main base is fixedly connected with an upper shell, the inner wall of the side face of the upper shell is fixedly connected with a display, the side face of the upper shell is provided with a visual window, the inner wall of the side face of the upper shell is provided with a bin door, a conveying device is arranged, a mechanical arm automatically conveys a silicon carbide substrate to the lower part of an image acquisition device, the automation of a workflow is facilitated, the work efficiency is improved, and after the image acquisition is completed, the image acquisition module, the defect feature extraction module, the defect classification module and the report output module are arranged, and finally the image is presented in the display in a report form, so that the automation of the equipment is facilitated, and the work efficiency of the equipment is improved.

Inventors

  • ZHAO LILI

Assignees

  • 哈尔滨科友半导体产业装备与技术研究院有限公司

Dates

Publication Date
20260508
Application Date
20260209

Claims (8)

  1. 1. The high-efficiency accurate defect rapid detection equipment comprises a main base (1) and is characterized in that a foot seat (11) is fixedly connected to the bottom of the main base (1), an upper shell (13) is fixedly connected to the top of the main base (1), a display (12) is fixedly connected to the inner wall of the side face of the upper shell (13), a visual window (14) is formed in the side face of the upper shell (13), a bin door (15) is formed in the inner wall of the side face of the upper shell (13), a conveying device (2) is fixedly connected to the top of the main base (1), the conveying device (2) comprises a first hydraulic rod base (21), a first hydraulic rod (22), a mechanical arm lower rotary table (23), a first mechanical arm (24), a second mechanical arm (25), a third mechanical arm (26) and a supporting claw (27), the bottom of the first hydraulic rod base (21) is fixedly connected with the top of the main base (1), the top of the first hydraulic rod base (21) is fixedly connected with the bottom of the first hydraulic rod (22), the first hydraulic rod (22) is movably connected with the bottom of the first mechanical arm (24) and the first mechanical arm (24) is movably connected with the bottom of the first rotary table (23), the top of the second mechanical arm (25) is movably connected with the bottom of the third mechanical arm (26), the side inner wall of the third mechanical arm (26) is fixedly connected with the side of the supporting claw (27), the top of the main base (1) is fixedly connected with the film box supporting base (3), the top of the film box supporting base (3) is fixedly connected with the film box (31), the top of the main base (1) is fixedly connected with the screw rod device assembly (4), the screw rod device assembly (4) comprises a transverse screw rod transmission device (41), a longitudinal screw rod transmission device (42), a film supporting base (43) and a film supporting rod (44), the bottom of the longitudinal screw rod transmission device (42) is fixedly connected with the top of the main base (1), the top of the longitudinal screw rod transmission device (42) is fixedly connected with the bottom of the transverse screw rod transmission device (41), the top of the film supporting base (43) is fixedly connected with the supporting rod (44), the top of the film supporting base (43) is fixedly connected with the film (5) and the image acquisition assembly (5) comprises the image acquisition device (52), the top of main base (1) and the bottom fixed connection who gathers strutting arrangement (52), the top of gathering strutting arrangement (52) and the bottom fixed connection of collection device (51), the top fixedly connected with treater (6) of collection device (51).
  2. 2. The high-efficiency and accurate defect rapid detection device according to claim 1, wherein the inner wall of the first hydraulic rod (22) is fixedly connected with a first motor (221), the top of the first motor (221) is fixedly connected with a first transmission shaft (222), the top of the first transmission shaft (222) is fixedly connected with a mechanical arm lower rotary table (23), the inner wall of the mechanical arm lower rotary table (23) is fixedly connected with a second motor (231), the top of the second motor (231) is fixedly connected with a second transmission shaft (232), the top of the second transmission shaft (232) is fixedly connected with a first mechanical arm (24), the inner wall of the first mechanical arm (24) is fixedly connected with a third motor (241), the top of the third motor (241) is fixedly connected with a third transmission shaft (242), the top of the third transmission shaft (242) is fixedly connected with a second mechanical arm (25), the inner wall of the second mechanical arm (25) is fixedly connected with a fourth motor (251), the top of the fourth motor (251) is fixedly connected with a fourth transmission shaft (252), and the top of the fourth motor (251) is fixedly connected with a fourth transmission shaft (252).
  3. 3. The device for rapid detection of defects efficiently and accurately according to claim 1, wherein the film cassette (31) comprises a cassette housing (311), a film cassette baffle (312) and a film cassette baffle (313), wherein the bottom of the film cassette baffle (313) is fixedly connected with the top of the film cassette support base (3), the side surface of the cassette housing (311) is movably connected with the side surface of the film cassette baffle (313), and the inner wall of the cassette housing (311) is fixedly connected with the side surface of the film cassette baffle (312).
  4. 4. The high-efficiency and accurate defect rapid detection device according to claim 1, wherein the transverse screw transmission device (41) comprises a fixed slide rod (411), a screw motor (412), a coupler (413), a transmission screw (414) and an upper bottom plate (415), the top of the longitudinal screw transmission device (42) is fixedly connected with the bottom of the fixed slide rod (411), the top of the longitudinal screw transmission device (42) is fixedly connected with the side surface of the screw motor (412), the top of the screw motor (412) is fixedly connected with the top of the coupler (413), the bottom of the coupler (413) is fixedly connected with the top of the transmission screw (414), the side surface of the transmission screw (414) is movably connected with the inner wall of the upper bottom plate (415), and the bottom of the upper bottom plate (415) is movably sleeved with the side surface of the fixed slide rod (411).
  5. 5. The high-efficiency and accurate defect rapid detection device according to claim 1, wherein the collection supporting device (52) comprises a lower slide plate (521), a second hydraulic rod (522), a slide plate (523), a fixing plate (524) and an upper slide plate (525), the bottom of the lower slide plate (521) is fixedly connected with the top of the main base (1), the inner wall of the lower slide plate (521) is fixedly connected with the bottom of the second hydraulic rod (522), a sliding groove is formed in the inner wall of the side face of the lower slide plate (521), the top of the second hydraulic rod (522) is fixedly connected with the inner wall of the upper slide plate (525), the side face of the upper slide plate (525) is fixedly connected with the slide plate (523), the slide plate (523) is movably connected with the sliding groove on the lower slide plate (521), and the top of the upper slide plate (525) is fixedly connected with the bottom of the fixing plate (524).
  6. 6. The high-efficiency and accurate defect rapid detection device according to claim 1, wherein the acquisition device (51) comprises a camera body (511), a camera lens (512), an illuminating lamp (513), an illuminating lamp holder (514), a lamp holder supporting plate (515) and an acquisition device supporting plate (516), one end bottom of the acquisition device supporting plate (516) is fixedly connected with the top of a fixing plate (524), the other end top of the acquisition device supporting plate (516) is fixedly connected with a processor (6), the bottom of the processor (6) is fixedly connected with the camera body (511), the bottom of the camera body (511) is fixedly connected with the top of the camera lens (512), the bottom of the acquisition device supporting plate (516) is fixedly connected with the top of the lamp holder supporting plate (515), the bottom of the lamp holder supporting plate (515) is fixedly connected with the top of the illuminating lamp holder (514), and the inner wall of the illuminating lamp holder (514) is fixedly connected with the illuminating lamp (513).
  7. 7. The high-efficiency and accurate defect rapid detection device according to claim 1, wherein the processor (6) comprises an image acquisition module (61), a defect feature extraction module (62), a defect classification module (63) and a report output module (64), wherein the image acquisition module (61) acquires negative film surface image data through an acquisition device (51), the acquired image data is sent to the defect feature extraction module (62), the defect feature extraction module (62) extracts and pre-processes the image data and sends the image data to the defect classification module (63), the defect classification module (63) identifies and classifies the data, the data is sent to the report output module (64), and the report output module. (64) The received data is collated into a report and output, and the report is sent to a display (12).
  8. 8. A method for high-efficiency and accurate defect rapid detection equipment according to any one of claims 1-7 is characterized by comprising the following steps that a worker puts a silicon carbide substrate into a substrate box (31), the substrate box (31) is fixed on a substrate box supporting base (3), the equipment is started, a second motor (231) drives a first mechanical arm (24) to rotate, a third motor (241) drives a second mechanical arm (25) to rotate, a fourth motor (251) drives a third mechanical arm (26) to move, the third mechanical arm (26) brings a supporting claw (27) to the lower part of the silicon carbide substrate box, a first hydraulic rod (22) drives a device to move upwards, the supporting claw (27) lifts the silicon carbide substrate box, a third device conveys the supporting claw (27) to the upper part of a substrate box (44) under the cooperation of each component, the first hydraulic rod (22) moves downwards, the silicon carbide substrate box (522) is put on a supporting surface of the substrate box (44) to rotate, a fourth motor (251) drives a third mechanical arm (26) to move, the third mechanical arm (26) drives a supporting claw (27) to move upwards, the supporting claw (522) is stretched out of the substrate box (522) under the second hydraulic rod (522) along with the longitudinal direction, the second hydraulic rod (522) is contracted by a transmission device, the second hydraulic rod (522) is contracted to be matched with the second rod (522) to rotate, and then the second rod (522) is contracted to move vertically, and the first rod (522) is contracted to the device is contracted to the position, and step five, the acquisition device (51) completes shooting, under the cooperation of the transverse screw transmission device (41) and the longitudinal screw transmission device (42), the silicon carbide substrate slice uniformly moves under the acquisition device (51) to enable the acquisition device (51) to shoot all required image information, the step six is that the acquisition device (51) sends all shot image information to the image acquisition module (61), after the image acquisition module (61) completes shooting, the received image information is sent to the defect feature extraction module (62), the defect feature extraction module (62) carries out defect feature extraction on the received image information, after the processing is completed, the defect classification module (63) classifies the received information, and after the classification is completed, the received information is sent to the report output module. (64) A report output module (64) for converting the information into a report and sending the report to the display (12), wherein the defect report can be displayed on the display (12).

Description

Efficient and accurate defect rapid detection method and equipment Technical Field The invention relates to the technical field of detection devices, in particular to a high-efficiency and accurate defect rapid detection method and equipment. Background The silicon carbide substrate is a semiconductor substrate made of silicon carbide single crystal material, is a key material for manufacturing semiconductor devices, and has become a basic stone material in the fields of power electronics, radio frequency technology and emerging consumer electronics by virtue of the unique physical and chemical properties of the silicon carbide substrate. Along with technology iteration and cost optimization, the permeability of the technology in the scenes of new energy automobiles, clean energy, AR/VR and the like is continuously improved, and the semiconductor industry is promoted to develop in the high-efficiency and miniaturization directions. The inspection of the surface of the silicon carbide substrate sheet is not only a necessary step for ensuring the quality of materials and improving the performance of devices, but also an important means for reducing the cost, promoting the technical progress, meeting the market demands and ensuring the production safety. The prior art has the defects that the traditional defect detection mode is to observe, identify and classify the surface of the silicon carbide substrate slice by using a microscope by a worker, the identification mode takes a long time, the detection time of one silicon carbide substrate slice needs more than ten hours, the operation identification accuracy of the worker can be affected, and the working efficiency and the accuracy are not high. Disclosure of Invention In order to overcome the defects in the prior art, the invention provides a high-efficiency and accurate rapid defect detection method and equipment, so as to solve the problems in the background art. In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a high-efficient, accurate defect short-term test method and equipment, including the main base, the bottom fixedly connected with foot rest of main base, the top fixedly connected with of main base goes up the casing, the side inner wall fixedly connected with display of going up the casing, go up the side of casing and seted up visual window, the side inner wall of going up the casing has seted up the storehouse body door, the top fixedly connected with conveyor of main base, conveyor includes first hydraulic stem base, first hydraulic stem, mechanical arm lower carousel, first arm, second arm, third arm and supporting jaw, the bottom of first hydraulic stem base and the top fixedly connected of main base, the top of first hydraulic stem base and the bottom fixedly connected of first hydraulic stem, the top of first hydraulic stem and the bottom swing joint of mechanical arm lower carousel, the top of first arm and the bottom swing joint of second arm, the top of second arm and the bottom swing joint of third arm, the bottom of main arm and the bottom of third arm lower carousel, the bottom of transmission device of vertical transmission device, the bottom of transmission device, the top fixedly connected with the bottom of main base, the top fixedly connected with the top of main base, the bottom of transmission device, the top fixedly connected with film supporting seat of horizontal lead screw transmission, the top fixedly connected with film bracing piece of film supporting seat, the top fixedly connected with image acquisition device assembly of main base, image acquisition device assembly includes collection system and gathers strutting arrangement, the top of main base and the bottom fixed connection of gathering strutting arrangement, the top of gathering strutting arrangement and the bottom fixed connection of gathering system, the top fixedly connected with treater of collection system. Further, the inner wall fixedly connected with first motor of first hydraulic stem, the top fixedly connected with first transmission shaft of first motor, the carousel under the top fixedly connected with arm of first transmission shaft, the inner wall fixedly connected with second motor of carousel under the arm, the top fixedly connected with second transmission shaft of second motor, the top fixedly connected with first arm of second transmission shaft, the inner wall fixedly connected with third motor of first arm, the top fixedly connected with third transmission shaft of third motor, the top fixedly connected with second arm of third transmission shaft, the inner wall fixedly connected with fourth motor of second arm, the top fixedly connected with fourth transmission shaft of fourth motor, the top fixedly connected with third arm of fourth transmission shaft. Further, the film box comprises a box shell, a negative film baffle and a film box baffle, the bottom of the