CN-121994996-A - Integrated special gas cylinder detection cabinet

Abstract

The invention discloses an integrated special gas cylinder detection cabinet which is at least integrated with two cabinet bodies, wherein a first cabinet body is provided with a blowing-out steel cylinder, is connected with a main gas pipeline and is provided with a first control panel, the first control panel is used for controlling the discharge and stopping the discharge action of a gas of the blowing-out steel cylinder, a second cabinet body is airtight and is provided with a steel cylinder area to be detected, a pipeline blowing-out switch valve disc area and a gas detector switch valve disc area, the steel cylinder area to be detected is provided with at least one steel cylinder to be detected, the second cabinet body is provided with an exhaust hole, and a special gas detector is arranged in the exhaust hole, so that whether special gas leakage exists in the cabinet body or not is detected in real time, and the special technical effect of preventing possible leakage hazard in a special gas detection process can be achieved.

Inventors

• WU QIMING

Assignees

• 吴棋铭

Dates

Publication Date

20260508

Application Date

20241106

Claims (3)

1. 1. An integrated special gas cylinder detection cabinet, characterized by comprising: A first cabinet provided with a blowing-out steel cylinder and connected with a main gas pipeline and a first control panel for controlling the discharge and stop of a gas in the blowing-out steel cylinder, and The second cabinet is provided with a steel cylinder zone to be detected, a pipeline blowing-out switch valve disc zone and a gas detector switch valve disc zone, the steel cylinder zone to be detected is provided with at least one steel cylinder to be detected, the pipeline blowing-out switch valve disc zone and the gas detector switch valve disc zone are respectively provided with a plurality of manual switch valves, the second cabinet is provided with an exhaust hole connected with a waste gas treatment system, a special gas detector is arranged in the exhaust hole, the second cabinet is also provided with a second control panel, and the second control panel is used for controlling the discharge and stop of a special gas of the steel cylinder to be detected, wherein part of the manual switch valves of the gas detector switch valve disc zone are connected with a gas detector analyzer cabinet; Wherein, the blowing-out steel cylinder, the steel cylinder to be tested, a part of the plurality of manual switching valves of the pipeline blowing-out switching valve disc area and a part of the plurality of manual switching valves of the gas detector switching valve disc area are connected with the main gas pipeline, and another part of the plurality of manual switching valves of the pipeline blowing-out switching valve disc area and another part of the plurality of manual switching valves of the gas detector switching valve disc area are connected with a waste gas discharge pipeline.
2. 2. An integrated special gas cylinder detection cabinet, characterized by comprising: The first cabinet is provided with a blowing-out steel cylinder which is connected with a main gas pipeline and is provided with a first control panel, and the first control panel is used for controlling the discharge and stopping the discharge action of a gas of the blowing-out steel cylinder; A second cabinet provided with a cylinder zone to be tested, at least one cylinder to be tested is arranged in the cylinder zone to be tested, a first exhaust hole connected with an exhaust gas treatment system is arranged in the second cabinet, a special gas detector is arranged in the first exhaust hole, the second cabinet is provided with a second control panel for controlling the discharge and stop of a special gas of the cylinder to be tested, and A third cabinet body provided with a pipeline blowing-off switch valve disc area and a gas detector switch valve disc area, wherein the pipeline blowing-off switch valve disc area and the gas detector switch valve disc area are respectively provided with a plurality of manual switch valves, the third cabinet body is provided with a second exhaust hole connected with the waste gas treatment system, the second exhaust hole is internally provided with the special gas detector, and part of the manual switch valves of the gas detector switch valve disc area are connected with a gas detector analyzer cabinet; Wherein, the blowing-out steel cylinder, the steel cylinder to be tested, a part of the plurality of manual switching valves of the pipeline blowing-out switching valve disc area and a part of the plurality of manual switching valves of the gas detector switching valve disc area are connected with the main gas pipeline, and another part of the plurality of manual switching valves of the pipeline blowing-out switching valve disc area and another part of the plurality of manual switching valves of the gas detector switching valve disc area are connected with a waste gas discharge pipeline.
3. 3. An integrated special gas cylinder detection cabinet, characterized by comprising: the first cabinet is provided with a blowing-out steel cylinder, is connected with a main gas pipeline and is provided with a first control panel, and the first control panel is used for controlling the discharge and stopping the discharge of a gas of the blowing-out steel cylinder; The second cabinet body is airtight and is provided with a steel cylinder region to be tested, the steel cylinder region to be tested is provided with at least one steel cylinder to be tested, the second cabinet body is provided with a first exhaust hole connected with an exhaust gas treatment system, a special gas detector is arranged in the first exhaust hole, the second cabinet body is also provided with a second control panel, and the second control panel is used for controlling the discharge and stop of a special gas of the steel cylinder to be tested; A third tank body which is airtight and is provided with a pipeline blowing-off switch valve disc zone, the pipeline blowing-off switch valve disc zone is provided with a plurality of manual switch valves, the third tank body is provided with a second exhaust hole connected with the exhaust gas treatment system, the second exhaust hole is also provided with the special gas detector, and A fourth cabinet body which is airtight and is provided with a gas detector switch valve disc area, the gas detector switch valve disc area is also provided with a plurality of manual switch valves, the fourth cabinet body is provided with a third exhaust hole connected with the exhaust gas treatment system, the third exhaust hole is internally provided with the special gas detector, wherein part of the manual switch valves of the gas detector switch valve disc area are connected with a gas detector analyzer cabinet; Wherein, the blowing-out steel cylinder, the steel cylinder to be tested, a part of the plurality of manual switching valves of the pipeline blowing-out switching valve disc area and a part of the plurality of manual switching valves of the gas detector switching valve disc area are connected with the main gas pipeline, and another part of the plurality of manual switching valves of the pipeline blowing-out switching valve disc area and another part of the plurality of manual switching valves of the gas detector switching valve disc area are connected with a waste gas discharge pipeline.

Description

Integrated special gas cylinder detection cabinet Technical Field The invention relates to a safety detection system for special gas analysis, in particular to an integrated special gas cylinder detection cabinet. Background The use of special gases has always played an important role in semiconductor processes, such as dry etching, oxidation, ion implantation, thin film deposition. However, the special gases are corrosive, flammable or somewhat toxic, and must be used with care, and the special gases are almost always supplied in a cylinder-loaded form. When in use, the purity of the special gas in the gas steel cylinder cannot be known at all by general visual inspection, wherein the special gas can comprise impurity gas, insufficient purity or the possibility of mixing one or more other special gases when the gas steel cylinder is not thoroughly cleaned, and if the special gas is not inspected, the special gas purity problem can occur when the special gas is directly taken out, so that the whole semiconductor manufacturing process has serious problems (serious losses). Therefore, a purity detection system for a special gas cylinder is developed. In a semiconductor manufacturing plant, a large amount of different special gases are required to be used, and some of the different special gases are corrosive and some of the different special gases are toxic, which are highly harmful to human bodies. Therefore, in the purity detection system of the special gas cylinder, it is necessary to monitor whether the special gas leaks during the detection process, so as to avoid the occurrence of an industrial safety event caused by the harm to the human body. The purity detecting system for special gas steel cylinder has several parts including gas pipeline comprising two parts, one being special gas detecting and blowing pipeline and the other being exhaust pipeline; a blowing-off gas cylinder cabinet, which is loaded with a blowing-off gas cylinder, typically nitrogen; the special gas cylinder cabinet is sealed and provided with an exhaust port connected to the outside (negative pressure is generated by an external air suction system, gas in the special gas cylinder cabinet is fixed to the exhaust port for exhaust), the exhaust port is provided with a special gas detector, once the special gas cylinder cabinet leaks, the special gas detector can detect the leakage, a pipeline blowing-out switch valve disc is used for firstly sucking gas in a pipeline to an exhaust gas treatment system and then controlling the opening of a blowing-out gas cylinder, the special gas detection and blowing-out pipeline cleans residual special gas in the pipeline by using nitrogen, a gas detector switch valve disc is used for controlling the opening of the special gas cylinder and then is conveyed to a gas detection analyzer through a special gas detection pipeline, the gas detection analyzer is generally provided with a plurality of gas detection analyzers for analyzing the content/moisture/purity of the impure substances in the special gas, and the gas detector switch valve disc can be opened and closed by the related switch valves in the front pipeline blowing-out (front blowing-out and back blowing-out), the special gas detection, exhaust gas emission, pipeline blowing-out and the related switch valve after detection, and the like flow of the blowing-out gas is controlled by the front pipeline blowing-out gas cylinder, the special gas cylinder, the pipeline blowing-out gas cylinder, the pipeline control valve disc, the gas detector switch valve disc and the gas detector are all connected in series by the front blowing-out valve and the pipeline detection analyzer The control modes of the above processes include the content of the known technology, such as back blowing), special gas detection, exhaust emission, pipeline blowing after detection, and the like, and are not repeated herein. The above known purity detection system for special gas cylinders integrates a purge gas cylinder cabinet with a special gas cylinder cabinet, which is provided by the same gas supplier, while the valve plate of the pipeline purge switch and the valve plate of the gas detector switch are provided by other switch valve manufacturers. As described above, the special gas cylinder cabinet, which may be compromised by leakage, can be detected by the special gas detector on the existing vent hole and can be discharged to an external exhaust gas treatment system. In other words, special gas cylinder cabinets themselves have been provided with means for hazard control. The valve disc is blown off by the pipeline, and the valve disc is opened and closed by the gas detector, and a plurality of gas switching valves are arranged, so that leakage can be caused in the conditions of poor quality, aging and the like of the gas switching valves. At present, when leakage occurs to a pipeline blowing-out switch valve disc, a gas detector switch valve disc and the like, a