CN-121995181-A - Spark phenomenon recognition processing system based on pulse feature fusion

CN121995181ACN 121995181 ACN121995181 ACN 121995181ACN-121995181-A

Abstract

The invention relates to the technical field of electric parameter monitoring and discloses a spark phenomenon identification processing system based on pulse characteristic fusion, which comprises a signal acquisition unit, a characteristic preprocessing unit, an arbitration processing unit and an output processing unit, wherein the signal acquisition unit is used for acquiring voltage and current signals of a controlled loop, the characteristic preprocessing unit is used for extracting the voltage and current change rate by utilizing a hardware differential circuit, the arbitration processing unit is used for acquiring the change rate product by utilizing a hardware multiplier to generate a correlation signal, and utilizing a high-pass filter circuit to separate the high-frequency burr signal, and when the correlation signal crosses a negative judgment threshold value and the pulse count of the high-frequency burr signal exceeds a random degree threshold value, the spark identification signal is output, and the output processing unit is used for executing loop blocking according to the spark identification signal.

Inventors

DUAN HE
ZHU BIN
YU QINGCHUAN
SUN JILAI

Assignees

苏州潽驱科技有限公司

Dates

Publication Date: 20260508
Application Date: 20260408

Claims (10)

1. A spark phenomenon recognition processing system based on pulse feature fusion, comprising: the signal acquisition unit is used for synchronously acquiring a voltage signal and a current signal of the controlled loop; The characteristic preprocessing unit is connected with the signal acquisition unit and comprises a hardware differential circuit for extracting the change rate of the voltage signal and the change rate of the current signal; The arbitration processing unit is connected with the characteristic preprocessing unit and comprises a hardware multiplier, a high-pass filter circuit, a comparator array and a logic AND gate; the hardware multiplier is configured to multiply a rate of change of the voltage signal with a rate of change of the current signal to generate an associated intensity signal R m , Dv/dt is the rate of change of the voltage signal and di/dt is the rate of change of the current signal; the high-pass filter circuit is connected with the output end of the hardware multiplier and is used for separating a high-frequency burr signal representing discontinuous jump characteristics in the discharging process from the associated intensity signal R m ; The comparator array is used for monitoring whether the negative amplitude of the correlation strength signal R m crosses a preset product judgment threshold value or not and monitoring whether the pulse count value of the high-frequency burr signal in a preset time window exceeds a preset randomness threshold or not; The logic AND gate is connected with the comparator array and is used for outputting a spark identification signal when the correlation strength signal R m crosses a preset product judgment threshold value and the pulse count value exceeds a preset randomness threshold; And the output processing unit is connected with the arbitration processing unit and is used for generating a loop blocking instruction according to the ignition identification signal.
2. The system of claim 1, wherein the arbitration processing unit further comprises a trace analysis module for mapping a rate of change of the voltage signal and a rate of change of the current signal extracted by the hardware differential circuit to a two-dimensional phase plane and calculating an instantaneous curvature of a running trace in the two-dimensional phase plane, and the arbitration processing unit is used for outputting the ignition identification signal when a discontinuous jump pole occurs in the instantaneous curvature and the amplitude of the discontinuous jump pole deviates from a preset controlled switch envelope.
3. The spark phenomenon identification processing system based on pulse feature fusion according to claim 1, wherein the arbitration processing unit is connected with a phase synchronization module for obtaining a modulated carrier phase of the controlled loop, the arbitration processing unit is used for dividing an identification period into a sensitive time window and a shielding time window according to the modulated carrier phase, and the arbitration processing unit maintains initial sensitivity of a preset randomness threshold in the sensitive time window and improves the preset randomness threshold in the shielding time window.
4. The system of claim 1, further comprising a reference calibration module for calculating a fluctuation ratio of the voltage signal to the current signal to update the loop impedance characteristic value when the controlled loop is in a steady-state operation period, and wherein the arbitration processing unit dynamically corrects the preset product determination threshold value according to the loop impedance characteristic value.
5. The system of claim 1, further comprising a waveform verification module coupled to the arbitration processing unit for obtaining a second-order change D r in a slope of a pulse recovery segment of the voltage signal after triggering the spark identification signal, V r is the voltage component of the pulse recovery section, and when the second-order variation D r accords with a preset plasma nonlinear composite model, the arbitration processing unit executes the output action of the ignition identification signal.
6. The system of claim 1, wherein the hardware differential circuit in the feature preprocessing unit comprises an analog differential link constructed by an operational amplifier for maintaining the system identification response delay within 1 μs through real-time slope extraction of the analog signal.
7. The system of claim 1, wherein the comparator array in the arbitration processing unit comprises a plurality of window comparators for respectively performing threshold discrimination on the negative peak amplitude of the correlation intensity signal R m and the pulse density of the high-frequency glitch signal.
8. The system of claim 1 further comprising a wave front feature monitoring module for extracting a wave front edge transition time T S at which the correlation intensity signal R m triggers, wherein the arbitration processing unit masks the fire recognition signal when the wave front edge transition time T S is within a preset inherent switching time interval of the power device.
9. The spark phenomenon recognition processing system based on pulse feature fusion according to claim 1, further comprising a trend analysis module connected with the arbitration processing unit and used for continuously collecting a low-amplitude residual sequence of the correlation intensity signal R m and calculating an energy variance of the low-amplitude residual sequence in a period when the spark recognition signal is not output, and outputting a loop insulation degradation early warning signal when the energy variance shows a nonlinear increase trend.
10. The spark-ignition phenomenon recognition processing system based on pulse feature fusion of claim 1, wherein the output processing unit is connected with a quick-break actuator for opening the power input contact of the controlled loop within 500ns after receiving the loop blocking instruction.

Description

Spark phenomenon recognition processing system based on pulse feature fusion Technical Field The invention belongs to the technical field of electric parameter monitoring, and particularly relates to a spark phenomenon identification processing system based on pulse feature fusion. Background The current power supply loop abnormality monitoring generally collects voltage or current signals in a loop, and judges the running state through a preset amplitude threshold, and the current power supply loop abnormality monitoring is used as a general means for loop safety guarantee, in a process environment such as semiconductor vapor deposition and the like which relates to a high-frequency variable frequency power supply, high-frequency electromagnetic noise is generated by the high-speed switching action of a power device, and loop impedance is in a dynamic evolution state, so that discharge pulses generated by load dielectric breakdown are submerged in normal variable frequency switching noise. The judgment logic based on single variable amplitude faces the contradiction between detection sensitivity and operation stability, if a threshold is lowered to capture weak ignition, transient pulses caused by load cut-off or power grid fluctuation cause false alarm frequently, if the threshold is raised to maintain stability, initial tiny ignition signals are covered up, missed detection risks are generated, accumulated damage of discharge energy to high-precision loads is caused, for example, chinese patent publication number CN107515386B discloses a control protection module for a microwave power module, pulse width and repetition frequency are identified by an FPGA, abnormal induction ignition of a travelling wave tube work ratio is prevented by utilizing a pulse nesting generation technology, the scheme belongs to control instruction compliance macroscopic pre-detection, a monitored object stays in time domain appearance parameters such as pulse width, repetition frequency and the like, and the physical nature of discharge is not touched. Therefore, how to utilize the physical causality relation of loop parameters to realize the instant and accurate identification of the sparking phenomenon under the background of strong noise and high-frequency switch becomes the technical problem to be solved by the invention. Disclosure of Invention The invention provides a spark phenomenon identification processing system based on pulse feature fusion, which comprises the following components: the signal acquisition unit is used for synchronously acquiring a voltage signal and a current signal of the controlled loop; The characteristic preprocessing unit is connected with the signal acquisition unit and comprises a hardware differential circuit for extracting the change rate of the voltage signal and the change rate of the current signal; The arbitration processing unit is connected with the characteristic preprocessing unit and comprises a hardware multiplier, a high-pass filter circuit, a comparator array and a logic AND gate; the hardware multiplier is configured to multiply a rate of change of the voltage signal with a rate of change of the current signal to generate an associated intensity signal R m, Dv/dt is the rate of change of the voltage signal and di/dt is the rate of change of the current signal; the high-pass filter circuit is connected with the output end of the hardware multiplier and is used for separating a high-frequency burr signal representing discontinuous jump characteristics in the discharging process from the associated intensity signal R m; The comparator array is used for monitoring whether the negative amplitude of the correlation strength signal R m crosses a preset product judgment threshold value or not and monitoring whether the pulse count value of the high-frequency burr signal in a preset time window exceeds a preset randomness threshold or not; The logic AND gate is connected with the comparator array and is used for outputting a spark identification signal when the correlation strength signal R m crosses a preset product judgment threshold value and the pulse count value exceeds a preset randomness threshold; And the output processing unit is connected with the arbitration processing unit and is used for generating a loop blocking instruction according to the ignition identification signal. Preferably, the arbitration processing unit further comprises a track analysis module, wherein the track analysis module is used for mapping the change rate of the voltage signal and the change rate of the current signal extracted by the hardware differential circuit to a two-dimensional phase plane and calculating the instantaneous curvature of the running track in the two-dimensional phase plane, and the arbitration processing unit is used for outputting a spark identification signal when the discontinuous jump pole appears in the instantaneous curvature and the amplitude of the discontinuous jump pole