CN-121995551-A - Optical element and method for manufacturing optical element

Abstract

An optical element and a method of manufacturing an optical element are disclosed. An optical element is provided that includes a substrate, and a supersurface formed on the substrate, the supersurface comprising first light transmissible diations and second light transmissible diations, wherein the second diations have a refractive index different from the first diations, the first diations having a material composition identical to a material composition of the substrate.

Inventors

• Junizo Kobayashi
• MORI KENTARO
• Shimano Kanako

Assignees

• 佳能株式会社

Dates

Publication Date

20260508

Application Date

20251107

Priority Date

20241107

Claims (20)

1. 1. An optical element, comprising: A substrate, and A super-surface formed on the substrate, Wherein the super-surface comprises a first super-atom through which light can propagate and a second super-atom through which light can propagate, Wherein the second superatom has a refractive index different from that of the first superatom, and Wherein the first meta-atom has the same material composition as the material composition of the substrate.
2. 2. The optical element of claim 1, wherein the first superatom is formed continuously from the substrate.
3. 3. The optical element of claim 2, wherein the first superatom is a processed form of the substrate.
4. 4. An optical element according to claim 1, Wherein the supersurface comprises a medium through which light can propagate, and Wherein the medium has a refractive index different from the first and second superatoms.
5. 5. The optical element according to claim 4, Wherein the supersurface comprises a void portion, an Wherein the medium is air filling the void portion.
6. 6. The optical element of claim 1, wherein the first and second superatoms each have a pillar structure.
7. 7. The optical element of claim 1, wherein the substrate comprises at least one type of oxide from the group consisting of La, nb, W, ti, K, na and oxides of Li.
8. 8. The optical element according to claim 1, wherein the substrate is a cycloolefin-containing resin or a polyolefin-containing resin.
9. 9. The optical element according to claim 1, wherein the substrate has a transmittance of 60% or more with respect to light having a wavelength of 400nm or more and 800nm or less.
10. 10. The optical element of claim 1, wherein the substrate comprises at least one type of polysilicon, ge, znSe, seS, znS, caF 2 , sapphire, and chalcogenide glass.
11. 11. The optical element of claim 1, wherein the substrate comprises at least one type of fluoride from the group consisting of Al, mg, ca, ba and fluorides of Sr.
12. 12. The optical element of claim 1, wherein the substrate comprises one of an oxide, nitride, or oxynitride of one type of element from Si, al, ti, hf, ta and Nb.
13. 13. An optical element according to claim 1, Wherein the substrate comprises: a first substrate, and A second substrate placed opposite to the first substrate, Wherein the supersurface is formed between the first substrate and the second substrate, Wherein the first superatoms are formed on a surface of the first substrate opposite the second substrate, Wherein the second superatoms are formed on a surface of the second substrate opposite the first substrate, Wherein the first super atom has the same material composition as that of the first substrate, and Wherein the second meta-atom has the same material composition as the material composition of the second substrate.
14. 14. The optical element of claim 13, wherein the first superatom is formed continuously from the first substrate.
15. 15. The optical element of claim 13, wherein the second superatoms are formed continuously from the second substrate.
16. 16. An optical component according to claim 13, Wherein the supersurface comprises third superatoms formed on a surface of one of the first substrate or the second substrate, and Wherein the third diatomic has a material composition that is different from the material composition of the first and second substrates.
17. 17. An optical component according to claim 13, Wherein the first supersurface comprises a low refractive index medium through which light can propagate, an Wherein the low refractive index medium has a lower refractive index relative to light than the first and second superatoms.
18. 18. The optical element of claim 13, wherein at least one of the first substrate and the second substrate has a functional film on a surface on an opposite side from the supersurface.
19. 19. An optical element comprising a supersurface is provided, Wherein the supersurface comprises a solid medium through which light can propagate, Wherein the solid medium comprises at least a first diatomic, a second diatomic and a third diatomic, Wherein the refractive indices of the first, second and third superatoms are different from each other, and Wherein the first meta-atom comprises one of silicon oxide or metal oxide, or is a plastic resin.
20. 20. The optical element of claim 19, wherein the first superatom comprises at least one type of oxide among Si, la, nb, W, ti, K, na and oxides of Li, or is one of a cycloolefin-containing resin or a polyolefin-containing resin.

Description

Optical element and method for manufacturing optical element Technical Field The present disclosure relates to optical elements and methods of manufacturing optical elements. Background Various devices such as a mirror-less camera, a smart phone, a microscope, and a semiconductor exposure device have an optical system for condensing desired light. These optical systems use various lenses. Optical systems using these lenses have optical designs using a plurality of lenses to achieve highly accurate light convergence with various aberrations corrected. In recent years, there has been an increasing demand for miniaturization of the size of mirror-less cameras, smart phones, and other such devices. However, in the existing optical system using a lens that condenses light through refraction of light by a curved surface shape and a refractive index of a medium, there is a limit in downsizing of the optical system, and therefore, highly accurate light condensing that corrects various aberrations has a trade-off relationship with miniaturization of the optical system. Japanese patent laid-open No. 2021-71727 solves this problem and teaches that by adopting an optical system configuration in which a refractive lens is combined with an optical element having a super surface, thickness reduction of the optical system and resolution of aberration problems are achieved. However, the optical element having the super surface in the prior art has a low degree of freedom in designing the super surface. There is a wide range of demands for optical elements having a super surface, and thus there is a need to improve the degree of freedom in designing the super surface. Disclosure of Invention Accordingly, the present disclosure is directed to an optical element and a method of manufacturing an optical element that can improve the degree of freedom in designing a supersurface. According to one aspect of the present disclosure, there is provided an optical element comprising a substrate, and a supersurface formed on the substrate, wherein the supersurface comprises first diations through which light can propagate and second diations through which light can propagate, wherein the refractive index of the second diations is different from that of the first diations, and wherein the first diations have the same material composition as that of the substrate. According to another aspect of the present disclosure, there is provided a method of manufacturing an optical element including forming a first super-atom on a surface of a substrate by treating the surface, and forming a second super-atom having a refractive index different from that of the first super-atom on the substrate on which the first super-atom is formed. According to still another aspect of the present invention, there is provided an optical element including a super surface including a solid medium through which light can propagate, the solid medium including at least first, second and third super atoms, refractive indices of the first, second and third super atoms being different from each other, the first super atom including one of silicon oxide or metal oxide, or being a plastic resin. According to still another aspect of the present invention, there is provided a method of manufacturing an optical element including forming a first superatom on a surface of a substrate by treating the surface, forming a second superatom having a refractive index different from that of the first superatom on the surface on which the first superatom is formed, and forming a third superatom having a refractive index different from that of the first and second superatoms on the surface on which the first and second superatoms are formed. Features of the present disclosure will become apparent from the following description of embodiments with reference to the accompanying drawings. The following description of the embodiments will be described by way of example. Drawings Fig. 1A is a perspective view for illustrating an optical element according to a first embodiment of the present disclosure. Fig. 1B is a sectional view for illustrating an optical element according to a first embodiment of the present disclosure. Fig. 2 is a flowchart for illustrating steps of a method of manufacturing an optical element according to a first embodiment of the present disclosure. Fig. 3A is a sectional view for illustrating steps of a method of manufacturing an optical element according to a first embodiment of the present disclosure. Fig. 3B is a sectional view for illustrating steps of a method of manufacturing an optical element according to a first embodiment of the present disclosure. Fig. 3C is a sectional view for illustrating steps of a method of manufacturing an optical element according to a first embodiment of the present disclosure. Fig. 3D is a sectional view for illustrating steps of a method of manufacturing an optical element according to a first embodiment of the present disclosure.