CN-121995592-A - Hollow two-dimensional piezoelectric flexible hinge platform

CN121995592ACN 121995592 ACN121995592 ACN 121995592ACN-121995592-A

Abstract

The invention discloses a hollow two-dimensional piezoelectric flexible hinge platform, which comprises a flexible hinge main body, a working platform, a displacement amplifying mechanism, a flexible hinge connecting rod and a cover plate component, wherein the working platform, the displacement amplifying mechanism, the flexible hinge connecting rod and the cover plate component are positioned in the central area of the flexible hinge main body, the flexible hinge main body is in a hollow frame type structure, a through hole for light beam through is formed in the center of the flexible hinge main body, two groups of displacement amplifying mechanisms are arranged, the two groups of displacement amplifying mechanisms respectively correspond to X-direction and Y-direction movements of the platform, each group of displacement amplifying mechanisms comprises a first lever amplifying mechanism and a second lever amplifying mechanism which are symmetrically arranged on two opposite sides of the flexible hinge main body, and piezoelectric actuators are connected to the first lever amplifying mechanism and the second lever amplifying mechanism. The invention relates to the technical field of mechanical precision displacement driving, and the platform has a highly compact integrated structure, excellent motion decoupling performance, a high-precision differential driving mode and good bearing capacity while ensuring a central clear aperture.

Inventors

LIU GUIXIAN
YANG HUIXIAN
Cao Meicheng
XIE KAI
GAO HAIMIN

Assignees

广东工业大学
研精覃思(东莞)精密机械科技有限公司

Dates

Publication Date: 20260508
Application Date: 20260210

Claims (9)

1. A hollow two-dimensional piezoelectric flexible hinge platform is characterized by comprising a flexible hinge main body, a working platform, displacement amplifying mechanisms, each group of the displacement amplifying mechanisms comprises two lever amplifying mechanisms symmetrically arranged on two opposite sides of the flexible hinge main body and used for realizing motion decoupling of the dimension, a flexible hinge connecting rod (4) used for connecting the displacement amplifying mechanisms and the working platform, a cover plate assembly used for packaging and protecting the platform, and each group of the displacement amplifying mechanisms comprises two lever amplifying mechanisms symmetrically arranged on two opposite sides of the flexible hinge main body, and each lever amplifying mechanism is connected with a piezoelectric actuator.
2. The hollow two-dimensional piezoelectric flexible hinge platform of claim 1, wherein the lever amplification mechanism comprises a first lever amplification mechanism (3) and a second lever amplification mechanism (7), the first lever amplification mechanism (3) and the second lever amplification mechanism (7) are respectively provided with a pressure spring pre-tightening mechanism for applying axial pre-tightening force to the piezoelectric actuator, and the pressure spring pre-tightening mechanism of at least one lever amplification mechanism is installed and adjusted through a pre-tightening pressing block (8).
3. A hollow two-dimensional piezoelectric flexible hinge platform according to claim 1, wherein the two symmetrically arranged lever amplifying mechanisms in the same motion direction form a differential driving mode, and parasitic displacement caused by lever rotation is mutually offset when the parasitic displacement is output to the working platform.
4. A hollow two-dimensional piezoelectric flexible hinge platform according to claim 1, wherein the flexible hinge connecting rod (4) is provided with a flexible hinge structure as a secondary decoupling mechanism for further counteracting displacement components from non-moving directions.
5. A hollow two-dimensional piezoelectric flexible hinge platform as claimed in claim 4, wherein the flexible hinge structure is a circular, elliptical or beam-type flexible hinge.
6. A hollow two-dimensional piezoelectric flexible hinge platform according to claim 1, wherein the flexible hinge connecting rod (4) is fastened to the working platform by screw plug pressing.
7. A hollow two-dimensional piezoelectric flexible hinge platform according to claim 1, wherein the cover plate assembly comprises an upper cover plate (1), a lower cover plate (6) and a plurality of side wall cover plates (5), wherein at least one side wall cover plate (5) is a wire outlet side wall cover plate (2) provided with a wire leading hole for leading out a wire of a piezoelectric actuator.
8. The two-dimensional piezoelectric flexible hinge platform according to claim 1, wherein the flexible hinge body is an integrally formed structure.
9. A hollow two-dimensional piezoelectric flexible hinge platform as claimed in claim 1, wherein said piezoelectric actuator is a piezoelectric ceramic stack.

Description

Hollow two-dimensional piezoelectric flexible hinge platform Technical Field The invention relates to the technical field of mechanical precision displacement driving, in particular to a hollow two-dimensional piezoelectric flexible hinge platform for precision optical adjustment, laser processing, microscopic imaging and optical communication. Background In the fields of precise optical adjustment, laser processing, microscopic imaging and optical communication, the requirement for a two-dimensional precise motion platform with a central clear aperture is increasingly urgent, and the hollow two-dimensional piezoelectric flexible hinge platform can provide a non-shielding straight-through path for a light beam or a probe while realizing X, Y two-dimensional nanoscale positioning, so that the blocking of the traditional solid platform to a light path is avoided, and the hollow two-dimensional piezoelectric flexible hinge platform becomes a core component in a light path integrated system. However, when the existing hollow two-dimensional piezoelectric flexible hinge platform pursues a large clear aperture and high performance index, a series of mutually restricted technical problems are often faced, and the main appearance is that: 1. In order to obtain a large clear aperture, the traditional design tends to simply enlarge the overall size of the platform, or adopt two one-dimensional platforms stacked in series, so that the system has the disadvantages of bulky structure, large volume and reduced natural frequency, and is difficult to integrate in precision equipment with limited space. 2. Motion coupling and precision loss, namely, the two-dimensional motion of a plurality of platforms is easy to generate obvious parasitic motion coupling (namely, the X-direction motion is accompanied by unnecessary Y-direction output and vice versa) through the flexibilities Liang Shixian in different directions by the same flexible hinge base body, and the coupling error severely restricts the positioning precision and track tracking accuracy of the platforms. 3. The limitations of the driving and amplifying mechanism are that in the common design, each dimension of motion is usually driven by only a single piezoelectric actuator matched with a single displacement amplifying mechanism, the asymmetric driving mode is easy to cause inconsistent displacement at two sides of an output end, unnecessary deflection moment is generated, the motion linearity is reduced, the effective load capacity is weakened, and in addition, the inherent contradiction exists between the amplification factor, the rigidity and the stroke of the single amplifying mechanism, and the balance is difficult to realize. 4. The bearing and rigidity are insufficient, the central opening inevitably weakens the integral rigidity of the structure, and the traditional symmetry is insufficient or the amplifying mechanism is designed to be thin, so that the anti-interference capability is poor when the platform bears eccentric load or works dynamically, the bearing capability is limited, and the stability and the application range of the platform are affected. Accordingly, improvements are needed to address the above-described problems. Disclosure of Invention Aiming at the situation, in order to overcome the current technical defects, the invention provides the hollow two-dimensional piezoelectric flexible hinge platform which has a highly compact integrated structure, excellent motion decoupling performance, a high-precision differential driving mode and good bearing capacity while ensuring the central clear aperture. The hollow two-dimensional piezoelectric flexible hinge platform comprises a flexible hinge main body, a working platform, a displacement amplifying mechanism, a flexible hinge connecting rod and a cover plate component, wherein the working platform, the displacement amplifying mechanism, the flexible hinge connecting rod and the cover plate component are arranged in the central area of the flexible hinge main body, the flexible hinge main body is in a hollow frame type structure, through holes for light beam through are formed in the center of the flexible hinge main body, the displacement amplifying mechanisms are provided with two groups, the two groups of displacement amplifying mechanisms respectively correspond to X-direction and Y-direction movements of the platform, each group of displacement amplifying mechanisms comprises a first lever amplifying mechanism and a second lever amplifying mechanism which are symmetrically arranged on two opposite sides of the flexible hinge main body, piezoelectric actuators are connected to the first lever amplifying mechanism and the second lever amplifying mechanism, one end of the flexible hinge connecting rod is fixedly connected with the output ends of the first lever amplifying mechanism and the second lever amplifying mechanism, the other end of the flexible hinge connecting rod is connected with