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CN-121995713-A - Developing device and developing method

CN121995713ACN 121995713 ACN121995713 ACN 121995713ACN-121995713-A

Abstract

The application provides a developing device and a developing method. The developing device comprises a carrying platform, developing arms and a plurality of groups of spraying components, wherein the developing arms are arranged above the carrying platform in a hanging mode, each spraying component comprises a plurality of nozzles with the same number, each nozzle is connected to the developing arm and communicated with a developing solution supply source, the liquid outlet ends of the nozzles face the carrying platform, the developing arms are configured to drive the nozzles to move along a preset direction relative to the carrying platform, the nozzles of any two groups of spraying components are alternately arranged along the extending direction of the developing arms, the liquid outlet ends of the nozzles of the same group of spraying components are arranged in a row along the extending direction of the developing arms, the liquid outlet ends of the nozzles of different groups of spraying components are located at different positions along a first direction, and the first direction is perpendicular to the extending direction of the developing arms and the height direction of the developing device. The developing device and the developing method can reduce the consumption of the developing solution and the cost of the developing process.

Inventors

  • MIAO JUNYAN

Assignees

  • 浙江芯道半导体科技有限公司

Dates

Publication Date
20260508
Application Date
20260319

Claims (10)

  1. 1. A developing device, characterized by comprising: Stage (10) The developing device comprises developing arms (20) and a plurality of groups of spraying assemblies (30), wherein the developing arms (20) are arranged above the carrying platform (10) in a suspending manner, each spraying assembly (30) comprises a plurality of nozzles (31) with the same number, each nozzle (31) is connected to the developing arms (20) and communicated with a developing solution supply source (60), a liquid outlet end (32) of each nozzle (31) faces the carrying platform (10), and the developing arms (20) are configured to drive the nozzles (31) to move along a preset direction (Y) relative to the carrying platform (10); The nozzles (31) of any two groups of spraying assemblies (30) are alternately arranged along the extending direction (S) of the developing arm, the liquid outlet ends (32) of the nozzles (31) of the same group of spraying assemblies (30) are arranged in a row along the extending direction (S) of the developing arm, the liquid outlet ends (32) of the nozzles (31) of different groups of spraying assemblies (30) are positioned at different positions along a first direction (F), and the first direction (F) is perpendicular to the extending direction (S) of the developing arm and the height direction (T) of the developing device.
  2. 2. A developing device according to claim 1, wherein said nozzles (31) include mounting portions (310), said mounting portions (310) being connected to said developing arm (20), said mounting portions (310) of each of said nozzles (31) being arranged in a row in an extending direction (S) of said developing arm; at least part of the structure of the nozzle (31) extends away from the mounting portion (310) so that the liquid outlet end (32) of the nozzle (31) is offset relative to the corresponding mounting portion (310) along the first direction (F).
  3. 3. A developing device according to claim 2, wherein the nozzles (31) are configured in an elongated configuration, the center line (O) of each nozzle being perpendicular to the direction of extension (S) of the developing arm, the orthographic projections of the center line (O) of each nozzle of the same spray assembly (30) in a first plane (Z1) coincide with each other, the orthographic projections of the center lines (O) of the nozzles of different spray assemblies (30) in the first plane (Z1) having an angle, the first plane (Z1) being perpendicular to the direction of extension (S) of the developing arm.
  4. 4. A developing device according to claim 3, wherein the number of said spraying members (30) is two; the included angle is in the range of 0-120 degrees.
  5. 5. A developing device according to claim 3, wherein the number of said spraying members (30) is two; The distance d between the orthographic projections of the liquid outlet ends (32) of the nozzles (31) of the two groups of spraying assemblies (30) in the first plane (Z1) is more than or equal to 1cm and less than or equal to 3cm.
  6. 6. A developing device according to claim 2, wherein said nozzle (31) comprises a first nozzle section (311) and a second nozzle section (312) connected to each other; The end of the first nozzle section (311) facing away from the second nozzle section (312) forms the mounting part (310), and the end of the second nozzle section (312) facing away from the first nozzle section (311) forms the liquid outlet end (32); The first nozzle section (311) extends in a height direction (T) of the developing device, the second nozzle section (312) protrudes in a direction away from the first nozzle section (311), and the second nozzle section (312) is disposed obliquely with respect to the first nozzle section (311).
  7. 7. A developing device according to any one of claims 1-6, wherein the liquid outlet end (32) of the nozzle (31) is provided with an atomizing portion (33), the atomizing portion (33) being configured to atomize the developer liquid sprayed from the liquid outlet end (32).
  8. 8. A developing device according to any one of claims 1-6, wherein the liquid outlet end (32) of the nozzle (31) has a liquid outlet (320); the liquid outlet (320) is configured to spray the developer in a cone shape, and the size of the liquid outlet (320) is adjustable, and/or The developing arm (20) is provided with a matching part which is detachably connected with the nozzle (31) so as to replace the nozzles (31) with different liquid outlet sizes.
  9. 9. Developing device according to any one of claims 1 to 6, further comprising a transfer conduit (50), said transfer conduit (50) being connected to a developing solution supply source (60); Each nozzle (31) is connected with the same transmission pipeline (50), or each nozzle (31) is respectively connected with different transmission pipelines (50) in a one-to-one correspondence manner.
  10. 10. A developing method, characterized by comprising: Controlling a developing arm (20) to drive at least two groups of spraying assemblies (30) to move above a carrying platform (10) along a preset direction (Y), so that nozzles (31) of each spraying assembly (30) spray developing liquid to wafers (40) carried on the carrying platform (10), wherein the number of the nozzles (31) included in each spraying assembly (30) is the same, the nozzles (31) of any two groups of spraying assemblies (30) are alternately arranged along the extending direction (S) of the developing arm, liquid outlet ends (32) of the nozzles (31) of the same group of spraying assemblies (30) are arranged into one row along the extending direction (S) of the developing arm, and liquid outlet ends (32) of the nozzles (31) of different groups of spraying assemblies (30) are positioned at different positions along a first direction (F), wherein the first direction (F) is perpendicular to the extending direction (S) of the developing arm and the height direction (T) of the developing device; And controlling the carrying platform (10) to drive the wafer (40) to rotate by a preset angle.

Description

Developing device and developing method Technical Field The application relates to the technical field of semiconductors, in particular to a developing device and a developing method. Background In the process of manufacturing semiconductor devices, the photolithography process is a core process for realizing wafer patterning and further preparing various semiconductor structures. In the photoetching process, a developing device is required to carry out developing treatment on the wafer subjected to photoresist uniformization exposure, so that photoresist in an unnecessary coverage area is dissolved and removed by a developing solution, and the subsequent process is convenient for carrying out area-selective treatment on the surface of the wafer. In the developing device of the related art, a nozzle spray method is used to coat the developing solution on the wafer to be developed. Specifically, the developing device of the related art generally includes a stage for carrying a wafer to be developed, and a movable developing arm on which a plurality of nozzles are provided. When the developing process is carried out, the wafer to be developed is fixed on the carrier, the developing arm drives each nozzle to sweep the whole wafer surface along a preset track, and the nozzles continuously spray the developing solution, so that the developing solution covers the wafer surface, and the developing reaction is completed. However, in the developing device of the related art, there is a problem in that the consumption amount of the developing solution is large, which also results in high cost of the developing process. Disclosure of Invention The embodiment of the application provides a developing device and a developing method, which can reduce the consumption of developing solution and the cost of a developing process. An embodiment of the present application provides a developing device including: Stage and The developing arm is arranged above the carrying platform in a suspending way, and each spraying assembly comprises a plurality of nozzles with the same quantity; each nozzle is connected to the developing arm and communicated with a developing solution supply source, the liquid outlet end of each nozzle faces the carrier, and the developing arm is configured to drive the nozzles to move along a preset direction relative to the carrier; The nozzles of any two groups of spraying assemblies are alternately arranged along the extending direction of the developing arm, the liquid outlet ends of the nozzles of the same group of spraying assemblies are arranged in a row along the extending direction of the developing arm, and the liquid outlet ends of the nozzles of different groups of spraying assemblies are positioned at different positions along the first direction, wherein the first direction is perpendicular to the extending direction of the developing arm and the height direction of the developing device. In some embodiments, the nozzles include mounting portions connected to the developing arm, the mounting portions of the respective nozzles being aligned in a row in an extending direction of the developing arm; At least part of the structure of the nozzle extends in a direction away from the mounting part, so that the liquid outlet end of the nozzle is offset relative to the corresponding mounting part along a first direction. In some embodiments, the nozzles are configured in a strip-shaped structure, the center line of each nozzle is perpendicular to the extending direction of the developing arm, the orthographic projections of the center lines of the nozzles of the same spraying assembly in a first plane are overlapped with each other, the orthographic projections of the center lines of the nozzles of different spraying assemblies in the first plane have included angles, and the first plane is perpendicular to the extending direction of the developing arm. In some embodiments, the number of spray assemblies is two, and the included angle is in the range of 0-120. In some embodiments, the number of spray assemblies is two; The distance d between the orthographic projections of the liquid outlet ends of the nozzles of the two groups of spraying components in the first plane is more than or equal to 1cm and less than or equal to 3cm. In some embodiments, the nozzle includes a first nozzle segment and a second nozzle segment that are connected to each other; The end part of the first nozzle section, which is far away from the second nozzle section, forms a mounting part, and the end part of the second nozzle section, which is far away from the first nozzle section, forms a liquid outlet end; The first nozzle section extends in a height direction of the developing device, the second nozzle section protrudes in a direction away from the first nozzle section, and the second nozzle section is disposed obliquely with respect to the first nozzle section. In some embodiments, the liquid outlet end of the nozzle is p