CN-121995991-A - Control system and control method for cold-hot integrated heating table

CN121995991ACN 121995991 ACN121995991 ACN 121995991ACN-121995991-A

Abstract

The invention discloses a control system and a control method of a cold and hot integrated heating table, wherein a multi-mode coupling field actuator comprises a heating unit, a refrigerating unit, an adsorption layer and a thermal control layer, wherein the heating unit comprises a near infrared laser and a scanning vibrating mirror, irradiates a high-absorptivity photo-thermal coating arranged on the back surface of a substrate to realize rapid and local heating, a microporous electrostatic adsorption film with high insulativity and a microporous structure is arranged on the outer surface of the substrate, a micro thermoelectric refrigerator is integrated below the substrate to jointly construct a solid and zonable temperature control execution surface, a space-time field information fusion sensing module is integrated with a distributed fiber grating temperature sensor and a thermal imaging sensor to realize synchronous, global and undisturbed sensing of physical temperature and optical effect, a self-adaptive prediction controller is used for establishing a real-time digital twin model of a controlled object, mapping set temperature distribution into actuator driving parameters through a field inverse problem solving algorithm, and introducing a closed-loop multi-mode coupling field actuator to conduct on-line correction.

Inventors

ZHAO TIANBIAO
YANG PEIYU
JIANG JIE
LI HONGJUN

Assignees

文天精策仪器科技(苏州)有限公司

Dates

Publication Date: 20260508
Application Date: 20260130

Claims (9)

1. A control system of a cold-hot integrated heating table comprises a cold-hot table and a substrate for heating/cooling, and is characterized by further comprising: The multi-mode coupling field actuator comprises a heating unit, a refrigerating unit, an adsorption layer and a thermal control layer, wherein the heating unit comprises a near infrared laser, a scanning galvanometer and a high-absorptivity photo-thermal coating arranged on the back surface of a substrate in an irradiation manner to realize rapid and local heating; The full space-time field information fusion sensing module integrates a distributed fiber bragg grating temperature sensor and a thermal imaging sensor, so that synchronous, global and undisturbed sensing of physical temperature and optical effect is realized; The self-adaptive prediction controller establishes a real-time digital twin model of the controlled object, maps the set temperature distribution into actuator driving parameters through a field inverse problem solving algorithm, and introduces a closed-loop multi-mode coupling field actuator to perform online correction.
2. The control system of a heating table with integrated cooling and heating functions according to claim 1, wherein the sensing module for fusion of information of full space-time field comprises: a. Modeling each sensor data point as a hypergraph node; b. The confidence coefficient dynamic evaluation and weighting fusion is that a confidence coefficient score C_i (t) is calculated for each data source in real time; Evaluating the fiber bragg grating sensor C_fbg based on the historical data stability and the consistency with the readings of the adjacent sensors; For a thermal imager pixel C_ir, evaluating based on the image sharpness, signal-to-noise ratio and correlation with physical sensor readings over time of the region in which the pixel is located; c. The confidence-based diffusion completion algorithm is that the final fusion temperature field T_fused is obtained by solving the following optimization problem: argmin{ Σ_i C_i * || T_fused(s_i) - T_i || 2 + λ * Σ_{(j,k)∈E} w_jk * || T_fused(s_j) - T_fused(s_k) || 2 } The first item forces the fusion field to approach an original measurement value T_i of high confidence, the second item is a smoothing item based on hypergraph edge weight w_jk, lambda is a smoothing coefficient, s_i is a space position coordinate of an ith sensor, T_i is an original temperature value actually measured at the ith sensor position s_i, C_i is a real-time confidence weight of the ith sensor measurement value T_i, all edges in an E hypergraph are gathered, each edge is connected with two space positions, j and k) belongs to one edge of an edge set E, and the positions s_j and s_k are connected.
3. A control method of a cold-hot integrated heating table, adopting the control system as claimed in any one of claims 1-2, characterized by comprising the following steps: A1, performing characteristic calibration through a multi-mode coupling field actuator, acquiring temperature field information through a thermal imaging sensor, and predicting full-field temperature space-time evolution under any control input by utilizing a real-time digital twin model; A2, setting the inverse problem solving and primary regulation of a temperature field, namely setting the difference between the target temperature and the current state of the digital twin model as input, running a field inverse problem solving algorithm, and efficiently solving the optimization problem by a concomitant variable method to obtain an optimal control vector; a3, performing self-adaptive multi-mode coupling field precision, namely, converting light energy into heat energy efficiently by scanning laser with specific wavelength and power and precisely projecting the laser to a high-absorptivity photo-thermal coating on the back of a substrate through a vibrating mirror, and then adopting a micro thermoelectric refrigerator to realize independent refrigeration of each micro area by changing the current direction and the current size so as to realize local refrigeration; And A4, feeding back and dynamically correcting on line by the closed-loop multi-mode coupling field actuator, wherein the self-adaptive prediction controller compares the predicted optical signal with the actually observed optical signal in real time, and uses a corrected model to generate a correction amount of a model parameter on line, returns to the step A2, and carries out a round of quick inverse problem solving again to update the control vector.
4. The method for controlling a cold and hot integrated heating table according to claim 3, wherein the step A1 comprises the steps of: A1.1, calibrating characteristics of a heating unit and a refrigerating unit in a low-power scanning mode, and recording transient temperature field distribution T_physical (x, y, T) measured by a distributed fiber bragg grating temperature sensor under different driving parameters; A1.2, a synchronous starting microscope is used for imaging a standard grid sample arranged on a table top, and temperature is inverted through analyzing astigmatism and characteristic point sub-pixel displacement caused by thermal refractive index change by a thermal imaging sensor to obtain temperature field information T_optical (x, y, T) of another dimension; A1.3, carrying out data fusion on the T_physical and the T_optical, and constructing a high-fidelity real-time digital twin model under the specific experimental configuration by utilizing a finite volume method in combination with three-dimensional thermal parameters of a substrate and a sample.
5. The method for controlling a cold and hot integrated heating table according to claim 3, wherein step A2 comprises: A2.1, setting a target temperature distribution T_target (x, y), wherein a temperature value T_target which is expected to be reached and maintained at a coordinate point (x, y) is set; A2.2, the self-adaptive prediction controller takes the difference between the temperature value T_target and the current state of the digital twin model as input, and runs a field inverse problem solving algorithm to minimize the following loss function L: L = ∫∫[α(T_model(u) - T_target) 2 + β(▽ 2 T_model(u)) 2 + γ||u|| 2 ] dx dy Wherein T_model (u) is a predicted temperature field of a digital twin model under a control vector u, alpha, beta and gamma are weight coefficients, tracking precision, temperature field smoothness and control energy consumption are respectively weighed, < b > - 2 is a Laplacian operator for punishing severe temperature change, A2.3, solving the optimization problem through a concomitant variable method to obtain an optimal control vector u.
6. The method for controlling a heating table with integrated cooling and heating as claimed in claim 5, wherein the control vector u is obtained by: Discretizing a space domain (x, y) into a grid, and discretizing a control vector U into a driving value vector U of each execution unit; The digital twin model is expressed as a linear time-varying or linearized state space equation dT/dt=A (U) T+B (U), or an approximation thereof in steady state T=G+U, where G is the transfer matrix, where the loss function L is discretized into L= (GU-T_target) T Wα(GU - T_target) + U T WγU + (DGU) T W beta (DGU), where W is the weight diagonal matrix and D is the discrete Laplace operator matrix, and finally, the optimal solution U is obtained by solving a system of linear equations (G T WαG + G T D T WβDG + Wγ) U = G T W alpha T_target).
7. The method for controlling a cold and hot integrated heating table according to claim 3, wherein step A3 comprises: A3.1, according to the instruction in u, precisely projecting laser with specific wavelength and power to the high-absorptivity photo-thermal coating on the back of the substrate by scanning the galvanometer, converting the light energy into heat energy by the coating to realize rapid and fixed-point heating of the appointed area of the sample table surface, then adopting a micro thermoelectric refrigerator to realize independent refrigeration of each micro area by changing the direction and the size of the current to realize local refrigeration, A3.2, the micro thermoelectric refrigerator and the microporous electrostatic adsorption film are set according to the overall temperature in U, and the temperature of the circulating fluid is regulated.
8. The method for controlling a cold and hot integrated heating table according to claim 3, wherein step A4 comprises the steps of: A4.1, in the temperature regulation process, the thermal imaging sensor continuously monitors a characteristic optical signal S of a specific area of the sample; a4.2, establishing an empirical mapping function f of the optical signal S and the local true temperature t_local, s=f (t_local); A4.3, the adaptive predictive controller converts the actually observed optical signal S_measured into an equivalent observed temperature T_optical_ inferred =f -1 (S_measured) by using an inverse mapping function f -1 ; A4.4, directly calculating a temperature residual error delta T=T_optical_ inferred-T_model, and sending the delta T into a model parameter updater to online correct the thermal parameters of a local area in the digital twin model to obtain delta k or delta C; Clearly locating the feedback as a correction for the difference between the model predicted temperature and the independent thermometry results inverted by the optical signal; A4.5, returning to the step A2 by using the corrected model, and carrying out one round of quick inverse problem solving again to update the control vector u_new.
9. Computer storage medium storing a computer program, characterized in that the program when executed by a processor performs the steps of the method according to any one of claims 2-7.

Description

Control system and control method for cold-hot integrated heating table Technical Field The invention belongs to the technical field of test instruments, and particularly relates to a control system and a control method for a cold and hot integrated heating table. Background The microscope cold-hot integrated heating table is key equipment for realizing in-situ microscopic observation under a sample temperature-changing environment. However, the existing mainstream technology has fundamental limitations on system architecture, perceptibility and control logic, and is difficult to meet the severe requirements of leading-edge scientific research on high spatial resolution, high temperature uniformity and long-term dynamic observation. The specific disadvantages are represented by the following three aspects: The prior art mostly uses an integral, contact type thermoelectric cooler (Peltier chip) or a resistive wire as a core actuator. The single structure of the heating/refrigerating integrated body has two inherent defects that firstly, the thermal inertia is large, the temperature rising and falling speed is slow, and the rapid and accurate temperature switching is difficult to realize, secondly, the spatial resolution is extremely low (usually in the centimeter level), the temperature of a sample table top cannot be finely partitioned, the complex local temperature gradient cannot be generated or counteracted, and the application in the fields of micro-area observation, bionic temperature field simulation and the like is severely limited; The sensing system has extremely low dimension and is disjointed with feedback due to the fact that the temperature sensing of the existing system is seriously dependent on a few embedded contact type temperature sensors (such as thermocouples or platinum resistors). The sparse single-point or low-point temperature measurement mode has the defects that feedback information is seriously insufficient in dimension, full-field temperature distribution on a sample table top cannot be reconstructed or estimated at all, and spatial non-uniformity caused by heat sink, sample heat capacity difference or environmental disturbance cannot be influenced. More importantly, the existing perception system is completely independent of a core microscopic optical observation path, no information is associated between a temperature control loop and an optical observation result, so that the control system cannot know the actual influence of the temperature control action on a final observation target (such as the fluorescence intensity of a cell and the Raman peak position of a material), and serious control-observation disjointing exists; The control logic is simple and lag, and can not realize global synergy and self-adaptive optimization, namely based on the simple actuator and the sensor, the conventional control logic generally adopts a classical set point-error-PID local feedback control paradigm. This paradigm can only drive an actuator in an effort to bring the temperature of a limited number of sensor stations close to a set point. The sensor can not sense and control the temperature condition of the dead zone of the sensor, and completely lacks modeling and coping capability for thermal coupling between actuators, thermal disturbance of the sample and environmental disturbance. The control mode of only seeing trees and not seeing forests inevitably causes poor temperature uniformity and slow dynamic response of the table top. In summary, the prior art is limited to the conventional architecture of monolithic actuators, sparse point sensing and local feedback control, and has reached bottlenecks in terms of spatial resolution, temperature uniformity, dynamic response, and observation relevance, and a systematic innovation from system architecture to control logic is needed. Disclosure of Invention Aiming at the defects of the prior art, the invention aims to provide a control system and a control method for a cold-hot integrated heating table. In order to achieve the aim of the invention, the technical scheme adopted by the invention comprises a control system of a cold and hot integrated heating table, a heating/cooling system and a control system, wherein the control system comprises a cold and hot table and a substrate for heating/cooling, and further comprises: The multi-mode coupling field actuator comprises a heating unit, a refrigerating unit, an adsorption layer and a thermal control layer, wherein the heating unit comprises a near infrared laser, a scanning galvanometer and a high-absorptivity photothermal coating (the high-absorptivity photothermal coating is a titanium nitride nano film prepared by adopting an atomic layer deposition technology, the absorptivity of the high-absorptivity photothermal coating is more than 95% near 1550nm wavelength, the thermal conductivity of the high-absorptivity photothermal coating is more than 20W/m.K), the heating unit realizes rapid