CN-121996009-A - Burning adjustment method and burning adjustment device for adjustable reference source

CN121996009ACN 121996009 ACN121996009 ACN 121996009ACN-121996009-A

Abstract

The application provides a burning adjustment method and a burning adjustment device for an adjustable reference source. The adjustable reference source comprises an anode, a reference voltage output end, a plurality of voltage dividing resistors, a plurality of burning resistors and a plurality of fuses, wherein the voltage dividing resistors and the burning resistors are connected in series between the anode and the reference voltage output end, and each burning resistor is connected with one fuse in parallel. The burning method of the adjustable reference source comprises the steps of providing constant current for the adjustable reference source, measuring a test voltage value of a reference voltage output end, determining target fuses to be blown according to the test voltage value, the target voltage value and adjustment voltages corresponding to burning resistors, determining positions of at least two melting points of each target fuse, arranging all melting points of the same target fuse in the width direction of the target fuse, and controlling laser to irradiate each melting point of the target fuse in sequence for each target fuse to enable the target fuse to be blown.

Inventors

WANG JIN
DING DONGMIN
WANG JIAN
CHEN WEIQIAN

Assignees

华润微集成电路(无锡)有限公司

Dates

Publication Date: 20260508
Application Date: 20241108

Claims (11)

1. The method for burning and adjusting the adjustable reference source is characterized in that the adjustable reference source comprises an anode, a reference voltage output end, a plurality of voltage dividing resistors, a plurality of burning and adjusting resistors and a plurality of fuses, wherein the voltage dividing resistors and the burning and adjusting resistors are connected between the anode and the reference voltage output end in series, each burning and adjusting resistor is connected with one fuse in parallel, and the method for burning and adjusting the adjustable reference source comprises the following steps: providing a constant current to the adjustable reference source and measuring a test voltage value of the reference voltage output end; Determining a target fuse to be blown according to the test voltage value, the target voltage value and the adjusting voltage corresponding to each burning resistor; Determining the positions of at least two melting points of each target fuse, wherein all melting points of the same target fuse are arranged in the width direction of the target fuse; And for each target fuse, controlling laser to irradiate each melting point of the target fuse in sequence so as to blow the target fuse.
2. The method of claim 1, wherein the distance between two adjacent melting points in the width direction of the target fuse and the distance between the opposite side edges of the target fuse in the width direction and the melting points adjacent thereto are the same.
3. The tuning method of an adjustable reference source according to claim 1, wherein a distance between two adjacent melting points in a width direction of the target fuse and a distance between opposite side edges of the target fuse in the width direction and the melting points adjacent thereto are respectively smaller than a spot size of the laser.
4. The method for burning the adjustable reference source according to claim 1, wherein the target voltage value comprises a first target voltage threshold, a second target voltage threshold and a target voltage value, the first target voltage threshold is smaller than the second target voltage threshold, the target voltage value is an average value of the first target voltage threshold and the second target voltage threshold, and the sum of the adjustment voltages corresponding to all the burning resistors is a maximum adjustment voltage; The determining the target fuse to be blown according to the test voltage value, the target voltage value and the adjustment voltage corresponding to each burning resistor includes: and when the difference between the target voltage value and the test voltage value is greater than or equal to the maximum adjustment voltage, determining that all fuses are target fuses.
5. The method of burning out the adjustable reference source of claim 4, wherein when the difference between the target voltage value and the test voltage value is greater than or equal to the maximum adjustment voltage, determining a target fuse to be burned out according to the test voltage value, the target voltage value, and the adjustment voltage corresponding to each burning out resistor, further comprising determining whether the difference between the target voltage value and the test voltage value is less than or equal to the sum of the maximum adjustment voltage and a preset voltage; and when the difference value between the target voltage value and the test voltage value is smaller than or equal to the sum of the maximum adjustment voltage and a preset voltage value, determining that all fuses are target fuses.
6. The method for burning the adjustable reference source according to claim 1, wherein the sum of the adjustment voltages corresponding to all the burning resistors is the maximum adjustment voltage, and the method for burning the adjustable reference source further comprises the steps of: judging whether the difference value between the target voltage value and the test voltage value is larger than the sum of the maximum adjustment voltage and a preset voltage value; And when the difference value between the target voltage value and the test voltage value is larger than the sum of the maximum adjustment voltage and the preset voltage value, determining that the adjustable reference source is a defective product, and not performing burning adjustment.
7. The method for burning the adjustable reference source according to claim 1, wherein the target voltage value comprises a first target voltage threshold, a second target voltage threshold and a target voltage value, the first target voltage threshold is smaller than the second target voltage threshold, the target voltage value is a central value of the first target voltage threshold and the second target voltage threshold, and a sum of adjustment voltages corresponding to all burning resistors is a maximum adjustment voltage; The determining the target fuse to be blown according to the test voltage value, the target voltage value and the adjustment voltage corresponding to each burning resistor includes: And when the difference value between the target voltage value and the test voltage value is smaller than the maximum adjustment voltage, determining target fuses from all fuses according to the difference value between the target voltage value and the test voltage value and the adjustment voltage corresponding to each trimming resistor, wherein the absolute value of the difference value between the sum of the adjustment voltages corresponding to the test voltage value and all target fuses and the target voltage value is a first absolute value, the absolute value of the difference value between the sum of the adjustment voltages corresponding to all fuses in the test voltage value and all non-target fuse sets and the target voltage value is a second absolute value, the first absolute value is smaller than or equal to each second absolute value, and the non-target fuse sets comprise one or more fuses which are not identical to all target fuses.
8. The method of tuning an adjustable reference source of claim 1, wherein the tuning voltages of any two of the plurality of tuning resistors are different.
9. The method for tuning an adjustable reference source according to claim 7, wherein the number of the tuning resistors is n, the tuning voltages corresponding to the n tuning resistors are 2 0 mV、2mV、2 2 mV. and 2 n-1 mV, respectively, and n is a positive integer greater than 3.
10. The method of claim 1, wherein the target voltage values include a first target voltage threshold and a second target voltage threshold, the first target voltage threshold being less than the second target voltage threshold; after the constant current is provided to the adjustable reference source and the test voltage value of the reference voltage output end is measured, the burning method of the adjustable reference source further comprises the step of determining that all fuses do not need to be blown if the test voltage value is between the first target voltage threshold and the second target voltage threshold; and/or the number of the groups of groups, For each target fuse, controlling laser to irradiate each melting point of the target fuse in turn, and after the target fuse is blown, the method for burning the adjustable reference source further comprises: Providing the constant current to the adjustable reference source, and measuring a reference voltage value of the reference voltage output end; Judging whether the reference voltage value is between the first target voltage threshold value and the second target voltage threshold value; When the reference voltage value is judged to be between the first target voltage threshold value and the second target voltage threshold value, determining that the adjustable reference source is good; and when the reference voltage value is judged to be smaller than the first target voltage threshold or larger than the second target voltage threshold, determining that the adjustable reference source is defective.
11. A tunable reference source tuning apparatus comprising a controller for performing the tunable reference source tuning method of any one of claims 1 to 10.

Description

Burning adjustment method and burning adjustment device for adjustable reference source Technical Field The application relates to the technical field of semiconductors, in particular to a burning adjustment method and a burning adjustment device for an adjustable reference source. Background The adjustable shunt reference source can be used for providing a stable reference voltage and is widely applied. The chip of the adjustable shunt reference source is provided with an aluminum film layer, and the aluminum film layer comprises an electrode and a plurality of fuses, wherein the electrode is used for being bonded with pins of a lead frame, and each fuse is connected with a resistor in parallel. At least one fuse may be blown when the adjustable shunt reference source is burned. For thicker aluminum films (e.g., greater than or equal to 1.2 μm thick), a high current pulse is typically applied to electrodes connected to both ends of the fuse to cause the fuse to blow. The electrode occupation area that links to each other with fuse both ends is great for the quantity of the fuse that the aluminium rete can set up is less, is unfavorable for promoting the precision of burning. Disclosure of Invention The embodiment of the application provides a burning adjustment method and a burning adjustment device for an adjustable reference source. According to a first aspect of an embodiment of the present application, a method for burning an adjustable reference source is provided. The adjustable reference source comprises an anode, a reference voltage output end, a plurality of voltage dividing resistors, a plurality of burning resistors and a plurality of fuses, wherein the voltage dividing resistors and the burning resistors are connected in series between the anode and the reference voltage output end, each burning resistor is connected with one fuse in parallel, and the burning method of the adjustable reference source comprises the following steps: providing a constant current to the adjustable reference source and measuring a test voltage value of the reference voltage output end; Determining a target fuse to be blown according to the test voltage value, the target voltage value and the adjusting voltage corresponding to each burning resistor; Determining the positions of at least two melting points of each target fuse, wherein all melting points of the same target fuse are arranged in the width direction of the target fuse; And for each target fuse, controlling laser to irradiate each melting point of the target fuse in sequence so as to blow the target fuse. In one embodiment, in the width direction of the target fuse, the distance between adjacent two melting points and the distance between opposite side edges of the target fuse in the width direction to the melting points adjacent thereto are the same. In one embodiment, in the width direction of the target fuse, the distance between two adjacent melting points and the distance between the opposite side edges of the target fuse in the width direction and the melting points adjacent thereto are respectively smaller than the spot size of the laser. In one embodiment, the target voltage values include a first target voltage threshold, a second target voltage threshold and a target voltage value, wherein the first target voltage threshold is smaller than the second target voltage threshold, the target voltage value is an average value of the first target voltage threshold and the second target voltage threshold, and the sum of the adjustment voltages corresponding to all the burning resistors is the maximum adjustment voltage; The determining the target fuse to be blown according to the test voltage value, the target voltage value and the adjustment voltage corresponding to each burning resistor includes: and when the difference between the target voltage value and the test voltage value is greater than or equal to the maximum adjustment voltage, determining that all fuses are target fuses. In one embodiment, when the difference between the target voltage value and the test voltage value is greater than or equal to the maximum adjustment voltage, determining a target fuse to be blown according to the test voltage value, the target voltage value and the adjustment voltage corresponding to each trimming resistor, and further comprising determining whether the difference between the target voltage value and the test voltage value is less than or equal to the sum of the maximum adjustment voltage and a preset voltage value; and when the difference value between the target voltage value and the test voltage value is smaller than or equal to the sum of the maximum adjustment voltage and a preset voltage value, determining that all fuses are target fuses. In one embodiment, the sum of the adjustment voltages corresponding to all the burning adjustment resistors is the maximum adjustment voltage, and after the constant current is provided to the adjustable reference so