CN-121998621-A - Graphite part maintenance control method and device, electronic equipment and storage medium

CN121998621ACN 121998621 ACN121998621 ACN 121998621ACN-121998621-A

Abstract

The application discloses a graphite piece maintenance control method, a device, electronic equipment and a storage medium, and relates to the technical field of semiconductors, wherein the method comprises the steps of determining maintenance condition information according to the type of a graphite piece; the method comprises the steps of determining processing formula information corresponding to a current batch, predicting predicted graphite piece state information of a graphite piece after the current batch is processed based on the processing formula information according to the graphite piece influence information, and carrying out maintenance control on the graphite piece according to the predicted graphite piece state information and maintenance condition information to obtain a maintenance control result. The method solves the problem of delayed maintenance of the graphite piece by predicting the state of the graphite piece after the processing is completed before the actual measurement and performing maintenance control on the graphite piece. The state of the graphite piece is predicted through the processing formula information, so that the accuracy and the rationality of the maintenance time of the graphite piece are improved.

Inventors

ZHOU YINGHONG
XU MINGGUANG
YANG TAO

Assignees

格创东智(武汉)科技有限公司

Dates

Publication Date: 20260508
Application Date: 20260127

Claims (10)

1. A method for maintenance control of a graphite article, the method comprising: Determining maintenance condition information according to the type of the graphite piece; Determining processing formula information corresponding to the current batch, wherein the processing formula information corresponds to graphite piece influence information; predicting predicted graphite piece state information of the graphite piece after the current batch is processed based on the processing formula information according to the graphite piece influence information; And carrying out maintenance control on the graphite piece according to the predicted graphite piece state information and the maintenance condition information to obtain a maintenance control result.
2. The graphite member maintenance control method according to claim 1, wherein the graphite member influence information includes predicted growth film thickness information and film thickness influence coefficient information, and the predicted graphite member state information includes predicted film thickness information corresponding to the graphite member; predicting the predicted graphite piece state information of the graphite piece after the current batch is processed based on the processing formula information according to the graphite piece influence information, including: calculating predicted film thickness increase information based on the predicted increase film thickness information and the film thickness influence coefficient information; and calculating the predicted film thickness information according to the current accumulated film thickness information of the graphite piece and the predicted film thickness increase information.
3. The method according to claim 2, wherein the maintenance condition information includes film thickness limitation information, and the maintenance control result includes a cleaning result; And performing maintenance control on the graphite piece according to the predicted graphite piece state information and the maintenance condition information to obtain a maintenance control result, wherein the maintenance control result comprises: And if the predicted film thickness information is greater than or equal to the film thickness limit information, cleaning the graphite piece to obtain the cleaning result.
4. The graphite article maintenance control method according to claim 1, wherein the graphite article influence information includes frequency influence information, and the predicted graphite article state information includes a target machining frequency of the graphite article; predicting the predicted graphite piece state information of the graphite piece after the current batch is processed based on the processing formula information according to the graphite piece influence information, including: calculating the processing times according to the number of wafers corresponding to the current batch and the number of single processing pieces of target processing equipment; calculating target machining increase times according to the machining times and the times influence information; And obtaining the target machining times according to the current accumulated machining times and the target machining increase times.
5. The method according to claim 4, wherein the maintenance condition information includes processing number limit information, and the maintenance control result includes a cleaning result; And performing maintenance control on the graphite piece according to the predicted graphite piece state information and the maintenance condition information to obtain a maintenance control result, wherein the maintenance control result comprises: And if the target machining times are greater than or equal to the machining times limit information, cleaning the graphite piece to obtain the cleaning result.
6. The method according to claim 1, wherein the maintenance condition information includes cleaning number limit information; After the graphite piece is subjected to maintenance control according to the predicted graphite piece state information and the maintenance condition information to obtain a maintenance control result, the method further comprises the following steps: if the maintenance control result comprises a cleaning result or the maintenance control comprises cleaning, updating the accumulated cleaning times corresponding to the graphite piece; and if the accumulated cleaning times are greater than or equal to the cleaning times limit information, replacing the graphite piece to obtain a graphite piece replacement result.
7. The method according to claim 1, wherein after performing maintenance control on the graphite piece according to the predicted graphite piece state information and the maintenance condition information to obtain a maintenance control result, the method further comprises: After the actual processing of the current batch is finished, if the maintenance control result comprises a cleaning result, keeping the graphite piece corresponding to the cleaning result unchanged; after the actual processing of the current batch is finished, if the maintenance control result does not comprise the cleaning result, adjusting the predicted graphite piece state information according to the actual film thickness average value information corresponding to the current batch to obtain actual graphite piece state information; Performing maintenance control on the graphite piece according to the actual graphite piece state information and the maintenance condition information to obtain another maintenance control result; The actual film thickness average value information is an average value of film thickness measured after processing based on the processing formula information based on at least one wafer corresponding to the current batch.
8. A graphite article maintenance control device, the device comprising: the first determining module is used for determining maintenance condition information according to the type of the graphite piece; the second determining module is used for determining processing formula information corresponding to the current batch, wherein the processing formula information corresponds to graphite piece influence information; The prediction module is used for predicting the predicted graphite piece state information of the graphite piece after the current batch is processed based on the processing formula information according to the graphite piece influence information; and the processing module is used for carrying out maintenance control on the graphite piece according to the predicted graphite piece state information and the maintenance condition information to obtain a maintenance control result.
9. An electronic device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, the processor implementing the steps in the graphite piece maintenance control method of any one of claims 1-7 when the computer program is executed.
10. A storage medium having stored thereon a computer program which, when executed by a processor, implements the steps of the graphite article maintenance control method according to any one of claims 1 to 7.

Description

Graphite part maintenance control method and device, electronic equipment and storage medium Technical Field The application relates to the technical field of semiconductors, in particular to a graphite piece maintenance control method and device, electronic equipment and a storage medium. Background The graphite piece is a core consumable and a bearing component in the reaction cavity, and the stability of the graphite piece is a necessary condition for the epitaxial equipment to realize the growth of a high-quality epitaxial layer. When the epitaxial equipment is used for processing the graphite piece bearing wafer, a SiC film layer can be deposited or grown concomitantly, and when the deposited SiC film layer is too thick, internal stress can be generated on the film layer, and the stress can cause peeling, skinning or microcracking of a coating. The detached SiC particles may fall onto the wafer undergoing the epitaxial process, creating fatal surface defects. In FAB (specialized factory for producing semiconductor chips), generally, a graphite member is managed, and according to the measurement result of Lot in an epitaxial layer, the film thickness of the graphite member is accumulated, and when the film thickness exceeds a set value, the graphite member is maintained or replaced. However, this management has a delay, for example, during the time that the measurement may process other lots resulting in a delay in the lock point. Moreover, the control of the maintenance time of the graphite piece simply through the measured film thickness also has the problem of inaccurate maintenance and improved rationality. Disclosure of Invention The embodiment of the application provides a graphite piece maintenance control method, a device, electronic equipment and a storage medium, which can solve the problem of delayed maintenance of a graphite piece and improve the accuracy and rationality of the maintenance opportunity of the graphite piece. In a first aspect, an embodiment of the present application provides a method for controlling maintenance of a graphite member, where the method includes: Determining maintenance condition information according to the type of the graphite piece; Determining processing formula information corresponding to the current batch, wherein the processing formula information corresponds to graphite piece influence information; predicting predicted graphite piece state information of the graphite piece after the current batch is processed based on the processing formula information according to the graphite piece influence information; And carrying out maintenance control on the graphite piece according to the predicted graphite piece state information and the maintenance condition information to obtain a maintenance control result. In a second aspect, an embodiment of the present application further provides a graphite member maintenance control device, including: the first determining module is used for determining maintenance condition information according to the type of the graphite piece; the second determining module is used for determining processing formula information corresponding to the current batch, wherein the processing formula information corresponds to graphite piece influence information; The prediction module is used for predicting the predicted graphite piece state information of the graphite piece after the current batch is processed based on the processing formula information according to the graphite piece influence information; and the processing module is used for carrying out maintenance control on the graphite piece according to the predicted graphite piece state information and the maintenance condition information to obtain a maintenance control result. Optionally, in some embodiments of the present application, the graphite piece influence information includes predicted growing film thickness information and film thickness influence coefficient information, and the predicted graphite piece state information includes predicted film thickness information corresponding to the graphite piece; predicting the predicted graphite piece state information of the graphite piece after the current batch is processed based on the processing formula information according to the graphite piece influence information, including: calculating predicted film thickness increase information based on the predicted increase film thickness information and the film thickness influence coefficient information; and calculating the predicted film thickness information according to the current accumulated film thickness information of the graphite piece and the predicted film thickness increase information. Optionally, in some embodiments of the present application, the maintenance condition information includes film thickness limitation information, and the maintenance control result includes a cleaning result; And performing maintenance control on the graphite piece according to t