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CN-122000260-A - X-ray generating device

CN122000260ACN 122000260 ACN122000260 ACN 122000260ACN-122000260-A

Abstract

The invention provides an X-ray generating device which comprises a cathode system, a magnetic deflection system, a magnetic focusing system, an anode system and a vacuumizing system, wherein the cathode system comprises a cathode cavity, a cathode high-voltage component and a high-voltage connecting component, the cathode high-voltage component comprises a lanthanum hexaboride filament component, the magnetic deflection system comprises a magnetic deflection unit, the magnetic focusing system comprises a quadrupole focusing unit and a monopole focusing unit, the anode system comprises an anode target component, the anode target component comprises a transmission target, and an electron beam emitted by the lanthanum hexaboride filament component sequentially passes through the magnetic deflection unit, the quadrupole focusing unit and the monopole focusing unit to reach the transmission target. According to the X-ray generating device, the lanthanum hexaboride filament with a smaller emission plane is used as a heat emission source, the two combined focusing units are used for highly compressing electron beams, and a high vacuum environment is provided, so that the focus finally hitting the transmission target is extremely small, and the resolution and stability of the X-ray generating device are improved.

Inventors

  • ZHAO LISHAN
  • SUN ZAIJUN
  • QU XUEFENG

Assignees

  • 海宁精奕电子有限公司

Dates

Publication Date
20260508
Application Date
20251231

Claims (10)

  1. 1. An X-ray generating apparatus, comprising: The cathode system comprises a cathode cavity, a cathode high-voltage component and a high-voltage connecting component, wherein the cathode high-voltage component is positioned in the cathode cavity, one end of the high-voltage connecting component is connected with the cathode high-voltage component, the other end of the high-voltage connecting component is connected with a high-voltage power supply, and the cathode high-voltage component comprises a lanthanum hexaboride filament component; A magnetic deflection system connected to the cathode system, the magnetic deflection system comprising a magnetic deflection unit; A magnetic focusing system including a quadrupole focusing unit and a monopole focusing unit; the anode system is connected with the monopole focusing unit and comprises an anode target assembly, the anode target assembly comprises a transmission target, and an electron beam emitted by the lanthanum hexaboride filament assembly sequentially passes through the magnetic deflection unit, the quadrupole focusing unit and the monopole focusing unit to reach the transmission target; and the vacuumizing system is communicated with the cathode system, the magnetic deflection system, the magnetic focusing system and the anode system.
  2. 2. The X-ray generator of claim 1, wherein the high-voltage connection assembly comprises a high-voltage cable connector, a ceramic socket and a sealing structure, the high-voltage cable connector is connected with one end of the cathode cavity in a sealing mode, a grid high-voltage wire and a filament high-voltage wire are arranged in the high-voltage cable connector, one end of the ceramic socket is connected with the cathode high-voltage assembly, the other end of the ceramic socket is connected with the high-voltage cable connector through the sealing structure, and insulating oil is filled in the sealing structure.
  3. 3. The X-ray generating device of claim 2, wherein the cathode high voltage assembly further comprises a grid assembly, a grid post and a filament post, the grid assembly comprises a grid hole, the grid post, the filament post and the lanthanum hexaboride filament assembly are all positioned between the grid assembly and the ceramic socket, the grid post and the filament post are respectively connected with the ceramic socket, the lanthanum hexaboride filament assembly is connected with the filament high voltage wire through the filament post, and the grid assembly is connected with the grid high voltage wire through the grid post.
  4. 4. The X-ray generating apparatus according to claim 1, wherein the cathode system further comprises an anode plate located at an upper end of the cathode cavity, the magnetic deflection unit is located above the cathode system and connected with the anode plate, the magnetic deflection unit comprises a deflection lens and a deflection lens housing surrounding the deflection lens, the deflection lens comprises two groups of coils respectively arranged in a first direction and a second direction, the first direction is perpendicular to the second direction, and a plane in which the first direction and the second direction are located is perpendicular to a movement path of the electron beam.
  5. 5. The X-ray generating apparatus according to claim 4, wherein the quadrupole focusing unit comprises a quadrupole focusing lens and a quadrupole focusing lens housing surrounding the quadrupole focusing lens, the quadrupole focusing lens comprising two sets of coils respectively arranged in a third direction and a fourth direction, the third direction being perpendicular to the fourth direction, and a plane in which the third direction and the fourth direction lie being perpendicular to a movement path of the electron beam.
  6. 6. The X-ray generating device as recited in claim 5, wherein the monopole focus unit is coupled to the quadrupole focus lens housing, the monopole focus unit comprising a monopole focus lens, a pole shoe structure and a pole shoe upper cover, the pole shoe upper cover being positioned over and coupled to the pole shoe structure, the pole shoe structure and the pole shoe upper cover closing to form a cavity, the monopole focus lens being positioned in the cavity.
  7. 7. The X-ray generating apparatus according to claim 6, wherein: A vacuum cavity is arranged between the magnetic deflection system and the magnetic focusing system, one end of the vacuum cavity is connected with the quadrupole focusing lens shell, and the other end of the vacuum cavity is connected with the pole shoe upper cover; The vacuum pumping system comprises an ion pump, a getter pump and a vacuum valve, wherein the ion pump and the vacuum valve are both arranged on the outer wall of the cathode cavity and are communicated with the cathode cavity, and the getter pump is positioned in the vacuum cavity.
  8. 8. The X-ray generating device according to claim 7, wherein the anode target assembly further comprises a target cooling cover and a limiting diaphragm, a cooling water channel is arranged on the target cooling cover, a reserved rotating hole is arranged on the transmission target, the limiting diaphragm comprises a diaphragm opening, the transmission target is positioned between the target cooling cover and the limiting diaphragm, the transmission target is connected with the limiting diaphragm through a sealing ring, and an electron beam emitted by the lanthanum hexaboride filament assembly passes through the limiting diaphragm and reaches the transmission target through the diaphragm opening.
  9. 9. The X-ray generating device as recited in claim 8, wherein the anode system further comprises a non-magnetic titanium tube inserted into a cavity formed by closing the pole shoe structure and the pole shoe upper cover through a top end opening of the pole shoe upper cover, and the limiting diaphragm is located in a pipe of the non-magnetic titanium tube.
  10. 10. The X-ray generator of claim 7, wherein the connection between the cathode system and the magnetic deflection system comprises indium metal cold-press welding, the connection between the magnetic focusing system and the pole shoe structure comprises indium metal cold-press welding, and the connection between the pole shoe structure and the upper cover of the pole shoe comprises indium metal cold-press welding.

Description

X-ray generating device Technical Field The invention belongs to the technical field of X rays, and relates to an X-ray generating device. Background The X-ray tube is an X-ray output source, and the generated X-rays can be used for nondestructive detection of the interior of an object and are widely applied to various fields such as medical treatment, security inspection, industrial flaw detection and the like. In the X-ray tube, electron beams generated by a cathode system are accelerated by high-voltage electric fields at two ends of the cathode system and an anode system, enter an optical path adjusting system, and are subjected to motion path adjustment under the control of functional components in the optical path adjusting system, which are responsible for deflection, focusing and other technologies, and finally impact on an anode target surface in the anode system. The high energy electron beam impinging on the anode target surface will generate X-rays by the bremsstrahlung mechanism. The external high-voltage power supply outputs a stable high-voltage electric field between the cathode system and the anode system, and the external shell performs vacuum packaging on the whole device to provide a high-vacuum environment, so that an electron beam impact event can continuously and stably run, and finally, continuously and stably outputting X-rays are obtained. The prior art has developed an open X-ray source with a maximum voltage of 160 kV, with a minimum image resolution of about 0.9 μm. In the global semiconductor packaging market, the advanced packaging ratio is larger and larger, and further, the requirements of high resolution, non-destructive and dynamic analysis are put forward on the detection technology, so that a novel X-ray generating device is needed to realize higher resolution. It should be noted that the foregoing description of the background art is only for the purpose of providing a clear and complete description of the technical solution of the present application and is presented for the convenience of understanding by those skilled in the art. The above-described solutions are not considered to be known to the person skilled in the art simply because they are set forth in the background of the application section. Disclosure of Invention In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide an X-ray generating device for solving the problem of low resolution of the X-ray generating device in the prior art. To achieve the above and other related objects, the present invention provides an X-ray generating apparatus comprising: The cathode system comprises a cathode cavity, a cathode high-voltage component and a high-voltage connecting component, wherein the cathode high-voltage component is positioned in the cathode cavity, one end of the high-voltage connecting component is connected with the cathode high-voltage component, the other end of the high-voltage connecting component is connected with a high-voltage power supply, and the cathode high-voltage component comprises a lanthanum hexaboride filament component; A magnetic deflection system connected to the cathode system, the magnetic deflection system comprising a magnetic deflection unit; A magnetic focusing system including a quadrupole focusing unit and a monopole focusing unit; the anode system is connected with the monopole focusing unit and comprises an anode target assembly, the anode target assembly comprises a transmission target, and an electron beam emitted by the lanthanum hexaboride filament assembly sequentially passes through the magnetic deflection unit, the quadrupole focusing unit and the monopole focusing unit to reach the transmission target; and the vacuumizing system is communicated with the cathode system, the magnetic deflection system, the magnetic focusing system and the anode system. Optionally, the high voltage connection assembly includes high voltage cable connector, ceramic socket and seal structure, high voltage cable connector with the one end sealing connection of negative pole cavity, the inside that high voltage cable connector is provided with grid high voltage line and filament high voltage line, ceramic socket's one end is connected negative pole high voltage assembly, the other end is passed through seal structure connects high voltage cable connector, seal structure is interior to be full of insulating oil. Optionally, the cathode high voltage assembly further comprises a grid assembly, a grid column and a filament plug, the grid assembly comprises a grid hole, the grid column, the filament plug and the lanthanum hexaboride filament assembly are all located between the grid assembly and the ceramic socket, the grid column and the filament plug are respectively connected with the ceramic socket, the lanthanum hexaboride filament assembly is connected with the filament high voltage wire through the filament plug, and the grid assembly i