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CN-122000262-A - Chamber resetting method and semiconductor process equipment

CN122000262ACN 122000262 ACN122000262 ACN 122000262ACN-122000262-A

Abstract

The application discloses a chamber resetting method and semiconductor process equipment. The method comprises the steps of obtaining current parameter values of all services in a preset steady-state model after a reset process is started, judging whether the current parameter values and the ideal parameter values of all services are unmatched, determining the unmatched services as services to be executed if the unmatched services are present, determining target services in the services to be executed according to influence degree of all the services to be executed, executing the target services, obtaining the current parameter values of the non-executed services if the non-executed services are present, and returning to the step of judging whether the current parameter values and the ideal parameter values are unmatched. The application realizes the screening of partial service execution according to the state of the machine, reduces the number of service execution, shortens the re-machine time and improves the re-machine efficiency.

Inventors

  • ZHANG DI
  • KONG LINGSHUAI
  • FENG DANDAN

Assignees

  • 北京北方华创微电子装备有限公司

Dates

Publication Date
20260508
Application Date
20241105

Claims (10)

  1. 1.A method for resetting a chamber, comprising: after a reset process is started, current parameter values of all services in a preset steady-state model are obtained, wherein the steady-state model comprises ideal parameter values of all the services; Judging whether a service exists in which the current parameter value and the ideal parameter value are not matched; If the unmatched service exists, determining the unmatched service as a service to be executed; determining target services in the services to be executed according to influence degree of each service to be executed; executing the target service; If the non-executed service exists in the to-be-executed service, acquiring the current parameter value of the non-executed service, and returning to the service step of judging whether the current parameter value and the ideal parameter value are not matched.
  2. 2. The method of claim 1, wherein determining a target service among the services to be executed according to the influence degree of each service to be executed comprises: Sequencing the services to be executed according to the order of the influence degree from small to large; determining one service to be executed with the forefront ranking as a reference service; Determining the service to be executed and the reference service which meet a parallel condition between the service to be executed and the reference service as the target service, wherein the parallel condition comprises no hardware conflict when the service to be executed and the reference service are executed; the executing the target service includes: And executing each target service in parallel.
  3. 3. The method of claim 2, wherein the parallel condition further comprises: And the difference value between the service to be executed and the reference service execution completion average time is smaller than a preset difference value threshold.
  4. 4. The method as recited in claim 1, further comprising: if the target service fails to be executed, outputting first alarm information; continuing to execute the target service based on the first alarm information; Based on the first alarm information, executing an associated service corresponding to the target service, wherein the associated service is a service which is other than the target service in the services to be executed and affects the target service; And if the target service still fails to be executed after the associated service is executed, outputting notification information of the manual checking hardware module.
  5. 5. The method according to claim 1, further comprising, before the obtaining the current parameter value of each service in the preset steady-state model: Initializing each hardware module in the semiconductor process equipment; the leak rate of the chamber and the gas in the hardware module is tested.
  6. 6. The method as recited in claim 5, further comprising: If the hardware module fails to be initialized, outputting second alarm information, and outputting notification information for manually checking the hardware module.
  7. 7. The method as recited in claim 5, further comprising: And if the leak rate test is not qualified, outputting third alarm information, and outputting notification information for manually checking the hardware module.
  8. 8. The method according to any one of claims 4, 6 and 7, further comprising And if the output times of the alarm information exceeds a preset time threshold, ending the reset process.
  9. 9. The method as recited in claim 1, further comprising: And if the service of which the current parameter value is not matched with the ideal parameter value does not exist, ending the multiplexing flow.
  10. 10. A semiconductor process apparatus comprising a controller and a plurality of hardware modules connected to the controller, the plurality of hardware modules comprising a chamber and a gas, the controller comprising at least one processor and at least one memory, the memory having stored therein a computer program that when executed by the processor performs the steps of the method of any of claims 1-9.

Description

Chamber resetting method and semiconductor process equipment Technical Field The application belongs to the technical field of semiconductors, and particularly relates to a chamber resetting method and semiconductor process equipment. Background In the field of semiconductor manufacturing, after a semiconductor processing apparatus (e.g., etching apparatus) is used for a period of time, a Chamber (Chamber) may accumulate impurities, or when a series of problems such as fragments occur in the Chamber, a field engineer needs to manually open and clean the Chamber, and after the cleaning operation is completed, the engineer may perform a re-machining operation on the Chamber using Auto Process (AutoPro) software, so that the Chamber may reach a stable state after re-machining. In the related art, autoPro software performs a re-operation on a chamber, and sequentially executes a service a, a service B, a service C, a service D, and the like according to a serial service List (List) edited in advance by a user, for example, the service a, the service B, the service C, the service D, and the like. However, in an actual scenario, the current state of the chamber may not need to execute a service before the service is executed, so that the manner of executing all the services in the service list once prolongs the time of the re-machine and reduces the re-machine efficiency. Disclosure of Invention The embodiment of the application aims to provide a cavity re-processing method and semiconductor process equipment, which are used for solving the problems that the re-processing time is prolonged and the re-processing efficiency is reduced in a mode of executing all services in a service list once in the related technology. In order to achieve the above purpose, the embodiment of the present application adopts the following technical scheme: In a first aspect, an embodiment of the present application provides a method for multiplexing a chamber, including obtaining a current parameter value of each service in a preset steady-state model after a multiplexing process is started, where the steady-state model includes ideal parameter values of each service, determining whether there is a service that does not match the current parameter value with the ideal parameter value, determining the service that does not match as a service to be executed if there is the service that does not match, determining a target service in the service to be executed according to influence of each service to be executed, executing the target service, obtaining the current parameter value of the service that does not execute if there is a service that does not execute in the service to be executed, and returning to the step of determining whether there is a service that does not match the current parameter value with the ideal parameter value. In a second aspect, an embodiment of the present application provides a semiconductor process apparatus, including a controller and a plurality of hardware modules connected to the controller, the plurality of hardware modules including a chamber and a gas, the controller including at least one processor and at least one memory, the memory having stored therein a computer program that when executed by the processor performs the steps of the chamber reset method described in the first aspect above. The above at least one technical scheme adopted by the embodiment of the application can achieve the following beneficial effects: When the chamber is reset, after a reset process is started, current parameter values of all services in a preset steady-state model are obtained, ideal parameter values of all the services are included in the steady-state model, whether the services with unmatched current parameter values and ideal parameter values exist or not is judged, if the unmatched services exist, the unmatched services are determined to be services to be executed, target services in the services to be executed are determined according to influence of the services to be executed, the target services are executed, if the services to be executed exist, the current parameter values of the services not to be executed are obtained, and a service step of judging whether the unmatched current parameter values and the ideal parameter values exist or not is returned. The embodiment of the application can screen the service to be executed (namely the service to be executed) by judging whether the current parameter value of each service is matched with the ideal parameter value, and the service to be executed is executed in batches according to the influence degree, and after the execution of each batch of service is finished, the non-executed service is matched and screened again, so that the screening of partial service execution according to the state of a machine is realized, the number of service execution is reduced, the time of re-machine is shortened, and the re-machine efficiency is improved. Drawings The accomp