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CN-122000770-A - Light source module and laser processing equipment

CN122000770ACN 122000770 ACN122000770 ACN 122000770ACN-122000770-A

Abstract

The embodiment of the application provides a light source module and laser processing equipment, and relates to the field of optical devices. The light source module is used for improving the light spot quality of the light source module. The specific scheme includes that the light source module comprises a pulse laser, a first nonlinear optical crystal and a second nonlinear optical crystal. The pulse laser is used for outputting laser with a pulse width of 20ps or more. The first nonlinear optical crystal is used for receiving laser from the pulse laser, performing frequency conversion on the laser and outputting a first light beam. The second nonlinear optical crystal is used for receiving the first light beam from the first nonlinear optical crystal and outputting a second light beam, and the center wavelength of the second light beam is larger than that of the first light beam. And a light shaping element with a focal length of more than or equal to 80mm is arranged in the light path between the first nonlinear optical crystal and the second nonlinear optical crystal. The light source M2 factor of the light source module is smaller, the light beam quality and the light beam energy are higher, and the light spot quality is good.

Inventors

  • WANG PU
  • CUI YIFAN
  • CAO SHIYI
  • BIAN YUCHENG
  • SUI QINGLIN
  • HOU YUBIN
  • ZHANG QIAN

Assignees

  • 华为技术有限公司
  • 北京工业大学

Dates

Publication Date
20260508
Application Date
20241107

Claims (14)

  1. 1. A light source module, characterized in that the light source module comprises: A pulse laser for outputting laser light having a pulse width of 20ps or more; A first nonlinear optical crystal for receiving the laser light from the pulse laser, frequency-converting the laser light, and outputting a first light beam, and And a second nonlinear optical crystal for receiving the first light beam from the first nonlinear optical crystal and outputting a second light beam, wherein a center wavelength of the second light beam is larger than a center wavelength of the first light beam.
  2. 2. The light source module of claim 1, wherein the pulse laser is configured to output laser light having a pulse width of 50ps or more.
  3. 3. The light source module of claim 1 or 2, further comprising a light shaping element, wherein the focal length of the light shaping element is greater than or equal to 80mm; The second nonlinear optical crystal for receiving the first light beam from the first nonlinear optical crystal and outputting a second light beam includes: The light shaping element is used for receiving the first light beam from the first nonlinear optical crystal, converging the first light beam and outputting the first light beam, and the second nonlinear optical crystal is used for receiving the first light beam from the light shaping element and outputting the second light beam.
  4. 4. A light source module as recited in claim 3, wherein a spot diameter of the first light beam after the light shaping element is converged is greater than or equal to 30 μm.
  5. 5. The light source module of claim 1 or 2, wherein a spot diameter of the first light beam transmitted to the light incident surface of the second nonlinear optical crystal is greater than or equal to 30 μm.
  6. 6. The light source module of any one of claims 1-5, further comprising a third nonlinear optical crystal configured to amplify the second light beam from the second nonlinear optical crystal for output.
  7. 7. The light source module of claim 6, further comprising a fourth nonlinear optical crystal configured to amplify the second light beam from the third nonlinear optical crystal for output.
  8. 8. The light source module of any one of claims 1-7, further comprising a seed injection assembly for outputting a third light beam, the second nonlinear optical crystal further for receiving the third light beam from the seed injection assembly, the third light beam having a wavelength band at least partially coincident with a wavelength band of the second light beam.
  9. 9. The light source module of any one of claims 1-8, further comprising a reflective element for reflecting the second light beam from the second nonlinear optical crystal to the second nonlinear optical crystal; the second nonlinear optical crystal is further used for amplifying the second light beam from the reflecting element and outputting the second light beam.
  10. 10. The light source module of any one of claims 1-9, wherein the pulsed laser comprises: Any one of Yb-doped fiber laser, er-doped fiber laser, nd-doped fiber laser, tm-doped fiber laser, yb-YAG solid laser, nd-YVO 4 solid laser or titanium precious stone laser.
  11. 11. The light source module of any one of claims 1-10, wherein the first nonlinear optical crystal is a frequency doubling crystal.
  12. 12. A light source module, characterized in that the light source module comprises: A pulse laser for outputting laser light; The first nonlinear optical crystal is used for receiving the laser from the pulse laser, performing frequency conversion and outputting a first light beam; A light shaping element for receiving the first light beam from the first nonlinear optical crystal, converging the first light beam and outputting the first light beam, the focal length of the light shaping element being 80mm or more, and And a second nonlinear optical crystal for receiving the first light beam from the light shaping element and outputting a second light beam, wherein a center wavelength of the second light beam is greater than a center wavelength of the first light beam.
  13. 13. The light source module of claim 12, wherein the spot diameter of the first light beam converged by the light shaping element is greater than or equal to 30 μm.
  14. 14. A laser processing apparatus comprising a lens assembly and the light source module of any one of claims 1-13, the lens assembly receiving the second light beam from the light source module.

Description

Light source module and laser processing equipment Technical Field The application relates to the field of optical devices, in particular to a light source module and laser processing equipment. Background Laser processing is the most commonly used application of laser systems. The principle of laser processing is to use the thermal effect or photochemical reaction generated by the laser beam projected onto the surface of the material to complete the processing of the material. Including but not limited to laser welding, laser engraving, laser drilling, stereolithography, and the like. The laser light source is an important device of the laser processing equipment, and the light spot quality of the laser light source can directly influence the processing effect. Therefore, the application only improves the light spot quality of the laser light source. Disclosure of Invention The application provides a light source module and laser processing equipment, aiming at improving the facula quality of the light source module. In order to achieve the above purpose, the present application adopts the following technical scheme. In a first aspect, the present application provides a light source module. The light source module comprises a pulse laser, a first nonlinear optical crystal and a second nonlinear optical crystal. The pulse laser is used for outputting laser with a pulse width of 20ps or more. The first nonlinear optical crystal is used for receiving laser light from the pulse laser, performing frequency conversion on the laser light and outputting a first light beam. The second nonlinear optical crystal is used for receiving the first light beam from the first nonlinear optical crystal and outputting a second light beam, wherein the center wavelength of the second light beam is larger than that of the first light beam. Thus, the second light beam obtained after the laser with the pulse width larger than 20ps passes through the first nonlinear optical crystal and the second nonlinear optical crystal can obviously improve the light spot quality and the light beam energy of the second light beam. The pulse width of the laser light being greater than or equal to the M2 factor of the second light beam is advantageous in reducing the beam quality and beam energy of the second light beam compared to the pulse width of the laser light being less than 20 ps. With reference to the first aspect, in some possible implementations, the pulse laser is configured to output laser light with a pulse width greater than or equal to 50 ps. In this way, the beam quality and beam energy of the second beam can be further improved. With reference to the first aspect, in some possible implementations, the light source module further includes a light shaping element. The focal length of the light shaping element is greater than or equal to 80mm. The second nonlinear optical crystal is used for receiving the first light beam from the first nonlinear optical crystal and outputting a second light beam, and the light shaping element is used for receiving the first light beam from the first nonlinear optical crystal, converging the first light beam and then outputting the first light beam. The second nonlinear optical crystal is used for receiving the first light beam from the light shaping element and outputting the second light beam. Thus, the focal length of the light shaping element is larger than or equal to 80mm, the conversion efficiency of the second nonlinear optical crystal to the first light beam can be improved, and the energy of the center wavelength of the second light beam can be improved. With reference to the first aspect, in some realizable manners, a spot diameter of the first light beam after the focusing element is focused is greater than or equal to 30 μm. Therefore, the light spot diameter of the first light beam transmitted to the second nonlinear optical crystal is larger, so that the conversion efficiency of the second nonlinear optical crystal is improved, the energy of the second light beam is improved, and the efficiency of the light source module is improved. With reference to the first aspect, in some realizable manners, a spot diameter of the first light beam transmitted to the light incident surface of the second nonlinear optical crystal is greater than or equal to 30 μm. With reference to the first aspect, in some realizable modes, the light source module further includes a third nonlinear optical crystal. The third nonlinear optical crystal is used for amplifying the second light beam from the second nonlinear optical crystal and outputting the second light beam. Thus, the third nonlinear optical crystal performs optical parametric amplification on the second light beam and outputs the second light beam. The third nonlinear optical crystal can further increase the energy of the second light beam. With reference to the first aspect, in some realizable modes, the light source module further includes a four