CN-122000782-A - Laser light path thermal drift compensation device based on TEC and piezoelectric module

CN122000782ACN 122000782 ACN122000782 ACN 122000782ACN-122000782-A

Abstract

The invention relates to the technical field of laser application, and discloses a laser light path thermal drift compensation device based on a TEC and a piezoelectric module, which comprises a cathode, a semiconductor laser chip, an anode, a thermoelectric cooler, a ceramic plate, a lens, a telescopic deformation piezoelectric module and a fixed base; the device also comprises a control module, an optical path detection sensor, a high-voltage driving circuit, a position sensor and a temperature sensor. The dual active compensation mechanism is adopted, and the laser and the lens are cooperatively controlled, wherein the thermoelectric refrigerator is responsible for stabilizing the laser source, so that temperature drift is fundamentally inhibited, the piezoelectric module dynamically compensates the side deformation of the lens, the comprehensive stability of the system is obviously improved, and the compensation effect is obviously better than that of a single means. The temperature control precision of the thermoelectric refrigerator can reach +/-0.1 ℃, the piezoelectric module has nanoscale resolution and millisecond response speed, thermal deformation can be tracked and counteracted in real time, and long-term stability of an optical path is ensured.

Inventors

SHEN LIMEI
LIU CHANG
LIU ZHICHUN
KONG WUBIN
GE JIAN

Assignees

华中科技大学

Dates

Publication Date: 20260508
Application Date: 20260114

Claims (10)

1. Laser light path thermal drift compensation arrangement based on TEC and piezoelectric module, characterized in that includes: The semiconductor laser chip is used as a laser emission source and is respectively and electrically connected with the anode and the cathode; the thermoelectric refrigerator is used for absorbing or generating heat and accurately stabilizing the temperature of the semiconductor laser chip at a preset first target temperature value; the ceramic sheet plays roles of insulation, heat conduction and structural support; A lens for collimating the laser beam; The telescopic deformable piezoelectric module is used for accurately adjusting the height position of the lens in the vertical direction; a fixed base providing mechanical support and mounting reference for the whole device; The cold end of the thermoelectric refrigerator is contacted with the bottom of the substrate, the hot end of the thermoelectric refrigerator is contacted with the ceramic plate, the ceramic plate is positioned below the thermoelectric refrigerator, the ceramic plate and the piezoelectric module are both arranged on the fixed base, and the lens is arranged on the lens seat of the lens.
2. The laser light path thermal drift compensation device based on the TEC and the piezoelectric module according to claim 1, further comprising a control module, wherein the control module is electrically connected with the thermoelectric cooler and the piezoelectric module respectively, the control module drives the thermoelectric cooler to work through a built-in temperature control algorithm so as to keep the temperature of the semiconductor laser chip constant, and the control module generates a high-voltage driving signal through a built-in displacement control algorithm and applies the high-voltage driving signal to the piezoelectric module so as to dynamically adjust the height of the lens.
3. The laser light path thermal drift compensation device based on the TEC and the piezoelectric module according to claim 2, further comprising a light path detection sensor, wherein the light path detection sensor is used for collecting coordinate data of a laser spot on a detection surface in real time and is electrically connected with the control module and the piezoelectric module respectively.
4. The laser light path thermal drift compensation device based on the TEC and the piezoelectric module according to claim 3, wherein the light path detection sensor is a four-quadrant photoelectric detector, the effective detection surface size of the four-quadrant photoelectric detector is 4mm multiplied by 4mm, the response wavelength range is 400-1100nm, the position resolution is 0.1 mu m, and the response time is less than or equal to 1 mu s.
5. The laser optical path thermal drift compensation device based on the TEC and the piezoelectric module according to claim 1, further comprising a high-voltage driving circuit for amplifying and converting a low-voltage analog signal output by the control module into a high-precision high-voltage driving voltage required by the operation of the piezoelectric module, wherein the high-voltage driving circuit is electrically connected with the control module and the piezoelectric module respectively.
6. The laser optical path thermal drift compensation device based on the TEC and the piezoelectric module according to claim 5, further comprising a position sensor, wherein actual height data of the lens are collected in real time and fed back to the control module, a fixed end of the position sensor is arranged on the side face of the fixed base, and a detection end of the position sensor is connected to the side face of the lens seat of the lens through an elastic clamp.
7. The laser light path thermal drift compensation device based on the TEC and the piezoelectric module according to claim 6, wherein the position sensor is a miniature grating scale displacement sensor, a signal output end of the position sensor is connected with a communication interface of the control module through an RS485 interface, and a power end of the position sensor is connected with a 5V direct current power supply provided by the control module.
8. The laser light path thermal drift compensation device based on the TEC and the piezoelectric module according to claim 7, further comprising a temperature sensor for collecting temperature data of the semiconductor laser chip in real time, wherein the temperature sensor is adhered to the surface of the substrate through heat conducting silica gel, the temperature sensor is adjacent to the cold end of the thermoelectric cooler, a lead of the temperature sensor is connected to an ADC collecting channel of the control module through a shielding wire, and the temperature sensor is a platinum resistance temperature sensor.
9. The laser light path thermal drift compensation device based on the TEC and the piezoelectric module according to claim 1, wherein the temperature control precision of the thermoelectric cooler is +/-0.1 ℃, the piezoelectric module is a stacked piezoelectric ceramic actuator, the displacement resolution of the piezoelectric module is greater than 10 nanometers, and the maximum displacement stroke is greater than or equal to 30 micrometers.
10. The laser optical path thermal drift compensation device based on the TEC and the piezoelectric module according to claim 1, wherein the ceramic chip is an alumina ceramic chip, and the fixed base is made of invar alloy with a low thermal expansion coefficient.

Description

Laser light path thermal drift compensation device based on TEC and piezoelectric module Technical Field The invention relates to the technical field of laser application, in particular to a laser light path thermal drift compensation device based on a TEC and a piezoelectric module. Background Laser transmitters (LDs) and their associated collimating lenses are core components in modern optical systems, however, they often cause thermal effects due to self-heating or ambient temperature changes during operation. The method is characterized in that the laser chip and the packaging material thereof generate thermal expansion and contraction under the influence of temperature, so that the laser light-emitting point generates micron-sized physical position deviation, and meanwhile, the lens also generates change of the optical center height caused by thermal deformation. These relative positional deviations can change the propagation path of the laser beam, thereby causing far-field spot drift or focal position variation, and seriously affecting the accuracy and stability of the optical system. The current common solutions include both passive thermal compensation and single temperature control. Passive thermal compensation is typically used to fabricate the brackets and base from low coefficient of thermal expansion materials in an attempt to counteract the deformation by structural "co-expansion and co-drop", but this approach is complex in design and difficult to fully compensate for inconsistent deformations due to material differences and heat source asymmetry. The single temperature control means can control the temperature of the laser, so as to stabilize the wavelength and output power of the laser and inhibit the deformation of the laser to a certain extent, but the method can not solve the problem of thermal drift of the lens and the lens base caused by heating or environmental temperature change. In summary, the prior art still cannot efficiently and comprehensively solve the problem of optical path drift of a laser optical system caused by a thermal effect. Therefore, we need to propose a laser light path thermal drift compensation device based on TEC and piezoelectric module, which can actively compensate the deformation of the laser and the lens caused by temperature change in real time, and ensure the long-term stability of the height and angle of the emergent laser light path. Disclosure of Invention The invention aims to provide a laser light path thermal drift compensation device based on a TEC and a piezoelectric module, which can actively compensate the deformation of a laser and a lens caused by temperature change in real time, ensure the long-term stability of the height and the angle of an emergent laser light path and solve the problems in the background technology. In order to achieve the purpose, the invention provides the following technical scheme that the laser light path thermal drift compensation device based on the TEC and the piezoelectric module comprises: The semiconductor laser chip is used as a laser emission source and is respectively and electrically connected with the anode and the cathode; the thermoelectric refrigerator is used for absorbing or generating heat and accurately stabilizing the temperature of the semiconductor laser chip at a preset first target temperature value; the ceramic sheet plays roles of insulation, heat conduction and structural support; A lens for collimating the laser beam; The telescopic deformable piezoelectric module is used for accurately adjusting the height position of the lens in the vertical direction; a fixed base providing mechanical support and mounting reference for the whole device; The cold end of the thermoelectric refrigerator is contacted with the bottom of the substrate, the hot end of the thermoelectric refrigerator is contacted with the ceramic plate, the ceramic plate is positioned below the thermoelectric refrigerator, the ceramic plate and the piezoelectric module are both arranged on the fixed base, and the lens is arranged on the lens seat of the lens. Preferably, the lens height adjusting device further comprises a control module, wherein the control module is respectively and electrically connected with the thermoelectric refrigerator and the piezoelectric module, the control module drives the thermoelectric refrigerator to work through a built-in temperature control algorithm so as to keep the temperature of the semiconductor laser chip constant, and the control module generates a high-voltage driving signal through a built-in displacement control algorithm and applies the high-voltage driving signal to the piezoelectric module so as to dynamically adjust the lens height. Preferably, the device further comprises an optical path detection sensor for collecting coordinate data of the laser light spot on the detection surface in real time, wherein the optical path detection sensor is electrically connected with the cont