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CN-122000788-A - High-speed direct-tuning surface-emitting laser based on optical-optical resonance effect

CN122000788ACN 122000788 ACN122000788 ACN 122000788ACN-122000788-A

Abstract

The invention provides a high-speed direct-tuning surface-emitting laser based on an optical-optical resonance effect, and relates to the technical field of semiconductor lasers. The laser introduces an optical-optical resonance effect and a detuning loading effect, and forms a composite cavity through an active phase region fed back by the integrated part and a transparent optical feedback region. The laser integrates the L-shaped second-order surface grating, the period number and the waveguide width of the L-shaped second-order surface grating are precisely controlled, the near Gaussian surface emission high-efficiency coupling output is realized, the PPR effect is generated by optical power feedback with a specific proportion, and the bandwidth of the laser is enhanced. The invention has the advantages of high bandwidth, surface emission, high temperature stability, high anti-reflection property, easy integration and the like.

Inventors

  • MA XIANG
  • HUANG JUNLE
  • SHEN XIANG
  • ZHOU ZIQI

Assignees

  • 宁波大学

Dates

Publication Date
20260508
Application Date
20260317

Claims (6)

  1. 1. The high-speed direct-tuning surface emitting laser based on the optical-optical resonance effect is characterized in that the laser is of a horizontal cavity structure, and a feedback area, a DFB area, an active phase area and a surface emitting area are sequentially integrated along the optical propagation direction; the feedback area and the DFB area are etched with first-order gratings (11), wherein the first-order gratings of the feedback area are used for providing optical feedback, and the first-order gratings of the DFB area are bands A first order grating (12) with a phase shift of/4 as a main lasing region, in which The surface emitting region is etched with an L-shaped second order surface grating (14) for realizing the vertical surface emitting output of the light beam and providing partial optical feedback.
  2. 2. The high-speed direct-tuning surface-emitting laser based on the optical-optical resonance effect according to claim 1, wherein the laser comprises a P back electrode (9), a substrate (8), a tunnel junction (7), a lower waveguide layer (6), an oxide layer (5), an active region (4) and an upper waveguide layer (3) which are sequentially stacked from bottom to top; The middle position of the upper surface of the upper waveguide layer (3) is etched with the grating, and the first-order grating (11) and the band are sequentially arranged from left to right The optical fiber comprises a first-order grating (12) with a phase shift of/4, a grating-free waveguide (13) and an L-shaped second-order surface grating (14), wherein n electrodes (1) are arranged on a feedback area, a DFB area and an active phase area, and the n electrodes (1) are positioned on two sides above an upper waveguide layer (3) and are connected through n contact layers (2) on two sides of the upper waveguide layer (3).
  3. 3. A high-speed direct-tuning surface-emitting laser based on the optical-optical resonance effect according to claim 2, characterized in that the active region (4) is a quantum dot structure or a quantum well gain structure.
  4. 4. A high speed direct tunable surface emitting laser based on the optical-optical resonance effect according to claim 2, characterized in that the L-shaped second order surface grating (14) is used to achieve feedback and directional surface emitting output of a specific power ratio.
  5. 5. A high-speed direct-tuning surface-emitting laser based on optical-optical resonance effect according to claim 2, characterized in that the active phase region is used for adjusting the laser phase, and that in combination with the power-section feedback function of the L-shaped second-order surface grating (14), an additional mode is introduced in the cavity to form the optical-optical resonance effect.
  6. 6. The high-speed direct-tuning surface emitting laser based on optical-optical resonance effect according to claim 2, wherein the feedback region is configured to provide a reflecting surface for the laser, and the laser lasing spectrum is located at a falling edge of the reflection spectrum by adjusting the position of the reflection spectrum, so as to generate a detuning loading effect to increase the direct-tuning bandwidth of the laser.

Description

High-speed direct-tuning surface-emitting laser based on optical-optical resonance effect Technical Field The invention belongs to the technical field of semiconductor lasers, and relates to a high-speed direct-tuning surface-emitting laser based on an optical-optical resonance effect. Background With rapid development of ChatGPT, deepSeek and other large-model artificial intelligence technologies, the annual increase of the global AI training data amount is up to 140% (statistics in 2024 by Nature Photonics), and the requirements of data centers and communication networks on transmission rate are rapidly increased, and meanwhile, the development and upgrading of an optical communication system are promoted. The national high-end optical chip field is dependent on import for a long time, especially in the laser market with the speed of more than 25G, the localization rate is low, and the whole level of the direct-tuning surface-emitting laser has a great gap with the international optical chip. From the market demand, with the rapid development of Artificial Intelligence (AI), cloud computing, 5G/6G communication and other technologies, global data traffic has shown explosive growth, and demands for high-speed optical communication chips have shown an exponentially rising trend. In a short-distance optical communication system, a direct-tuning link becomes a mainstream solution because of the advantages of small volume, low cost, low power consumption, easy array integration and the like. Vertical-Cavity Surface-emitting lasers (Vertical-Cavity Surface-EMITTING LASER, VCSEL) have been widely used in the fields of data centers, optical interconnects, and the like, by virtue of the characteristics of high-speed, low-cost, and easy two-dimensional array integration. However, most of the existing VCSELs operate in multimode states and are coupled with multimode optical fibers, so that the problem of inaccurate wavelength control exists, and the requirements of a wavelength division multiplexing system are difficult to meet. Currently, the modulation bandwidth of commercial direct-tuning lasers is usually not more than 25 GHz, which has become a key bottleneck for the development of a power network [1]. In long-distance transmission scenes such as a metropolitan area network and a wide area network, the long-wavelength VCSEL (working in 1310 nm and 1550 nm low-loss and low-dispersion communication windows) can remarkably reduce the number of relay stations and the construction cost by virtue of low-mode dispersion and low-signal attenuation characteristics, meets the long-distance data transmission requirement, can be integrated in a two-dimensional array, and is expected to replace partial Electro-absorption modulation lasers (Electro-Absorption Modulated Laser, EML) with high cost and large volume power consumption, silicon optical modulators and the like. However, the development of the long wavelength VCSEL faces a significant challenge in that, due to the characteristics of the InP-based low refractive index difference material, tens or even hundreds of layers are required to ensure sufficient reflectivity, which results in difficulty in development, and has problems of limited modulation bandwidth, poor coupling efficiency with a single mode fiber, and the like. In addition, the performance of the high-speed direct-tuning semiconductor laser in high-temperature and high-reflection environments is remarkably attenuated, and the application range of the high-speed direct-tuning semiconductor laser is further limited. Under the background, research on high-temperature-resistant and anti-reflection high-bandwidth surface emitting lasers is carried out to break through the bottleneck of the prior art and realize autonomous innovation. Disclosure of Invention The invention aims to overcome the defects that the conventional surface-emitting laser is limited in modulation bandwidth and poor in high-temperature performance, and the conventional direct-tuning DFB laser is not easy to integrate and test, and provides a single-mode surface-emitting laser with high direct-tuning bandwidth, high output efficiency, wide temperature working range and high anti-reflection characteristic. In order to solve the technical problems, the implementation scheme of the invention is as follows: The quantum dot high-speed direct-tuning surface-emitting laser based on the optical-optical resonance effect is of a horizontal cavity structure, and a feedback area, a DFB area, an active phase area and a surface-emitting area are sequentially integrated along the optical propagation direction; the first-order grating of the feedback area is used for providing optical feedback, and the first-order grating of the DFB area is a band First order grating of/4 phase shift as main lasing region, whereinThe surface emitting area is etched with an L-shaped second-order surface grating for realizing the vertical surface emitting output of the light