CN-122001171-A - Single-motor direct-drive two-dimensional plane flexible nano motion platform

CN122001171ACN 122001171 ACN122001171 ACN 122001171ACN-122001171-A

Abstract

The application relates to the technical field of precise positioning, in particular to a single-motor direct-drive two-dimensional plane flexible nano motion platform, which comprises a two-dimensional flexible guide mechanism, a positioning mechanism and a positioning mechanism, wherein the two-dimensional flexible guide mechanism comprises a fixed frame, an X-direction flexible piece, a Y-direction flexible piece and a tail end output device; the electromagnetic driving mechanism comprises permanent magnets, X-direction voice coil motors and Y-direction voice coil motors, wherein the permanent magnets are installed in a fixed frame, the permanent magnets are provided with first side edges and second side edges which are distributed oppositely, two sides of each first side edge are symmetrically provided with a group of X-direction voice coil motors, gaps are reserved between each X-direction voice coil motor and the permanent magnets, two sides of each second side edge are symmetrically provided with a group of Y-direction voice coil motors, and gaps are reserved between each Y-direction voice coil motor and the permanent magnets. Compared with the traditional multi-mover layout, the single-mover design not only greatly simplifies the structure and reduces the complexity of the system, but also has more compact overall structure, fundamentally eliminates the coupling interference among the multiple movers and obviously improves the motion decoupling precision.

Inventors

YANG MIAO
CAO SHUAIKANG
LI BIAO

Assignees

中山大学

Dates

Publication Date: 20260508
Application Date: 20260210

Claims (10)

1. The utility model provides a single-action child directly drives flexible nanometer motion platform in two-dimensional plane which characterized in that includes: The two-dimensional flexible guide mechanism comprises a fixed frame, an X-direction flexible piece, a Y-direction flexible piece and a tail end output device, wherein the tail end output device is fixedly connected with the fixed frame, and the fixed frame is configured to drive the X-direction flexible piece to generate flexible deformation corresponding to the movement when moving in the X direction; The electromagnetic driving mechanism comprises permanent magnets, X-direction voice coil motors and Y-direction voice coil motors, wherein the permanent magnets are installed in the fixed frame, the X-direction voice coil motors and the Y-direction voice coil motors share the permanent magnets, the permanent magnets are provided with first side edges which are distributed oppositely along the X direction and second side edges which are distributed oppositely along the Y direction, the X-direction voice coil motors are provided with two groups, the Y-direction voice coil motors are provided with two groups, a group of X-direction voice coil motors are symmetrically distributed on two sides of each first side edge along the thickness direction of the permanent magnets, a gap is reserved between each X-direction voice coil motor and each permanent magnet, a group of Y-direction voice coil motors are symmetrically distributed on two sides of each second side edge along the thickness direction of the permanent magnets, and a gap is reserved between each Y-direction voice coil motor and each permanent magnet.
2. The single-rotor direct-drive two-dimensional planar flexible nanometer motion platform of claim 1, wherein each X-direction voice coil motor comprises an X-direction coil and a first magnetic yoke, the first magnetic yoke penetrates through the X-direction coil, two ends of the first magnetic yoke extend out of two ends of the X-direction coil to form a first end and a second end, the first end is close to the permanent magnet, the second end is far away from the permanent magnet, the second ends of the two first magnetic yokes on the same side of the permanent magnet are connected with each other, each Y-direction voice coil motor comprises a Y-direction coil and a second magnetic yoke, the second magnetic yoke penetrates through the Y-direction coil, two ends of the second magnetic yoke extend out of two ends of the Y-direction coil to form a third end and a fourth end, the fourth end is close to the permanent magnet, the fourth end is far away from the permanent magnet, and the first ends of the two second magnetic yokes on the same side of the permanent magnet are connected with each other.
3. The single-action direct-drive two-dimensional plane flexible nano motion platform of claim 2, wherein the second ends of the two first magnetic yokes on the same side of the permanent magnet are provided with mutually matched step structures, and the fourth ends of the two second magnetic yokes on the same side of the permanent magnet are provided with mutually matched step structures.
4. The single-motor direct-drive two-dimensional plane flexible nano motion platform of claim 2, wherein the X-direction voice coil motor is positioned in the Y-direction voice coil motor, and the second end head and the fourth end head which are mutually connected are connected through a magnetic yoke connecting plate.
5. The single-action direct-drive two-dimensional plane flexible nano motion platform as set forth in claim 2, further comprising damping plates distributed on both sides of the permanent magnet along a thickness direction of the permanent magnet, wherein the damping plates are connected with the electromagnetic driving mechanism, two first fixing grooves distributed along the X direction and two second fixing grooves distributed along the Y direction are formed in the damping plates, the first end of the first magnetic yoke is assembled in the first fixing grooves, and the second end of the second magnetic yoke is assembled in the second fixing grooves.
6. The single-acting-sub direct-drive two-dimensional planar flexible nano motion platform as set forth in claim 2, wherein the two-dimensional flexible guide mechanism further comprises a base, an intermediate connection frame, a first outer frame and a second outer frame, the base is distributed on two sides of the fixed frame along the X direction, the terminal output devices are distributed on two sides of the top of the fixed frame along the X direction, the first outer frame is distributed on two sides of the fixed frame along the Y direction, the second outer frame is distributed on two sides of the fixed frame along the X direction, the intermediate connection frame is arranged between each base and the fixed frame, the X-direction flexible members are arranged on two ends of the first outer frame along the X direction, each X-direction flexible member comprises two first sheets distributed at intervals along the X direction, one ends of the two first sheets are commonly connected on one end of the first outer frame, the other sides of the first sheets are connected with the fixed frame, the other sides of the first outer frame are connected with the intermediate connection frame along the X direction, the two sides of the second sheets are commonly distributed on two sides of the first outer frame along the Y direction, the two sides of the second sheets are commonly distributed on two sides of the first sheets along the Y direction, and the two sides of the first sheets are commonly distributed on two sides of the first sheets.
7. The single-rotor direct-drive two-dimensional plane flexible nano motion platform as set forth in claim 6, wherein the base is of a U-shaped structure, the Y-direction flexible member and the second outer frame are both located inside the base, an inwardly extending boss is disposed at an opening end of the base, and one side of one second reed is connected to the boss inside the opening end of the base.
8. The single-rotor direct-drive two-dimensional plane flexible nano motion platform of claim 6, wherein the two-dimensional flexible guiding mechanism further comprises anti-torsion frames horizontally fixed at the bottoms of the intermediate connecting frames.
9. The single-rotor direct-drive two-dimensional plane flexible nano motion platform as set forth in claim 6, further comprising a base and a support, wherein the support is of a shape of a Chinese character 'ji', the support comprises a top beam and first side plates vertically connected to two ends of the top beam, bottoms of the two first side plates are fixed on the base, the top beam spans over the top of the electromagnetic driving mechanism, and the top beam is fixedly connected with the fourth ends of the two second yokes.
10. The single-rotor direct-drive two-dimensional plane flexible nano motion platform of claim 9, wherein second side plates are arranged on two sides of each base, and the second side plates are fixedly connected with the base.

Description

Single-motor direct-drive two-dimensional plane flexible nano motion platform Technical Field The application relates to the technical field of precise positioning, in particular to a single-motor direct-drive two-dimensional plane flexible nano motion platform. Background In the fields of optical measurement, ultra-precise machining, semiconductor equipment and the like, urgent demands for high-frequency response, compactness, large stroke and high bandwidth are provided for a precise motion platform. The traditional rigid precision motion platform has the problems of clearance, abrasion, energy loss and the like, and cannot realize the nano-scale motion precision. The flexible precision motion platform transmits motion and force through elastic deformation of the flexible mechanism, so that the problems of gaps and abrasion are avoided, the motion precision of the flexible precision motion platform can reach the nanometer level, and meanwhile, the flexible precision motion platform has higher frequency response. At present, an electromagnetic direct-drive type two-dimensional flexible precision motion platform directly drives a flexible guide mechanism through a voice coil motor, so that a force transmission path is shortened, and the dynamic performance of a system is improved. However, the driving units are generally distributed around the motion platform, the structural layout is complex, and the multi-rotor driving is easy to introduce coupling interference, so that the motion decoupling precision and the platform stability are affected. Disclosure of Invention The present application aims to solve, at least to some extent, one of the above technical problems in the prior art. Therefore, the embodiment of the application provides the single-mover direct-drive two-dimensional plane flexible nano motion platform, which has a more compact overall structure, eliminates coupling interference among multiple movers, and remarkably improves motion decoupling precision. A single-action direct-drive two-dimensional planar flexible nano motion platform, comprising: The two-dimensional flexible guide mechanism comprises a fixed frame, an X-direction flexible piece, a Y-direction flexible piece and a tail end output device, wherein the tail end output device is fixedly connected with the fixed frame, and the fixed frame is configured to drive the X-direction flexible piece to generate flexible deformation corresponding to the movement when moving in the X direction; The electromagnetic driving mechanism comprises a permanent magnet, an X-direction voice coil motor and a Y-direction voice coil motor, wherein the permanent magnet is installed in the fixed frame, the X-direction voice coil motor and the Y-direction voice coil motor share the permanent magnet, the permanent magnet is provided with a first side edge which is distributed oppositely along the X direction and a second side edge which is distributed oppositely along the Y direction, the X direction is intersected with the Y direction, the X-direction voice coil motor is provided with two groups, and the Y-direction voice coil motor is provided with two groups; The X-direction voice coil motors are symmetrically distributed on two sides of each first side along the thickness direction of the permanent magnet, gaps are reserved between each X-direction voice coil motor and the permanent magnet, the Y-direction voice coil motors are symmetrically distributed on two sides of each second side along the thickness direction of the permanent magnet, and gaps are reserved between each Y-direction voice coil motor and the permanent magnet. In an alternative or preferred embodiment, each of the X-direction voice coil motors includes an X-direction coil and a first yoke, the first yoke is inserted into the X-direction coil, two ends of the first yoke extend from two ends of the X-direction coil to form a first end and a second end, the first end is close to the permanent magnet, the second end is far away from the permanent magnet, the second ends of the two first yokes on the same side of the permanent magnet are connected with each other, each of the Y-direction voice coil motors includes a Y-direction coil and a second yoke, the second yoke is inserted into the Y-direction coil, two ends of the second yoke extend from two ends of the Y-direction coil to form a third end and a fourth end, the third end is close to the permanent magnet, the fourth end is far away from the permanent magnet, and the fourth ends of the two second yokes on the same side of the permanent magnet are connected with each other. In an alternative or preferred embodiment, the second ends of the two first yokes on the same side of the permanent magnet are provided with mutually matched step structures, and the fourth ends of the two second yokes on the same side of the permanent magnet are provided with mutually matched step structures. In an alternative or preferred embodiment, the X-direction