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CN-122001195-A - MEMS device high-voltage driving circuit for OCS all-optical switching

CN122001195ACN 122001195 ACN122001195 ACN 122001195ACN-122001195-A

Abstract

The invention discloses a high-voltage driving circuit of an MEMS device for OCS (optical switching system), which relates to the technical field of optical communication and comprises a micro control module, an error amplification module, a high-voltage current amplification module, a feedback module and a high-voltage output module, wherein the micro control module is used for providing programmable direct-current voltage, the error amplification module is used for comparing the direct-current voltage with feedback voltage, the high-voltage current amplification module is used for performing voltage fine adjustment and micro current amplification, the feedback module is used for performing voltage division and providing feedback voltage, and the high-voltage output module is used for outputting a high-voltage driving signal. Compared with the prior art, the high-voltage driving circuit for the OCS all-optical switching MEMS device has the advantages of being low in cost, high in flexibility and expandability, capable of conveniently changing high-voltage output parameters, meeting the requirements of different application scenes, good in anti-interference capability, capable of stably working in a complex electromagnetic environment and capable of providing reliable high-voltage driving for MEMS micromirrors.

Inventors

  • HUANG MIN
  • YIN QI
  • XIE JIAN

Assignees

  • 武汉云智光联科技有限公司

Dates

Publication Date
20260508
Application Date
20260120

Claims (7)

  1. 1. The MEMS device high-voltage driving circuit for OCS all-optical exchange is characterized by comprising a micro control module, an error amplifying module, a high-voltage current amplifying module, a feedback module and a high-voltage output module; The micro control module is used for providing a programmable direct-current voltage; The error amplifying module is connected with the micro control module and the feedback module and is used for comparing the direct current voltage with the feedback voltage provided by the feedback module, comparing the voltage difference between the direct current voltage and the feedback voltage and outputting an error signal; The high-voltage current amplifying module is connected with the error amplifying module and is used for accessing an external high-voltage direct current source, carrying out voltage fine adjustment and micro current amplifying treatment on the error signal and generating a high-voltage driving signal; The feedback module is connected with the high-voltage current amplifying module and is used for carrying out voltage division processing on the high-voltage driving signal and providing feedback voltage; The high-voltage output module is connected with the high-voltage current amplifying module and is used for receiving and outputting high-voltage driving signals and driving the MEMS device.
  2. 2. The MEMS device high-voltage driving circuit for OCS all-optical switching according to claim 1, wherein the micro-control module comprises a micro-controller VG1, and the error amplifying module comprises a resistor R8, a capacitor C1, a resistor R7, an operational amplifier U1, a voltage stabilizing source J2 and a resistor R13; The model of the operational amplifier U1 is OPAx and 196, the in-phase end of the operational amplifier U1 is connected with the positive end of the microcontroller VG1, the negative end of the controller VG1 is grounded, the power end and the ground end of the operational amplifier VG1 are respectively connected with the voltage stabilizing source J2 and the ground end, the inverting end of the operational amplifier U1 is connected with the first end of the resistor R8 and the first end of the resistor R7 through the capacitor C1, and the second end of the resistor R7 is connected with the output end of the operational amplifier U1 and the first end of the resistor R13.
  3. 3. A MEMS device high voltage driving circuit for OCS all-optical switching as recited in claim 2, wherein the resistor R7 and the capacitor C1 form a frequency compensation network.
  4. 4. The MEMS device high voltage driving circuit for OCS all-optical switching of claim 2, wherein the error amplification module comprises a transistor T2, a resistor R9, a resistor R10, a transistor T3, a resistor R2, a resistor R12, a high voltage dc source J1, a resistor R1, and a transistor T1; The second end of base connecting resistance R13 of triode T2, triode T2's projecting pole passes through resistance R9 and connects steady voltage source J2, triode T3's base is connected to triode T2's collecting electrode and passes through resistance R10 ground connection, triode T3's projecting pole ground connection, triode T3's collecting electrode connecting resistance R12's one end and pass through resistance R2 and connect high-voltage direct current source J1 and resistance R1's one end, triode T1's collecting electrode is connected to resistance R1's the other end, triode T1's base connecting resistance R12's the other end.
  5. 5. The MEMS device high voltage driving circuit for OCS all-optical switching as recited in claim 4, wherein the transistor T2 and the transistor T3 form a complementary push-pull structure for voltage trimming of the error signal.
  6. 6. The MEMS device high voltage driving circuit for OCS all-optical switching as defined in claim 5, wherein the transistor T1 and the transistor T3 form a common emitter or darlington current amplifying structure, and the micro current is amplified.
  7. 7. The MEMS device high voltage driving circuit for OCS all-optical switching of claim 4, wherein the feedback module comprises a resistor R5, a resistor R3, a resistor R6, and a resistor R4; One end of the resistor R5 is connected with the emitter of the triode T1 and the driving port VF1, the other end of the resistor R5 is connected with the second end of the resistor R8, one end of the resistor R4 and one end of the resistor R6 through the resistor R3, and the other end of the resistor R4 and the other end of the resistor R6 are grounded.

Description

MEMS device high-voltage driving circuit for OCS all-optical switching Technical Field The invention relates to the technical field of optical communication, in particular to a MEMS device high-voltage driving circuit for OCS all-optical switching. Background In the field of optical communication technology, an all-optical switching technology is receiving attention as a key technology for realizing high-speed and large-capacity optical information transmission and processing. The OCS (Optical Circuit Switch) all-optical switching system is taken as an important component part, and the optimization and promotion of the performance of the all-optical switching system have important significance for the development of the whole optical communication network. The core of the OCS all-optical switching technology is to eliminate a photoelectric conversion link through direct routing in an optical domain. The current mainstream technology paths include MEMS Micro mirror arrays, digital Liquid Crystal (DLC) and piezoceramic (DLBS) schemes, and MEMS (Micro-Electro-MECHANICAL SYSTEMS) devices are used as core elements of an OCS all-optical switching system, and the improvement of the driving technology directly affects the overall performance of the system. In the field of high-precision high-voltage signal output, related technology and product layout in China of a DAC (digital-to-analog converter) driving circuit capable of stably driving 150V high voltage are still blank. In particular, the current domestic market lacks high voltage DAC core devices like ADI corporation AD 45335. In the situations that the domestic enterprises need high-voltage analog signal output (such as high-voltage sensor calibration, precise high-voltage power supply debugging and the like), the complex scheme of multi-device combination is forced to be adopted, or only the multi-device combination is needed to be withdrawn, and then a low-precision alternative circuit is selected, so that the application requirements of high precision and high stability cannot be met, miniaturization and low-cost design of products are difficult to realize, and therefore, the field of MEMS device high-voltage driving circuits for OCS all-optical exchange is urgently needed. Disclosure of Invention The embodiment of the invention provides a MEMS device high-voltage driving circuit for OCS all-optical switching, which is used for solving the problems in the background technology. According to the embodiment of the invention, the MEMS device high-voltage driving circuit for OCS all-optical exchange comprises a micro control module, an error amplifying module, a high-voltage current amplifying module, a feedback module and a high-voltage output module; The micro control module is used for providing a programmable direct-current voltage; The error amplifying module is connected with the micro control module and the feedback module and is used for comparing the direct current voltage with the feedback voltage provided by the feedback module, comparing the voltage difference between the direct current voltage and the feedback voltage and outputting an error signal; The high-voltage current amplifying module is connected with the error amplifying module and is used for accessing an external high-voltage direct current source, carrying out voltage fine adjustment and micro current amplifying treatment on the error signal and generating a high-voltage driving signal; The feedback module is connected with the high-voltage current amplifying module and is used for carrying out voltage division processing on the high-voltage driving signal and providing feedback voltage; The high-voltage output module is connected with the high-voltage current amplifying module and is used for receiving and outputting high-voltage driving signals and driving the MEMS device. As a still further scheme of the invention, the micro control module comprises a microcontroller VG1, and the error amplification module comprises a resistor R8, a capacitor C1, a resistor R7, an operational amplifier U1, a voltage stabilizing source J2 and a resistor R13; preferably, the model of the operational amplifier U1 is OPAx-196 operational amplifier, the in-phase end of the operational amplifier U1 is connected with the positive end of the microcontroller VG1, the negative end of the controller VG1 is grounded, the power end and the ground end of the operational amplifier VG1 are respectively connected with the voltage stabilizing source J2 and the ground end, the inverting end of the operational amplifier U1 is connected with the first end of the resistor R8 and the first end of the resistor R7 through the capacitor C1, and the second end of the resistor R7 is connected with the output end of the operational amplifier U1 and the first end of the resistor R13. As a still further aspect of the invention, resistor R7 and capacitor C1 form a frequency compensation network. As a still further scheme of the in