CN-122001242-A - Bending actuation type four-degree-of-freedom micro-motion platform of double piezoelectric driver and excitation method thereof

CN122001242ACN 122001242 ACN122001242 ACN 122001242ACN-122001242-A

Abstract

The invention provides a bending-actuation type four-degree-of-freedom micro-motion platform of a double piezoelectric driver and an excitation method thereof, and belongs to the technical field of image stabilization and vibration suppression platforms, wherein the micro-motion platform comprises a tail end platform, eight first bolts, two flexible hinges, two amplitude transformers, four strain gauges, two piezoelectric drivers, two second bolts and a base; the flexible hinge is used for transmitting linear and bending motions, and the piezoelectric driver can respectively realize displacement output in a bending mode in the up-down direction and the left-right direction under the control of two paths of voltages. By coordinating the bending directions of the two piezoelectric drivers, the end platform can realize translational movement along the Y axis and the Z axis and rotational movement around the Y axis and the Z axis, thereby completing four-degree-of-freedom precise micro-adjustment. The invention has compact structure, less driver quantity, quick response and high precision, and is suitable for application scenes with strict requirements on optical imaging stability, such as aerospace, navigation and the like.

Inventors

GUAN JINGHAN
LIU YINGXIANG
DENG JIE
ZHANG SHIJING
LI JING
LIU JUNKAO

Assignees

哈尔滨工业大学

Dates

Publication Date: 20260508
Application Date: 20260227

Claims (10)

1. A bending actuation type four-degree-of-freedom micro-motion platform of a double piezoelectric driver is characterized in that: The micro-motion platform comprises a tail end platform (1), two flexible hinges (2), two amplitude transformers (4), two piezoelectric drivers (6), two second bolts (7) and a base (8); Screw holes are formed in the two axial end faces of the amplitude transformer (4), a through hole is formed in the axial direction of the piezoelectric driver (6), one side end face of the piezoelectric driver (6) is tightly attached to the base (8), and the other side end face of the piezoelectric driver is tightly attached to the end face of the amplitude transformer (4); The base (8) is provided with two through holes, a screw rod part of the second bolt (7) penetrates through the through hole of the base (8) and the through hole of the piezoelectric driver (6) and is fixed on the end face of the amplitude transformer (4), a nut part of the second bolt (7) is close to the outer side face of the base (8), the axes of the second bolt (7), the piezoelectric driver (6) and the amplitude transformer (4) are overlapped, and the axes of the two piezoelectric drivers (6) are overlapped; The tail end platform (1) is horizontally arranged, threaded holes are formed in the side face of the tail end platform (1), and through holes are formed in two ends of the flexible hinge (2); The micro-motion platform is symmetrical with respect to the end platform (1).
2. The micro motion platform according to claim 1, wherein: The micro-motion platform also comprises a first bolt (3); The number of the first bolts (3) is 4×n, wherein n is a positive integer; the lower end surface of the flexible hinge (2) is fixedly connected with the amplitude transformer (4) through a first bolt (3); The upper end face of the flexible hinge (2) is fixedly connected with the tail end platform (1) through a first bolt (3).
3. The micro motion platform according to claim 2, wherein: The two piezoelectric drivers (6) are provided with a grounding electrode and two control electrodes; The piezoelectric driver (6) is bent upward when a positive voltage is applied between the first control electrode and the ground electrode, and the piezoelectric driver (6) is bent downward when a negative voltage is applied between the first control electrode and the ground electrode; the piezoelectric driver (6) bends leftward when a positive voltage is applied between the second control electrode and the ground electrode, and the piezoelectric driver (6) bends rightward when a negative voltage is applied between the second control electrode and the ground electrode.
4. The micro motion platform according to claim 3, wherein: the piezoelectric driver (6) is any one of a stacked structure, a patch structure or a piezoelectric tube and is used for realizing bending motion.
5. The micro motion platform according to claim 4, wherein: The micro-motion platform also comprises a strain gauge (5); The strain gauge (5) is adhered to a sensitive deformation area of the piezoelectric driver (6) and at least comprises a piece in the up-down and left-right directions, and is used for decoupling and measuring bending strain.
6. The micro motion platform according to claim 5, wherein: the flexible hinge (2) is in threaded connection, cementing or welding with the tail end platform (1) and the amplitude transformer (4) in a fixed connection mode.
7. The micro motion platform according to claim 6, wherein: the flexible hinge (2) is in a biaxial symmetry type or universal type and is used for transmitting motion in more than two directions of straight line and bending.
8. A method for exciting a bending-actuated four-degree-of-freedom micro-motion platform of a double piezoelectric actuator is characterized in that the method is based on the bending-actuated four-degree-of-freedom micro-motion platform of the double piezoelectric actuator according to any one of claims 1 to 7; when positive and negative alternating voltages are applied between the first control electrode and the grounding electrode, the two piezoelectric drivers (6) bend upwards or downwards simultaneously and are used for driving the tail end platform (1) to translate along the Z axis; when positive and negative alternating voltages are applied between the second control electrode and the grounding electrode, the two piezoelectric drivers (6) bend leftwards or rightwards simultaneously and are used for driving the tail end platform (1) to translate along the Y axis; When a positive voltage is applied between the first control electrode and the grounding electrode of one piezoelectric driver (6) and a negative voltage is applied between the first control electrode and the grounding electrode of the other piezoelectric driver (6), one piezoelectric driver (1) bends upwards, and the other piezoelectric driver (6) bends downwards, so that the terminal platform (1) is driven to rotate around the Y axis; when a positive voltage is applied between the second control electrode and the ground electrode of one piezoelectric driver (6) and a negative voltage is applied between the second control electrode and the ground electrode of the other piezoelectric driver (6), the one piezoelectric driver (6) bends leftwards, and the other piezoelectric driver (6) bends rightwards, so that the end platform (1) is driven to rotate around the Z axis.
9. A computer apparatus device system comprising a memory, a processor and a computer program stored on the memory, wherein the processor executes the computer program to perform the steps of the method of claim 8.
10. A computer readable storage medium having stored thereon a computer program/instruction which when executed by a processor implements the steps of the method of claim 8.

Description

Bending actuation type four-degree-of-freedom micro-motion platform of double piezoelectric driver and excitation method thereof Technical Field The invention belongs to the technical field of image stabilization and vibration suppression platforms, and particularly relates to a bending-actuated four-degree-of-freedom micro-motion platform of a double-piezoelectric driver and an excitation method thereof. Background In the fields of aerospace navigation, optical communications and optical imaging, ultra-long range optical imaging is susceptible to disturbances from support structure vibrations and external environmental vibrations, in particular jitter from four degrees of freedom. For the technical requirement of high-precision image stabilization, a four-degree-of-freedom micro-motion platform needs to be developed to inhibit unexpected vibration interference. Piezoelectric actuation is characterized by a fast response and high precision and is commonly used in precision positioning platforms. However, conventional positioning stages typically have displacement outputs in the form of orthogonal two-degree-of-freedom translational motion or in the form of a combination of two-axis rotation and single-axis movement, and typically operate with three to four piezoelectric actuators. At present, research on micro-motion platforms still lacks research on four-degree-of-freedom micro-motion platforms capable of accurately adjusting orthogonal translation and pivoting. In addition, reducing the number of drives used can promote the reliability and compactness of the platform. Disclosure of Invention Aiming at the problems of insufficient displacement output freedom degree and excessive number of drivers of the traditional positioning platform, the invention provides the bending-actuation type four-freedom-degree micro-motion platform with double piezoelectric drivers and the excitation method thereof. The invention is realized by the following technical scheme: Bending actuation type four-degree-of-freedom micro-motion platform of double piezoelectric driver: The micro-motion platform comprises a tail end platform, two flexible hinges, two amplitude transformers, two piezoelectric drivers, two second bolts and a base; screw holes are formed in the two axial end faces of the amplitude transformer, a through hole is formed in the axial direction of the piezoelectric driver, one side end face of the piezoelectric driver is tightly attached to the base, and the other side end face of the piezoelectric driver is tightly attached to the end face of the amplitude transformer; The base is provided with two through holes, a screw rod part of the second bolt penetrates through the through holes of the base and the through holes of the piezoelectric drivers and is fixed on the end face of the amplitude transformer, a nut part of the second bolt is close to the outer side face of the base, the axes of the second bolt, the piezoelectric drivers and the amplitude transformer are overlapped, and the axes of the two piezoelectric drivers are overlapped; The tail end platform is horizontally arranged, threaded holes are formed in the side face of the tail end platform, and through holes are formed in two ends of the flexible hinge; The micro-motion platform is symmetrical about the end platform. Further, the micro-motion platform also comprises a first bolt; The number of the first bolts is 4×n, wherein n is a positive integer; the lower end surface of the flexible hinge is fixedly connected with the amplitude transformer through a first bolt; The upper end face of the flexible hinge is fixedly connected with the tail end platform through a first bolt. Further, the two piezoelectric drivers are provided with a grounding electrode and two control electrodes; The piezoelectric driver bends upward when a positive voltage is applied between the first control electrode and the ground electrode; The piezoelectric driver bends leftward when a positive voltage is applied between the second control electrode and the ground electrode, and bends rightward when a negative voltage is applied between the second control electrode and the ground electrode. Further, the piezoelectric driver is any one of a stacked structure, a patch structure or a piezoelectric tube, and is used for realizing bending motion. Further, the micro-motion platform further comprises a strain gauge; the strain gauge is adhered to a sensitive deformation area of the piezoelectric driver and at least comprises an upper piece, a lower piece, a left piece and a right piece, and the strain gauge is used for decoupling and measuring bending strain. Further, the flexible hinge is in threaded connection, glue joint or welding with the tail end platform and the amplitude transformer in a fixed connection mode. Further, the flexible hinge is biaxially symmetrical or universal, and is used for transmitting motion in more than two directions of straight line and bending. A method f