CN-122001243-A - Three-sandwich type piezoelectric driver opposite arrangement type multidimensional vibration platform and excitation method thereof

CN122001243ACN 122001243 ACN122001243 ACN 122001243ACN-122001243-A

Abstract

The invention discloses a three-sandwich piezoelectric driver opposite arrangement type multidimensional vibration platform and an excitation method thereof, and belongs to the technical field of precision driving and micro vibration control. Each actuating unit is formed by connecting a flexible hinge, an amplitude transformer, a piezoelectric driver, an end cover and a bolt in series, and reliable compressive stress is provided by pre-tightening the bolt. The core innovation is that the three-way translation along the X/Y/Z axis and the three-way rotation around the X/Y/Z axis can be realized by only utilizing the phase collaborative excitation of the bending vibration ceramic group around the Y axis and the Z axis without a longitudinal vibration mode, so that six-degree-of-freedom high-frequency micro-vibration output is achieved. The brackets are arranged in the modal node areas to reduce interference, and the rigidity of the flexible hinge is adjustable to adapt to different working conditions. The platform is particularly suitable for application scenes with limited space and high precision such as endoscopic instruments, micro-fluidic chips, laser micromachining, omnidirectional active vibration suppression and the like.

Inventors

LIU YINGXIANG
GUAN JINGHAN
LI JING
YAN JIPENG
ZHANG SHIJING
DENG JIE

Assignees

哈尔滨工业大学

Dates

Publication Date: 20260508
Application Date: 20260227

Claims (10)

1. A multi-dimensional vibration platform with three sandwich piezoelectric drivers oppositely arranged is characterized by comprising an end platform (1) and three actuating units (2); The actuating units (2) are of a composite structure, a plurality of functional sub-components are integrated in the actuating units, the sub-components of each actuating unit (2) at least comprise a flexible hinge (2-1), an amplitude transformer (2-2), a piezoelectric driver (2-3), an end cover (2-4) and bolts (2-5), and all the components are assembled in series along a force transmission path; The vibration platform has mirror symmetry characteristics, and a symmetry reference plane of the vibration platform is a longitudinal vertical plane passing through the geometric center; Three actuating units (2) are arranged around the tail end platform (1), one actuating unit (2) is positioned on the symmetrical reference plane, the other two actuating units (2) are symmetrically distributed on two sides of the symmetrical reference plane, and the whole actuating units are in flat circumferential layout; the amplitude transformer (2-2) is of a variable cross-section structure and comprises a large-diameter end and a small-diameter end, wherein the end surfaces of the large-diameter end and the small-diameter end are parallel to each other, and a threaded hole is formed in the end surface of the large-diameter end; The piezoelectric driver (2-3) is provided with a through hole along the axial direction, and the two end surfaces of the piezoelectric driver are parallel; the end covers (2-4) are provided with two parallel end surfaces and are provided with through holes penetrating along the axial direction; the piezoelectric driver (2-3) is clamped between the end cover (2-4) and the amplitude transformer (2-2), one side end face of the piezoelectric driver is attached to the inner end face of the end cover (2-4), and the other side end face is attached to the end face of the large-diameter end of the amplitude transformer (2-2); The bolt (2-5) sequentially passes through the through hole of the end cover (2-4) and the axial through hole of the piezoelectric driver (2-3) and is screwed into the threaded hole of the large-diameter end of the amplitude transformer (2-2) to fasten the three into a whole along the axial direction, wherein the bolt (2-5), the end cover (2-4) and the axis of the piezoelectric driver (2-3) are overlapped, and the head of the bolt (2-5) is abutted against the outer end surface of the end cover (2-4) to exert pretightening force; the small diameter end of the amplitude transformer (2-2) is connected with one side of the flexible hinge (2-1) through the end surface of the small diameter end, and the other side of the flexible hinge (2-1) is connected to the side wall of the tail end platform (1); The circumference of the amplitude transformer (2-2) and the circumference of the piezoelectric driver (2-3) are both provided with brackets for external fixation constraint.
2. The three-sandwich piezoelectric actuator opposite-arrangement type multidimensional vibration platform according to claim 1 is characterized in that a coordinate system is established by taking the geometric center of the end platform (1) as an origin, an X axis horizontally points to the right along a symmetrical reference plane, a Y axis is perpendicular to the symmetrical reference plane, a Z axis vertically faces upwards and meets the right-hand rule, and all the end platforms (1) are based on the coordinate system along the X/Y/Z axis and around the X/Y/Z axis.
3. A multi-dimensional vibration platform with three-sandwich piezoelectric drivers arranged oppositely according to claim 1, characterized in that the piezoelectric drivers (2-3) can integrate any one or more of longitudinal vibration ceramic group, bending vibration ceramic group around Y-axis and bending vibration ceramic group around Z-axis.
4. A multi-dimensional vibration table with a three-sandwich piezoelectric actuator facing arrangement according to claim 3, wherein each ceramic group is provided with an independent driving electrode and a common ground electrode, and the desired longitudinal vibration or bending vibration mode is selectively excited by applying an alternating voltage between the corresponding electrodes.
5. The three-sandwich type piezoelectric actuator opposite-arranged multidimensional vibration platform according to claim 1, wherein the structural form of the piezoelectric actuator (2-3) can be selected from a stack type, a patch type, a piezoelectric tube type or any combination of the above structures so as to flexibly match the requirements of different application scenes on output displacement, rigidity and dynamic response characteristics.
6. The multi-dimensional vibration platform with the opposite arrangement of the three-sandwich piezoelectric driver according to claim 1, wherein the connection mode between the flexible hinge (2-1) and the terminal platform (1) and the amplitude transformer (2-2) comprises screw fastening, cementing, welding or integral forming.
7. The three-sandwich piezoelectric actuator opposite-arranged multi-dimensional vibration platform according to claim 1, wherein the flexible hinge (2-1) can adopt a double-shaft symmetrical type or a universal type configuration so as to effectively transfer axial displacement and support multi-directional bending deformation, and meet the requirement of complex motion coupling.
8. The multi-dimensional vibration platform with the opposite arrangement of the three-sandwich type piezoelectric drivers according to claim 1, wherein the vibration platform can be externally installed and fixed through a bracket arranged on the amplitude transformer (2-2), a bracket arranged on the circumference of the piezoelectric drivers (2-3) or a combination of the two, and the position of the bracket is preferably arranged in a node area of a main mode of the system so as to minimize interference on vibration energy transmission and ensure efficient electromechanical coupling.
9. A three-sandwich piezoelectric driver counter-arranged multi-dimensional vibration platform according to claim 1, characterized in that the components inside each actuation unit (2) are aligned along the same axis and the overall axes of the three actuation units (2) are coplanar.
10. A method of exciting a vibrating platform, the method being based on a three-sandwich piezoelectric actuator counter-arranged multi-dimensional vibrating platform according to any of claims 1-9, the method comprising: When in-phase alternating voltage signals are applied to the bending vibration ceramic groups around the Z axis of the three piezoelectric drivers (2-3) and the excitation frequency is matched with the bending resonance mode around the Z axis, the mode is transmitted with the flexible hinge (2-1) through the amplitude transformer (2-2), and then the terminal platform (1) is excited to vibrate in a rotating mode around the Z axis; when alternating signals with a phase difference of 180 degrees are respectively applied to the Z-axis bending vibration ceramic groups of the two piezoelectric drivers (2-3) positioned on two sides of the symmetrical reference plane, and the frequencies are matched with the Z-axis bending resonance mode, the tail end platform (1) is excited to generate translational vibration along the X axis; When alternating signals are applied to the Z-axis bending vibration ceramic groups of one piezoelectric driver (2-3) positioned on the symmetrical reference plane, and signals 180 degrees different from the Z-axis bending vibration ceramic groups of two piezoelectric drivers (2-3) positioned on two sides of the symmetrical reference plane in phase are applied to the Z-axis bending vibration ceramic groups, and the frequencies of the three signals are matched with the bending resonance mode around the Z axis, the tail end platform (1) generates translational vibration along the Y axis; When in-phase alternating signals are applied to the bending vibration ceramic groups around the Y axis of the three piezoelectric drivers (2-3) and the frequencies are matched with the bending resonance modes around the Y axis, the tail end platform (1) is excited to generate translational vibration along the Z axis; When a signal is applied to a Y-axis bending vibration ceramic group of one piezoelectric driver (2-3) on the symmetrical reference plane, and a signal 180 degrees different from the phase of the signal is applied to the Y-axis bending vibration ceramic group of the piezoelectric drivers (2-3) on two sides, and the frequency of the three signals is matched with the bending resonance mode around the Y axis, the tail end platform (1) generates rotary vibration around the Y axis; When alternating signals with 180-degree phase difference are applied to the Y-axis bending vibration ceramic groups of the two piezoelectric drivers (2-3) on two sides of the symmetrical reference plane and the frequencies are matched with the bending resonance modes around the Y axis, the tail end platform (1) is excited to generate rotary vibration around the X axis; When alternating signals are applied to the longitudinal vibration ceramic groups of one piezoelectric driver (2-3) on the symmetrical reference plane and the frequencies are matched with the longitudinal resonance modes, the tail end platform (1) generates translational vibration along the X axis; when alternating signals with a phase difference of 180 degrees are applied to longitudinal vibration ceramic groups of two piezoelectric drivers (2-3) on two sides of a symmetrical reference plane and the frequencies are matched with the longitudinal vibration modes, the tail end platform (1) is excited to generate translational vibration along the Y axis.

Description

Three-sandwich type piezoelectric driver opposite arrangement type multidimensional vibration platform and excitation method thereof Technical Field The invention relates to the technical field of precise driving and micro-vibration control, in particular to a flattened piezoelectric vibration platform which adopts a circumferential opposite arrangement mode and has full six-degree-of-freedom output capability, and is suitable for high-precision application scenes such as micro-nano operation, ultrasonic processing, active vibration suppression and the like. Background The current multi-degree-of-freedom piezoelectric vibration platform is coupled with longitudinal vibration and bending vibration modes to realize motion output, and longitudinal vibration ceramics are generally integrated to excite axial displacement, so that the structure height is increased, and the control channel is complex. While three-driver schemes attempt to promote freedom, their actuation units are often stacked or juxtaposed in the same direction, making it difficult to achieve efficient multi-dimensional actuation within a limited thickness. In addition, part of the configuration is easy to introduce an unexpected mode due to lack of geometric symmetry, and the motion precision is influenced. Particularly when only bending vibration modes are used, the existing platform cannot cover all six degrees of freedom, and the application of the platform in a non-contact and space-limited system is limited. Disclosure of Invention The invention aims to provide a three-sandwich piezoelectric driver opposite arrangement type multidimensional vibration platform and an excitation method thereof, and the three-sandwich piezoelectric driver opposite arrangement type multidimensional vibration platform is characterized in that all six degrees of freedom can be independently excited only through phase cooperative control of a bending vibration ceramic group around a Y axis and a Z axis, and a longitudinal vibration ceramic group is an optional enhancement module and is not a necessary condition for realizing six degrees of freedom. In order to achieve the above purpose, the present invention provides the following technical solutions: the invention provides a novel piezoelectric multidimensional vibration platform, which is characterized in that three independent actuating units are distributed in a circumferential opposite direction around a terminal platform to form a mirror-symmetrical flat structure, and complete six-degree-of-freedom high-frequency micro-vibration output can be realized without a longitudinal vibration component through phase collaborative excitation of a pure bending vibration mode. The scheme is specifically as follows: a three-sandwich piezoelectric driver opposite arrangement type multidimensional vibration platform and an excitation method thereof, wherein the vibration platform comprises: An end platform and three actuation units; the actuating units are of a composite structure, a plurality of functional sub-components are integrated in the actuating units, each sub-component of each actuating unit at least comprises a flexible hinge, an amplitude transformer, a piezoelectric driver, an end cover and a bolt, and all the components are assembled in series along a force transmission path; The vibration platform has mirror symmetry characteristics, and a symmetry reference plane of the vibration platform is a longitudinal vertical plane passing through the geometric center; the three actuating units are arranged around the tail end platform, one actuating unit is positioned on the symmetrical reference plane, the other two actuating units are symmetrically distributed on two sides of the symmetrical reference plane, and the whole actuating units are in a flat circumferential layout; The amplitude transformer is of a variable cross-section structure and comprises a large-diameter end and a small-diameter end, the end faces of the large-diameter end and the small-diameter end are parallel to each other, and a threaded hole is formed in the end face of the large-diameter end; The piezoelectric driver is provided with a through hole along the axial direction, and the two end surfaces of the piezoelectric driver are parallel; The end cover is also provided with two parallel end surfaces and is provided with a through hole penetrating along the axial direction; during assembly, the piezoelectric driver is clamped between the end cover and the amplitude transformer, one side end face of the piezoelectric driver is attached to the inner end face of the end cover, and the other side end face is attached to the end face of the large-diameter end of the amplitude transformer; the bolt sequentially passes through the through hole of the end cover and the axial through hole of the piezoelectric driver and is screwed into the threaded hole at the large-diameter end of the amplitude transformer to axially fasten the end cover, the thro