CN-122001320-A - Method and system for exciting MEMS resonance module

Abstract

The invention provides a method and a system for exciting an MEMS resonance module, wherein the MEMS resonance module is provided with at least a high-frequency mode and a low-frequency mode designed according to the integer ratio of a target frequency, the low-frequency mode is excited by a parametric excitation signal which is a frequency signal with continuously changing frequency, the intrinsic frequency of the parametric excitation signal is obtained, when the ratio of a first actual measurement frequency of the high-frequency mode to a second actual measurement frequency of the low-frequency mode is the integer ratio of the target frequency, the frequency of the parametric excitation signal is the frequency in the excitation process of the low-frequency mode by the parametric excitation signal, the second actual measurement frequency is the frequency in the excitation process of the high-frequency mode by the parametric excitation signal, the target excitation signal is applied to the MEMS resonance module, and the frequency of the target excitation signal is the intrinsic frequency, so that the energy transmission efficiency between different modes of the MEMS resonance module is improved, and the sensitivity of the MEMS resonance module is improved by integer times.

Inventors

• ZHAO ZHIXIN
• PENG KUN

Assignees

• 广州增芯科技有限公司

Dates

Publication Date

20260508

Application Date

20260123

Claims (10)

1. 1. A method of actuating a MEMS resonant module, comprising: providing an MEMS resonance module, wherein the MEMS resonance module at least has a high-frequency mode and a low-frequency mode designed according to the integer ratio of the target frequency, and the first target frequency of the high-frequency mode is larger than the second target frequency of the low-frequency mode; applying a parameterized excitation signal to the MEMS resonance module to excite the low-frequency mode, wherein the parameterized excitation signal is a frequency signal with continuously-changing frequency; Acquiring the eigenfrequency of the parametric excitation signal, wherein the eigenfrequency is the frequency of the parametric excitation signal when the ratio of the first measured frequency of the high-frequency mode to the second measured frequency of the low-frequency mode is the integral ratio of the target frequency, the first measured frequency is the frequency in the process that the low-frequency mode is excited by the parametric excitation signal, and the second measured frequency is the frequency in the process that the high-frequency mode is excited by the parametric excitation signal; and applying a target excitation signal to the MEMS resonance module, wherein the frequency of the target excitation signal is the eigenfrequency.
2. 2. The method of exciting a MEMS resonant module of claim 1, wherein applying a parametric excitation signal to the MEMS resonant module excites the low frequency mode, comprising: acquiring an initial first measured frequency of the high-frequency mode; Acquiring an initial second measured frequency of the low-frequency mode; acquiring the initial measured frequency ratio based on the initial first measured frequency and the initial second measured frequency, wherein the initial measured frequency ratio is characterized in that the ratio of the initial first measured frequency to the initial second measured frequency is not equal to the integer ratio of the target frequency; Determining an initial frequency range of the parameterized excitation signal based on a relationship of the initial measured frequency ratio and the target frequency integer ratio; A parametric excitation signal is applied to the MEMS resonant module with a frequency that varies over an initial frequency range.
3. 3. The method of exciting a MEMS resonant module of claim 2, wherein determining an initial frequency range of a parametric excitation signal based on the relationship of the initial measured frequency ratio to the target frequency integer ratio comprises: judging the magnitude relation between the initial measured frequency ratio and the target frequency integer ratio; If the initial measured frequency ratio is greater than the target frequency integer ratio, determining the initial frequency range to be greater than the initial second measured frequency; and if the initial measured frequency ratio is smaller than the target frequency integer ratio, determining the initial frequency range to be smaller than the initial second measured frequency.
4. 4. The method of exciting a MEMS resonant module of claim 1, wherein obtaining the eigenfrequency of the parametric excitation signal comprises: Monitoring vibration response of the MEMS resonance module in real time in the process of applying the parameterized excitation signal to the MEMS resonance module; acquiring a frequency response spectrum based on the vibration response, wherein the frequency response spectrum is characterized by a curve of the frequency of the high-frequency mode along with the frequency change of the parametric excitation signal; when the frequency of the high-frequency mode in the frequency response spectrum is suddenly increased, the frequency of the parametric excitation signal is used as the intrinsic frequency, and when the frequency of the high-frequency mode in the frequency response spectrum is suddenly increased, the ratio of the first measured frequency to the second measured frequency is the integer ratio of the target frequency.
5. 5. The method of exciting a MEMS resonant module according to claim 4, wherein a vibration meter is used to monitor the vibrational response of the MEMS resonant module in real time.
6. 6. The method of exciting a MEMS resonant module according to claim 4, wherein a phase-locked amplifier is employed to obtain a frequency response spectrum based on the vibrational response.
7. 7. The method of actuating a MEMS resonant module of claim 1, wherein the MEMS resonant module comprises a MEMS resonator.
8. 8. The method of exciting a MEMS resonant module of claim 1, wherein the MEMS resonant module comprises two MEMS resonators, one of the two MEMS resonators having the high frequency mode and the other having the low frequency mode.
9. 9. A method of exciting a MEMS resonant module according to claim 2, wherein the low frequency mode is excited with the parametric excitation signal having a frequency of the initial frequency range using a function transmitter.
10. 10. A system for exciting a MEMS resonant module, the MEMS resonant module having at least a high frequency mode and a low frequency mode designed according to an integer ratio of a target frequency, the target frequency of the high frequency mode being greater than the target frequency of the low frequency mode, the system comprising: The initial excitation module is used for applying a parameterized excitation signal to the MEMS resonance module to excite the low-frequency mode, wherein the parameterized excitation signal is a frequency signal with continuously-changing frequency; The frequency determining module is used for obtaining the eigenfrequency of the parameterized excitation signal, wherein the eigenfrequency is the frequency of the parameterized excitation signal when the ratio of a first actually measured frequency of the high-frequency mode to a second actually measured frequency of the low-frequency mode is an integer ratio of a target frequency, the first actually measured frequency is the frequency in the process that the low-frequency mode is excited by the parameterized excitation signal, and the second actually measured frequency is the frequency in the process that the high-frequency mode is excited by the parameterized excitation signal; and the excitation module is used for applying a target excitation signal to the MEMS resonance module, and the frequency of the target excitation signal is the eigenfrequency.

Description

Method and system for exciting MEMS resonance module Technical Field The invention relates to the technical field of MEMS (micro electro mechanical systems), in particular to a method and a system for exciting an MEMS resonance module. Background MEMS (Micro Electromechanical Systems, micro-electromechanical system) resonators are widely used in the fields of sensors, filters, oscillators, etc. because of their small size, low power consumption, easy integration, etc. The energy transfer efficiency between the modes of a MEMS resonator is one of the key factors affecting its sensitivity. However, the energy transfer efficiency between the different modes of the conventional MEMS resonator is low. Disclosure of Invention The invention provides a method and a system for exciting an MEMS resonance module, which can improve the energy transfer efficiency between different modes of the MEMS resonance module and improve the sensitivity of the MEMS resonance module by integer times. According to a first aspect of the present invention there is provided a method of a MEMS resonant module, the method comprising: providing an MEMS resonance module, wherein the MEMS resonance module at least has a high-frequency mode and a low-frequency mode designed according to the integer ratio of the target frequency, and the first target frequency of the high-frequency mode is larger than the second target frequency of the low-frequency mode; applying a parameterized excitation signal to the MEMS resonance module to excite the low-frequency mode, wherein the parameterized excitation signal is a frequency signal with continuously-changing frequency; Acquiring the eigenfrequency of the parametric excitation signal, wherein the eigenfrequency is the frequency of the parametric excitation signal when the ratio of the first measured frequency of the high-frequency mode to the second measured frequency of the low-frequency mode is the integral ratio of the target frequency, the first measured frequency is the frequency in the process that the low-frequency mode is excited by the parametric excitation signal, and the second measured frequency is the frequency in the process that the high-frequency mode is excited by the parametric excitation signal; and applying a target excitation signal to the MEMS resonance module, wherein the frequency of the target excitation signal is the eigenfrequency. Optionally, applying a parametric excitation signal to the MEMS resonant module excites the low frequency mode, including: acquiring an initial first measured frequency of the high-frequency mode; Acquiring an initial second measured frequency of the low-frequency mode; acquiring the initial measured frequency ratio based on the initial first measured frequency and the initial second measured frequency, wherein the initial measured frequency ratio is characterized in that the ratio of the initial first measured frequency to the initial second measured frequency is not equal to the integer ratio of the target frequency; Determining an initial frequency range of the parameterized excitation signal based on a relationship of the initial measured frequency ratio and the target frequency integer ratio; A parametric excitation signal is applied to the MEMS resonant module with a frequency that varies over an initial frequency range. Optionally, determining the initial frequency range of the parametric excitation signal based on the relationship of the initial measured frequency ratio and the target frequency integer ratio includes: judging the magnitude relation between the initial measured frequency ratio and the target frequency integer ratio; If the initial measured frequency ratio is greater than the target frequency integer ratio, determining the initial frequency range to be greater than the initial second measured frequency; and if the initial measured frequency ratio is smaller than the target frequency integer ratio, determining the initial frequency range to be smaller than the initial second measured frequency. Optionally, obtaining the eigenfrequency of the parametric excitation signal includes: Monitoring vibration response of the MEMS resonance module in real time in the process of applying the parameterized excitation signal to the MEMS resonance module; acquiring a frequency response spectrum based on the vibration response, wherein the frequency response spectrum is characterized by a curve of the frequency of the high-frequency mode along with the frequency change of the parametric excitation signal; when the frequency of the high-frequency mode in the frequency response spectrum is suddenly increased, the frequency of the parametric excitation signal is used as the intrinsic frequency, and when the frequency of the high-frequency mode in the frequency response spectrum is suddenly increased, the ratio of the first measured frequency to the second measured frequency is the integer ratio of the target frequency. Optionally, a vibration