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CN-122001321-A - Vibrating reed, vibrating device, and oscillator

CN122001321ACN 122001321 ACN122001321 ACN 122001321ACN-122001321-A

Abstract

Provided are a vibrating reed, a vibrating device, and an oscillator, wherein the vibrating reed is composed of an AT-cut substrate of a crystal, and G sensitivity is reduced. The vibrating reed includes a substrate composed of an AT-cut crystal plate and having a first outer edge intersecting a first direction, the substrate having a first fixing portion and a second fixing portion fixed to a base, and a slit provided between the main region and the first fixing portion and between the main region and the second fixing portion and opening to the front and rear surfaces of the substrate and the first outer edge when a region where the excitation electrode is arranged and a region located between the excitation electrode and the first outer edge are set as main regions.

Inventors

  • NORIHITO MATSUKAWA

Assignees

  • 精工爱普生株式会社

Dates

Publication Date
20260508
Application Date
20251105
Priority Date
20241107

Claims (9)

  1. 1. A vibrating reed is characterized by comprising: A substrate formed of an AT-cut crystal plate and having first and second outer edges intersecting with respect to a first direction, and third and fourth outer edges along the first direction, and An excitation electrode provided in a central portion of the substrate in a plan view, The substrate has: A first fixing portion provided at a first corner portion intersecting the third outer edge along a virtual line of the first outer edge, and fixed to the base; A second fixing part arranged at a second corner part where the virtual line intersects the fourth outer edge and fixed on the base, and When the region where the excitation electrode is disposed and the region between the excitation electrode and the first outer edge are set as main regions, the slit is provided between the main region and the first fixing portion and between the main region and the second fixing portion, and opens to the front and back surfaces of the substrate and the first outer edge.
  2. 2. The vibration plate according to claim 1, wherein, The slit is disposed between the main region and the first fixing portion, In the case where the length from the first outer edge to the second outer edge in the first direction is set to Lx, When the length from the first outer edge to the end of the slit on the second outer edge side in the first direction is L1, Satisfies the relation of 0.00< L1/Lx less than or equal to 0.41.
  3. 3. The vibrating piece of claim 2, wherein the vibrating piece is formed of a material having a shape of a thin film, Satisfies the relation of 0.00< L1/Lx less than or equal to 0.20.
  4. 4. The vibration plate according to claim 1, wherein, The slit is disposed between the main region and the second fixing portion, In the case where the length from the first outer edge to the second outer edge in the first direction is set to Lx, When the length from the first outer edge to the end of the slit on the second outer edge side in the first direction is L2, Satisfies the relation of 0.00< L2/Lx less than or equal to 0.41.
  5. 5. The vibration plate as claimed in claim 4, wherein, Satisfies the relation of 0.00< L2/Lx less than or equal to 0.14.
  6. 6. The vibrating piece according to claim 1 or 2, characterized in that, The slit is disposed between the main region and the first fixing portion, The first fixing portion is provided on the second outer edge side of the second fixing portion.
  7. 7. The vibrating piece as claimed in claim 1 or 4, wherein, The slit is disposed between the main region and the second fixing portion, The second fixing portion is provided on the second outer edge side of the first fixing portion.
  8. 8. A vibration device, comprising: The vibrating reed as recited in claim 1, and The base supports the vibrating piece.
  9. 9. An oscillator is provided, which comprises a first oscillator and a second oscillator, characterized by comprising: The vibrating piece of claim 1; An oscillating circuit electrically connected to the vibrating plate, and The base accommodates the vibrating reed and the oscillating circuit.

Description

Vibrating reed, vibrating device, and oscillator Technical Field The invention relates to a vibrating reed, a vibrating device, and an oscillator. Background For example, patent document 1 discloses a crystal oscillator in which both sides of one end portion of a crystal piece in the longitudinal direction are fixed to the inner bottom surface of a container body by a conductive adhesive, and the other end portion of the crystal piece in the longitudinal direction is fixed by an adhesive. The crystal plate has an auxiliary frame separated from the vibration region by a slit on one side in the longitudinal direction. The crystal oscillator described in patent document 1 reduces stress due to a difference in expansion coefficient between the container body and the crystal piece by fixing the adhesive, and maintains vibration characteristics. On the other hand, there is a demand for vibration devices having low G sensitivity in the market. Patent document 1 Japanese patent application laid-open No. 2010-136174 Disclosure of Invention However, in the crystal plate of patent document 1, no consideration is made regarding the G sensitivity. The vibration plate according to an application example of the present invention is characterized by comprising a substrate which is formed of an AT-cut crystal plate and has a first outer edge and a second outer edge intersecting with a first direction and a third outer edge and a fourth outer edge along the first direction, an excitation electrode which is provided in a central portion of the substrate in a plan view, the substrate having a first fixing portion which is provided in a first corner portion intersecting with the third outer edge along a virtual line of the first outer edge and is fixed to a base, a second fixing portion which is provided in a second corner portion intersecting with the fourth outer edge and is fixed to the base, and a slit which is provided between the main region and the first fixing portion and between the main region and the second fixing portion and is opened to a front surface of the substrate and the first outer edge when a region where the excitation electrode is arranged and a region located between the excitation electrode and the first outer edge are set as main regions. The vibration device according to an application example of the present invention includes the vibration plate and the base for supporting the vibration plate. An oscillator according to an application example of the present invention includes the vibrating reed, an oscillation circuit electrically connected to the vibrating reed, and the base housing the vibrating reed and the oscillation circuit. Drawings Fig. 1 is a schematic plan view showing the structure of a vibration device according to a first embodiment. Fig. 2 is a schematic cross-sectional view taken along line A1-A1 in fig. 1. Fig. 3 is a plan view illustrating an in-plane rotation angle of the vibrating piece. Fig. 4 is a plan view showing the structure of the vibrating reed according to the first embodiment. Fig. 5 is a sectional view illustrating forces acting on the vibrating reed. Fig. 6 is a sectional view illustrating a force acting on the vibrating piece. Fig. 7 is a diagram showing G sensitivity of the vibrating reed with respect to L1/Lx. Fig. 8 is a plan view showing the structure of the vibrating reed according to the second embodiment. Fig. 9 is a diagram showing G sensitivity of the vibrating reed with respect to L2/Lx. Fig. 10 is a plan view showing the structure of the vibrating reed according to the third embodiment. Fig. 11 is a plan view showing a structure of a vibrating reed according to a modification of the third embodiment. Fig. 12 is a schematic plan view showing the structure of an oscillator according to the fourth embodiment. Fig. 13 is a schematic cross-sectional view taken along line A2-A2 in fig. 12. Description of the reference numerals 1.1 A to 1c of a vibrating piece; 2, 2 a-2 c, a substrate; 3, exciting an electrode; 3a first excitation electrode, 3b second excitation electrode, 4 fixing part, 4a first fixing part, 4b second fixing part, 10 vibrating piece, 12 first face, 13 second face, 14, 15 lead wire, 16 end part, 21 first outer edge, 22 second outer edge, 23 third outer edge, 24 fourth outer edge, 25a first corner, 26a second corner, 28 main area, 30 slit, 31 first slit, 32 second slit, 33 first bifurcation part, 34 second bifurcation part, 35b first arm part, 36c second arm part, 37 first shoulder part, 38 second shoulder part, 40a, 40b, 40c end part, 50, 51 virtual wire, 70 package, 80 base, 81, 82 face, 83 external terminal, 84 electrode pad, 85 first electrode pad, 86 second electrode pad, 90 base, 92F, 2F 2, the oscillating device, 2F 2, the oscillating device, the end part, 50, 51 virtual wire, 70, 80 base, 81, 82 face, 83, and the external terminal, 84 electrode pad, 85, 86 first electrode pad, 86 second electrode pad, 90, the lid, 2F 2, the oscillating devic