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CN-122001322-A - Vibrating reed, vibrating device, and oscillator

CN122001322ACN 122001322 ACN122001322 ACN 122001322ACN-122001322-A

Abstract

The invention relates to a vibrating reed, a vibrating device, and an oscillator. A vibrating reed is provided which is composed of an AT-cut substrate of crystal and has reduced G sensitivity. The vibrating reed includes a substrate composed of an AT-cut quartz plate and having a first outer edge intersecting with a first direction, and when a region where the excitation electrode is arranged and a region located between the excitation electrode and the first outer edge are set as main regions, the substrate has a first slit between the main region and the first fixing portion, and a second slit provided between the main region and the second fixing portion, and the second slit is opened on the front and rear surfaces of the substrate and the first outer edge, and when the length of the substrate including the excitation electrode is set to Lx, the length of the first slit is set to L1, and the length of the second slit is set to L2, L1/Lx and L2/Lx are set to be within a predetermined range.

Inventors

  • NORIHITO MATSUKAWA

Assignees

  • 精工爱普生株式会社

Dates

Publication Date
20260508
Application Date
20251105
Priority Date
20241107

Claims (5)

  1. 1. A vibrating reed is characterized by comprising: A substrate made of an AT-cut quartz plate and having a first outer edge and a second outer edge intersecting with respect to a first direction and a third outer edge and a fourth outer edge along the first direction, and An excitation electrode provided in a central portion of the substrate in a plan view, When the region where the excitation electrode is disposed and the region between the excitation electrode and the first outer edge are set as main regions, the substrate has a first slit between the main region and the third outer edge, a second slit between the main region and the fourth outer edge, The first slit and the second slit are opened on the front and back surfaces of the substrate and the first outer edge, In setting the length in the first direction from the first outer edge to the second outer edge to Lx, Assuming that a length in the first direction from the first outer edge to the end portion on the second outer edge side of the first slit is L1, and assuming that a length in the first direction from the first outer edge to the end portion on the second outer edge side of the second slit is L2, L1/Lx and L2/Lx satisfy any of the following formulas (1) to (9): 0.00< L1/Lx <0.14 and 0.000< L2/Lx≤0.500 xL 1/Lx+0.400 seed, seed (1) L1/Lx < 0.14≤L2/Lx <0.42 and 0.000< L2/Lx≤1.250XL1/Lx+0.300 seed, seed (2) L1/Lx 0.42-0.49 and L2/Lx-0.840-0.100×L1/Lx+0.860, seed (3) L1/Lx is more than or equal to 0.49 and less than or equal to 0.62, L2/Lx is more than or equal to 0.846X1 1/Lx-0.270 and less than or equal to-0.100deg.X1/Lx+0.860, seeds (4) L1/Lx 0.62≤L 1/Lx <0.77 and 0.450xL 1/Lx-0.030≤L2/Lx≤0.600xL 1/Lx+0.430. Times. Zanzhi (5) L1/Lx 0.77 <0.82 and 0.450xL 1/Lx-0.030 < L2/Lx < 0.950 seed first seed (6) L1/Lx 0.82 is less than or equal to 0.90 and L2/Lx 0.750 is less than or equal to 0.200, L1/Lx 0.200, 0.500 is less than or equal to 0.1/Lx+0.920 is less than or equal to 0.750 is less than or equal to 0.1 is less than or equal to 0.0 is double-seed (7) L1/Lx 0.82. Ltoreq.L 2/Lx 0.950 seed, seed (8) 0.462 XL 1/Lx+0.320. Ltoreq.L 1/Lx <0.90 L1/Lx 0.90≤L 1/Lx <0.95 and 0.462 XL 1/Lx+0.320≤L2/Lx≤0.950 seed, seed (9).
  2. 2. A vibrating reed is characterized by comprising: A substrate made of an AT-cut quartz plate and having a first outer edge and a second outer edge intersecting with respect to a first direction and a third outer edge and a fourth outer edge along the first direction, and An excitation electrode provided in a central portion of the substrate in a plan view, When the region where the excitation electrode is disposed and the region between the excitation electrode and the first outer edge are set as main regions, the substrate has a first slit between the main region and the third outer edge, a second slit between the main region and the fourth outer edge, The first slit and the second slit are opened on the front and back surfaces of the substrate and the first outer edge, In setting the length in the first direction from the first outer edge to the second outer edge to Lx, Assuming that a length in the first direction from the first outer edge to the end portion on the second outer edge side of the first slit is L1, and assuming that a length in the first direction from the first outer edge to the end portion on the second outer edge side of the second slit is L2, L1/Lx and L2/Lx satisfy any of the following formulas (10) to (18): 0.03< L1/Lx <0.10 and 0.000< L2/Lx≤1.714 xL 1/Lx+0.030 seed, seed (10) L1/Lx 0.10≤L 1/Lx <0.17 and 0.857X1/Lx-0.050 < L2/Lx≤1.143 XL 1/Lx+0.090. 1@ 0.0 @ 0.120 @ (11) L1/Lx 0.17≤L 1/Lx <0.27 and 0.500 xL 1/Lx+0.020≤L2/Lx≤0.700 xL 1/Lx+0.160. Seed. Zangzhi (12) L1/Lx of 0.27≤L1/Lx <0.46 and 0.857X1/Lx-0.080≤L2/Lx≤1.526 X1/Lx-0.020. RTM. Zangji. Seed (13) L1/Lx 0.46≤L 1/Lx <0.55 and 0.857X1/Lx-0.080≤L 2/Lx≤0.111 XL 1/Lx+0.630. The seed (14) L1/Lx is 0.55≤L 1/Lx <0.64 and 0.222 xL 1/Lx+0.270≤L 2/Lx≤0.571xL 1/Lx+1.000. Times. J.sub.1 (15) L1/Lx is more than or equal to 0.64 and less than or equal to 0.69, and L2/Lx is more than or equal to 0.020 and less than or equal to-0.556 XL 1/Lx+0.880, and 0.667XL 1/Lx-0.020, and J-shaped seed (16) L1/Lx is 0.64≤L 1/Lx <0.69 and 1.800 XL 1/Lx-0.630≤L 2/Lx≤0.571 XL 1/Lx+1.000. Times. J.J. (17) L1/Lx is more than or equal to 0.69 and less than or equal to 0.73, L2/Lx is more than or equal to 0.020 and less than or equal to-0.556 XL 1/Lx+0.880, and is more than or equal to 0.667 XL 1/Lx-0.020, and is more than or equal to 0.556, and is more than or equal to 18.
  3. 3. The vibrating piece according to claim 1 or 2, characterized in that, At least one of the first outer edge-side end portion of the third outer edge and the first outer edge-side end portion of the fourth outer edge is located closer to the second outer edge than the first outer edge in the first direction.
  4. 4. A vibration device, comprising: The vibrating reed as recited in claim 1 or 2, and And a base for supporting the vibrating reed.
  5. 5. An oscillator is provided, which comprises a first oscillator and a second oscillator, characterized by comprising: the vibrating piece of claim 1 or 2; An oscillating circuit electrically connected to the vibrating plate, and And a base which accommodates the vibrating piece and the oscillation circuit.

Description

Vibrating reed, vibrating device, and oscillator Technical Field The invention relates to a vibrating reed, a vibrating device, and an oscillator. Background For example, patent document 1 discloses a piezoelectric vibrator having a piezoelectric plate provided with an excitation electrode film on the upper surface. The piezoelectric vibrator has a connection portion connected to the container via a conductive adhesive. The connection portion is provided at a distance from the farthest portion of the excitation electrode film. The connection portion is formed by providing a slit in the piezoelectric plate. In general, a difference in thermal expansion coefficient between the container and the piezoelectric plate causes shrinkage occurring when the conductive adhesive is cured, and thus deformation stress and strain are generated. In the piezoelectric vibrator described in patent document 1, the influence of deformation stress and strain on the excitation electrode film is prevented. On the other hand, there is a demand for vibration devices having low G sensitivity in the market. Patent document 1 Japanese patent laid-open No. 4-061413 However, in patent document 1, the G sensitivity of the piezoelectric vibrator is not considered. Disclosure of Invention The vibrating reed according to the application example of the present invention is characterized by comprising a substrate which is formed by an AT-cut quartz plate and has a first outer edge and a second outer edge intersecting with respect to a first direction and a third outer edge and a fourth outer edge along the first direction, and an excitation electrode which is provided in a central portion of the substrate in a plan view, wherein when a region where the excitation electrode is arranged and a region located between the excitation electrode and the first outer edge are regarded as main regions, the substrate has a first slit between the main regions and the third outer edge, a second slit is provided between the main regions and the fourth outer edge, the first slit and the second slit are opened on a front side and a back side of the substrate and the first outer edge, and when a length in the first direction from the first outer edge to the second outer edge is set to Lx, a length in the first direction from the first outer edge to an end of the second outer edge side of the first slit is set to L1, and a length in the first direction from the first outer edge to an end of the second outer edge side is set to L1, and when a length in the first direction from the first outer edge to the second outer edge side is set to L2 is set to L1, and a length in the first direction from the first edge to L2/L is set to L2: 0.00< L1/Lx <0.14 and 0.000< L2/Lx≤0.500 xL 1/Lx+0.400 seed, seed (1) L1/Lx < 0.14≤L2/Lx <0.42 and 0.000< L2/Lx≤1.250XL1/Lx+0.300 seed, seed (2) L1/Lx 0.42-0.49 and L2/Lx-0.840-0.100×L1/Lx+0.860, seed (3) L1/Lx is more than or equal to 0.49 and less than or equal to 0.62, L2/Lx is more than or equal to 0.846X1 1/Lx-0.270 and less than or equal to-0.100deg.X1/Lx+0.860, seeds (4) L1/Lx 0.62≤L 1/Lx <0.77 and 0.450xL 1/Lx-0.030≤L2/Lx≤0.600xL 1/Lx+0.430. Times. Zanzhi (5) L1/Lx 0.77 <0.82 and 0.450xL 1/Lx-0.030 < L2/Lx < 0.950 seed first seed (6) L1/Lx 0.82 is less than or equal to 0.90 and L2/Lx 0.750 is less than or equal to 0.200, L1/Lx 0.200, 0.500 is less than or equal to 0.1/Lx+0.920 is less than or equal to 0.750 is less than or equal to 0.1 is less than or equal to 0.0 is double-seed (7) L1/Lx 0.82. Ltoreq.L 2/Lx 0.950 seed, seed (8) 0.462 XL 1/Lx+0.320. Ltoreq.L 1/Lx <0.90 L1/Lx 0.90≤L 1/Lx <0.95 and 0.462 XL 1/Lx+0.320≤L2/Lx≤0.950 seed, seed (9). The vibrating reed according to the application example of the present invention is characterized by comprising a substrate which is formed by an AT-cut quartz plate and has a first outer edge and a second outer edge intersecting with respect to a first direction and a third outer edge and a fourth outer edge along the first direction, and an excitation electrode which is provided in a central portion of the substrate in a plan view, wherein when a region where the excitation electrode is arranged and a region located between the excitation electrode and the first outer edge are regarded as main regions, the substrate has a first slit between the main regions and the third outer edge, a second slit is provided between the main regions and the fourth outer edge, the first slit and the second slit are opened on a front side and a back side of the substrate and the first outer edge, and when a length in the first direction from the first outer edge to the second outer edge is set to Lx, a length in the first direction from the first outer edge to an end of the second outer edge side of the first slit is set to L1, and a length in the first direction from the first outer edge to an end of the second outer edge side is set to L1, and a length in the first direction from the first outer edge to L