CN-122001326-A - Double-ring MEMS resonator with side support beam and energy decoupling structure

Abstract

The invention belongs to the technical field of micro-electromechanical systems, and particularly discloses a double-ring MEMS resonator with a side support beam and an energy decoupling structure, which comprises a resonance unit, a main support beam and an auxiliary support beam system, wherein the resonance unit is of a concentric double-ring structure and is used for vibrating in a breathing mode under electrostatic driving, one end of the main support beam is connected with the resonance unit, the other end of the main support beam is connected with a main anchor point, the auxiliary support beam system comprises a plurality of auxiliary beams, one end of each auxiliary beam is connected with the resonance unit, and the other end of each auxiliary beam is connected with an auxiliary anchor point, so that the technical problems that anchor point loss is large, structural stability is insufficient and dynamic resistance needs to be further reduced in the existing annular MEMS resonator are solved.

Inventors

• QIAN RUI
• PENG HUILI
• WANG CHAO
• QIAO ZHIFENG
• Zhao Shengshuang
• LIU SHA
• XU HUIHUI

Assignees

• 北京无线电计量测试研究所

Dates

Publication Date

20260508

Application Date

20251226

Claims (10)

1. 1. A dual-ring MEMS resonator with a side support beam and an energy decoupling structure, the resonator comprising: a resonance unit, a main support beam and an auxiliary support beam system, wherein, The resonance unit is of a concentric double-ring structure and is used for vibrating in a breathing mode under electrostatic drive; One end of the main supporting beam is connected with the resonance unit, and the other end of the main supporting beam is connected with a main anchor point; the auxiliary support beam system comprises a plurality of auxiliary beams, one ends of the auxiliary beams are connected with the resonance units, and the other ends of the auxiliary beams are connected with auxiliary anchor points.
2. 2. A resonator according to claim 1, characterized in that, One end of the auxiliary beam is connected with the resonance unit, and the other end of the auxiliary beam can be connected with an energy decoupling outer frame.
3. 3. A resonator according to claim 2, characterized in that, The length of the main support beam is configured to correspond to a quarter of a wavelength of the resonator element operating frequency.
4. 4. A resonator according to claim 3, characterized in that, The energy decoupling frame is connected with the resonance unit through the auxiliary supporting beam system, and the resonance frequency of the energy decoupling frame is matched with the main resonance frequency of the resonance unit.
5. 5. The resonator according to claim 4, characterized in that, The resonator further comprises an electrode system; The electrode system comprises a first driving electrode positioned inside the resonance unit and a second detection electrode positioned outside the resonance unit.
6. 6. The resonator according to claim 5, characterized in that, The first driving electrode, the second detecting electrode and the resonance unit are arranged at intervals through a gap layer.
7. 7. The resonator according to claim 6, characterized in that, The auxiliary supporting beam system and the energy decoupling outer frame restrict vibration energy in the resonance unit so as to reduce energy loss propagated to the substrate through the anchor point and remarkably improve the Q value of the resonator.
8. 8. The resonator according to claim 7, characterized in that, The auxiliary beam optimizes the energy transmission path and maintains a large transduction area without greatly increasing the effective mass according to the following implementation: from the above formula, the improvement of the Q value and the transduction area a remain in combination to achieve a significant reduction in the dynamic resistance.
9. 9. The resonator according to claim 8, characterized in that, The auxiliary support beam system forms a distributed support network to strengthen the overall rigidity of the resonator, inhibit the excitation of non-working modes and improve the robustness of the device against process deviation and environmental vibration.
10. 10. The resonator according to claim 9, characterized in that, The support beam and the energy decoupling structure can be compatible with the existing standard MEMS manufacturing process, no complicated extra steps are needed, and batch production and integration with an IC circuit are facilitated.

Description

Double-ring MEMS resonator with side support beam and energy decoupling structure Technical Field The invention belongs to the technical field of micro-electromechanical systems, and particularly relates to a double-ring MEMS resonator with a side support beam and an energy decoupling structure. Background Radio frequency microelectromechanical systems (RF MEMS) resonators are key components that constitute filters, oscillators and sensor core elements in modern communication, sensing systems. The performance index, especially the quality factor (Q value) and dynamic resistance, directly determines the frequency stability, phase noise and insertion loss of the device. In the prior art, ring resonators have received much attention because of their symmetrical structure capable of exciting low loss breathing modes. For example, chinese patent publication No. CN 116827302B discloses an electrostatic MEMS resonator with low dynamic resistance, which increases Q value and reduces dynamic resistance by using elliptical ring resonator units and a quarter-wavelength support beam. However, the structure still has the disadvantages that (1) the supporting structure mainly depends on a central Anchor point, energy still leaks to the substrate through the Anchor point, so that Anchor point Loss (Anchor Loss) is caused, (2) the stability of the structure needs to be further improved when the structure is used for coping with process deviation or temperature variation, and (3) the further reduction of dynamic resistance is limited. Accordingly, there is a strong need in the art for a novel MEMS resonator structure that can further reduce dynamic resistance and improve structural stability while maintaining a high Q value. Disclosure of Invention The invention provides a double-ring MEMS resonator with a side support beam and an energy decoupling structure, which is used for solving the technical problems of larger anchor point loss, insufficient structural stability and dynamic resistance to be further reduced in the existing ring MEMS resonator. The invention provides a double-ring MEMS resonator with a side support beam and an energy decoupling structure, the resonator comprises: a resonance unit, a main support beam and an auxiliary support beam system, wherein, The resonance unit is of a concentric double-ring structure and is used for vibrating in a breathing mode under electrostatic drive; One end of the main supporting beam is connected with the resonance unit, and the other end of the main supporting beam is connected with a main anchor point; the auxiliary support beam system comprises a plurality of auxiliary beams, one ends of the auxiliary beams are connected with the resonance units, and the other ends of the auxiliary beams are connected with auxiliary anchor points. According to the double-ring MEMS resonator with the side support beam and the energy decoupling structure, provided by the embodiment of the invention, the high quality factor of the resonator is improved, the dynamic resistance of the resonator is reduced, the overall rigidity of the resonator is enhanced, and the double-ring MEMS resonator is flexible in design and easy to integrate by introducing the auxiliary support beam system and the energy decoupling outer frame. Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims thereof as well as the appended drawings. Drawings The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and do not constitute a limitation on the invention. In the drawings: Fig. 1 is a schematic top view of a dual-ring MEMS resonator with side support beams and an energy decoupling structure according to an embodiment of the present invention; Fig. 2 is a schematic side view of a dual-ring MEMS resonator with side support beams and an energy decoupling structure according to an embodiment of the present invention. Detailed Description For the purposes of making the objects, technical solutions and advantages of the present specification more apparent, the technical solutions of the present specification will be clearly and completely described below with reference to specific embodiments of the present specification and corresponding drawings. It will be apparent that the described embodiments are only some, but not all, of the embodiments of the present specification. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are inten