CN-122001347-A - Multi-frequency control method based on self-adaptive adjustment of sweep frequency width and matching and switching of inductance

CN122001347ACN 122001347 ACN122001347 ACN 122001347ACN-122001347-A

Abstract

The invention provides a multi-frequency control method based on self-adaptive adjustment of sweep frequency width and matching and switching of inductance, which comprises the steps of collecting and standardizing charge and discharge time constant data of a multi-channel adjustable capacitor, constructing a three-dimensional table look-up library, generating multi-dimensional state input by combining real-time terminal voltage, slope and environment data, driving an embedded predictor to output a precise level overturning control sequence, injecting a narrow pulse width high-intensity driving pulse into a non-standard channel by adopting a closed loop check sum self-adaptive model iteration mechanism, and realizing real-time compensation of environmental change and device aging.

Inventors

QIU PING
XIONG GUOXIN

Assignees

东莞市佳源达科技有限公司

Dates

Publication Date: 20260508
Application Date: 20260409

Claims (10)

1. The multi-frequency control method based on the self-adaptive adjustment of the frequency sweep width and the matching and switching of the inductance is characterized by comprising the following steps: S1, acquiring charge and discharge time constant data of each adjustable capacitor in a semiconductor front end cleaning scene, and constructing a level configuration table look-up library based on the charge and discharge time constant data and three-dimensional variables; s2, receiving a frequency switching request sent by an upper controller, and synchronously acquiring an instantaneous voltage sampling sequence, an instantaneous change rate vector and an environmental interference characteristic set of each adjustable capacitor based on the frequency switching request to generate a multidimensional state input vector; S3, inputting the multidimensional state input vector into a state predictor, and generating an optimal level turning sequence and a time sequence offset required by each capacitor reaching a target voltage platform in a preset time period in the future; S4, based on the optimal level overturning sequence and the time sequence offset, carrying out parallel level setting operation on corresponding pins of the singlechip to generate a preset charge-discharge path driving signal; S5, monitoring whether feedback voltage signals corresponding to all the frequency modulation resistors enter a preset voltage interval bandwidth in real time in a first preset time window after the frequency sweep is started, and generating a frequency sweep width verification result; S6, triggering a compensation pulse generation instruction if the sweep frequency width verification result judges that the signal does not reach the standard, and injecting a single narrow pulse width current enhancement driving signal in the next pulse width modulation period; And S7, recording the injection times and duration of the single narrow pulse width current enhancement driving signal, updating the environment variable correction coefficient in the level configuration table look-up library based on the injection times and duration, and generating an optimized level configuration parameter set.
2. The multi-frequency control method based on the adaptive adjustment of the frequency sweep width and the switching of the matching inductance according to claim 1, the method is characterized by further comprising the following steps of: and S8, mapping the optimized level configuration parameter set into the initial weight of the state predictor, and completing model self-adaptive iteration aiming at the current working condition so as to realize continuous compression of the response time of the sweep frequency width adjustment in the subsequent frequency switching process.
3. The method of claim 1, wherein the three-dimensional variables include a target frequency band variable, a desired sweep width variable, and an environmental variable.
4. The multi-frequency control method based on the adaptive adjustment of the frequency sweep width and the switching of the matching inductance according to claim 1, wherein the step S2 further comprises: After receiving the frequency switching request, the singlechip acquires seven adjustable capacitor instantaneous terminal voltages in parallel through an analog-to-digital converter, combines a sliding window to differentially extract the voltage change rate, and fuses the voltage change rate with environment data of on-board temperature and bus voltage to generate a multidimensional state input vector.
5. The multi-frequency control method based on adaptive tuning of sweep frequency width and switching of inductance matching according to claim 1, wherein the step S3 specifically comprises: Based on real-time terminal voltage values and voltage change slope data in the multidimensional state input vector, carrying out normalization processing on transient charge and discharge track characteristics of seven adjustable capacitors, and constructing a standardized capacitor dynamic response baseline data set; Performing piecewise linear regression operation by utilizing the capacitor dynamic response baseline data set and the on-board temperature sensor data and combining offline calibrated charge and discharge time constant data to generate a piecewise linear prediction coefficient matrix; Based on the piecewise linear prediction coefficient matrix and the current power supply voltage monitoring value, carrying out logic judgment on the expected sweep frequency width boundary condition corresponding to the target frequency segment, and outputting a threshold trigger state flag bit sequence; Reversely deducting a capacitor voltage convergence path in a preset time period in the future according to the threshold trigger state zone bit sequence and the piecewise linear prediction coefficient matrix, and calculating an optimal level overturning time sequence point set; And executing level sequence coding operation based on the optimal level overturning time sequence point set and the U5 singlechip pin configuration rule to generate an optimal level overturning sequence and a time sequence offset control instruction packet.
6. The multi-frequency control method based on adaptive adjustment of sweep frequency width and switching of matching inductance according to claim 5, wherein the threshold trigger status flag bit sequence contains voltage platform arrival time pre-judgment information.
7. The multi-frequency control method based on the adaptive adjustment of the frequency sweep width and the matching switching of the inductances according to claim 1, wherein the state predictor maps the multi-dimensional state input vector into a corresponding piecewise linear regression model, outputs a voltage platform arrival time pre-judgment zone bit through a piecewise linear prediction coefficient combined with a threshold trigger mechanism, and reversely derives by a time axis mapping algorithm to generate an optimal level turning time sequence point set.
8. The multi-frequency control method based on adaptive tuning of sweep frequency width and switching of inductance matching according to claim 1, wherein the step S4 specifically comprises: Acquiring an optimal level turning sequence and a time sequence offset output by a state predictor, and performing bit mapping analysis processing on the optimal level turning sequence to generate an independent channel control instruction set; Based on the independent channel control instruction set, performing atomic write operation processing on a general input/output register of the singlechip, configuring the electrical characteristics of a specified pin into a high-speed push-pull output mode, and generating a pin driving capability configuration parameter; Performing reverse timestamp calculation processing on the main frequency switching trigger time by using the time sequence offset, determining a preset early time window starting point corresponding to the main frequency switching action, and generating an accurate level inversion synchronous trigger time base signal; when the arrival of the level inversion synchronous trigger time base signal is detected, parallel level setting operation is carried out on each pin configured into a high-speed push-pull output mode according to the independent channel control instruction set, and an initial port level state combination is generated; And based on the initial port level state combination, conducting the corresponding capacitor charging and discharging loop, enabling each adjustable capacitor to enter a preset charge transfer path, and generating a preset charging and discharging path driving signal.
9. The multi-frequency control method based on adaptive tuning of sweep frequency width and switching of inductance matching according to claim 1, wherein the step S5 specifically comprises: Seven frequency modulation resistor end analog voltage signals in a first preset time window after the frequency sweep is started are obtained, and the seven frequency modulation resistor end analog voltage signals are synchronously latched by utilizing a high-speed sampling and holding circuit to generate seven paths of discrete sampling voltage data sequences; Performing deviation amount calculation processing on the seven paths of discrete sampling voltage data sequences based on the seven paths of discrete sampling voltage data sequences and a nominal voltage threshold value corresponding to a prestored target frequency segment, and generating seven paths of real-time voltage deviation vectors; Receiving the seven-path real-time voltage deviation vector and preset voltage interval bandwidth parameters set by a system, and performing boundary matching judgment processing on the seven-path real-time voltage deviation vector to generate a seven-path binary state zone bit; Performing logic AND operation and time window validity verification processing on the seven-path binary state flag bits based on the seven-path binary state flag bits and a preset time stamp counter to generate a comprehensive verification state word; And acquiring the comprehensive verification status word and the historical sweep frequency width verification record data, and performing fault mode classification processing on the comprehensive verification status word to generate a final sweep frequency width verification result data packet.
10. The method of claim 9, wherein the final sweep width calibration result data packet includes a failure channel index and bias class information.

Description

Multi-frequency control method based on self-adaptive adjustment of sweep frequency width and matching and switching of inductance Technical Field The invention relates to the technical field of ultrasonic cleaning control and intelligent frequency self-adaptive control, in particular to a multi-frequency control method based on self-adaptive adjustment of sweep frequency width and matching and switching of inductance. Background At present, ultrasonic cleaning equipment is widely applied to semiconductor, precision devices and front end manufacturing links, and particularly in cleaning scenes requiring multi-frequency work, quick response and high adaptability, a main stream control system mostly adopts a frequency and sweep frequency width adjusting method based on a single chip microcomputer. In the prior art, a plurality of adjustable capacitors are controlled through a singlechip, and the adaptive adjustment of the frequency sweep center frequency and the frequency sweep width is realized by combining inductance matching switching. The systems basically adopt a level control and capacitor charging and discharging mechanism, namely, the charging and discharging of the capacitor are driven by changing the level state of an IO port of the singlechip, so that sweep frequency parameters are adjusted to match the transducer and different frequency characteristics. However, with the improvement of the precision of the semiconductor process and the continuous improvement of the requirements on the cleaning efficiency and the response speed, the limitation of the prior art is increasingly prominent; In the current representative technical implementation, the adjustment of the sweep frequency width mainly depends on sampling and waiting of the charge and discharge processes of a plurality of capacitors after the singlechip issues an instruction. This mechanism belongs to the traditional serial closed loop paradigm, namely an "instruction issue-level set-delay wait-sample correction-next action" mode. In the working process, the charge and discharge states of the capacitor cannot be closely synchronized with the frequency switching request, so that obvious response delay exists in the cleaning system. In a batch process cleaning and high dynamic frequency adjustment scenario, this delay can cause misalignment of the actual swept width with the transducer's optimal resonance interval, affecting cleaning efficiency and yield. The typical technology disclosed in the current industry realizes certain automation in the aspects of capacitance parameter self-adaption and inductance switching, but still cannot break through the bottleneck caused by level control and charge-discharge delay; The prior art is also affected by environmental factors such as temperature drift, power supply voltage fluctuation, device aging and the like, so that the time constant of capacitor charge and discharge cannot be stably maintained. Most systems can only be roughly adjusted by periodically correcting a table look-up or checking in batches, and lack sensitive real-time compensation capability. In addition, in the multi-frequency cleaning mode, the system needs to frequently switch frequencies and reconfigure widths, the traditional technology cannot achieve the response speed of sub microsecond level, and the frequency distribution difference of the transducer caused by process tolerance cannot be accurately matched. Disclosure of Invention The invention aims to solve the technical problems and provides a multi-frequency control method based on adaptive adjustment of sweep frequency width and matching and switching of inductance. The technical scheme of the invention is realized by a multi-frequency control method based on self-adaptive adjustment of sweep frequency width and matching and switching of inductance, which comprises the following steps: S1, acquiring charge and discharge time constant data of seven adjustable capacitors in a semiconductor front end cleaning scene under different temperatures, power supply voltages and aging degrees, and constructing a level configuration table look-up library based on the charge and discharge time constant data, a target frequency band and a three-dimensional variable of an expected sweep frequency width; S2, receiving a frequency switching request sent by an upper controller, and synchronously collecting real-time terminal voltage values of all adjustable capacitors, voltage change slopes in the last three sampling periods, current power supply voltage monitoring values and on-board temperature sensor data based on the frequency switching request to generate a multidimensional state input vector; S3, inputting the multi-dimensional state input vector into an embedded lightweight state predictor, and calculating the multi-dimensional state input vector by utilizing a piecewise linear regression and threshold triggering hybrid algorithm to generate an optimal level turning sequence and a tim