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CN-122002941-A - Preparation method and production equipment of solar cell

CN122002941ACN 122002941 ACN122002941 ACN 122002941ACN-122002941-A

Abstract

The application relates to the technical field of photovoltaics, in particular to a preparation method and production equipment of a solar cell, which are used for carrying out first development on an exposed photoresist layer so as to form a graphical groove on the photoresist layer; spraying mist developing solution to the patterned groove to perform second development on the photoresist layer after the first development, electroplating the patterned groove after the second development to form a metal grid line, and spraying the mist developing solution to the patterned groove through the second development, so that the contact area of the developing solution and the patterned groove is increased, the residual glue removing effect is improved, and the developing solution of the small particles is dispersed into small particles and is easier to disperse to the joint of the side wall and the bottom wall of the patterned groove, the residual glue removing effect on one end, close to the bottom wall, of the side wall of the patterned groove is improved, the contact area of the grid line is increased, the resultant force of the grid line is improved, and the product quality of the solar cell is improved.

Inventors

  • XU PENG

Assignees

  • 通威太阳能（成都）有限公司

Dates

Publication Date
20260508
Application Date
20241108

Claims (10)

  1. 1. A method of manufacturing a solar cell, comprising: Providing a solar cell substrate, wherein the surface of the solar cell substrate is provided with a metal seed layer; Forming a photoresist layer on the metal seed layer, forming a preset pattern on the photoresist layer, and exposing the photoresist layer with the preset pattern; performing first development on the exposed photoresist layer to form a patterned groove on the photoresist layer; spraying mist developing solution on the patterned groove to carry out second development on the photosensitive adhesive layer after the first development; and electroplating in the patterned groove after the second development to form a metal grid line.
  2. 2. The method according to claim 1, wherein the mist developing solution having a particle diameter of 20 μm to 40 μm is sprayed to the patterned grooves in the second development.
  3. 3. The method according to claim 1, wherein in the first development, the photoresist layer after exposure is subjected to first development using a first developer; the first development satisfies at least one of the following (i) - (iv): (i) The concentration of the developer in the first developer is 10 g/L-20 g/L; (ii) The temperature of the first developing solution is 25-35 ℃; (iii) Spraying the first developing solution to the photoresist layer, wherein the spraying pressure of the first developing solution is 0.5 bar-2.5 bar; (iv) The pH value of the first developing solution is 8-13.
  4. 4. The method according to claim 3, wherein in the second development, the photoresist layer after the first development is subjected to the second development using a second developer; The second developing solution is a new developing solution, and the first developing solution is a repeatedly used developing solution; and spraying mist developing solution to the patterned groove so as to carry out second development on the photoresist layer after the first development, and further comprising: And overflowing the second developing solution sprayed in the second developing process into a developing tank for containing the first developing solution.
  5. 5. The method of manufacturing a solar cell according to claim 4, further comprising: Performing reverse osmosis membrane treatment on the first developing solution; And carrying out oil removal treatment on the first developing solution.
  6. 6. The method according to claim 4, wherein the first developer and the second developer are alkaline solutions, respectively, and the first developer in the first developer and the second developer in the second developer are the same or different.
  7. 7. The method of claim 1, wherein before forming the metal gate line in the patterned groove after the second development by electroplating, further comprising: Cleaning the patterned groove after the second development by using deionized water; And cleaning the patterned grooves after the second development by using a cleaning solution containing calcium ions and magnesium ions.
  8. 8. The method of claim 7, wherein before the step of cleaning the patterned grooves after the second development with deionized water, further comprises: And carrying out air knife cleaning on the patterned groove after the second development to remove the developing solution remained in the patterned groove.
  9. 9. A production apparatus for a solar cell, characterized by comprising: The developing tank is used for accommodating a solar cell substrate to be developed, and the surface of the solar cell substrate is provided with a metal seed layer and an exposed photoresist layer which are sequentially laminated; The first liquid spraying device is used for spraying a first developing liquid to the exposed photoresist layer; the second spraying device is used for spraying mist second developing solution to the exposed photoresist layer; and the reverse osmosis filter device is used for carrying out reverse osmosis membrane treatment on the first developing solution.
  10. 10. The apparatus for producing a solar cell according to claim 9, further comprising: The air knife device is used for carrying out air knife cleaning on the solar cell substrate after the second development; and the cleaning device is used for cleaning the solar cell substrate after the second development.

Description

Preparation method and production equipment of solar cell Technical Field The application relates to the technical field of photovoltaics, in particular to a preparation method and production equipment of a solar cell. Background In the preparation process of the solar cell, a metal electroplating mode is adopted to prepare a grid line electrode, a grid line pattern is laser printed on a photoresist layer, then the photoresist layer is exposed, and the part, on which the grid line pattern is printed, on the photoresist layer is removed through a developing solution so as to form a groove on the photoresist layer. At present, as the grid line of the battery is continuously thinned, the width of the groove is continuously reduced, after development, residual glue exists at one end of the side wall of the formed groove, which is close to the bottom wall of the groove, so that the width of a contact area between the grid line of the battery and a solar cell substrate is narrowed, the contact area is reduced, the improvement of the grid line bonding force is not facilitated, and meanwhile, after development, the residual glue exists at the bottom wall of the formed groove, and the improvement of the grid line bonding force is not facilitated. Disclosure of Invention Based on the above, the application provides a preparation method and production equipment of a solar cell, which are used for solving the technical problems that the side wall of a groove is close to one end of the bottom wall of the groove after development and the bottom wall of the groove has residual glue, so that the grid line bonding force is not improved. In a first aspect, an embodiment of the present application provides a method for manufacturing a solar cell, including: Providing a solar cell substrate, wherein the surface of the solar cell substrate is provided with a metal seed layer; Forming a photoresist layer on the metal seed layer, forming a preset pattern on the photoresist layer, and exposing the photoresist layer with the preset pattern; performing first development on the exposed photoresist layer to form a patterned groove on the photoresist layer; spraying mist developing solution on the patterned groove to carry out second development on the photosensitive adhesive layer after the first development; and electroplating in the patterned groove after the second development to form a metal grid line. Optionally, in the second development, the mist developing solution with the particle size of 20-40 μm is sprayed on the patterned groove. Optionally, in the first development, a first developing solution is used for performing first development on the exposed photoresist layer; the first development satisfies at least one of the following (i) - (iv): (i) The concentration of the developer in the first developer is 10 g/L-20 g/L; (ii) The temperature of the first developing solution is 25-35 ℃; (iii) Spraying the first developing solution to the photoresist layer, wherein the spraying pressure of the first developing solution is 0.5 bar-2.5 bar; (iv) The pH value of the first developing solution is 8-13. Optionally, in the second development, a second developing solution is used for performing second development on the photoresist layer after the first development; The second developing solution is a new developing solution, and the first developing solution is a repeatedly used developing solution; and spraying mist developing solution to the patterned groove so as to carry out second development on the photoresist layer after the first development, and further comprising: And overflowing the second developing solution sprayed in the second developing process into a developing tank for containing the first developing solution. Optionally, the preparation method of the solar cell further comprises the following steps: Performing reverse osmosis membrane treatment on the first developing solution; And carrying out oil removal treatment on the first developing solution. Optionally, before the metal gate line is formed in the patterned groove after the second development, the method further includes: Cleaning the patterned groove after the second development by using deionized water; And cleaning the patterned grooves after the second development by using a cleaning solution containing calcium ions and magnesium ions. Optionally, the first developer and the second developer are respectively alkaline solutions, and the first developer in the first developer and the second developer in the second developer are the same or different. Optionally, before the step of cleaning the patterned groove after the second development by using deionized water, the method further comprises: And carrying out air knife cleaning on the patterned groove after the second development to remove the developing solution remained in the patterned groove. In a second aspect, an embodiment of the present application provides a production apparatus for a solar cell