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CN-122002957-A - Laminate, solar cell, multi-junction solar cell, solar cell module, solar power generation system, and method for manufacturing laminate

CN122002957ACN 122002957 ACN122002957 ACN 122002957ACN-122002957-A

Abstract

The laminate of the embodiment has a transparent substrate, a p-electrode provided on the substrate and including an oxide transparent conductive film, and a p-type light absorbing layer provided on the p-electrode and including a cuprous oxide compound. The crystalline particle size of the cuprous oxide compound is 1.2 times or more the thickness of the p-type light absorbing layer. The carrier concentration of the p-type light absorbing layer is 5.0X10 14 [cm ‑3 or more. The cuprous oxide compound comprises copper, oxygen, and further optionally an element represented by M1. The element represented by M1 is 1 or more selected from the group consisting of Li, na, K, al, ga, in, C, si, ge, sn, N, P, sb and Bi.

Inventors

  • HONISHI YUYA
  • SHIBASAKI SOICHIRO
  • NAKAGAWA NAOYUKI
  • YAMAMOTO KAZUSHIGE

Assignees

  • 株式会社东芝

Dates

Publication Date
20260508
Application Date
20250915
Priority Date
20241108

Claims (20)

  1. 1. A laminate, comprising: a transparent substrate, A p-electrode comprising an oxide transparent conductive film provided on the substrate, and A p-type light absorbing layer containing a cuprous oxide compound disposed on the p-electrode, The crystalline particle diameter of the cuprous oxide compound is 1.2 times or more the thickness of the p-type light absorbing layer, The carrier concentration of the p-type light absorbing layer is 5.0X10 14 cm -3 or more, The cuprous oxide compound comprises copper, oxygen, and further optionally an element represented by M1, The element represented by M1 is 1 or more selected from the group consisting of Li, na, K, al, ga, in, C, si, ge, sn, N, P, sb and Bi.
  2. 2. The laminate according to claim 1, wherein the element represented by M1 is Si and/or N.
  3. 3. The laminate according to claim 1, wherein the carrier concentration of the p-type light absorbing layer is 1.0 x 10 18 cm -3 or less.
  4. 4. The laminate according to claim 1, wherein the thickness of the p-type light absorbing layer is 500nm or more and 10 μm or less.
  5. 5. The laminate according to claim 1, wherein the mobility of the p-type light absorbing layer is 10cm 2 /(v·s) or more.
  6. 6. The laminate according to claim 1, wherein a total of the elements represented by M1 contained in the p-type light-absorbing layer is 0.00001% or more and 1% or less when the copper element contained in the p-type light-absorbing layer is set to 100%.
  7. 7. The laminate according to claim 1, wherein the cuprous oxide compound has a cuprite type structure.
  8. 8. The laminate according to claim 1, wherein 95wt% or more and 100wt% or less of the p-type light absorbing layer is the cuprous oxide compound.
  9. 9. A solar cell, comprising: The laminate according to any one of claims 1 to 8, An n-type layer provided on the p-type light absorbing layer of the laminate, and And an n-electrode disposed on the n-type layer.
  10. 10. A multi-junction solar cell using the solar cell of claim 9.
  11. 11. A solar cell module using the solar cell according to claim 9.
  12. 12. A solar power generation system that generates power using the solar cell module according to claim 11.
  13. 13. A method for producing a laminate, comprising the step of forming a layer mainly composed of a copper oxide compound on a p-electrode of a substrate on which the p-electrode is formed, by sputtering using a target mainly composed of copper, The sputtering of the layer mainly composed of the copper oxide compound is continuously performed in a low temperature range and in a high temperature range, The temperature of the substrate sputtered in the low temperature range is 25 ℃ or more and 600 ℃ or less, 50 ℃ or more below the highest temperature in the high temperature range, The temperature of the sputtered substrate in the high temperature range is higher than 600 ℃ and lower than 1000 ℃.
  14. 14. The method for producing a laminate according to claim 13, wherein the sputtering time in the low temperature range is 5% to 200% of the sputtering time in the high temperature range.
  15. 15. The method for producing a laminate according to claim 13, wherein an average temperature of the base material sputtered in the low temperature range is 100 ℃ or more lower than an average temperature sputtered in a high temperature range.
  16. 16. The method for producing a laminate according to claim 13, wherein the lowest temperature of the base material sputtered in the low temperature range is 550 ℃ or lower.
  17. 17. The method for producing a laminate according to claim 13, wherein the lowest temperature of the base material sputtered in the low temperature range is 450 ℃ or less.
  18. 18. The method for producing a laminate according to any one of claims 13 to 17, wherein the supply of Cu, oxygen, and the element represented by M1 is not stopped from the start of the sputtering reaction to the end of the sputtering reaction.
  19. 19. The method for producing a laminate according to claim 18, wherein an oxygen partial pressure in the chamber for sputtering is 0.01Pa or more and 0.10Pa or less.
  20. 20. The method for producing a laminate according to claim 18, wherein the substrate sputtered at the high temperature range has a temperature of 630 ℃ or higher and 850 ℃ or lower, When the deposition rate of the sputtering is set to d [ mu ] m/min, the oxygen partial pressure in the chamber of the sputtering is 0.20×d or more and 0.50×d or less.

Description

Laminate, solar cell, multi-junction solar cell, solar cell module, solar power generation system, and method for manufacturing laminate Citation of related application The present application is based on Japanese patent application 2024-195997 (application day: 11/8 of 2024), from which priority is given. The present application is incorporated by reference into this application in its entirety. Technical Field The present invention relates to a laminate, a solar cell, a multi-junction solar cell, a solar cell module, a solar power generation system, and a method for manufacturing a laminate. Background One of the new solar cells is a solar cell using cuprous oxide (Cu 2 O) in the light absorbing layer. Cu 2 O is a wide bandgap semiconductor. Cu 2 O is a safe and inexpensive material composed of copper and oxygen which are abundant on earth, and thus it is expected to realize a high-efficiency and low-cost solar cell. Disclosure of Invention Embodiments relate to a laminate, a solar cell, a multi-junction solar cell, a solar cell module, a solar power generation system, and a method for manufacturing a laminate. The laminate of the embodiment has a transparent substrate, a p-electrode provided on the substrate and including an oxide transparent conductive film, and a p-type light absorbing layer provided on the p-electrode and including a cuprous oxide compound. The crystalline particle size of the cuprous oxide compound is 1.2 times or more the thickness of the p-type light absorbing layer. The carrier concentration of the p-type light absorbing layer is 5.0X10 14[cm-3 or more. The cuprous oxide compound comprises copper, oxygen, and further optionally an element represented by M1. The element represented by M1 is 1 or more selected from the group consisting of Li, na, K, al, ga, in, C, si, ge, sn, N, P, sb and Bi. With the above configuration, a laminate of high quality can be provided. Drawings Fig. 1 is a schematic cross-sectional view of a laminate according to an embodiment. Fig. 2 is a diagram illustrating analysis points of the laminate according to the embodiment. Fig. 3 is a schematic view of the surface of the p-type light absorbing layer of the embodiment. Fig. 4 is a flowchart of a method for manufacturing a laminate according to an embodiment. Fig. 5 is a schematic view of a manufacturing apparatus according to an embodiment. Fig. 6 is a schematic cross-sectional view of a solar cell of an embodiment. Fig. 7 is a cross-sectional view of a multi-junction solar cell of an embodiment. Fig. 8 is a perspective view of the solar cell module according to the embodiment. Fig. 9 is a cross-sectional view of a solar cell module according to an embodiment. Fig. 10 is a configuration diagram of the solar power generation system according to the embodiment. Fig. 11 is a schematic diagram of a vehicle of an embodiment. Fig. 12 is a schematic view of an embodiment unmanned aerial vehicle. Fig. 13 is a table for the embodiment. Fig. 14 is a table concerning the embodiment. Fig. 15 is a cross-sectional SEM image of the laminate of the example. Fig. 16 is a table concerning the embodiment. Description of symbols 10 Laminate body 1 Substrate 2:P electrode 3:P type light absorbing layer 4:N type layer 5:N electrode 20 Manufacturing apparatus 21 Chamber 22 Substrate holder 23 Heating mechanism 24 Target 25 Inactive gas supply mechanism 26 Reactive gas supply mechanism 27 Exhaust mechanism 28 Power supply 100 Solar cell 200 Multijunction solar cell 201 Nd solar cell 300 Solar cell module 301 1 St solar cell module 302 Nd solar cell module 303 Sub-module 304 Wiring 305 Bus bar 400 Solar power generation system 401 Solar cell Module 402 Converter 403 Accumulator 404 Load 500 Vehicle 501 Vehicle body 502 Solar cell module 503 Electric power conversion device 504 Accumulator 505 Motor 600 Unmanned plane 601 Body skeleton 602 Motor 603 Rotating wing 604 Control unit Detailed Description Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. Unless otherwise specified, the physical properties at 25℃and 1 atmosphere (atmosphere) are shown. Further, the average represents an arithmetic average value. Each concentration is the average concentration of the region or layer of the object. Each layer contains a specific element, for example, an element whose presence is confirmed by SIMS (Secondary Ion Mass Spectrometry ), and does not contain a specific element, for example, an element whose presence is not confirmed by SIMS. In the specification, "/" indicates division symbols. But "and/or"/"means" or ". In the specification "·" and "×" denote multiplication symbols. The "." of numerical values in the specification means decimal points. The thickness and structure of the member described in the specification can be obtained from images obtained by using a scanning electron microscope (SEM: scanning Electron Microscope), a transmission electron mic