CN-122003064-A - Display device, electronic device, and method for manufacturing display device

CN122003064ACN 122003064 ACN122003064 ACN 122003064ACN-122003064-A

Abstract

The invention relates to a display device, an electronic device, and a method for manufacturing the display device. The display device includes a substrate including a light emitting region, an anode electrode on the light emitting region of the substrate and including silver, and an element insulating layer covering an edge of the anode electrode and defining a light emitting aperture, wherein the anode electrode includes a first layer on the substrate, a second layer on the first layer, and a third layer on the second layer and including a protruding portion protruding further than a side surface of the second layer, and a width of the protruding portion of the third layer is 0.1 [ mu ] m or less.

Inventors

Zhao Xuanmin
Pu Taixiang
CHEN DONGKUI
DING YOUGUANG

Assignees

三星显示有限公司

Dates

Publication Date: 20260508
Application Date: 20251029
Priority Date: 20241104

Claims (16)

1. A display device, comprising: a substrate including a light emitting region; An anode electrode on the light emitting region of the substrate and including silver, and An element insulating layer covering an edge of the anode electrode and defining a light emitting aperture, Wherein the anode electrode comprises: A first layer on the substrate; a second layer on the first layer, and A third layer located on the second layer and including a protruding portion protruding further than a side surface of the second layer, and The protruding portion of the third layer has a width of 0.1 microns or less.
2. The display device according to claim 1, wherein: The first layer includes an upper surface and, The upper surface of the first layer includes a first portion that does not contact the second layer and a second portion that contacts the second layer, an The first portion has a width of 0.1 microns or less.
3. The display device according to claim 2, wherein a thickness of the second layer is greater than a thickness of the first layer and a thickness of the third layer.
4. The display device of claim 3, wherein the first layer and the third layer each comprise a transparent conductive material.
5. The display device according to claim 1, wherein: The light emitting region includes a first light emitting region and a second light emitting region adjacent to each other, and The display device further includes: A first resonance auxiliary layer overlapping the first light emitting region and located between the first layer of the anode electrode and the substrate, and A second resonance auxiliary layer overlapping the second light emitting region and spaced apart from the first resonance auxiliary layer, Wherein the thickness of the first resonance auxiliary layer and the thickness of the second resonance auxiliary layer are different from each other.
6. The display device according to claim 5, wherein: The display device includes the anode electrode, and the anode electrode is provided in plurality to include a plurality of anode electrodes, A first anode electrode of the plurality of anode electrodes is positioned on the first resonance auxiliary layer, A second anode electrode of the plurality of anode electrodes is positioned on the second resonance auxiliary layer, and The first anode electrode and the second anode electrode are located at different heights.
7. The display device according to claim 5, wherein: The display device includes the anode electrode, and the anode electrode is provided in plurality to include a plurality of anode electrodes, A first anode electrode of the plurality of anode electrodes overlaps the first light emitting region, A second anode electrode of the plurality of anode electrodes overlaps the second light emitting region, and A gap between the second layer of the first anode electrode overlapping the first light-emitting region and the second layer of the second anode electrode overlapping the second light-emitting region is 1.86 micrometers or less.
8. The display device according to claim 1, further comprising a residual pattern placed in contact with the third layer of the anode electrode and placed such that the residual pattern surrounds the light emitting aperture, Wherein the residual pattern overlaps the protruding portion included in the third layer of the anode electrode.
9. A method for manufacturing a display device, the method comprising: forming a first layer, a second layer, and a third layer of an anode electrode on a surface of the resonance auxiliary layer; Removing a portion of the third layer by performing a dry etching process; plasma treating a portion of the second layer; Performing a cleaning process after the plasma treatment, and A portion of the first layer is removed by performing a dry etching process.
10. The method according to claim 9, wherein: The first layer and the third layer each comprise a transparent conductive material, and The second layer comprises silver.
11. The method according to claim 10, wherein: performing the plasma treatment using plasma, and The plasma treatment uses a bias power of 0W in the process parameter values of the plasma treatment, Wherein the plasma body comprises a fluorine-containing gas.
12. The method according to claim 11, wherein: the plasma further comprises oxygen, and The portion of the second layer after the plasma treatment comprises silver fluoride.
13. The method of claim 12, wherein performing the cleaning process comprises dissolving the silver fluoride using at least one of an organic stripper and deionized water.
14. The method according to claim 9, wherein: The third layer includes a protruding portion protruding further than the side surface of the second layer, and The protruding portion has a width of 0.1 micrometers or less.
15. The method of claim 9, wherein the side surface of the first layer, the side surface of the second layer, and the side surface of the third layer are on the same line.
16. An electronic device, comprising: A display device according to any one of claims 1 to 8 or a display device manufactured according to the method of any one of claims 9 to 15, and A display module, a processor, a memory, and a power module, wherein at least one of the display module, the processor, the memory, and the power module is connected to the display device.

Description

Display device, electronic device, and method for manufacturing display device Cross Reference to Related Applications The present application claims priority and ownership rights obtained from korean patent application No. 10-2024-0154703, filed on 4 of 11 months of 2024, and korean patent application No. 10-2025-0008596, filed on 21 of 1 month of 2025, the contents of which are incorporated herein by reference in their entireties. Technical Field The present disclosure relates to a display device, an electronic device, and a method for manufacturing the display device. Background With the development of information society, demands for various forms of display devices for displaying images are increasing. For example, display devices have been applied to various electronic devices (e.g., smart phones, digital cameras, laptop computers, navigation devices, and smart televisions). Such a display device may include a flat panel display device (e.g., a liquid crystal display device, a field emission display device, or an organic light emitting display device). Among the flat panel display devices, the organic light emitting display device may include a light emitting element in which each of the pixels of the display panel itself may emit light, thereby displaying an image without a backlight unit providing light to the display panel. Disclosure of Invention Aspects of the present disclosure provide methods for patterning an anode electrode suitable for a high resolution display device and electronic devices using the high resolution display device. However, aspects of the present disclosure are not limited to those set forth herein. The above aspects and other aspects of the present disclosure will become more apparent to those of ordinary skill in the art to which the present disclosure pertains by referencing the detailed embodiments of the present disclosure given below. Details of other embodiments are included in the detailed description and the accompanying drawings. In an embodiment of the present disclosure, a display device includes a substrate including a light emitting region, an anode electrode on the light emitting region of the substrate and including silver, and an element insulating layer covering an edge of the anode electrode and defining a light emitting aperture, wherein the anode electrode includes a first layer on the substrate, a second layer on the first layer, and a third layer on the second layer and including a protruding portion protruding further than a side surface of the second layer, and a width of the protruding portion of the third layer is 0.1 μm or less. In an embodiment, the first layer may include an upper surface, the upper surface of the first layer including a first portion that does not contact the second layer and a second portion that contacts the second layer, and the first portion having a width of 0.1 microns or less. In an embodiment, the thickness of the second layer may be greater than the thickness of the first layer and the thickness of the third layer. In an embodiment, the first layer and the third layer may each comprise a transparent conductive material. In an embodiment, the light emitting region may include a first light emitting region and a second light emitting region adjacent to each other, the display device further includes a first resonance auxiliary layer overlapping the first light emitting region and located between the first layer of the anode electrode and the substrate, and a second resonance auxiliary layer overlapping the second light emitting region and spaced apart from the first resonance auxiliary layer, and a thickness of the first resonance auxiliary layer and a thickness of the second resonance auxiliary layer may be different from each other. In an embodiment, the display device may include anode electrodes, and the anode electrodes may be provided in plurality to include a plurality of anode electrodes, a first anode electrode of the plurality of anode electrodes may be located on the first resonance auxiliary layer, a second anode electrode of the plurality of anode electrodes may be located on the second resonance auxiliary layer, and the first anode electrode and the second anode electrode may be located at different heights. In an embodiment, the display device may include anode electrodes, and the anode electrodes may be provided in plurality to include a plurality of anode electrodes, a first anode electrode of the plurality of anode electrodes may overlap the first light emitting region, a second anode electrode of the plurality of anode electrodes may overlap the second light emitting region, and a gap between a second layer of the first anode electrode overlapping the first light emitting region and a second layer of the second anode electrode overlapping the second light emitting region may be 1.86 micrometers or less. In an embodiment, the display device may further include a residual pattern placed in contact with t