CN-122003083-A - Apparatus for manufacturing display device

Abstract

An apparatus for manufacturing a display device includes a mask electrostatic chuck, a mask support placed on the mask electrostatic chuck, and a mask placed on the mask support. The mask electrostatic chuck may include a seating portion on which the mask support is seated, a contact portion configured to contact the mask, and a position alignment portion configured to align a position of the mask support.

Inventors

• Pei Mingao
• JIN SHENGZHEN
• Pu Junhe
• Shen Zaiyuan
• ZHENG SHIYUAN
• Han Zhenghuan

Assignees

• 三星显示有限公司

Dates

Publication Date

20260508

Application Date

20251028

Priority Date

20241101

Claims (20)

1. 1. An apparatus for manufacturing a display device, the apparatus comprising: A mask electrostatic chuck; a mask support disposed on the mask electrostatic chuck, and A mask disposed on the mask support, the mask electrostatic chuck comprising: A seating portion on which the mask support is seated; A contact portion configured to contact the mask, and A position alignment portion configured to align a position of the mask support.
2. 2. The apparatus according to claim 1, Wherein the mask electrostatic chuck further comprises a peripheral portion disposed outside the contact portion, and Wherein the height of the peripheral portion is smaller than the height of the contact portion.
3. 3. The apparatus of claim 2, wherein a height of the seating portion is less than the height of the contact portion.
4. 4. The apparatus according to claim 2, Wherein the mounting portion and the contact portion have different heights from each other, an Wherein a difference between the height of the seating portion and the height of the contact portion is equal to or greater than a thickness of the mask support.
5. 5. The apparatus of claim 2, further comprising a transfer member configured to transfer at least one of the mask support and the mask, and Wherein the transfer member does not contact the peripheral portion.
6. 6. The apparatus of any one of claims 2 to 5, further comprising: The camera is used to detect the position of the camera, Wherein a camera aperture passes through the contact portion, Wherein the camera corresponds to the camera aperture, and Wherein the camera is configured to capture an image of the mask.
7. 7. The apparatus of any of claims 2-5, wherein the position alignment portion comprises a slot defined in the peripheral portion.
8. 8. The apparatus of claim 7, wherein the trough has a constant width in a cross-sectional view or a width that increases from a bottom end of the trough to a top end of the trough.
9. 9. The apparatus according to claim 7, Wherein the mask support comprises: a support frame, and A guide connected to and protruding from the support frame, and Wherein the guide is placed on the position alignment portion.
10. 10. The apparatus of claim 9, wherein the guide has a rod shape in a plan view.
11. 11. The apparatus according to claim 9, Wherein the mask support further comprises an outer guide frame connected to the guide, and Wherein the outer guide frame has a ring shape in a plan view.
12. 12. The apparatus according to claim 2 to 5, Wherein the position alignment portion includes: a protrusion connected to and protruding from the seating portion, and The pin is provided with a pin-shaped opening, Wherein the protrusion defines a protrusion aperture therein through at least a portion of the protrusion, Wherein the pin is inserted into the protruding hole, and Wherein the pin protrudes from an upper surface of the protrusion.
13. 13. The apparatus according to claim 12, Wherein the contact portion is connected to the mounting portion, and Wherein the peripheral portion is connected to the contact portion.
14. 14. The apparatus of claim 12, wherein in cross-section the pin has a constant width or a width that increases from a top end of the pin to a bottom end of the pin.
15. 15. The apparatus according to claim 12, Wherein a guide hole through the mask support is defined in the mask support, and Wherein the pin is inserted into the guide hole.
16. 16. The apparatus according to claim 15, Wherein the guide holes include a first guide hole and a second guide hole, and Wherein the second guide hole has an area larger than that of the first guide hole in a plan view.
17. 17. An apparatus for manufacturing a display device, the display device comprising a substrate, the apparatus comprising: a substrate electrostatic chuck disposed on the substrate; A mask, a pattern of the mask being configured to correspond to a pattern of a material formed on the substrate; A mask electrostatic chuck disposed under the mask, and A substrate electrostatic chuck moving member configured to move the substrate electrostatic chuck, and Wherein the substrate electrostatic chuck moving means is configured to move the substrate electrostatic chuck to change the shape of the substrate.
18. 18. The apparatus of claim 17, further comprising: a pressure sensor configured to measure a pressure applied to the substrate, and A distance sensor configured to measure a distance between the substrate and the mask, Wherein the substrate is capable of being flexed by the substrate electrostatic chuck moving member.
19. 19. An apparatus for manufacturing a display device, the display device comprising a substrate, the apparatus comprising: a substrate electrostatic chuck disposed on the substrate; A mask, a pattern of the mask being configured to correspond to a pattern of a material formed on the substrate; A mask electrostatic chuck disposed under the mask, and A mask electrostatic chuck moving part configured to move the mask electrostatic chuck, and Wherein the mask electrostatic chuck moving means is configured to move the mask electrostatic chuck to change the shape of the mask.
20. 20. The apparatus according to claim 19, Wherein the masking electrostatic chuck is provided as a plurality of masking electrostatic chucks, Wherein the plurality of masking electrostatic chucks are configured to be movable and spaced apart from one another, Wherein the mask electrostatic chuck moving means includes a number of mask electrostatic chuck moving means corresponding to the number of the plurality of mask electrostatic chucks, and Wherein the mask electrostatic chuck moving means is configured to tension the mask.

Description

Apparatus for manufacturing display device The present application claims priority from korean patent application No. 10-2024-0153729 filed on 1 month 11 of 2024, the entire contents of which are incorporated herein by reference. Technical Field Various embodiments of the present disclosure relate to an apparatus for manufacturing a display device, a method of manufacturing a display device, and an electronic device. Background With the development of information technology, importance of a display device as a medium for connecting a user and information is increasingly paid attention. Accordingly, research and development of display devices have been continuously conducted. The display device may be formed by placing a patterned mask over the substrate and depositing material onto the substrate. In order for the material to be properly formed on the substrate, it is important to ensure that the mask is firmly and properly secured in place. Disclosure of Invention Features of the present disclosure relate to an apparatus for manufacturing a display device, and a method of manufacturing a display device and an electronic device, in which a mask may be appropriately fixed to minimize a gap between the mask and a substrate and to improve parallelism between the mask and the substrate. Features of the present disclosure relate to an apparatus for manufacturing a display device, and a method of manufacturing a display device and an electronic device that are capable of automatically replacing a mask support supporting a mask with another mask support. The features of the present disclosure are not limited to the above-described objects, and other objects not mentioned will be clearly understood by those skilled in the art from the appended claims. An embodiment of the present disclosure may provide an apparatus for manufacturing a display device including a mask electrostatic chuck, a mask support placed on the mask electrostatic chuck, and a mask placed on the mask support. The mask electrostatic chuck may include a seating portion on which the mask support is seated, a contact portion configured to contact the mask, and a position alignment portion configured to align a position of the mask support. In an embodiment, the mask electrostatic chuck may further include a peripheral portion disposed outside the contact portion. The height of the peripheral portion may be smaller than the height of the contact portion. In an embodiment, the height of the seating portion may be less than the height of the contact portion. In an embodiment, the seating portion and the contact portion may have different heights from each other. The difference between the height of the seating portion and the height of the contact portion may be equal to or greater than a thickness of the mask support. In an embodiment, the apparatus may further comprise a transfer member configured to transfer at least one of the mask support and the mask. The transfer member may not contact the peripheral portion. In an embodiment, the apparatus may further comprise a camera. A camera aperture may pass through the contact portion. The camera may correspond to the camera aperture. The camera may be configured to capture an image of the mask. In an embodiment, the position alignment portion may include a slot defined in the peripheral portion. In an embodiment, the slot may have a constant width in a cross-sectional view, or a width that increases from its bottom end to its top end. In an embodiment, the mask support may include a support frame and a guide connected to and protruding from the support frame. The guide may be placed on the position alignment portion. In an embodiment, the guide may have a rod shape in a plan view. In an embodiment, the mask support may further comprise an outer guide frame connected to the guide. The outer guide frame may have a ring shape in a plan view. In an embodiment, the position alignment portion may include a protrusion connected to and protruding from the seating portion, and a pin. The protrusion may define a protrusion aperture therein through at least a portion of the protrusion. The pin may be inserted into the protruding hole. The pin may protrude from an upper surface of the protrusion. In an embodiment, the contact portion may be connected to the seating portion. The peripheral portion may be connected to the contact portion. In an embodiment, the pin may have a constant width in a cross-sectional view, or a width that increases from its top to its bottom. In an embodiment, the mask support may define guide holes therethrough. The pin is insertable into the guide hole. In an embodiment, the guide holes may include a first guide hole and a second guide hole. In a plan view, the second guide hole may have an area larger than that of the first guide hole. An embodiment of the present disclosure may provide an apparatus for manufacturing a display device including a substrate electrostatic chuck placed on the